JPH0285914A - Detecting device for surface pressure distribution - Google Patents
Detecting device for surface pressure distributionInfo
- Publication number
- JPH0285914A JPH0285914A JP63236212A JP23621288A JPH0285914A JP H0285914 A JPH0285914 A JP H0285914A JP 63236212 A JP63236212 A JP 63236212A JP 23621288 A JP23621288 A JP 23621288A JP H0285914 A JPH0285914 A JP H0285914A
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- surface pressure
- pressure distribution
- gauge element
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 32
- 239000011159 matrix material Substances 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 17
- 238000005530 etching Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 229910002482 Cu–Ni Inorganic materials 0.000 abstract 1
- 238000005019 vapor deposition process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- RRLHMJHRFMHVNM-BQVXCWBNSA-N [(2s,3r,6r)-6-[5-[5-hydroxy-3-(4-hydroxyphenyl)-4-oxochromen-7-yl]oxypentoxy]-2-methyl-3,6-dihydro-2h-pyran-3-yl] acetate Chemical compound C1=C[C@@H](OC(C)=O)[C@H](C)O[C@H]1OCCCCCOC1=CC(O)=C2C(=O)C(C=3C=CC(O)=CC=3)=COC2=C1 RRLHMJHRFMHVNM-BQVXCWBNSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229920003251 poly(α-methylstyrene) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Image Input (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は微細な面圧力分布を検出する面圧力分布検出装
置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a surface pressure distribution detection device that detects a minute surface pressure distribution.
（従来技術）
従来、物体の面上に作用する荷重の２次元的分布を多数
のロードセルをマトリクス状に並べたり、多数の電極対
をマトリクス状に形成し、それらの素子をスキャニング
することにより測定する方法か知られており（たとえば
特開昭６２−７１８２８号および特開昭６２−２２６０
３０号公報）、自動車のシートやロボットの手先などに
加わる荷重や圧力の分布を測定するのに用いられている
。(Prior art) Conventionally, the two-dimensional distribution of the load acting on the surface of an object has been measured by arranging a large number of load cells in a matrix, or forming a large number of electrode pairs in a matrix, and scanning these elements. Methods are known to
No. 30), it is used to measure the distribution of load and pressure applied to automobile seats, robot hands, etc.
これらの方法は、ロードセルや電極対などの素子か比較
的大きなものであることから、上述したような物体上で
の２次元的圧力分布を測定するには好適であるか、たと
えば指紋のような凹凸か１ｍｍ当り４本という微細な密
度の圧力分布の測定には向いていない。Since these methods involve relatively large elements such as load cells and electrode pairs, are they suitable for measuring two-dimensional pressure distribution on objects such as those mentioned above? It is not suitable for measuring pressure distribution with a fine density of 4 lines per 1 mm due to unevenness.
そこで本出願人は、特願昭６２−１４５０３０号におい
て、指紋のような微細な面圧力分布を測定するのに、圧
力の強さに応して抵抗値か変化する導電ゴムのような感
圧シートを用い、圧力分布による抵抗値の変化を電気的
に走査して取り出すようにした検出装置を提案している
。Therefore, in Japanese Patent Application No. 62-145030, the present applicant proposed a pressure-sensitive material such as a conductive rubber whose resistance value changes depending on the strength of the pressure, in order to measure a fine surface pressure distribution such as a fingerprint. We have proposed a detection device that uses a sheet to electrically scan and extract changes in resistance due to pressure distribution.
この検出装置によれば、マトリクス走査用電極との組合
せにより確かに微細な面圧力分布を検出することはでき
るか、測定原理か感圧シートの抵抗値変化を利用するこ
とから感圧シートにはある程度の厚さが必要となり薄膜
化は不可詣であること、シート状であるため近接する荷
重どうしか影響しあって荷重点か個別化しにくく、その
ため圧力の面分布か正確に検出できないこと、感圧シー
トの経年変化により測定圧力に微細な影響か及ぶこと、
製造上感圧シートの均一性が確保しにくく且つ所望の特
性が得にくいため微細な圧力変化や圧力分布か検出しに
くいなどの問題かある。According to this detection device, is it possible to reliably detect a minute surface pressure distribution in combination with a matrix scanning electrode? A certain degree of thickness is required and it is impossible to make the film thinner.Since it is sheet-like, it is difficult to separate the load points because only adjacent loads affect each other, so it is difficult to accurately detect the surface distribution of pressure. The measured pressure may be slightly affected by changes in the sheet over time.
In manufacturing, it is difficult to ensure the uniformity of the pressure-sensitive sheet and it is difficult to obtain the desired characteristics, resulting in problems such as difficulty in detecting minute pressure changes and pressure distribution.
（発明の目的および構成）
本発明は上記の点にかんがみてなされたもので、製造か
容易で薄形且つ安価、しかも荷重点が個別化し易い微細
な面圧力分布の検出装置を提案することを目的とし、こ
の目的を達成するために、互いに交差してマトリクスを
形成するように絶縁して配置された複数本の電極から成
る第１の走査用電極と第２の走査用電極との交差点間で
両電極間に接続するようにストレンゲージ素子を形成し
２そのストレンゲージ素子か外部からの力でたわみ得る
ように受圧板を構成し、この受圧板のストレンゲージ素
子のたわみによる抵抗値の変化を利用して受圧板の受け
る面圧力分布を電気信号として取り出すように構成した
ものである。(Objective and Structure of the Invention) The present invention has been made in view of the above points, and it is an object of the present invention to propose a detection device for fine surface pressure distribution that is easy to manufacture, thin, and inexpensive, and in which load points can be easily separated. In order to achieve this purpose, between the intersections of a first scanning electrode and a second scanning electrode, which are composed of a plurality of electrodes that are insulated and arranged so as to cross each other and form a matrix. A strain gauge element is formed so as to be connected between both electrodes, and a pressure receiving plate is constructed so that the strain gauge element can be deflected by an external force, and the resistance value of the pressure receiving plate changes due to the deflection of the strain gauge element. It is configured to take out the surface pressure distribution received by the pressure receiving plate as an electrical signal using the .
（実施例） 以下本発明を図面に基づいて説明する。(Example) The present invention will be explained below based on the drawings.
以下に示す実施例では指紋パターンの検出に適した面圧
力分布検出装置を例示するか、本発明はこれに限定され
るものでないことは当然である。In the embodiments shown below, a surface pressure distribution detection device suitable for detecting a fingerprint pattern will be exemplified, but it goes without saying that the present invention is not limited thereto.
第１図は指紋パターン検出用としての本発明による面圧
力分布検出装置の全体構成を示すブロック線図である。FIG. 1 is a block diagram showing the overall configuration of a surface pressure distribution detection device according to the present invention for detecting a fingerprint pattern.
図において、ｌは指先を押しつけて指紋データを入力す
る受圧板としての指紋入力板、２はＲＯＭ３に格納され
た所定の処理プログラムに従って指令し作動するコント
ローラ、４は指紋入力板ｌにより読み取られた指紋デー
タを記憶するＲＡＭ、５はコントローラ２から出力する
クロックのタイミングでスイッチＳＷの接点ａ１ａ ２
＋ ａ ：ｌ ＋・・・ａｎを順次切り換えてＸ軸う
インＸＩ 、Ｘ２．Ｘ：ｌ 、・・・Ｘｎに走査信号を
出力する電子スイッチ、６は電子スイッチ５の最後のＸ
輌うインｘｎの走査信号に基づいてＹ軸うインｙｌ ＋
Ｙ２＋ ｙ３ ＊・”ｙｎを順次接点すに切り換える
アナログスイッチｓｗ、、ｓｗ、、ｓｗ、。In the figure, l is a fingerprint input board as a pressure receiving plate for inputting fingerprint data by pressing the fingertip, 2 is a controller that commands and operates according to a predetermined processing program stored in ROM 3, and 4 is a fingerprint input board that is read by the fingerprint input board l. A RAM 5 stores fingerprint data, and a contact a1a 2 of the switch SW is connected at the timing of the clock output from the controller 2.
+ a :l +...an are sequentially switched to set the X axis in XI, X2. X:l,...Electronic switch that outputs a scanning signal to Xn, 6 is the last X of electronic switch 5
Y-axis input yl + based on the scanning signal of the input xn
Analog switches sw,, sw,, sw, which sequentially switch Y2+ y3 *・”yn to the contact point.
・・・ＳＷｏを有するセレクタ、７は所望の電圧を発生
する電源回路である。電源回路７により発生される電圧
は抵抗Ｒ３とＲ２により分圧されて点Ａに所望の電圧ｖ
１を発生し、この電圧はバッファ８の非反転端子に印加
される。バッファ８の反転端子は出力端子と接続されて
いる。...Selector 7 having SWo is a power supply circuit that generates a desired voltage. The voltage generated by the power supply circuit 7 is divided by resistors R3 and R2, and a desired voltage v is applied to point A.
1 and this voltage is applied to the non-inverting terminal of buffer 8. The inverting terminal of the buffer 8 is connected to the output terminal.
セレクタ６は、各Ｙ軸うインｙｌ ＋ ｙ２ ＋ｙ、３
．・・・ｙｎごとに接点ａとｂとを有し、接点ａどうし
は共通にしてバッファ８の出力端子に接続され、接点す
どうしは共通にして差動増幅器９の反転端子に接続され
ている。差動増幅器９の非反転端子はバッファ８の出力
端子と接続されている。差動増幅器９の反転端子は抵抗
Ｒ３を介して出力端子に接続されている。The selector 6 selects each Y axis yl + y2 + y, 3
．． Each yn has contacts a and b, and the contacts a are connected in common to the output terminal of the buffer 8, and the contacts in common are connected to the inverting terminal of the differential amplifier 9. . A non-inverting terminal of differential amplifier 9 is connected to an output terminal of buffer 8. The inverting terminal of the differential amplifier 9 is connected to the output terminal via a resistor R3.
差動増幅器９の出力はＡ／Ｄ変換器１０によりＡ／Ｄ変
換されるとともに、コンパレータ１１により基準電圧Ｖ
ｒｅｆと比較される。この基準電圧ｖ、、ｍｆは可変
抵抗Ｒ４により設定される。The output of the differential amplifier 9 is A/D converted by an A/D converter 10, and is converted to a reference voltage V by a comparator 11.
compared with ref. The reference voltages v, , mf are set by a variable resistor R4.
指紋入力板ｌは０本のＸ軸うインＸ工、ｘ２゜ｘ３．”
＊＋ｘｎと０本のＹ軸うイン３’ｌ ｌ ｙ２１ｙ３１
・” Ｙ ｎとか互いに直交し絶縁されるように配置さ
れており、Ｙ軸うイン３’ｌ ＊ ’ｊｚ ｌ ３’３
１・・・ｙｎはセレクタ６のスイッチＳＷ、、ＳＷ２
。The fingerprint input board l has 0 X-axis lines, x 2° x 3. ”
*+xn and 0 Y-axis in 3'l l y21y31
・" Y n are arranged so that they are orthogonal to each other and insulated, and the Y axis is 3'l * 'jz l 3'3
1...yn are switches SW, SW2 of selector 6
.
ＳＷ３ ・・・ＳＷｎの共通接点に接続されている。SW3...Connected to the common contact of SWn.
次に第２図、第３図および第４図を参照して受圧板とし
ての指紋入力板ｌの一実施例を説明する。Next, an embodiment of the fingerprint input plate l as a pressure receiving plate will be described with reference to FIGS. 2, 3, and 4.
第２図は指紋入力板１の部分分解斜視図、第３図は一部
を切欠いて示す組立斜視図、第４図は第３図におけるＡ
−Ａ断面図である。FIG. 2 is a partially exploded perspective view of the fingerprint input board 1, FIG. 3 is an assembled perspective view with a part cut away, and FIG. 4 is an A in FIG. 3.
-A sectional view.
指紋入力板１は、エツチングなどにより円形の穴１０１
ａを所定間隔（たとえば中心間距離か５０ｐｍ）であけ
且つ裏面（下面）に穴１０１ａの直径１．よりやや大き
い幅文２ （文、 ＞ｎｒ ）の溝１ｏｉｂを穴１０１
ａの位置に合わせて並べて形成した銅箔製の圧抜き板１
０１か接着され、その穴１０１ａにいずれ最終的には除
去されるアクリル系ポリマーまたはスチレン系（たとえ
ばポリα−メチルスチレン）などの熱分解性物質を詰め
た後、表面（上面）を研磨してから、その上に厚さ５〜
１０ｇｍのたとえばポリイミドのような樹脂から成る弾
性ベース１ｔ１１０２か接着される。The fingerprint input board 1 has a circular hole 101 formed by etching or the like.
a at a predetermined interval (for example, center-to-center distance of 50 pm), and the diameter of the hole 101a on the back surface (lower surface) is 1. Groove 1oib of Sentence 2 (sentence, >nr) with a slightly larger width than Hole 101
Copper foil pressure relief plates 1 arranged and formed according to the position of a
After filling the hole 101a with a thermally decomposable material such as acrylic polymer or styrene (for example, polyα-methylstyrene), which will eventually be removed, the surface (upper surface) is polished. From then on top of that thickness 5~
A 10 gm elastic base 1t1102 made of a resin such as polyimide is glued.
このベース膜１０２はローラーで塗布してもよいし蒸着
してもよい。This base film 102 may be applied by a roller or vapor deposited.
次にベース膜１０２上にＮ、またはＡＭなどの金属材料
を蒸着またはスパッタ法により付着した後エツチングに
よりＹ軸うイン’／ｌ＋ Ｙｚ ＋ｙ３．・・・となる
Ｙ方向走査用電極Ｙ、、Ｙｔ。Next, a metal material such as N or AM is deposited on the base film 102 by vapor deposition or sputtering, and then etched to form a Y-axis in'/l+ Yz +y3. The Y-direction scanning electrodes Y,, Yt.
Ｙａ、・・・を形成する。このＹ方向走査用電極Ｙ１．
Ｙａ 、Ｙａの幅は約６ｐｍである。その後走査用電極
Ｙｒ 、 Ｙｔ 、 Ｙ’ｓ 、・・・上のＸ方向走査
用電極Ｘｒ 、 Ｘ２ 、 Ｘ：ｌ 、・・・と交差す
る部分に五酸化タンタルなどの絶縁膜でスペーサ１０３
をエツチングにより形成する。次に、これらのスペーサ
１０３を通ってＹ方向走査用電極Ｙｌ。Ya, . . . are formed. This Y direction scanning electrode Y1.
The width of Ya and Ya is approximately 6 pm. After that, spacers 103 are formed with an insulating film such as tantalum pentoxide at the portions that intersect with the X-direction scanning electrodes Xr, X2, X:l, . . . on the scanning electrodes Yr, Yt, Y's, .
is formed by etching. Next, the Y-direction scanning electrode Yl passes through these spacers 103.
Ｙｔ、Ｙａ・・・と直交する方向にＮ、またはＡｎなと
の金属材料てＸ方向走査用電極Ｘ ｔ 、 Ｘ ｚ 、
””を形成する。形成方法はＹ軸方向走査用電極Ｙ１
．Ｙｔ 、ｙ、・・・と同じで、蒸着またはスパッタ法
とエツチングとの組合せであり、電極幅は約６μｍであ
る。X-direction scanning electrodes X t , X z , made of metal materials such as N or An in the direction orthogonal to Yt, Ya...
Form “”. The formation method is Y-axis direction scanning electrode Y1
．． Same as Yt, y, . . ., it is a combination of vapor deposition or sputtering and etching, and the electrode width is about 6 μm.
こうしてＸ方向走査用電極Ｘｓ 、 Ｘ２ 、・・・と
Ｙ方向走査用電極Ｙ□’＋ ｙ、、ｙ、−・・とかスペ
ーサ１０３を介してマトリクス状に形成する。そして、
再走査用電極にまたかって圧抜き板１０１の穴１０１ａ
の上にくるようにＣｕ−Ｎ、合金材料を用いて線幅約ａ
ｇｍ、長さ約１１００ｐのストレンゲージ素子１０４を
蒸着またはスパッタ法と工・ンチングとの組合せにより
屈曲して形成する。In this way, the X-direction scanning electrodes Xs, X2, . . . and the Y-direction scanning electrodes Y□'+y,, y, . and,
Hole 101a of pressure release plate 101 straddles the rescanning electrode
Using Cu-N and alloy material on top, the line width is about a.
gm and a length of about 1100p is formed by bending by a combination of vapor deposition or sputtering and machining/nching.
このストレンゲージ素子１０４の形状はその幅と長さの
比（いわゆるアスペクト比）かできるたけ大きくなるよ
うに決定される。The shape of this strain gauge element 104 is determined so that its width to length ratio (so-called aspect ratio) is as large as possible.
こうして作られた指紋久方板組立体の上部に、圧抜き板
１０１の穴１０１ａと河し間隔で多数の圧力集中用突起
１０５ａか設けられた保護膜１０５が接着される。この
保護膜１０５は厚さか６ｇｍでポリプロピレンなどの弾
力性のある材料で作られている。A protective film 105 provided with a large number of pressure concentration protrusions 105a at a distance from the holes 101a of the pressure relief plate 101 is adhered to the upper part of the thus produced fingerprint retention plate assembly. This protective film 105 has a thickness of about 6 gm and is made of an elastic material such as polypropylene.
最後に、こうして作られた指紋入力板ｌを加温容器に入
れ、圧抜き板１０１の穴１０１ａおよび溝１０１ｂに詰
められている熱分解性物質を軟化させ、真空吸引装置を
利用して除去し、その後ガラス基板１００上に接着して
完成する。Finally, the fingerprint input board l thus made is placed in a heating container, and the pyrolyzable material filled in the holes 101a and grooves 101b of the pressure release board 101 is softened and removed using a vacuum suction device. , and then adhered onto the glass substrate 100 to complete the process.
再び第１図にもどって指紋パターンの検出手順と装置の
動作を説明する。Returning again to FIG. 1, the fingerprint pattern detection procedure and the operation of the device will be explained.
装置の回路各部に電源電圧を供給すると、コントローラ
２はＲＯＭ３に格納されたプログラムより制御されたタ
イミングて電子スイッチ５とセレクタ６を切換える。す
なわち電子スイッチ５はたとえばｌｐｓのタイミンクで
スイッチｓｗの接点ａｌ ＋ ａ２１・−ａ 、を順次
切換え、その結果Ｘ方向走査用電極Ｘ＋ 、Ｘ２ 、
ｘｌ 、・・・ｘｌに所定の電圧（たとえば５ｖ）か順
次印加される。一方、セレクタ６もコントローラ２から
の選択信号によりたとえば１Ｘｎ７ｚｓのタイミンクで
アナログスイッチＳ Ｗ ＝ 、 Ｓ Ｗｚ 、・・・
ＳＷ、の接点をａからｂに切換えていく。When power supply voltage is supplied to each circuit part of the device, the controller 2 switches the electronic switch 5 and the selector 6 at a timing controlled by a program stored in the ROM 3. That is, the electronic switch 5 sequentially switches the contacts al+a21 and -a of the switch sw at a timing of, for example, lps, and as a result, the X-direction scanning electrodes X+, X2,
A predetermined voltage (for example, 5V) is sequentially applied to xl, . . . xl. On the other hand, the selector 6 also switches analog switches S W = , S Wz , .
Switch the contact of SW from a to b.
そこでいま指紋パターンを検出しようとする指Ｆを指紋
入力板ｌに乗せて軽く押しつけると、指紋パターンの山
部に当る部分でストレンゲージ素子１０４か押されてた
わむ。ストレンゲージ素子１０４の真下には圧抜き板ｌ
ｏｔにあけられた穴１０１ａが位置しているのでストレ
ンゲージ素子１０４はたわみ易く、しかもたわむ際その
穴１０１ａ内の空気が押され圧抜き板１０１の裏面に形
成された溝１０１ｂを通って指紋入力板ｌの側面に逃げ
るためストレンゲージ素子１０４のたわみは何ら妨げら
れることかない。Therefore, when the finger F whose fingerprint pattern is to be detected is placed on the fingerprint input board L and pressed lightly, the strain gauge element 104 is pushed and bent by the portion that hits the ridges of the fingerprint pattern. There is a pressure relief plate l directly below the strain gauge element 104.
Since the hole 101a drilled in the ot is located, the strain gauge element 104 is easy to bend, and when it bends, the air in the hole 101a is pushed out and passes through the groove 101b formed on the back side of the pressure relief plate 101, allowing fingerprint input. The deflection of the strain gauge element 104 is not hindered in any way because it escapes to the side surface of the plate l.
ストレンゲージ素子１０４がたわむとその固有の抵抗値
が増加するため電子スイッチ５によりＸ方向走査用電極
Ｘ Ｌ Ｉ Ｘ ｔ 、 Ｘユ、・・・ｘｎに前述した
ような電圧が順次印加され（第１図では電子スイッチ５
の接点ａ２が電源回路７に接続されている）セレクタ６
によりスイッチＳＷ。When the strain gauge element 104 is bent, its inherent resistance value increases. Therefore, the electronic switch 5 sequentially applies the above-mentioned voltages to the X-direction scanning electrodes X L I X t , X Y , . In Figure 1, electronic switch 5
) selector 6 whose contact a2 is connected to the power supply circuit 7
Switch SW.
ＳＷ２．・・・ＳＷ、、の接点か順次ａからｂに切換え
られると（第１図ではスイッチＳＷ２接点か切換えられ
てＹ方向走査用電極ｙ２が接点すに接続されている）、
指紋入力板ｌ上の各点におけるストレンゲージ素子１０
４の抵抗値か順次差動増幅器９の反転端子に入力される
。SW2. . . . When the contacts of SW, , are sequentially switched from a to b (in FIG. 1, the switch SW2 contact is switched and the Y-direction scanning electrode y2 is connected to the contact).
Strain gauge element 10 at each point on the fingerprint input board l
The resistance values of 4 are sequentially input to the inverting terminal of the differential amplifier 9.
バッファ８の非反転端子には抵抗Ｒ１とＲ２の接続点Ａ
の電位ｖ１が印加され、この電位ｖ１は差動増幅器９の
非反転端子とセレクタ６のすべてのスイッチの接点ａに
も印加されているので、第１図に破線の丸で囲んだ領域
Ｍの指紋データは、セレクタ６を構成するｎ個のスイッ
チのうち接点すに接続されたＹ方向走査用電極（第１図
ではＹ２）を流れる電流がストレンゲージ素子１０４の
たわみによる抵抗値の増加で減少し抵抗Ｒ３による帰還
作用によって差動増幅器９の出力電圧か電流の減少分だ
け増加する形で現われる。このように瞬時的にはセレク
タ６の１つのスイッチだけか接点すに接続され、他のす
べてのスイッチは接点ａに接続されることになるため、
測定したい１点の指紋パターンのデータのみが取り出さ
れることになり、他のＸ方向走査用電極およびストレン
ゲージ素子を介してＹ方向走査用電極に取り出される他
の点の指紋データはセレクタ６により排除されることに
なる。The non-inverting terminal of the buffer 8 has a connection point A between resistors R1 and R2.
, and this potential v1 is also applied to the non-inverting terminal of the differential amplifier 9 and the contacts a of all the switches of the selector 6. Therefore, the area M surrounded by the broken line circle in FIG. The fingerprint data indicates that the current flowing through the Y-direction scanning electrode (Y2 in FIG. 1) connected to the contact point of the n switches constituting the selector 6 decreases due to an increase in resistance due to the deflection of the strain gauge element 104. However, due to the feedback effect of the resistor R3, the output voltage of the differential amplifier 9 appears to increase by the amount of the decrease in current. In this way, only one switch of the selector 6 is connected to contact a, and all other switches are connected to contact a, so
Only the fingerprint pattern data of one point to be measured is extracted, and the selector 6 excludes the fingerprint data of other points that are extracted to the Y-direction scanning electrode via other X-direction scanning electrodes and strain gauge elements. will be done.
差動増幅器９の出力端子に取り出される各点の指紋デー
タはストレンゲージ素子１０４の抵抗値に応じてきまる
アナログ信号である。このアナログ指紋データはＡ／Ｄ
変換器１０によりデジタル化されて出力端子ＯＩからた
とえば８ビツトのデジタル指紋データとして取り出され
るとともに、コンパレータ１１において可変抵抗Ｒ４に
より設定される閾値Ｖ ｒ ｅ ｆと比較されて指紋の
山部と谷部の判別かなされ、出力端子０２から指紋パタ
ーン信号として取り出される。これらの出力端子０、お
よび０２からの指紋データおよび指紋パターン信号はそ
の後の用途に応じて処理され、指紋パターンの表示や登
録あるいはすでに登録されている指紋パターンとの比較
に用いられる。The fingerprint data at each point taken out to the output terminal of the differential amplifier 9 is an analog signal that depends on the resistance value of the strain gauge element 104. This analog fingerprint data is A/D
The data is digitized by the converter 10 and taken out as, for example, 8-bit digital fingerprint data from the output terminal OI, and is compared with a threshold value V r e f set by the variable resistor R4 in the comparator 11 to determine the peaks and valleys of the fingerprint. The fingerprint pattern signal is extracted from the output terminal 02 as a fingerprint pattern signal. The fingerprint data and fingerprint pattern signals from these output terminals 0 and 02 are processed depending on the subsequent use and used for displaying or registering the fingerprint pattern or for comparison with already registered fingerprint patterns.
第５図はやはり指紋パターンの検出に適した本発明によ
る面圧力分布検出装置の他の実施例の受圧板としての指
紋入力板のみを部分的に示す斜視図である。図において
第３図と同じ参照数字は同し構成部分を示す。FIG. 5 is a perspective view partially showing only a fingerprint input plate as a pressure receiving plate of another embodiment of the surface pressure distribution detection device according to the present invention, which is also suitable for detecting a fingerprint pattern. In the figures, the same reference numerals as in FIG. 3 indicate the same components.
この実施例の指紋入力板ｌの製法上第３図に示した実施
例と異なる点は、ベース膜１０２上に形成したＹ方向走
査用電極Ｙ ｌＩ Ｙ ２１ Ｙ ３１・・・スペーサ
１０３、Ｘ方向走査用電極Ｘｓ 、 Ｘ２ 。The manufacturing method of the fingerprint input plate l of this embodiment is different from the embodiment shown in FIG. Scanning electrodes Xs, X2.
・・・の上に前面にわたって熱分解性物質なローラなど
で均一に約２０４ｍ厚に塗布し、その塗布膜上の圧抜き
板１０１の穴１０１ａに対応する位置にほぼ正方形の金
属マスクを蒸着とエツチングで形成する。このマスクの
位置はちょうど２本のＸ方向走査用電極と２本のＹ方向
走査用電極とで囲まれた正方形の領域内になる。. . . Apply a thermally decomposable substance to a thickness of about 204 m uniformly over the front surface using a roller or the like, and then vapor-deposit an approximately square metal mask on the coating film at a position corresponding to the hole 101a of the pressure relief plate 101. Formed by etching. The position of this mask is exactly within a square area surrounded by two X-direction scanning electrodes and two Y-direction scanning electrodes.
次にエツチングにより金属マスク以外の部分の熱分解性
物質を除去し、その後金属マスクも除去する。その結果
、金属マスクの位置に第６図に示すような熱分解性物質
の台部１０６が形成される。次にこの台部１０６上にス
トレンゲーシ素子１０４を前の実施例と同様の手順で屈
曲して形成し、各ストレンゲージ素子１０４の一端はＸ
方向走査用電極にまた他端はＹ方向走査用電極に電着さ
せる。この台部１０６の表面はベース膜１０２より高い
位置にあるため、ストレンゲージ素子１０４はＸ方向走
査用電極およびＹ方向走査用電極より１０数ｇｍ〜２０
ｇｍ高い位置に形成される。Next, the thermally decomposable substance in areas other than the metal mask is removed by etching, and then the metal mask is also removed. As a result, a pedestal 106 of the thermally decomposable material is formed at the position of the metal mask as shown in FIG. Next, strain gauge elements 104 are bent and formed on this base 106 in the same manner as in the previous embodiment, and one end of each strain gauge element 104 is
The electrode is electrodeposited on the direction scanning electrode, and the other end is electrodeposited on the Y direction scanning electrode. Since the surface of this platform 106 is located at a higher position than the base film 102, the strain gauge element 104 is approximately 10 to 20 gm higher than the X-direction scanning electrode and the Y-direction scanning electrode.
gm is formed at a high position.
こうしてストレンゲージ素子１０４か形成された後前記
実施例と同様に厚さ数ｇｍの保護膜１０５′を前面に塗
°布する。この保護膜１０５′には前記実施例の保護膜
１０５と異なり圧力集中用突起１０５ａのような突起は
必要でない、何故なら、台部１０６かベース膜１０２よ
り高く形成されているために、この部分で保護［１０５
か第５図に符号りで示すように上方に高く浮き上ってあ
たかも前の実施例の圧力集中用突起１０５ａのような形
状となり、同じ機能を果すからである。After the strain gauge element 104 is thus formed, a protective film 105' having a thickness of several gm is applied to the front surface as in the previous embodiment. Unlike the protective film 105 of the previous embodiment, this protective film 105' does not require a protrusion such as the pressure concentration protrusion 105a, because the pedestal part 106 is formed higher than the base film 102. Protected with [105
This is because, as shown by the reference numeral in FIG. 5, it rises high upwards and has a shape similar to the pressure concentration protrusion 105a of the previous embodiment, and performs the same function.
最後にこうして作られた指紋入力板組立体全体を加温容
器に入れ、圧抜き板１０１の穴１０１ａおよび溝１０１
ｂに詰められた熱分解性物質と台部１０６を構成する熱
分解性物質とを軟化させ真空吸引装置を利用して除去す
る。その結果、ストレンゲージ素子１０４は保護膜１０
５′の裏面に付着し保持される。Finally, the entire fingerprint input board assembly made in this way is placed in a heating container, and the holes 101a and grooves 101 of the pressure relief plate 101 are
The thermally decomposable material packed in b and the thermally decomposable material constituting the platform 106 are softened and removed using a vacuum suction device. As a result, the strain gauge element 104
It is attached and held on the back side of 5'.
この実施例における指紋入力板以外の構成は第１図に示
した実施例と全く同じであるのて、その構成および回路
動作については説明を省略する。The structure of this embodiment other than the fingerprint input board is completely the same as the embodiment shown in FIG. 1, and therefore the explanation of the structure and circuit operation will be omitted.
上記２つの実施例のいずれにおいても指紋パターン検出
時に生ずる圧力増分を圧抜き板の裏面に設けた溝で逃す
ようにしているか、圧抜き板の圧抜き構造は第７図に示
すように、圧抜き板１０１上のＸ方向走査用電極とＹ方
向走査用電極との交差する部位に対応する位置に突起１
０１Ｃを形成してもよい。このようにすれば、４つの１
０１ｃで囲まれた領域か前述した実施例で用いられた圧
抜き板１０１の穴１０１ａに相当し、突起１０１ｃ間の
部分が圧抜き通路となるので、前記実施例より簡単な構
造でそれ以上の圧抜き効果か得られる。In either of the above two embodiments, the pressure increment that occurs when detecting a fingerprint pattern is released through a groove provided on the back side of the pressure relief plate, or the pressure relief structure of the pressure relief plate has a pressure relief structure as shown in FIG. A protrusion 1 is provided at a position corresponding to the intersection of the X-direction scanning electrode and the Y-direction scanning electrode on the punched plate 101.
01C may be formed. If you do this, the four 1
The area surrounded by 01c corresponds to the hole 101a of the pressure relief plate 101 used in the above-mentioned embodiment, and the area between the protrusions 101c becomes the pressure relief passage, so the structure is simpler than that of the previous embodiment. You can get a pressure relief effect.
上記実施例では好適な応用例として本発明による面圧力
分布測定装置を指紋パターンの検出に用いた例を示した
が、本発明はそれに限定されず、医療機器で考えられる
微細な面圧力分布の測定などその他の応用分野にも好適
であることはいうまでもない。In the above embodiment, an example was shown in which the surface pressure distribution measuring device according to the present invention was used to detect a fingerprint pattern as a preferred application example, but the present invention is not limited thereto. Needless to say, it is also suitable for other application fields such as measurement.
（発明の効果）
以上説明したように、本発明においては、互いに交差し
てマトリクスを形成するように絶縁して配置された複数
本の電極から成る第１の走査用電極と第２の走査用電極
との交差点間で両電極間に接続するようにストレゲージ
素子を形成し、そのストレンゲージ素子か外部からの力
でたわみ得るように受圧板を構成したので、圧力分布の
ある荷重を外部から受圧板に当て第１の走査用電極と第
２の走査用電極とを所定の順序で走査することにより微
細な面圧力分布を検出することかできる。(Effects of the Invention) As explained above, in the present invention, the first scanning electrode and the second scanning electrode are composed of a plurality of electrodes that are insulated and arranged so as to cross each other to form a matrix. A strain gauge element was formed to be connected between both electrodes at the intersection with the electrode, and the pressure receiving plate was configured so that the strain gauge element could be deflected by an external force, so that a load with a pressure distribution could be applied from the outside. A fine surface pressure distribution can be detected by applying the first scanning electrode and the second scanning electrode to the pressure receiving plate and scanning them in a predetermined order.
感圧素子としてストレンゲージを用いることにより、素
子の厚さに制限かなく、経年変化による測定圧力への影
響をなくすことかでき、荷重点の個別化か可能となり、
薄形で安価な面圧力分布の検出が可能になる。By using a strain gauge as a pressure-sensitive element, there is no restriction on the thickness of the element, it is possible to eliminate the influence of aging on the measured pressure, and it is possible to separate the load points.
It becomes possible to detect surface pressure distribution in a thin and inexpensive manner.
また、ストレンゲージ素子の位置に外部負荷による素子
のたわみを積極的に増幅する空間やたわみを妨げない空
気逃げのような構造を設ければ、圧力検出の感度を向上
させることかできる。Furthermore, if a space for actively amplifying the deflection of the element due to an external load is provided at the position of the strain gauge element, or a structure such as an air escape that does not impede the deflection, the sensitivity of pressure detection can be improved.
第１図は本発明による面圧力分布検出装置の全体構成を
示すブロック線図、第２図は面圧力分布検出装置を指紋
パターンの検出に用いた場合の指紋入力板の一実施例の
部分分解斜視図、第３図は同指紋入力板の一部を切欠い
て示す組立斜視図、第４図は第３図のＡ−Ａ断面図、第
５図は指紋入力板の他の実施例の一部切欠き組立斜視図
、第６図は第５図に示した指紋入力板の製造途中の状態
を示す部分斜視図、第７図は圧抜き板の他の例の斜視図
である。
ｌ・・・指紋入力板（受圧板）、２・・・コントローラ
、５・・・電子スイッチ、６・・・セレクタ、８・・・
バッファ、９・・・差動増幅器、ｌＯ・−Ａ ／ Ｄ変
換器、１００・・・ガラス基板、１０１・・・圧抜き板
、１０２・・・ベース膜、１０３・・・スペーサ、１０
４・・・ストレンゲージ素子、１０５・・・保護膜、１
０６・・・台部
特許出願人 株式会社エニックス
代理人 弁理士 鈴 木 弘
男
第１FIG. 1 is a block diagram showing the overall configuration of a surface pressure distribution detection device according to the present invention, and FIG. 2 is a partial exploded view of an embodiment of a fingerprint input board when the surface pressure distribution detection device is used to detect a fingerprint pattern. FIG. 3 is an assembled perspective view with a part of the fingerprint input board cut away, FIG. 4 is a sectional view taken along line A-A in FIG. 3, and FIG. 5 is an example of another embodiment of the fingerprint input board. FIG. 6 is a partial perspective view showing a state in which the fingerprint input board shown in FIG. 5 is being manufactured, and FIG. 7 is a perspective view of another example of the pressure release plate. l... Fingerprint input board (pressure receiving board), 2... Controller, 5... Electronic switch, 6... Selector, 8...
Buffer, 9...Differential amplifier, lO.-A/D converter, 100...Glass substrate, 101...Pressure plate, 102...Base film, 103...Spacer, 10
4... Strain gauge element, 105... Protective film, 1
06... Taibe Patent Applicant Enix Co., Ltd. Agent Patent Attorney Hiroo Suzuki 1st
Claims (6)
るように絶縁して配置された複数本の第１および第２の
走査用電極と該第１および第２の走査用電極の交差点間
で両電極間に接続され且つ外部からの力でたわみ得るよ
うに形成されたストレンゲージ素子とを有して成る受圧
板と、前記第１および第２の走査用電極に所定の順序で
走査信号を印加する走査回路と、前記受圧板に外部から
加わる面圧力に応じてたわむストレンゲージ素子の抵抗
値の変化を前記走査回路からの走査信号により前記交差
点ごとに電気信号として順次取り出す出力手段とを有す
ることを特徴とする面圧力分布検出装置。(1) Between a plurality of first and second scanning electrodes that are insulated and arranged so as to intersect at predetermined minute intervals to form a matrix, and the intersection of the first and second scanning electrodes. a pressure receiving plate having a strain gauge element connected between both electrodes and formed to be deflectable by an external force; and a scanning signal is applied to the first and second scanning electrodes in a predetermined order. and output means for sequentially extracting changes in the resistance value of the strain gauge element, which is deflected in response to surface pressure applied to the pressure receiving plate from the outside, as an electric signal at each intersection using a scanning signal from the scanning circuit. A surface pressure distribution detection device comprising:
有する請求項１に記載の面圧力分布検出装置。(2) The surface pressure distribution detection device according to claim 1, wherein the pressure receiving plate has a space below the strain gauge element.
面圧力分布検出装置。(3) The surface pressure distribution detection device according to claim 2, wherein the space communicates with the atmosphere.
集中用突起を有する請求項１、２または３に記載の面圧
力分布検出装置。(4) The surface pressure distribution detection device according to claim 1, 2 or 3, wherein the pressure receiving plate has a surface pressure concentration protrusion above the strain gauge element.
２の走査用電極形成面より加圧側にダイヤフラム形状に
形成されている請求項１に記載の面圧力分布検出装置。(5) The surface pressure distribution detection device according to claim 1, wherein the strain gauge element of the pressure receiving plate is formed in a diaphragm shape on the pressure side of the first and second scanning electrode forming surfaces.
有する請求項１に記載の面圧力分布検出装置。(6) The surface pressure distribution detection device according to claim 1, wherein the strain gauge element has a large aspect ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63236212A JP2750583B2 (en) | 1988-09-22 | 1988-09-22 | Surface pressure distribution detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63236212A JP2750583B2 (en) | 1988-09-22 | 1988-09-22 | Surface pressure distribution detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0285914A true JPH0285914A (en) | 1990-03-27 |
| JP2750583B2 JP2750583B2 (en) | 1998-05-13 |
Family
ID=16997439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63236212A Expired - Fee Related JP2750583B2 (en) | 1988-09-22 | 1988-09-22 | Surface pressure distribution detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2750583B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6234031B1 (en) | 1997-11-27 | 2001-05-22 | Nec Corporaion | Fingerprint detection apparatus |
| JP2011197001A (en) * | 2010-03-18 | 2011-10-06 | Korea Research Inst Of Standards & Science | Flexible force or pressure sensor array using semiconductor strain gauge, manufacturing method of flexible force or pressure sensor array, and force or pressure measurement method using flexible force or pressure sensor array |
-
1988
- 1988-09-22 JP JP63236212A patent/JP2750583B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6234031B1 (en) | 1997-11-27 | 2001-05-22 | Nec Corporaion | Fingerprint detection apparatus |
| JP2011197001A (en) * | 2010-03-18 | 2011-10-06 | Korea Research Inst Of Standards & Science | Flexible force or pressure sensor array using semiconductor strain gauge, manufacturing method of flexible force or pressure sensor array, and force or pressure measurement method using flexible force or pressure sensor array |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2750583B2 (en) | 1998-05-13 |
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