JPH0265939A - Driving device for sliding body of static pressure fluid bearing - Google Patents
Driving device for sliding body of static pressure fluid bearingInfo
- Publication number
- JPH0265939A JPH0265939A JP21731988A JP21731988A JPH0265939A JP H0265939 A JPH0265939 A JP H0265939A JP 21731988 A JP21731988 A JP 21731988A JP 21731988 A JP21731988 A JP 21731988A JP H0265939 A JPH0265939 A JP H0265939A
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- sliding body
- driving
- drive
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 12
- 239000012530 fluid Substances 0.000 title claims description 6
- 230000002706 hydrostatic effect Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、精密加工装置や精密測定装置などに使用され
、摺動体を静圧間隙を介してガイド軸上に浮上させ、こ
れを超微少移送するようにした静圧流体軸受層動体の駆
動装置ａに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is used in precision processing equipment, precision measurement equipment, etc., by floating a sliding body on a guide shaft through a static pressure gap, and The present invention relates to a driving device (a) for a hydrostatic fluid bearing bed moving body that is configured to move a small amount.
［従来の技術１
従来、第４図に示ず如く、ガイド軸２８上に静圧気体に
より浮上する摺動体２９を設け、基台２２の側板２３．
２４に回転自在に軸受けされたネジ棒２５を前記一方の
側板２３に固定されたモータＨにより駆動する如く成す
と共に、前記摺動体２９に設けた軸受２７と前記ネジ棒
２５とをボールネジ方式で駆動連結して、前記モータＨ
の駆動を制御して摺動体２９をガイド軸２８上に移動調
整する駆動装置が提供されている。[Prior art 1] Conventionally, as shown in FIG. 4, a sliding body 29 that floats by static pressure gas is provided on a guide shaft 28, and the side plate 23 of the base 22 is mounted on the guide shaft 28.
A threaded rod 25 rotatably supported by a shaft 24 is driven by a motor H fixed to the one side plate 23, and a bearing 27 provided on the sliding body 29 and the threaded rod 25 are driven by a ball screw system. In connection, the motor H
A driving device is provided that controls the driving of the slider 29 to adjust the movement of the slider 29 onto the guide shaft 28.
また、第５図に示す如く、ガイド軸３８上に静圧気体に
より浮上する摺動体３９を設ける一方、基台３２に設け
た駆動用モータＨと前記摺動体３９とをワイヤー３５．
３５及びプーリー３３．３３を介して連結して、前記モ
ータＨの駆動制御により摺動体３９をガイド軸３８上に
移動調整するようにした駆動装置が提供されている。Further, as shown in FIG. 5, a sliding body 39 that floats by static pressure gas is provided on the guide shaft 38, and a wire 35.
35 and pulleys 33 and 33, and a drive device is provided which adjusts the movement of the sliding body 39 onto the guide shaft 38 by controlling the drive of the motor H.
これらの駆動方法においては、粗駆動は充分果し得るが
、微小駆動させるためには摺動体の移送聞をより高分解
的に位置検出しながら、間欠的に摺動体を移動させる手
段を設けなければならない。微小な送りには、従来第６
図に示す如く、摺動体４９に直接圧電素子４０（以下ア
クチュエータと称Ｖ）を接続する方式は採用されている
。These driving methods can sufficiently perform coarse driving, but in order to achieve fine driving, it is necessary to provide a means to move the sliding body intermittently while detecting the position of the sliding body in a higher resolution manner. Must be. Conventionally, No. 6 was used for minute feeds.
As shown in the figure, a method is adopted in which a piezoelectric element 40 (hereinafter referred to as actuator V) is directly connected to a sliding body 49.
［発明が解決しようとする課題］
しかしながら、前記アクチュエータを用いた方式では、
このアクチュエータが摺動体に直接接続しているため、
該アクチュエータの最大変位り分（約１０μｍ程度）の
送りしかできない。そしてまた、この送りを大きくする
ため、アクチュエータの変位岱をテコ構造により増幅す
ることも考えられるが、テコの支点と作用点の距離が大
きくなり、スペースに限界がある。[Problem to be solved by the invention] However, in the method using the actuator,
Since this actuator is directly connected to the sliding body,
The actuator can only feed by the maximum displacement (approximately 10 μm). Furthermore, in order to increase this feed, it is possible to amplify the displacement of the actuator using a lever structure, but this increases the distance between the fulcrum of the lever and the point of action, and there is a space limit.
［課題を解決するための手段］
したがって、本発明においては、摺動体を移送する駆動
用アクチュエータと、この１と動体を駆動用アクチユエ
ータの一動作毎に移送された位置で固定する保持用アク
チュエータと、前記駆動用アクチュエータの動作を摺動
体に連結する駆動連結用アクチュエータと、前記各アク
チュエータを電気的に制御するコン１〜ローラとを備え
、該コンｌ−ローラの制御により駆動用アクチュエータ
を動作させ、摺動体を移送するようにしたことにより前
記課題を解決した。[Means for Solving the Problems] Accordingly, the present invention provides a driving actuator for transporting a sliding body, a holding actuator for fixing this one and the moving body at the position moved for each movement of the driving actuator. , comprising a drive coupling actuator that connects the operation of the drive actuator to a sliding body, and a controller 1 to a roller that electrically controls each of the actuators, and operates the drive actuator under control of the controller roller. The above problem was solved by moving the sliding body.
本発明においては、ガイド軸上に静圧気体により浮上す
る摺動体を超微小移送するに適した静圧流体軸受層動体
の駆動装置を提供する。The present invention provides a hydrostatic fluid bearing bed moving body drive device suitable for ultra-fine transfer of a sliding body floating on a guide shaft by static pressure gas.
［実施例］
以下、本発明の実施例を図面にもとすき説明する。本発
明の静圧気体軸受層動体の駆動装置は、第１図、第２図
及び第３図に示す如く、アルミナ焼結体からなるガイド
軸１に静圧間隙Ｓを介して該ガイド軸１の周囲を囲繞し
、該ガイド軸上に１と動する摺動体２を設けている。こ
の摺動体２の下部には該摺動体２に固定する中央柱３と
この両側に設ける保持壁４．４とからなる保持部材５を
設け、この中央柱３と前記保持壁４．４との間に摺動体
２を移送した位置で固定する保持用アクチュエータ６と
、後記する駆動用アクチュエータの一動作を１８動体２
に連結するための駆動連結用アクチュエータ１とを中央
柱３側に固定し、これら各アクチュエータ６．７の外方
作用端と前記保持壁４．４内面との間に後記するベルト
１３．１４を挿通してアクチュエータ６．７の作動によ
りこのベルト１３．１４を保持または保持解除するため
の二つの保持部８．９を形成している。また、前記一方
の保持部８に挿通し基台１０の側板１１．１２に固定す
る固定ベルト１３を設けると共に、前記他方の保持部９
に挿通する駆動用ベルト１４を設けている。該駆動用ベ
ルト１４は一方端を前記側板１１に取付けた支持金具１
５に弾性部材であるバネ１６を介して取付け、伯方端は
前記側板１２に取付けた支持金具１７に取付けである。[Example] Hereinafter, an example of the present invention will be explained with reference to the drawings. As shown in FIGS. 1, 2, and 3, the driving device for a static pressure gas bearing bed moving body according to the present invention has a guide shaft 1 which is connected to a guide shaft 1 made of an alumina sintered body through a static pressure gap S. A sliding body 2 that moves with the guide shaft 1 is provided on the guide shaft. A holding member 5 consisting of a central column 3 fixed to the sliding body 2 and retaining walls 4.4 provided on both sides thereof is provided at the lower part of the sliding body 2. In between, a holding actuator 6 fixes the sliding body 2 at the transferred position, and a driving actuator (to be described later) performs one operation of the moving body 2.
A drive connection actuator 1 for connection to the central column 3 is fixed to the central column 3, and a belt 13.14 (described later) is placed between the outer working end of each actuator 6.7 and the inner surface of the retaining wall 4.4. Two holding parts 8.9 are formed through which the belt 13.14 can be held or released by actuation of the actuator 6.7. Further, a fixing belt 13 is provided that is inserted into the one holding part 8 and fixed to the side plate 11.12 of the base 10, and the other holding part 9
A drive belt 14 is provided which is inserted through the drive belt 14. The drive belt 14 has one end attached to the support metal 1 on the side plate 11.
5 via a spring 16 which is an elastic member, and the square end is attached to a support fitting 17 attached to the side plate 12.
さらに、該金具１７の内面と側板１２外面とには駆動用
アクチュエータ１８を同容すると共に、この金具１７の
一部に該金具に可撓性を持たせるための切込み部１９を
形成し、前記アクチュエータ１８を作動させることによ
り駆動用ベルト１４を前記バネ１６カに抗して左右動す
る様にしている。Further, a drive actuator 18 is contained in the inner surface of the metal fitting 17 and the outer surface of the side plate 12, and a notch 19 is formed in a part of the metal fitting 17 to give flexibility to the metal fitting 17. By operating the actuator 18, the drive belt 14 is moved left and right against the spring 16.
この様にして、第２図に示すコントローラＣにより前記
各アクチュエータ６．７．１８にパルス信号を制御して
送ることにより、以下の様に各アクチュエータを作動さ
往、摺動体２を間欠的に移送させるようにする。In this way, by controlling and sending pulse signals to each of the actuators 6, 7, and 18 using the controller C shown in FIG. 2, each actuator is operated as follows, and the sliding body 2 is intermittently Let it be transferred.
即ち、定常状態では一方の保持用アクチュエータ６に電
圧を印加して固定ベルト１３を保持部８で保持すると共
に、他方の駆動連結用アクチュエータ７は非通電状態で
他方の保持部９が解放状態にあり、摺動体２は静止状態
を保っている。That is, in a steady state, voltage is applied to one holding actuator 6 to hold the fixed belt 13 in the holding part 8, while the other drive coupling actuator 7 is in a de-energized state and the other holding part 9 is in a released state. Yes, the sliding body 2 remains stationary.
この状態で駆動連結用アクチュエータ１に電圧を印加し
、駆動用ベルト１４を保持部９で保持すると同時に、前
記一方の保持用アクチュエータ６の電圧を切り固定ベル
ト１３の保持状態を解除する。In this state, a voltage is applied to the drive coupling actuator 1 to hold the drive belt 14 in the holding section 9, and at the same time, the voltage to the one holding actuator 6 is turned off to release the holding state of the fixed belt 13.
次に、駆動用アクチュエータ１８に電圧を印加して駆動
用ベルト１４をバネ１６カに抗して右方向に変位させる
。この時き固定ベルト１３は保持部８において保持状態
が解放されているので、保持部材５と共に摺動体２は右
方向に移動する。この移動した状態で保持用アクチュエ
ータ６に電圧を印加して固定ベルト１３を保持部８で保
持する。次に、駆動連結用アクチュエータ７０通電を切
りこの保持部９を解放すると共に、駆動用アクチュエー
タ１８の通電を切ると、摺動体２は静止状態のまま駆動
用ベルト１４のみがバネ１６の反作用で元の位置に戻り
、前記の定常状態に戻る。この様に、摺動体２は駆動用
アクチュエータ１８及び駆動用ベルト１４の変位量分だ
け右方向へ移動する。そして、上記一連の動作を繰返ず
ことにより摺動体２の右方向への移動を進行させる。Next, a voltage is applied to the drive actuator 18 to displace the drive belt 14 to the right against the spring 16. At this time, since the fixing belt 13 is released from the holding state in the holding part 8, the sliding body 2 moves to the right together with the holding member 5. In this moved state, a voltage is applied to the holding actuator 6 to hold the fixed belt 13 in the holding section 8 . Next, when the drive coupling actuator 70 is de-energized and this holding portion 9 is released, and the drive actuator 18 is de-energized, the sliding body 2 remains stationary and only the drive belt 14 is restored by the reaction of the spring 16. and returns to the steady state described above. In this way, the sliding body 2 moves to the right by the amount of displacement of the drive actuator 18 and the drive belt 14. Then, by repeating the above series of operations, the sliding body 2 moves to the right.
逆に左方向へ移動させるためには、前記の定常状態より
、駆動用アクチュエータ１８に電圧を印加すると、保持
部９は解放されているので、駆動用ベルト１４はバネ１
６カに抗して右方向に移動する。Conversely, in order to move leftward, when a voltage is applied to the drive actuator 18 from the above-mentioned steady state, since the holding part 9 is released, the drive belt 14 is moved by the spring 1.
Move to the right against the 6 forces.
次に、駆動連結用アクチュエータ７に電圧を印加して駆
動用ベルト１４を保持部９で保持する。次に、保持用ア
クチュエータ６の通電を切り保持部８を解放すると同時
に駆動用アクチュエータ１８の通電を切ると、駆動用ベ
ルト１４はバネ１６の反作用により元の位置に戻る。こ
の時摺動体２は駆動用ベルト１４及び駆動用アクチュエ
ータ１８の変位ｍ分だ（プノ「方向へ移動する。次に保
持用アクチュエータ６に電圧を印加し、一方の保持部８
で固定用ベルト１３を保持すると共に、駆動連結用アク
チュエータ７の通電を切り保持部９を解放させて元の定
常状態に戻す。上記一連の動作を繰返すことにより摺動
体２の左方向への移動を進行させる。Next, a voltage is applied to the drive connection actuator 7 to hold the drive belt 14 in the holding section 9 . Next, when the holding actuator 6 is de-energized, the holding part 8 is released, and the driving actuator 18 is de-energized at the same time, the driving belt 14 returns to its original position due to the reaction of the spring 16. At this time, the sliding body 2 moves in the direction corresponding to the displacement m of the drive belt 14 and the drive actuator 18.Next, a voltage is applied to the holding actuator 6, and one of the holding parts 8
While holding the fixing belt 13, the drive connection actuator 7 is de-energized and the holding part 9 is released to return to the original steady state. By repeating the above series of operations, the sliding body 2 is moved to the left.
この様にして、摺動体２を一動作毎に移送する駆動用ア
クチュエータ１８と、この摺動体２を移送された位置に
固定する保持用アクチュエータ６と、前記駆動用アクチ
ュエータ１８の一動作を摺動体２に連結する駆動連結用
アクチュエータ１と、前記各アクチュエータ６．１．１
８を電気的に制御するコントローラＣとから構成して、
このコン１〜ロラＣの制御により駆動用アクチュエータ
１８の一動作毎に摺動体２をガイド軸１上に間欠的に移
送するようにしている。In this way, the driving actuator 18 that moves the sliding body 2 for each movement, the holding actuator 6 that fixes the sliding body 2 at the transferred position, and the driving actuator 18 that moves the sliding body 2 for each movement, 2, and each of the actuators 6.1.1.
8 and a controller C that electrically controls the controller C.
By controlling the controllers 1 to C, the sliding body 2 is intermittently transferred onto the guide shaft 1 for each movement of the drive actuator 18.
［発明の効果］
上述の如く本発明によれば、摺動体を移送する駆動用ア
クチュエータと、この摺動体を駆動用アクチュエータの
一動作毎に移送された位置で固定する保持用アクチュエ
ータと、前記駆動用アクチュエータの動作を摺動体に連
結する駆動連結用アクチュエータとを、コントローラを
介して制御することにより駆動用アクチュエータの動作
により摺動体を移送するようにしたので、静圧流体によ
リガイド軸上に浮上する摺動体を超微小に間欠的に、か
つ長い距離を移送させるることができる静圧気体軸受層
動体の駆動装置を提供することができる。[Effects of the Invention] As described above, according to the present invention, there is provided a driving actuator for transporting a sliding body, a holding actuator for fixing this sliding body at a position transferred for each movement of the driving actuator, and a The drive connection actuator, which connects the operation of the drive actuator to the sliding body, is controlled via the controller, so that the sliding body is transferred by the operation of the drive actuator, so that the sliding body is moved onto the guide shaft by static pressure fluid. It is possible to provide a driving device for a static pressure gas bearing layer moving body that can move a floating sliding body intermittently and over a long distance in an ultra-fine manner.
第１図は本発明の実施例の静圧気体軸受（８動体の駆動
装置の側面図、第２図は第１図の■−■線所線図面図３
図は第１図の■−■線断面図、第４図は従来例を示すボ
ールネジ方式を採用した同駆動装置の側面図、第５図は
従来のワイヤーとプーリーとにより駆動伝達する方式の
同駆動装置の側面図、第６図はアクチュエータを使用し
た従来例を示す側面図である。
１、 ガイド軸
２、 Ｉ習動体
保持部材
保持用アクチュエータ
駆動連結用アクチュエータ
保持部
固定ベルト
駆動用ベルト
弾性部材
駆動用アクチュエータFig. 1 is a side view of a drive device for a static pressure gas bearing (8 moving bodies) according to an embodiment of the present invention, and Fig. 2 is a drawing of the ■-■ line in Fig. 1.
The figure is a cross-sectional view taken along the line ■-■ in Figure 1, Figure 4 is a side view of the same drive device employing the conventional ball screw method, and Figure 5 is the same example of the conventional drive transmission system using wires and pulleys. A side view of the drive device, FIG. 6 is a side view showing a conventional example using an actuator. 1. Guide shaft 2. I Actuator for driving and connecting the actuator for holding the holding member of the learning body Actuator for driving the belt elastic member for driving the fixed belt holding part
Claims (1)
設けた摺動体の駆動装置において、該摺動体を移送する
駆動用アクチュエータと、この摺動体を駆動用アクチュ
エータの一動作毎に移送された位置で固定する保持用ア
クチュエータと、前記駆動用アクチュエータの動作を摺
動体に連結する駆動連結用アクチュエータと、前記各ア
クチュエータを電気的に制御するコントローラとを備え
、該コントローラの制御により駆動用アクチュエータの
動作により摺動体を移送するようにしたことを特徴とす
る静圧流体軸受層動体の駆動装置。A driving device for a sliding body that is movable by floating the sliding body on a guide shaft using static pressure fluid includes a driving actuator that moves the sliding body, and a driving actuator that moves the sliding body every time the driving actuator moves. a holding actuator that fixes the drive actuator in a fixed position; a drive connection actuator that connects the operation of the drive actuator to the sliding body; and a controller that electrically controls each of the actuators; A driving device for a hydrostatic fluid bearing layer moving body, characterized in that the sliding body is moved by the operation of an actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63217319A JP2964253B2 (en) | 1988-08-31 | 1988-08-31 | Driving device for hydrostatic bearing sliding body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63217319A JP2964253B2 (en) | 1988-08-31 | 1988-08-31 | Driving device for hydrostatic bearing sliding body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0265939A true JPH0265939A (en) | 1990-03-06 |
| JP2964253B2 JP2964253B2 (en) | 1999-10-18 |
Family
ID=16702305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63217319A Expired - Fee Related JP2964253B2 (en) | 1988-08-31 | 1988-08-31 | Driving device for hydrostatic bearing sliding body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2964253B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006255181A (en) * | 2005-03-17 | 2006-09-28 | Aso Seiyaku Kk | Magnetic therapeutic device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62192685A (en) * | 1986-02-20 | 1987-08-24 | キヤノン株式会社 | Position controller |
-
1988
- 1988-08-31 JP JP63217319A patent/JP2964253B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62192685A (en) * | 1986-02-20 | 1987-08-24 | キヤノン株式会社 | Position controller |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006255181A (en) * | 2005-03-17 | 2006-09-28 | Aso Seiyaku Kk | Magnetic therapeutic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2964253B2 (en) | 1999-10-18 |
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