JPH0253247U - - Google Patents

Info

Publication number
JPH0253247U
JPH0253247U JP12901688U JP12901688U JPH0253247U JP H0253247 U JPH0253247 U JP H0253247U JP 12901688 U JP12901688 U JP 12901688U JP 12901688 U JP12901688 U JP 12901688U JP H0253247 U JPH0253247 U JP H0253247U
Authority
JP
Japan
Prior art keywords
stator side
motor
vacuum
stator
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12901688U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12901688U priority Critical patent/JPH0253247U/ja
Publication of JPH0253247U publication Critical patent/JPH0253247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Motor Or Generator Frames (AREA)
  • Induction Machinery (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案に係る真空用交流モータを示
す断面図、第2図は第1図における―矢視図
、第3図は従来の真空用交流モータを示す断面図
である。 1……ステータ、2……隔壁、3……ロータ、
4……巻線部。
FIG. 1 is a sectional view showing an AC motor for vacuum use according to this invention, FIG. 2 is a view taken along the - arrow in FIG. 1, and FIG. 3 is a sectional view showing a conventional AC motor for vacuum use. 1... Stator, 2... Partition wall, 3... Rotor,
4...Winding section.

Claims (1)

【実用新案登録請求の範囲】 真空チヤンバ等の清浄室を形成する隔壁を介し
てその内外に夫々ロータ側及びステータ側を取付
け、 前記ステータ側の巻線部を電源側と電気的に接
続した ことを特徴とする真空用交流モータ。
[Scope of Claim for Utility Model Registration] A rotor side and a stator side are installed inside and outside the partition wall forming a clean room such as a vacuum chamber, respectively, and the winding section on the stator side is electrically connected to the power source side. AC motor for vacuum use.
JP12901688U 1988-09-30 1988-09-30 Pending JPH0253247U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12901688U JPH0253247U (en) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12901688U JPH0253247U (en) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0253247U true JPH0253247U (en) 1990-04-17

Family

ID=31382900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12901688U Pending JPH0253247U (en) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0253247U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001339920A (en) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd Vacuum motor
JP2010527507A (en) * 2007-04-27 2010-08-12 エドワーズ株式会社 Plate rotating device, exhaust path opening / closing degree changing device, exhausted device, transfer device, beam device, and gate valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001339920A (en) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd Vacuum motor
JP2010527507A (en) * 2007-04-27 2010-08-12 エドワーズ株式会社 Plate rotating device, exhaust path opening / closing degree changing device, exhausted device, transfer device, beam device, and gate valve
US8763985B2 (en) 2007-04-27 2014-07-01 Edwards Japan Limited Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve

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