JPH0275480A - Diffusion joining method for cylindrical laminated material - Google Patents
Diffusion joining method for cylindrical laminated materialInfo
- Publication number
- JPH0275480A JPH0275480A JP22806388A JP22806388A JPH0275480A JP H0275480 A JPH0275480 A JP H0275480A JP 22806388 A JP22806388 A JP 22806388A JP 22806388 A JP22806388 A JP 22806388A JP H0275480 A JPH0275480 A JP H0275480A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- joined
- metal base
- pressing tool
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000002648 laminated material Substances 0.000 title claims description 5
- 238000005304 joining Methods 0.000 title abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 144
- 238000003825 pressing Methods 0.000 claims abstract description 31
- 230000002093 peripheral effect Effects 0.000 claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 9
- 239000010439 graphite Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 65
- 239000002184 metal Substances 0.000 claims description 65
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000005219 brazing Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000001513 hot isostatic pressing Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 241000255789 Bombyx mori Species 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Laminated Bodies (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、例えば医療用機器１分析機器、ｆｓ子機器お
よびこれらの部品等に使われる筒状積層材の拡散接合方
法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for diffusion bonding cylindrical laminated materials used for, for example, medical equipment 1 analysis equipment, fs child equipment, and their parts.
［従来の技術］
をリブテン。タングステン、チタン、鉄、クロム、銀、
マンガン、ニッケル等からなる被接合材を、例えば銅あ
るいは銅合金からなる金属基材に接合する手段として、
■ろう付、■蒸着、■めっき等が知られている。[Conventional technology] Ribten. tungsten, titanium, iron, chromium, silver,
As a means of joining a material to be joined made of manganese, nickel, etc. to a metal base material made of copper or a copper alloy, for example,
■Brazing, ■vapor deposition, ■plating, etc. are known.
■ ろう付としては銀ろう付が一般的であるが、高温時
の接合部の強度に開局が条り、熱応力あるいは外力によ
る剪断力が負荷された場合にろう材部から剥離する可能
性がある。また、円筒形の部材の外周面全体に均一にろ
う付することは技術的に難しく、使用中にろう付不良箇
所が冷却不足となって局部的な温度上昇を生じ、剥離す
る可能性が高い。また、チタンやクロム、モリブデン等
はろう材との濡れ性が悪いため、ろう材自体が不可能な
場合もある。■ Silver brazing is the most common type of brazing, but the strength of the joint at high temperatures is limited, and there is a possibility that it will separate from the brazing material when thermal stress or shearing force from an external force is applied. be. In addition, it is technically difficult to uniformly braze the entire outer circumferential surface of a cylindrical member, and there is a high possibility that poor brazing will become insufficiently cooled during use, causing a local temperature rise and peeling. . Furthermore, since titanium, chromium, molybdenum, etc. have poor wettability with the brazing material, it may not be possible to use the brazing material itself.
■ 蒸着は、被接合材を真空蒸着法やイオンブレーティ
ング、スパッタリング法などによって金属基材の外周面
にコーティングする方法であるが、コーティング速度が
きわめて遅く、必要厚（例えば３０〜１００ｕ）にする
のに長時間を要する。また、コーティング厚が大になる
と不可避的に発生する残留応力により剥離しやすくなる
。■ Vapor deposition is a method of coating the outer circumferential surface of a metal base material using vacuum evaporation, ion blating, sputtering, etc., but the coating speed is extremely slow and it is difficult to maintain the required thickness (for example, 30 to 100 u). It takes a long time. Furthermore, as the coating thickness increases, it becomes easier to peel off due to residual stress that inevitably occurs.
■ めっきによる場合、被接合材はめつき可能な金属（
銀、鉄、ニッケル、クロム等）に限られるから、材料的
な制約が大きい。また、めっきは液中で行なわれるため
、真空で高温にさらされると、めっき時に吸着された液
分がガス化しやすく、界面から剥離する可能性がある。■ When using plating, the materials to be joined are metals that can be plated (
(silver, iron, nickel, chromium, etc.), so there are significant material restrictions. Furthermore, since plating is performed in a liquid, when exposed to high temperatures in a vacuum, the liquid adsorbed during plating tends to gasify and may peel off from the interface.
また、蒸着の場合と同様に被接合材の厚みに大きな制約
を受ける。Furthermore, as in the case of vapor deposition, there are major restrictions on the thickness of the materials to be joined.
上記■、■、■の各方法に比べて、拡散接合は接合強度
および高温時の強度が高く、しかも欠陥のない安定した
接合部が得られる。拡散接合は、□接合したい部材を真
空中、不活性ガスもしくは還元ガス雰囲気中で高温に加
熱するとともに、接合部に荷重を負荷した状態で所定の
時間保持することにより、部材相互の接触部を通じて原
子の相互拡散を生じさせて固相状態のまま接合を行なう
方法である。拡散接合によって被接合材を接合した場合
、ろう付のような低融点部分がないため高温強度に優れ
、各種の被接合材令てに適用可能であり、被接合材の厚
みを大きくとれ、しかもめつきのような接合界面からの
ガスの発生を生じないなど、優れた特性を発揮できる。Compared to the above-mentioned methods (1), (2), and (2), diffusion bonding has higher bonding strength and strength at high temperatures, and also provides a stable bonded portion without defects. Diffusion bonding involves heating the parts to be joined to a high temperature in a vacuum, in an inert gas or reducing gas atmosphere, and holding the joint part under a load for a predetermined period of time. This is a method of bonding in a solid state by causing interdiffusion of atoms. When joining materials by diffusion bonding, there is no low melting point part like brazing, so it has excellent high-temperature strength and can be applied to various materials to be joined. It exhibits excellent properties such as no generation of gas from the bonding interface, which is the case with seagulling.
拡散接合を行なうための設備としては、ホットプレス装
置あるいはＨＩＰ （熱間等方加圧装置）を適用できる
。ホットプレス装置は、真空炉あるいは雰囲気炉にプレ
スを貫通して設け、真空あるいは還元ガス、不活性ガス
雰囲気中で加熱とプレスを行なえるようにした装置であ
る。ＨＩＰは、接合部材を塑性変形容易な金属製密閉容
器（一般的には低炭素鋼からなる容器）の内部に収容し
、この容器の外側からガスの圧力によって容器ごと接合
部材を全方向から加圧するようになっている。As equipment for performing diffusion bonding, a hot press device or a HIP (hot isostatic pressing device) can be used. A hot press device is a device that is installed in a vacuum furnace or an atmosphere furnace with a press penetrating through it, and is capable of heating and pressing in a vacuum, reducing gas, or inert gas atmosphere. In HIP, the parts to be joined are housed inside a sealed metal container (generally made of low carbon steel) that is easily plastically deformed, and the parts to be joined together are applied from all directions using gas pressure from the outside of the container. It's designed to put pressure on you.
［発明が解決しようとする課題］
前述したホットプレス装置の場合、通常は加圧方向が一
方向（垂直方向）のみであるから、部材の幅方向（径方
向）に接合させることが困難である。これに対しＨＩＰ
は全方向からの接合が可能であるが、容器も一緒に接合
されてしまうため、接合後に容器を除去するための手間
のかかる加工が必要である。[Problem to be solved by the invention] In the case of the above-mentioned hot press device, the pressurizing direction is usually only in one direction (vertical direction), so it is difficult to join the members in the width direction (radial direction). . In contrast, HIP
can be joined from all directions, but since the container is also joined together, a time-consuming process is required to remove the container after joining.
なお、本発明者らによって提案された金属と黒鉛からな
る複合材、の製造方法（特開昭Ｈ−１４６８２５号公報
）においては、被接合材に黒鉛が使用されている。黒鉛
は塑性変形せず割れやすいから、高温接合時にはこの黒
鉛製被接合材を拡径させるような力が加わらないように
格別の配慮が必要であった。In addition, in the manufacturing method of a composite material consisting of metal and graphite proposed by the present inventors (Japanese Patent Application Laid-Open No. 146825/1983), graphite is used as the material to be joined. Since graphite does not undergo plastic deformation and is easily cracked, special care was required to avoid applying force that would cause the diameter of the graphite materials to expand during high-temperature welding.
従って本発明の目的は、゛−２−７
叫金属基材の外周部に、蚕属製被接合材をホ吸ドブレス
等を用いて高品質に接合させることができるような拡散
接合方法を提供することにある。Therefore, the object of the present invention is to provide a diffusion bonding method that can bond a material made of Silkworm to the outer periphery of a metal base material with high quality using a suction press or the like. It's about doing.
［課題を解決するための手段］
上記目的を果たすための本発明方法は、円筒状をなし一
端側から他端側に向かって内径が狭まるテーパ状内面を
有した金属基材と、この金属基材のテーパ状内面に対応
したテーパ状外周面を有する抑圧具と、常温において上
記金属基材の外径よりも大きな内径を有しかつ金属基材
よりも熱膨張率の小さな材料からなる円筒状の被接合材
とを使用する拡散接合方法であって、常温において上記
金属基材のテーパ状内面に上記押圧具をセットしかつ金
属基材の外周側に上記被接合材をセットする工程と、上
記金属基材および被接合材を拡散接合温度まで昇温させ
その昇温の途中あるいは昇温後に上記押圧具を金属基材
のテーパ状内面の一端側から他端側に向かって押圧する
ことにより金属基材の外周面を被接合材の内周面に密接
させるとともに接合温度に達した状態において上記抑圧
具に更に大きな荷重を加えることによって被接合材と金
属基材を拡径方向に塑性変形させた状態で金属基材と被
接合材相互の接触面の拡散接合を行なう工程とを具備し
たことを特徴とする拡散接合方法である。[Means for Solving the Problems] The method of the present invention for achieving the above object includes a metal base material having a cylindrical shape and a tapered inner surface whose inner diameter narrows from one end side to the other end side, and this metal base material. a suppressor having a tapered outer circumferential surface corresponding to the tapered inner surface of the material; and a cylindrical material made of a material having an inner diameter larger than the outer diameter of the metal base material and a coefficient of thermal expansion smaller than that of the metal base material at room temperature. a diffusion bonding method using a material to be joined, the step of setting the pressing tool on the tapered inner surface of the metal base material and setting the material to be joined on the outer peripheral side of the metal base material at room temperature; By raising the temperature of the metal base material and the material to be joined to the diffusion bonding temperature and pressing the press tool from one end side of the tapered inner surface of the metal base material toward the other end during or after the temperature rise. The outer peripheral surface of the metal base material is brought into close contact with the inner peripheral surface of the material to be joined, and when the joining temperature is reached, a larger load is applied to the suppressor to plastically deform the material to be joined and the metal base material in the radial direction. This diffusion bonding method is characterized by comprising the step of performing diffusion bonding of the contact surfaces between the metal base material and the materials to be bonded in a state in which the metal base material and the material to be bonded are in contact with each other.
なお、場合によっては上記被接合材の外側に、この被接
合材を収容可能な大きさの内周面をもつ治具をセットし
てもよい。上記押圧具の材質は炭素または炭化珪素（Ｓ
ｉ Ｃ）が適している。In some cases, a jig having an inner circumferential surface large enough to accommodate the welded material may be set outside the welded material. The material of the above pressing tool is carbon or silicon carbide (S
iC) is suitable.
［作用］
上記金属基材のテーパ状内面に押圧具をセットしかつ金
属基材の外周側に上記被接合材および必要に応じて上記
治具をセットする。そして金属基材および被接合材を拡
散接合温度まで昇温させると、熱膨張差によって金属基
材と被接合材が互いに接触する。また、昇温の途中ある
いは昇温後に押圧具を金属基材に押込むことにより金属
基材と被接合材との接触を補助する。そして接合温度に
保持した状態で、抑圧具に更に大きな荷重を加えること
により、金属基材と被接合材を拡径方向に塑性変形させ
た状態にして金属基材と被接合材相互の拡散接合を行な
う。[Operation] A pressing tool is set on the tapered inner surface of the metal base material, and the material to be joined and, if necessary, the jig are set on the outer peripheral side of the metal base material. When the metal base material and the material to be joined are heated to the diffusion bonding temperature, the metal base material and the material to be joined come into contact with each other due to the difference in thermal expansion. In addition, contact between the metal base material and the material to be joined is assisted by pushing the pressing tool into the metal base material during or after the temperature rise. Then, while maintaining the welding temperature, by applying a larger load to the suppressor, the metal base material and the material to be joined are plastically deformed in the radial direction, and the metal base material and the material to be joined are diffusion bonded to each other. Do this.
［実施例］
以下に本発明の一実施例について第１図ないし第５図を
参照して説明する。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.
第１図において、銅製の金属基材１は底部２を有した円
筒状をなしている。この金属基材１の内面３は、一端側
から他端側（底部２側）に向かって内径が狭まるテーパ
状に加工されている。金属基材１の外径は軸方向の全長
にわたって実質的に一定である。In FIG. 1, a metal substrate 1 made of copper has a cylindrical shape with a bottom 2. As shown in FIG. The inner surface 3 of this metal base material 1 is processed into a tapered shape in which the inner diameter narrows from one end side toward the other end side (bottom 2 side). The outer diameter of the metal substrate 1 is substantially constant over the entire axial length.
金属基材１のテーパ状内面３に挿入される押圧具５は黒
鉛製である。この押圧具°５は円錐台状をなしており、
金属基材１のテーパ状内面３と同一傾斜角のテーパ状外
周面６を有している。この抑圧具５の外径および長さは
、常温（室温）において第１図に示されるようにテーパ
状内面３の軸方向の途中まで押圧具５を挿入できるよう
な寸法としである。押圧具５は、真空ホットプレス装置
によって真空雰囲気中で図示上方から所望の荷重を加え
ることができるようになっている。The pressing tool 5 inserted into the tapered inner surface 3 of the metal base material 1 is made of graphite. This pressing tool °5 has a truncated cone shape,
It has a tapered outer circumferential surface 6 having the same inclination angle as the tapered inner surface 3 of the metal base material 1 . The outer diameter and length of the pressing tool 5 are such that the pressing tool 5 can be inserted halfway in the axial direction of the tapered inner surface 3 at normal temperature (room temperature), as shown in FIG. A desired load can be applied to the pressing tool 5 from above in the drawing in a vacuum atmosphere using a vacuum hot press device.
金属基材１の外周側に設けられる被接合材８は円筒状を
なしている。この被接合材８は例えばニッケル製であり
、常温における被接合材８の内径Ｂは金属基材１の外径
Ａよりも大きい。−例としてＡ−φ９［ｉ、５ｍ、
Ｂ−φ９７．Ｏｎであり、金属基材１の外周面９と被接
合材８の内周面１０との間に隙間１２が生じる。被接合
材８の材料は、目的に応じてニッケル以外にモリブデン
、タングステン。The material to be joined 8 provided on the outer peripheral side of the metal base material 1 has a cylindrical shape. The material to be joined 8 is made of nickel, for example, and the inner diameter B of the material to be joined 8 at room temperature is larger than the outer diameter A of the metal base material 1. - As an example, A-φ9[i, 5m,
B-φ97. On, a gap 12 is created between the outer circumferential surface 9 of the metal base material 1 and the inner circumferential surface 10 of the material to be joined 8 . The material of the material to be joined 8 may be molybdenum or tungsten in addition to nickel depending on the purpose.
チタン、鉄、クロム、銀、マンガン等が使用され、望ま
しくは拡散接合の容易な融点８００℃以上の合金を選ぶ
。被接合材８の内径Ｂは、金属基材１と被接合材８を接
合温度まで加熱した時に両者が丁度密接できるように接
合温度と熱膨張差を考慮して決める。Titanium, iron, chromium, silver, manganese, etc. are used, and it is preferable to choose an alloy with a melting point of 800° C. or higher that can be easily diffused bonded. The inner diameter B of the material to be joined 8 is determined in consideration of the joining temperature and the difference in thermal expansion so that when the metal base material 1 and the material to be joined 8 are heated to the joining temperature, they can be brought into close contact with each other.
被接合材８の外周側に配置されるダイス治具１５は黒鉛
製である。この治具１５は、常温において被接合材８の
外径Ｃよりも大きな内径りのダイス孔内周面１６を有し
ている。常温での寸法は一例としテＣ−φ９９．０ｚｊ
Ｉ、 Ｄ −φ１０１．Ｏｒｔｒｍテあり、被接合材８
の外周面１７と雨具１５の内周面１６との間には隙間１
８があく。The die jig 15 arranged on the outer circumferential side of the material to be joined 8 is made of graphite. This jig 15 has a die hole inner circumferential surface 16 having an inner diameter larger than the outer diameter C of the workpieces 8 at room temperature. Dimensions at room temperature are an example: Te C-φ99.0zz
I, D-φ101. With Ortrm Te, welded material 8
There is a gap 1 between the outer peripheral surface 17 of the rain gear 15 and the inner peripheral surface 16 of the rain gear 15.
8 is open.
上記金属基材１と被接合材８を拡散接合させるには、ま
ず第１図に示されるように、常温で金属基材１のテーパ
状内面３に押圧具５を軸方向の途中まで挿入するととも
に、金属基材１の外周側に被接合材８と治具１５をセッ
トする。In order to diffusion bond the metal base material 1 and the workpiece 8, first, as shown in FIG. 1, the press tool 5 is inserted halfway in the axial direction into the tapered inner surface 3 of the metal base material 1 at room temperature. At the same time, the material to be joined 8 and the jig 15 are set on the outer peripheral side of the metal base material 1.
次に金属基材１と被接合材８を押圧具５および治具１５
と共に加熱し、かつ真空ポンプ等によってホットプレス
内の真空引きを行ない、金属基材１と被接合材８の接合
温度（本実施例では銅とニッケルが拡散接合する温度）
まで一定の割合で昇温させる。この昇温の途中において
、押圧具５に図示上方から比較的小さい荷重（例えばｔ
ｔｏｎ程度）を加えることにより、押圧具５を底部２
に向かって押込む。昇温過程の金属基材１と被接合材８
は共に熱膨張して径が拡大するが、銅製の金属基材１は
被接合材８よりも熱膨張率が大きく、しかも内面側から
押圧具５のテーパ状外周面６によるくさび効果によって
拡径方向に押圧されているため、相対的に金属基材１の
拡径率の方が大きい。Next, press tool 5 and jig 15 press metal base material 1 and material to be joined 8.
At the same time, the inside of the hot press is evacuated using a vacuum pump or the like to reach the bonding temperature of the metal base material 1 and the material to be bonded 8 (in this example, the temperature at which copper and nickel are diffusion bonded).
Increase the temperature at a constant rate until During this temperature rise, a relatively small load (for example, t
ton), the pressing tool 5 is pressed to the bottom 2.
Push towards. Metal base material 1 and material to be joined 8 during temperature increase process
Both expand thermally and expand in diameter, but the copper metal base material 1 has a larger coefficient of thermal expansion than the material to be joined 8, and the diameter expands from the inner side due to the wedge effect of the tapered outer circumferential surface 6 of the pressing tool 5. Since the metal base material 1 is pressed in the direction, the diameter expansion rate of the metal base material 1 is relatively larger.
このため、第２図に示されるように押圧具５が途中まで
押込まれたところで金属基材１の外周面９が被接合材８
の内周面１０に密接する。この時の寸法は、Ａ１−φ９
７．５ｕ、 ｃｌ−φ９９．５ｕ、 Ｄｌ−φ１０１．
５ ａｘである。この工程を経ることによって金属基材
１の均等な拡径が補助され、金属基材１と被接合材８と
の接触が促進される。Therefore, as shown in FIG. 2, when the pressing tool 5 is pushed halfway, the outer circumferential surface 9 of the metal base material 1 is pressed against the workpiece 8.
in close contact with the inner circumferential surface 10 of. The dimensions at this time are A1-φ9
7.5u, cl-φ99.5u, Dl-φ101.
5 ax. By going through this process, uniform diameter expansion of the metal base material 1 is assisted, and contact between the metal base material 1 and the material to be joined 8 is promoted.
接合温度（−例として１０００℃前後）に達した段階で
、押圧具５に更に大きな荷重（例えば８ ｔｏｎ前後）
を負荷することにより、第３図に示されるように上記の
状態から更に金属基材１の径と被接合材８の径を拡大さ
せ、この状態を一定時間保持する。これによって金属基
材１の外周面９と被接合材８の内周面１０との間に大き
な面圧が負荷され、しかも両者が共に拡径する方向に塑
性変形するので、両者間に完全な接合状態が得られる。When the bonding temperature (for example, around 1000°C) is reached, a larger load (for example, around 8 ton) is applied to the pressing tool 5.
As shown in FIG. 3, the diameter of the metal base material 1 and the diameter of the material to be joined 8 are further expanded from the above state, and this state is maintained for a certain period of time. As a result, a large surface pressure is applied between the outer circumferential surface 9 of the metal base material 1 and the inner circumferential surface 10 of the welded material 8, and both are plastically deformed in the direction of diameter expansion, so that there is no complete gap between the two. A bonded state is obtained.
また、被接合材８の表面に何らかの理由によって酸化被
膜が生じていても、被接合材８を拡径させることで酸化
被膜が破れるため、拡散接合の接合強度が増す。しかも
この接合時に被接合材８の外周面１７が全面にわたって
黒鉛治具１５の内周面１６によって規制されるため、接
合後に安定した形状寸法を得ることができる。接合時の
寸法例は、Ａ２１１１Ｉφ９９．５１１１． Ｄ２ ＝
φ１０１．５ ａ、 Ｅ−φ９１．Ｏｎである。接合
温度は使用材料によって相違するが、おおむね６００℃
から１０２０℃である。Moreover, even if an oxide film is formed on the surface of the material 8 to be joined for some reason, the oxide film is broken by expanding the diameter of the material 8 to be joined, so that the bonding strength of the diffusion bonding is increased. Moreover, since the outer circumferential surface 17 of the material to be welded 8 is entirely regulated by the inner circumferential surface 16 of the graphite jig 15 during this welding, a stable shape and dimension can be obtained after welding. An example of dimensions at the time of joining is A2111Iφ99.5111. D2=
φ101.5 a, E-φ91. It is on. The bonding temperature varies depending on the material used, but is approximately 600℃.
to 1020°C.
接合後は所定時間かけてゆっくりと冷却し、最終的に常
温に戻す。この冷却過程における温度降下率は接合前の
昇温過程における温度上昇率よりも小さくするとよい。After bonding, the parts are slowly cooled down over a predetermined period of time, and finally brought back to room temperature. The rate of temperature drop in this cooling process is preferably smaller than the rate of temperature increase in the temperature raising process before bonding.
以上の一例の温度履歴とホットプレス荷重との関係を第
５図に示す。FIG. 5 shows the relationship between the temperature history and hot press load in the above example.
接合後は、冷却過程の途中または常温に戻ったところで
、適宜の機械的処理によって押圧具５を除去する。押圧
具５は黒鉛製であるから容易に除去できる。また必要に
応じて被接合材８の外周部を所定の寸法に仕上げ機械加
工するとともに、金属基材１の内周部にも必要に応じて
仕上げ加工を行なうことによって、第４図に例示したよ
うな筒状積層材２０が得られる。仕上げ加工後の寸法例
は、Ａ３ｇｍφ９９．０．、、 Ｄ３繻φ１Ｇ０．Ｏｕ
、 Ｅ３ ＝φ９３．０題である。After joining, the pressing tool 5 is removed by appropriate mechanical processing during the cooling process or when the temperature returns to room temperature. Since the pressing tool 5 is made of graphite, it can be easily removed. In addition, the outer periphery of the material to be joined 8 is finish-machined to predetermined dimensions as needed, and the inner periphery of the metal base material 1 is also finished as shown in FIG. 4. A cylindrical laminated material 20 like this is obtained. An example of dimensions after finishing processing is A3gmφ99.0. ,, D3 φ1G0. Ou
, E3 = φ93.0 problem.
［発明の効果］
本発明によれば、金属基材と被接合材との拡散接合を一
方向から荷重を加えるホットプレス装置等を使用して行
なうことができ、所望厚みの被接合材を強固にかつ欠陥
を生じることなく接合でき、その接合面はきわめて良質
であり、高温での使用にも長期間充分耐えることができ
る。また本発明では、押圧具によって径の小さな被接合
材を拡径した状態で接合を行なって製品にするため、高
純度で高価な被接合材を効率よく使用でき、低コスト化
にも寄与できる。[Effects of the Invention] According to the present invention, diffusion bonding between a metal base material and a material to be joined can be performed using a hot press device or the like that applies a load from one direction, and the material to be joined to a desired thickness can be firmly bonded. The bonding surface can be bonded easily and without any defects, and the bonded surface is of extremely high quality and can withstand use at high temperatures for long periods of time. In addition, in the present invention, the materials to be welded with small diameters are joined with the expanded diameter using a pressing tool, so that high-purity and expensive materials to be joined can be used efficiently, contributing to cost reduction. .
第１図ないし第３図はそれぞれ本発明の一実施例方法を
工程順に示すそれぞれ断面図、第４図は接合後に仕上げ
加工された製品の断面図、第５図は本発明の一実施例方
法における温度履歴とブレス荷重との関係を示す図であ
る。
１・・・金属基材、３・・・テーパ状内面、５・・・押
圧具、６・・・テーパ状外周面、８・・・被接合材、１
５・・・治具。
出願人代理人 弁理士 鈴江武彦
第１図
第３図
第５図
１、事件の表示
特願昭６３−２２８０６３号
２、発明の名称
筒状積層材の拡散接合方法
３、補正をする者
事件との関係 特許出願人
（４８４）日本発条株式会社
４、代理人
東京都千代田区霞が関３丁目７番２号 ＵＢＥビル７、
補正の内容
（１）明細書中、第８頁１３行目に「一定である。」と
ある次に下記文章を加入する。
記
「なお、金属基材１は必ずしも底部２を有している必要
はなく、場合によっては底部２をもたずに両端が開口す
るような円筒形状をなしていてもよい。」Figures 1 to 3 are sectional views showing a method according to an embodiment of the present invention in the order of steps, Figure 4 is a sectional view of a finished product after joining, and Figure 5 is a method according to an embodiment of the present invention. It is a figure showing the relationship between temperature history and breath load in . DESCRIPTION OF SYMBOLS 1... Metal base material, 3... Tapered inner surface, 5... Pressing tool, 6... Tapered outer peripheral surface, 8... Joined material, 1
5...Jig. Applicant's representative Patent attorney Takehiko Suzue Figure 1 Figure 3 Figure 5 Figure 1 Case description Japanese Patent Application No. 63-228063 2 Name of the invention Diffusion bonding method for cylindrical laminated materials 3 Amendment person's case Relationship: Patent applicant (484) NHK Spring Co., Ltd. 4, Agent UBE Building 7, 3-7-2 Kasumigaseki, Chiyoda-ku, Tokyo.
Contents of the amendment (1) In the specification, on page 8, line 13, the following sentence is added after the phrase "is constant." ``The metal base material 1 does not necessarily have to have the bottom part 2, and may have a cylindrical shape with both ends open without having the bottom part 2 in some cases.''
Claims (2)
狭まるテーパ状内面を有した金属基材と、この金属基材
のテーパ状内面に対応したテーパ状外周面を有する押圧
具と、常温において上記金属基材の外径よりも大きな内
径を有しかつ金属基材よりも熱膨張率の小さな材料から
なる円筒状の被接合材とを使用する拡散接合方法であっ
て、常温において上記金属基材のテーパ状内面に上記押
圧具をセットしかつ金属基材の外周側に上記被接合材を
セットする工程と、上記金属基材および被接合材を拡散
接合温度まで昇温させその昇温途中あるいは昇温後に上
記押圧具を金属基材のテーパ状内面の一端側から他端側
に向かって押圧することにより金属基材の外周面を被接
合材の内周面に密接させるとともに接合温度に達した状
態において上記押圧具に更に大きな荷重を加えることに
よって被接合材と上記金属基材を拡径方向に塑性変形さ
せた状態で金属基材と被接合材相互の接触面の拡散接合
を行なう工程とを具備したことを特徴とする筒状積層材
の拡散接合方法。(1) A metal base material having a cylindrical shape and a tapered inner surface whose inner diameter narrows from one end to the other end, and a pressing tool having a tapered outer peripheral surface corresponding to the tapered inner surface of the metal base material. , a diffusion bonding method using a cylindrical member to be joined made of a material having an inner diameter larger than the outer diameter of the metal base material and a coefficient of thermal expansion smaller than that of the metal base material at room temperature, A step of setting the pressing tool on the tapered inner surface of the metal base material and setting the material to be joined on the outer peripheral side of the metal base material, and raising the temperature of the metal base material and the material to be joined to the diffusion bonding temperature. During or after heating up, the pressing tool is pressed from one end of the tapered inner surface of the metal base material toward the other end to bring the outer peripheral surface of the metal base material into close contact with the inner peripheral surface of the material to be joined. When the welding temperature has been reached, by applying a larger load to the pressing tool, the materials to be joined and the metal base material are plastically deformed in the radial direction, and the contact surfaces between the metal base materials and the materials to be welded are diffused. 1. A diffusion bonding method for cylindrical laminated materials, comprising the step of bonding.
圧具が黒鉛または炭化珪素から なる請求項１記載の筒状積層材の拡散接合方法。(2) The method of diffusion bonding a cylindrical laminate according to claim 1, wherein the metal base material is made of copper or a copper alloy, and the pressing tool is made of graphite or silicon carbide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228063A JP2693973B2 (en) | 1988-09-12 | 1988-09-12 | Diffusion bonding method for tubular laminated materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228063A JP2693973B2 (en) | 1988-09-12 | 1988-09-12 | Diffusion bonding method for tubular laminated materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0275480A true JPH0275480A (en) | 1990-03-15 |
| JP2693973B2 JP2693973B2 (en) | 1997-12-24 |
Family
ID=16870612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63228063A Expired - Lifetime JP2693973B2 (en) | 1988-09-12 | 1988-09-12 | Diffusion bonding method for tubular laminated materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2693973B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024833A (en) * | 2010-07-27 | 2012-02-09 | Japan Aerospace Exploration Agency | Pulse electric-current bonding method and pulse electric-current bonding apparatus |
| CN107225318A (en) * | 2017-06-08 | 2017-10-03 | 中国科学院电子学研究所 | The diffusion welding method of metal telescoping pieces |
| CN107745178A (en) * | 2017-10-17 | 2018-03-02 | 西北工业大学 | High temperature TiAl alloy and Ti2The diffusion connection method of AlNb alloy annular parts |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014061144A1 (en) * | 2012-10-18 | 2014-04-24 | 株式会社 旭 | Method for manufacturing composite metal material, method for manufacturing metal mold, method for manufacturing metal product, and composite metal material |
-
1988
- 1988-09-12 JP JP63228063A patent/JP2693973B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024833A (en) * | 2010-07-27 | 2012-02-09 | Japan Aerospace Exploration Agency | Pulse electric-current bonding method and pulse electric-current bonding apparatus |
| CN107225318A (en) * | 2017-06-08 | 2017-10-03 | 中国科学院电子学研究所 | The diffusion welding method of metal telescoping pieces |
| CN107745178A (en) * | 2017-10-17 | 2018-03-02 | 西北工业大学 | High temperature TiAl alloy and Ti2The diffusion connection method of AlNb alloy annular parts |
| CN107745178B (en) * | 2017-10-17 | 2020-01-03 | 西北工业大学 | High temperature TiAl alloys and Ti2Diffusion connection method for AlNb alloy annular part |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2693973B2 (en) | 1997-12-24 |
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