JPH0295432A - Chemical solution supplying pipe - Google Patents
Chemical solution supplying pipeInfo
- Publication number
- JPH0295432A JPH0295432A JP24865288A JP24865288A JPH0295432A JP H0295432 A JPH0295432 A JP H0295432A JP 24865288 A JP24865288 A JP 24865288A JP 24865288 A JP24865288 A JP 24865288A JP H0295432 A JPH0295432 A JP H0295432A
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- supply pipe
- pipe
- bottle
- supplying pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims abstract description 45
- 230000002093 peripheral effect Effects 0.000 claims abstract 3
- 239000007788 liquid Substances 0.000 claims description 14
- 230000008595 infiltration Effects 0.000 abstract 1
- 238000001764 infiltration Methods 0.000 abstract 1
- 239000003814 drug Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229940079593 drug Drugs 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、薬液ボトルから薬液を外部へ供給するための
薬液供給パイプに関し、特に、半導体製造工程における
薬液供給ラインに用いるに好適な薬液供給パイプに関す
る。Detailed Description of the Invention [Industrial Field of Application] The present invention relates to a chemical supply pipe for supplying a chemical from a chemical bottle to the outside, and particularly to a chemical supply pipe suitable for use in a chemical supply line in a semiconductor manufacturing process. Regarding pipes.
薬液は薬液ボトル（以下、ボトルという。）から他の容
器に移し換えて使用すると、汚染物質の混入により品質
が低下するので、ボトルから直接吸い出すか、または加
圧して使用場所まで送るのが望ましく、このため、ボト
ルから薬液を供給するのにボトルに挿入された薬液供給
パイプ（以下、供給パイプという。）が用いられている
。If a chemical liquid is transferred from a chemical liquid bottle (hereinafter referred to as a bottle) to another container for use, the quality will deteriorate due to contamination, so it is preferable to suck it directly from the bottle or pressurize it and send it to the place of use. Therefore, a chemical liquid supply pipe (hereinafter referred to as a supply pipe) inserted into the bottle is used to supply the chemical liquid from the bottle.
しかし、薬液が消費され、ボトルが空になると、新しい
ボトルと交換する必要があり、−度空のボトルから供給
パイプを引き抜き、再び新しいボトルへと挿入する作業
を要する。この挿入作業の際、供給パイプ先端から薬液
が滴下し、供給パイプ内に気泡が入ってしまう。この気
泡がそのまま送られると、薬液が吐出するノズル先端で
吐出量が変化し、製品にバラつきが発生し、製品の歩留
りを低下させるという問題点があり、特に、高い精度を
要求される半導体製造工程では大きな問題となっていた
。However, when the drug solution is consumed and the bottle becomes empty, it is necessary to replace it with a new bottle, which requires the work of pulling out the supply pipe from the empty bottle and reinserting it into the new bottle. During this insertion work, the chemical solution drips from the tip of the supply pipe, causing air bubbles to enter the supply pipe. If these bubbles are sent as they are, the discharge amount will change at the tip of the nozzle where the chemical solution is discharged, causing variations in the product and reducing the product yield.This is especially true in semiconductor manufacturing, which requires high precision. This was a big problem during the process.
このため、従来、ろ過フィルタ一部に空気抜きを設けた
り、常時供給薬液の一部を環流させて気泡を元のボトル
に戻す等の方法が採用されている。For this reason, conventional methods have been adopted, such as providing an air vent in a part of the filtration filter, or circulating a part of the constantly supplied chemical solution to return air bubbles to the original bottle.
しかし、いずれの方法も操作に手間がかかったり、環流
させた薬液の劣化による歩留り低下等の問題点があった
。また、ろ過フィルタ一部で気泡が除去し切れずに、ノ
ズルから気泡が出て製品の品質低下をまねくことがある
という問題点があった。However, both methods have problems such as time-consuming operations and a decrease in yield due to deterioration of the recirculated chemical solution. In addition, there is a problem in that air bubbles may not be completely removed from a part of the filtration filter, causing air bubbles to come out from the nozzle, resulting in a decrease in product quality.
本発明は、このような従来の問題点に鑑みなされたもの
で、その目的とするところは、ボトルの交換時において
、供給パイプ先端部から薬液の滴下がなく、かつ供給パ
イプ内に気泡が侵入しない信頼性に優れた薬液供給パイ
プを堤供することにある。The present invention has been developed in view of these conventional problems, and its purpose is to prevent the chemical solution from dripping from the tip of the supply pipe and to prevent air bubbles from entering the supply pipe when replacing the bottle. The purpose of the present invention is to provide a chemical solution supply pipe with excellent reliability.
この目的のため、本発明における薬液供給パイプは、供
給パイプ先端部が直接または間接に閉塞され、かつ外周
面径方向に、供給パイプ内の残留薬液による表面張力が
得られる貫通孔が設けられた構成を特徴とするものであ
る。For this purpose, in the chemical solution supply pipe of the present invention, the distal end of the supply pipe is directly or indirectly closed, and a through hole is provided in the radial direction of the outer circumferential surface to obtain surface tension due to the residual chemical solution in the supply pipe. It is characterized by its configuration.
上記のように構成された薬液供給パイプにおいては、先
端面閉塞の供給パイプに直接穿設の貫通孔、または先端
面開口の供給パイプに外挿着のキャップに穿設の貫通孔
を通ってボトル内薬液は供給パイプに流入し、更に供給
ラインを介して供給される。In the chemical supply pipe configured as above, the bottle can be passed through a through-hole drilled directly in the supply pipe with the tip end closed, or through a through-hole drilled in the cap attached externally to the supply pipe with the tip end open. The internal medicine liquid flows into the supply pipe and is further supplied via the supply line.
ボトルの薬液がなくなって新たなボトルとの交換時、供
給パイプをボトル内から引き抜いても、供給パイプ内の
残留薬液は貫通孔による薬液自身の表面張力によって滴
下が防止され、同時に供給パイプ内への気泡の侵入も防
止される。Even if the supply pipe is pulled out from inside the bottle when the chemical solution in the bottle runs out and is replaced with a new one, the remaining chemical solution in the supply pipe is prevented from dripping by the surface tension of the drug itself due to the through-hole, and at the same time it flows into the supply pipe. The intrusion of air bubbles is also prevented.
以下、実施例を図面に基づいて説明する。 Examples will be described below based on the drawings.
第１図は全体の概略説明図、第２図は本発明要部の拡大
縦断面図で、第１図において、供給パイプ１は貫通型継
手２によりボトル蓋３に固定され。FIG. 1 is an overall schematic explanatory view, and FIG. 2 is an enlarged vertical cross-sectional view of essential parts of the present invention. In FIG. 1, a supply pipe 1 is fixed to a bottle lid 3 by a through-type joint 2.
かつ蓋３をボトル４に螺着することにより供給パイプ先
端キャップ５をボトル底部近傍に位置させてボトル４内
に挿入されている。By screwing the lid 3 onto the bottle 4, the supply pipe end cap 5 is positioned near the bottom of the bottle and inserted into the bottle 4.
供給パイプ１の上部には一例として継手６を介して薬液
供給ライン７、ポンプ８等が連結され。For example, a chemical liquid supply line 7, a pump 8, etc. are connected to the upper part of the supply pipe 1 via a joint 6.
また、蓋３にはボトル４に大気圧を導入するか、または
加圧するための継手９が設けられ、ボトル４内の薬液１
０が供給パイプ１よりポンプ８により吸い上げられて圧
送され、薬液吹付ノズル１１から回転しているスピンチ
ャック１２上のウェハ１３に吹き付けられて薄膜が形成
されるようになっている。Further, the lid 3 is provided with a joint 9 for introducing atmospheric pressure into the bottle 4 or pressurizing the bottle 4.
0 is sucked up by a pump 8 from a supply pipe 1 and fed under pressure, and is sprayed from a chemical spray nozzle 11 onto a wafer 13 on a rotating spin chuck 12 to form a thin film.
第２図において、供給パイプ１の先端部に固定的に外挿
着されているキャップ５は、同心状の大径部５０と小径
部５１を有し、大径部５０の上端は面取りされて傾斜部
５２が形成されている。In FIG. 2, the cap 5 fixedly attached to the tip of the supply pipe 1 has a concentric large diameter part 50 and a small diameter part 51, and the upper end of the large diameter part 50 is chamfered. A sloped portion 52 is formed.
大径部５０には同心状の大径貫通孔５３と段部５４を介
して小径孔５５が設けられ、小径部５１にも小径孔５５
が盲孔として設けられ、小径孔５５の内径は供給パイプ
１の内径りと等しく、大径貫通孔５３を介しての挿入を
もって供給パイプ１の先端部に外挿着される。A small diameter hole 55 is provided in the large diameter portion 50 via a concentric large diameter through hole 53 and a stepped portion 54, and a small diameter hole 55 is provided in the small diameter portion 51 as well.
is provided as a blind hole, the inner diameter of the small diameter hole 55 is equal to the inner diameter of the supply pipe 1, and the small diameter hole 55 is inserted through the large diameter through hole 53 and is externally attached to the tip of the supply pipe 1.
小径部５１の外周面径方向には、適宜数（本実施例では
４個）の貫通孔５６が穿設されており、該貫通孔５６よ
りボトル内薬液１０が供給パイプ１内に流入するように
なっている。An appropriate number (four in this embodiment) of through holes 56 are bored in the radial direction of the outer circumferential surface of the small diameter portion 51 so that the medicinal solution 10 in the bottle flows into the supply pipe 1 through the through holes 56. It has become.
貫通孔５６の径ｄは、供給パイプ１内の残留薬液による
表面張力が得られるに充分な大きさであればよく、該貫
通孔５Ｇの径ｄは供給パイプ１の内径りの断面積より決
定され、実験的に次式よす求められる。The diameter d of the through hole 56 may be large enough to obtain the surface tension due to the residual chemical in the supply pipe 1, and the diameter d of the through hole 5G is determined from the cross-sectional area of the inside diameter of the supply pipe 1. The following equation can be obtained experimentally.
πＤ２ πｄ２
−− Ｘ Ｓ
ｄ＝ｖ’−ｊＤ （Ｓ：貫通孔５６の数）このような
条件下に貫通孔５６を穿設すると。πD2 πd2 --
薬液は表面張力でＡの様な形状となって滴下しにくくな
る。The chemical liquid becomes shaped like A due to surface tension, making it difficult to drip.
本実施例のキャップ５によりボトル４の交換操作を繰り
返し行なったが、薬液の滴下は認められず、従って気泡
の供給パイプ１内への侵入もなかった・
キャップ５の材質としては、供給液が溶剤の場合、四フ
ッ化エチレン樹脂が好ましい。Although the bottle 4 was replaced repeatedly using the cap 5 of this example, no dripping of the chemical solution was observed, and therefore no air bubbles entered the supply pipe 1. In the case of a solvent, tetrafluoroethylene resin is preferred.
なお、本実施例は、キャップ５に、薬液による表面張力
が得られる貫通孔５６を設けた場合であるが、該貫通孔
５６は、特に図示しないが、先端面閉塞の供給パイプの
先端部外周に直接穿設しても同等の効果が得られる。In this embodiment, the cap 5 is provided with a through hole 56 through which surface tension can be obtained due to the chemical liquid. Although not particularly shown, the through hole 56 is formed on the outer periphery of the distal end of the supply pipe whose distal end is closed. The same effect can be obtained by directly drilling the hole.
しかして１本発明によれば、薬液ボトルの交換時に、ボ
トル内より供給パイプを引き抜いても、貫通孔による薬
液自身の表面張力によって供給パイプ内の残留薬液の滴
下がなくなり、また、気泡が供給パイプ内に侵入しない
ため、薬液供給ラインの途中で空気抜きの操作をする必
要がなくなり。Therefore, according to the present invention, even if the supply pipe is pulled out from inside the bottle when replacing the chemical bottle, the surface tension of the chemical liquid itself due to the through hole prevents the residual chemical liquid in the supply pipe from dripping, and air bubbles are removed from the supply pipe. Since it does not enter the pipe, there is no need to bleed air in the middle of the chemical supply line.
生産性の向上が計れる。Improved productivity can be measured.
また、空気抜きの環流ラインが不要となり、装置を簡略
にでき、また、環流した薬液による製品の歩留り低下の
問題も解決される。In addition, a recirculation line for air venting is not required, the apparatus can be simplified, and the problem of reduced product yield due to the recirculated chemical solution is also solved.
更にまた、ノズルからの気泡噴出がなくなり、製品の歩
留りを向上することができる。Furthermore, air bubbles are no longer ejected from the nozzle, and the yield of products can be improved.
図面は本発明の一実施例を示したもので、第１図は全体
の概略説明図、第２図は要部の拡大縦断面図である。
薬液供給パイプ
薬液ボトル
キャップ
貫通孔
第２図The drawings show one embodiment of the present invention, with FIG. 1 being a schematic explanatory view of the whole, and FIG. 2 being an enlarged vertical sectional view of the main part. Chemical supply pipe chemical bottle cap through hole Diagram 2
Claims (1)
パイプであって、該供給パイプの先端部が直接または間
接に閉塞され、かつ外周面径方向には、供給パイプ内の
残留薬液による表面張力が得られる貫通孔が穿設されて
成る薬液供給パイプ。1. A pipe that is inserted into a chemical liquid bottle to suck up and supply a chemical liquid, the tip of the supply pipe is directly or indirectly blocked, and the surface tension due to the residual chemical liquid in the supply pipe is applied in the radial direction of the outer peripheral surface. A chemical liquid supply pipe with a through hole drilled through it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24865288A JPH0295432A (en) | 1988-10-01 | 1988-10-01 | Chemical solution supplying pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24865288A JPH0295432A (en) | 1988-10-01 | 1988-10-01 | Chemical solution supplying pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295432A true JPH0295432A (en) | 1990-04-06 |
Family
ID=17181311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24865288A Pending JPH0295432A (en) | 1988-10-01 | 1988-10-01 | Chemical solution supplying pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295432A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107308903A (en) * | 2017-08-21 | 2017-11-03 | 荆门市帅邦化学科技有限公司 | A kind of low-temp reaction kettle with feeding device |
-
1988
- 1988-10-01 JP JP24865288A patent/JPH0295432A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107308903A (en) * | 2017-08-21 | 2017-11-03 | 荆门市帅邦化学科技有限公司 | A kind of low-temp reaction kettle with feeding device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5089305A (en) | Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state | |
| EP1830393B1 (en) | Photoresist coating liquid supplying apparatus and method, and photoresist coating apparatus using said first apparatus | |
| US3081490A (en) | Spinning apparatus for the spinning of hollow filaments | |
| US11059680B2 (en) | Gripper for an ophthalmic lens and process for transporting an ophthalmic lens | |
| JPH0295432A (en) | Chemical solution supplying pipe | |
| JP2002139452A (en) | Method and apparatus for inspection of coating state | |
| KR102188047B1 (en) | spray nozzle of reagent for blood collection tube | |
| US7708208B1 (en) | Method and apparatus to disintegrate liquids having a tendency to solidify | |
| JP3135209B2 (en) | Semiconductor wafer cleaning equipment | |
| JP2003190867A (en) | Liquid applying apparatus | |
| JP2000354816A (en) | Method and apparatus for applying liquid material die bonding device using the apparatus | |
| JP2000065291A (en) | Mist forming equipment | |
| JPH02132444A (en) | Coating device for coating semiconductor wafer with liquid | |
| JPH10163154A (en) | Substrate cleaning method and apparatus | |
| JPH0470838A (en) | Resist coating device | |
| JP3832537B2 (en) | Treatment liquid supply device | |
| JPH0729789A (en) | Coating device | |
| JPH10163159A (en) | Treatment chamber for substrate cleaning apparatus | |
| JP2003273070A (en) | Method and apparatus for processing wafer | |
| JPS6369564A (en) | Spin coater for substrate | |
| JPH10163147A (en) | Chucking device for substrate cleaning apparatus | |
| JPH10163146A (en) | Substrate cleaning system | |
| JPS6140850A (en) | Coating device for optical fiber | |
| JPH0539666U (en) | Liquid coating device | |
| JPH04196220A (en) | Hermetically sealed container |