JPH0259495U - - Google Patents
Info
- Publication number
- JPH0259495U JPH0259495U JP13814788U JP13814788U JPH0259495U JP H0259495 U JPH0259495 U JP H0259495U JP 13814788 U JP13814788 U JP 13814788U JP 13814788 U JP13814788 U JP 13814788U JP H0259495 U JPH0259495 U JP H0259495U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- shaft
- axis direction
- fine movement
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Description
第１図ａ，ｂ，ｃは各々、本発明の微動装置を
示す正面図、側面図及び平面図、第２図は、従来
の微動装置を示す図である。
１……ＬＤモジユール、１ａ……レンズキヤツ
プ、１ｂ……被移動体とみてのステム、４……ｘ
軸ステージ、５……ｙ軸ステージ、６……ｚ軸ス
テージ、６ａ……シヤフト、７……固定部、８…
…高周波加熱器、８ａ……加熱部。
FIGS. 1a, b, and c are respectively a front view, a side view, and a plan view showing a fine movement device of the present invention, and FIG. 2 is a diagram showing a conventional fine movement device. 1...LD module, 1a...lens cap, 1b...stem viewed as a moving object, 4...x
Axis stage, 5... y-axis stage, 6... z-axis stage, 6a... shaft, 7... fixed part, 8...
...High frequency heater, 8a...Heating section.
Claims (1)
る水平方向であるｙ軸方向、さらに鉛直方向であ
るｚ軸方向に被移動体１ｂを微動させる微動装置
であつて： ｘ，ｙ軸方向に微動自在なｘ軸ステージ４及び
ｙ軸ステージ５と； 前記ｘ，ｙ軸ステージの面***部分に設けら
れ、かつｘ，ｙ軸ステージの貫通孔４ｂ，５ｂを
貫通し、前記被移動体がその一端６ｃに固定され
たｚ軸方向に微動自在なシヤフト６ａを有するｚ
軸ステージ６とを具備したことを特徴とする微動
装置。[Claims for Utility Model Registration] A fine movement device that slightly moves a moved object 1b in the x-axis direction, which is a horizontal direction, the y-axis direction, which is a horizontal direction perpendicular to the x-axis direction, and the z-axis direction, which is a vertical direction. An x-axis stage 4 and a y-axis stage 5 that are capable of fine movement in the x- and y-axis directions; A shaft 6a that penetrates through the shaft 6a and has a shaft 6a that is slightly movable in the z-axis direction and has one end 6c of which the object to be moved is fixed.
A fine movement device characterized by comprising a shaft stage 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13814788U JPH0639359Y2 (en) | 1988-10-25 | 1988-10-25 | Fine movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13814788U JPH0639359Y2 (en) | 1988-10-25 | 1988-10-25 | Fine movement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0259495U true JPH0259495U (en) | 1990-05-01 |
| JPH0639359Y2 JPH0639359Y2 (en) | 1994-10-12 |
Family
ID=31400218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13814788U Expired - Lifetime JPH0639359Y2 (en) | 1988-10-25 | 1988-10-25 | Fine movement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639359Y2 (en) |
-
1988
- 1988-10-25 JP JP13814788U patent/JPH0639359Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639359Y2 (en) | 1994-10-12 |
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