JPH0273729U - - Google Patents
Info
- Publication number
- JPH0273729U JPH0273729U JP15371888U JP15371888U JPH0273729U JP H0273729 U JPH0273729 U JP H0273729U JP 15371888 U JP15371888 U JP 15371888U JP 15371888 U JP15371888 U JP 15371888U JP H0273729 U JPH0273729 U JP H0273729U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- liquid
- liquid supply
- supply pipe
- photoresist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15371888U JPH0273729U (de) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15371888U JPH0273729U (de) | 1988-11-25 | 1988-11-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0273729U true JPH0273729U (de) | 1990-06-05 |
Family
ID=31429806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15371888U Pending JPH0273729U (de) | 1988-11-25 | 1988-11-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0273729U (de) |
-
1988
- 1988-11-25 JP JP15371888U patent/JPH0273729U/ja active Pending