JPH0246991A - Laser device - Google Patents
Laser deviceInfo
- Publication number
- JPH0246991A JPH0246991A JP63195223A JP19522388A JPH0246991A JP H0246991 A JPH0246991 A JP H0246991A JP 63195223 A JP63195223 A JP 63195223A JP 19522388 A JP19522388 A JP 19522388A JP H0246991 A JPH0246991 A JP H0246991A
- Authority
- JP
- Japan
- Prior art keywords
- reflected
- reflecting mirror
- laser
- mirror
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 47
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Laser Surgery Devices (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
この発明は、ＣＯ２レーザ光によって加工などを行うレ
ーザ装置に係り、とくにＨｅ−Ｎｅレーザ光を用いて放
物面鏡の角度調整を行うようにしたレーザ装置に関する
ものである。The present invention relates to a laser device that performs processing using CO2 laser light, and more particularly to a laser device that uses He-Ne laser light to adjust the angle of a parabolic mirror.
従来の上記のようなレーザ装置を第４図、第５図につい
て説明する。
第４図において、１はＣＯ２レーザ発振器、２はＨｅ
−Ｎ ｅレーザ発振器、３は光路反射鏡、４は放物面鏡
加工ヘッドであり、乙のヘッド４には角度調整機構５に
よって角度調整される放物面鏡６と加工ヘッド反射鏡７
とが設けられている。８はＣｏ２Ｌ／−ザ光、９はＨｅ
−Ｎ ｅ レーザ光、１０は光路、１２はＨｅ −Ｎ
ｅレーザ光用反射鏡、１３は被加工物である。
このレーザ装置では、Ｃ０２レーザ発振器１から発振さ
れたＣＯ２レーザ光８が、光路反射鏡３゜加工ヘッド反
射鏡７で反射されて放物面＠６の放物面６ａに至り、こ
の放物面６ａによって被加工物１３上に集光されること
で、ＣＯ□レーザ光によって被加工物１３が加工される
。この時に、放物面鏡６の角度調整は、ＣＯ□レーザ光
８の集光性能に関係があり、このために被加工物１３の
加工性能に大きく影響する。
そこで、従来のレーザ装置では、ＣＯ２レーザ光８の光
軸合せのために、Ｈｓ−Ｎｅレーザ発振器２を用い、こ
の発振器２から発振されたＨｅ−Ｎｅレーザ光９をＨ６
−Ｎ ｅレーザ光用反射鏡１２で反射させて、第５図に
示すように加工ヘッド４に入射させ、放物面鏡６の焦点
位置１４付近での集光スボッ１−１５の形状を観察する
。第５図（ｂｌに示すような放物面鏡６の角度調整が悪
い場合には、収差を生じて集光スポット１５が楕円にな
る。そこで、角度調整機構５によって放物面鏡６の角度
調整を行う乙とで収差をなくしている。
なお、この従来例では、Ｈｅ−Ｎｅレーザ発振器２から
発振されなＨｅ −Ｎ ｅレーザ光を適当に拡大して使
用するが、ＣＯ２レーザ光８と同軸に設けられたＨｅ−
Ｎｅレーザ光９をそのまま使用してもよい。A conventional laser device as described above will be explained with reference to FIGS. 4 and 5. In Fig. 4, 1 is a CO2 laser oscillator, 2 is a He
-N e laser oscillator, 3 is an optical path reflecting mirror, 4 is a parabolic mirror processing head, and the second head 4 includes a parabolic mirror 6 whose angle is adjusted by an angle adjustment mechanism 5 and a processing head reflecting mirror 7.
and is provided. 8 is Co2L/-the light, 9 is He
-N e laser beam, 10 is optical path, 12 is He -N
e laser beam reflecting mirror; 13 is a workpiece; In this laser device, a CO2 laser beam 8 oscillated from a C02 laser oscillator 1 is reflected by an optical path reflector 3° and a processing head reflector 7 to reach a paraboloid 6a of a paraboloid @6. By condensing the light onto the workpiece 13 by the CO□ laser beam, the workpiece 13 is processed. At this time, the angle adjustment of the parabolic mirror 6 is related to the focusing performance of the CO□ laser beam 8, and therefore greatly affects the processing performance of the workpiece 13. Therefore, in the conventional laser device, an Hs-Ne laser oscillator 2 is used to align the optical axis of the CO2 laser beam 8, and the He-Ne laser beam 9 oscillated from this oscillator 2 is
-N e The laser beam is reflected by the reflecting mirror 12 and made incident on the processing head 4 as shown in FIG. 5, and the shape of the focusing slot 1-15 near the focal position 14 of the parabolic mirror 6 is observed. do. If the angle of the parabolic mirror 6 is poorly adjusted as shown in FIG. In this conventional example, the He-Ne laser beam that is not oscillated from the He-Ne laser oscillator 2 is appropriately expanded and used, but the CO2 laser beam 8 and Coaxially installed He-
The Ne laser beam 9 may be used as is.
【発明が解決しようとする課題］
従来のレーザ装置は、以上のように構成されているので
、放物面鏡の角度Ｆｌ整の確度を定量的に把握すること
ができず、ＣＯ２レーザ光の集光性能にばらつきを生ず
る恐れがあり、また放物面鏡の精度のよい角度調整を行
うには、大口径で平行光のＨｅ −Ｎ ｅレーザ光を得
る装置が必要であるという問題点があった。
この発明は、上記のような問題点を解決するためになさ
れたもので、放物面鏡の角度調整が簡易にしかも正確に
でき、ＣＯ２レーザ光の集光性がよいレーザ装置を得る
ことを目的とするものである。
【課題を解決するための手段】
この発明は、上記のようなレーザ装置において、Ｈｅ
−Ｎ ｅレーザ光を平行移動させるための２枚の反射鏡
と、これらの反射鏡で反射されたＨｅ−Ｎｅレーザ光が
通る孔を設けた孔付き反射鏡と、上記孔から出たＨ ｅ
−Ｎ ｅレーザ光を放物面鏡へ入射するＣＯ２レーザ
光の光軸と平行に上記放物面鏡に設けた基準面に当てて
反射させ反射光を上記孔付き反射鏡でさらに反射させて
光路外に取抄出しこの反射光を観察する手段とを有する
光軸変換機構を備え、光路外に取り出した反射光を観察
しつつ上記角度調整機構によって放物面鏡の角度調整が
行えるようにしたものである。[Problems to be Solved by the Invention] Since the conventional laser device is configured as described above, it is not possible to quantitatively grasp the accuracy of setting the angle Fl of the parabolic mirror, and the accuracy of the CO2 laser beam cannot be determined quantitatively. There is a risk of variations in light focusing performance, and in order to accurately adjust the angle of the parabolic mirror, there is a problem that a device that obtains parallel He-Ne laser light with a large aperture is required. there were. This invention was made in order to solve the above-mentioned problems, and aims to provide a laser device in which the angle of the parabolic mirror can be easily and precisely adjusted, and the CO2 laser beam can be condensed well. This is the purpose. [Means for Solving the Problems] The present invention provides a laser device as described above.
- Two reflecting mirrors for translating the Ne laser beam, a reflecting mirror with a hole through which the He-Ne laser beam reflected by these mirrors passes, and the He-Ne laser beam coming out from the hole.
-Ne laser light is reflected by hitting a reference plane provided on the parabolic mirror in parallel with the optical axis of the CO2 laser light entering the parabolic mirror, and the reflected light is further reflected by the above-mentioned holed reflecting mirror. An optical axis conversion mechanism is provided with a means for taking out the reflected light out of the optical path and observing the reflected light, so that the angle of the parabolic mirror can be adjusted by the angle adjustment mechanism while observing the reflected light taken out out of the optical path. This is what I did.
乙の発明におけるレーザ装置は、Ｈｅ−Ｎｅレーザ光が
放物面鏡に設けた基準面および孔付き反射鏡で反射した
反射光を光路外に取出したので、この反射光を観察しつ
つ角度調整機構を操作することで、放物面鏡の角度調整
を行うことができ、角度調整が簡易にできろとともに正
確にできる。In the laser device according to the invention of B, the He-Ne laser beam is reflected by the reference plane provided on the parabolic mirror and the reflecting mirror with a hole, and the reflected light is taken out of the optical path, so the angle can be adjusted while observing this reflected light. By operating the mechanism, the angle of the parabolic mirror can be adjusted, making the angle adjustment both easy and accurate.
以下、この発明の一実施例を第１図ないし第３図につい
て説明する。
第１図ないし第３図において、第４図および第５図と同
一符号は相当部分を示し、１１はＨｅＮｅレーザ光用反
射鏡１２と光路反射鏡３との間に配設される光軸変換機
構であり、この変換機構１１には反射鏡１６，１７、孔
１８ａ付き反射鏡１８および駆動装置１９が設けられ、
孔付き反射鏡１８の反射面と対向する窓２０の下方には
スクリーン２１が設けられている。また、放物面鏡６の
放物面６ａの上方にはＣＯ２レーザ光の光軸すなわち光
路１０と平行に垂直な基準面６ｂが設けられている。さ
らに、２２はＨｅ−Ｎｅレーザ光反射モード、９ａ、９
ｅはＨｅ−Ｎｅレーザ光９の入射光２反射光である。な
お、この実施例の上述した以外の各部の構成および基本
動作は、第４図および第５図に示す従来のものと同様で
ある。
この実施例のレーザ装置では、放物面鏡６の角度ｙＡＭ
ｌを行う時に、まずＨｅ −Ｎ ｅレーザ光用反射鏡１
２をＣＯ２レーザ光８の光軸と一致させろ。
次に、光軸変換機構１１を駆動装置１９によって光路１
０中に移動させろ。そして、Ｈｅ−Ｎｏレーザ発振器２
からＨｅ −Ｎ ｅレーザ光９を発振させ、とのレーザ
９は、光軸をＣ０２レーザ発振器１から発振されるＣＯ
２レーザ光８の光軸すなわち光路１０と一致するように
Ｈｅ −Ｎ ｅレーザ光用反射鏡１２によって反射させ
ろ。反射させたＨｅ −Ｎ ｅレーザ光９は、光軸変換
４［Ｊｌｌｌの下方の反射鏡１６に入射させ、上方に反
射させて上方の反射鏡１７で反射させることにより、Ｈ
ｅ−Ｎｅレーザ光を上方に平行移動させて孔付き反射鏡
１８の孔１８ａに入射させる。この入射光９ａは、光路
反射鏡３および加工ヘッド反射鏡７で反射させて光路１
０と平行に放物面鏡６の基準面６ｂに対し直角に当てて
反射させ、この反射光９ｂを加工ヘッド反射＠７．光路
反射鏡３を介して孔付き反射鏡１８でさらに下方に反射
させる。この際、Ｈｅ −Ｎ ｅレーザ光には発散角が
あり、その入射光９ａはビーム径が小さく、孔付き反射
鏡１８の孔１８ａを通過するが、反射光９ｂはビーム径
が大きくなる。この反射光９ｂは、孔付き反射鏡１８で
反射して窓２０を通過し、光路１０の外でスクリーン２
１に反射モード２２として写し出される。このため、ス
クリーン２１を予め放物面鏡加工へノド４の近くに設置
しておく乙とにより、反射モード２２を観察しながら角
度調整機構５を操作して放物面鏡６の角度を調整できる
。したがって、この実施例では、１人の作業者で、簡易
にしかも正確に放物面鏡６の角度調整を行うことができ
る。
なお、上記実施例では、切断、表面処理などの物品の加
工用レーザ装置について説明したが、この発明は、医療
用などのレーザ装置にも適用できる。
【発明の効果］
以上説明したように、この発明によれば、ＨｅＮｅレー
ザ光を平行移動させろための２枚の反射鏡と、これらの
反射鏡で反射されたＨ ｅ −Ｎ ｅレーザ光が通る孔
を設けた孔付き反射鏡とを有する光軸変換機構を備丸、
上記孔から出たＨ ｅ −Ｎｅレーザ光を放物面鏡へ入
射するＣＯ２レーザ光の光軸と平行に放物面鏡に設けた
基準面に当てて反射させ、反射光を孔付き反射鏡でさら
に反射させて光路外に取り出し、この反射光を観察する
ようにしたので、この観察をしつつ角度ＷＪｍｅ＊構に
よって放物面鏡の角度調整を行うことができ、従ってこ
の調整が簡易にしかも正確にでき、ＣＯ２レーザ光の集
光性がよいレーザ装置が得られるという効果がある。An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. 1 to 3, the same reference numerals as in FIGS. 4 and 5 indicate corresponding parts, and 11 is an optical axis converter disposed between the HeNe laser beam reflecting mirror 12 and the optical path reflecting mirror 3. This conversion mechanism 11 is provided with reflecting mirrors 16, 17, a reflecting mirror 18 with a hole 18a, and a driving device 19,
A screen 21 is provided below the window 20 facing the reflecting surface of the holed reflecting mirror 18. Further, above the parabolic surface 6a of the parabolic mirror 6, a reference surface 6b is provided which is parallel and perpendicular to the optical axis of the CO2 laser beam, that is, the optical path 10. Furthermore, 22 is a He-Ne laser light reflection mode, 9a, 9
e is the reflected light of the incident light 2 of the He-Ne laser light 9. The configuration and basic operation of each part of this embodiment other than those described above is the same as the conventional one shown in FIGS. 4 and 5. In the laser device of this embodiment, the angle yAM of the parabolic mirror 6
When performing 1, first reflector 1 for He-N e laser beam.
2 to match the optical axis of the CO2 laser beam 8. Next, the optical axis conversion mechanism 11 is moved to the optical path 1 by the driving device 19.
Move it inside 0. And He-No laser oscillator 2
A He-N e laser beam 9 is oscillated from
2. The He-Ne laser beam should be reflected by the He-Ne laser beam reflecting mirror 12 so as to coincide with the optical axis of the laser beam 8, that is, the optical path 10. The reflected He-N e laser beam 9 is incident on the lower reflecting mirror 16 of the optical axis conversion 4 [Jllll, reflected upward, and then reflected by the upper reflecting mirror 17, thereby converting the H
The e-Ne laser beam is translated upward and made to enter the hole 18a of the holed reflecting mirror 18. This incident light 9a is reflected by the optical path reflecting mirror 3 and the processing head reflecting mirror 7 to form an optical path 1.
0 and is reflected at right angles to the reference surface 6b of the parabolic mirror 6, and this reflected light 9b is reflected by the processing head reflection@7. The light is reflected further downward via the optical path reflecting mirror 3 by the holed reflecting mirror 18. At this time, the He-Ne laser beam has a divergence angle, and the incident light 9a thereof has a small beam diameter and passes through the hole 18a of the holed reflecting mirror 18, but the reflected light 9b has a large beam diameter. This reflected light 9b is reflected by the holed reflector 18, passes through the window 20, and passes through the screen 2 outside the optical path 10.
1 as a reflection mode 22. Therefore, by installing the screen 21 in advance near the throat 4 for parabolic mirror processing, the angle of the parabolic mirror 6 is adjusted by operating the angle adjustment mechanism 5 while observing the reflection mode 22. can. Therefore, in this embodiment, one operator can easily and accurately adjust the angle of the parabolic mirror 6. In the above embodiments, a laser device for processing articles such as cutting and surface treatment has been described, but the present invention can also be applied to laser devices for medical use and the like. [Effects of the Invention] As explained above, according to the present invention, there are two reflecting mirrors for parallelly moving the HeNe laser beam, and the He-Ne laser beam reflected by these mirrors passes through. Bimaru has an optical axis conversion mechanism with a holed reflector.
The H e -Ne laser beam emitted from the hole is reflected by hitting a reference plane provided on the parabolic mirror parallel to the optical axis of the CO2 laser beam incident on the parabolic mirror, and the reflected light is reflected by a reflecting mirror with a hole. Since the reflected light is further reflected and taken out of the optical path, and this reflected light is observed, the angle of the parabolic mirror can be adjusted using the angle WJme* structure while observing this, making this adjustment easy. Moreover, it is possible to obtain a laser device that can be made accurately and has good focusing ability for CO2 laser light.
【図面の簡単な説明】
第１図はこの発明の一実施例によるレーザ装置を示す光
学系の構成図、第２図は同放物面鏡部分の拡大図、第３
図は同光軸変換８ＪＩ＃ｌＩＩ部の要部を示す拡大図、
第４図は従来のレーザ装置を示す光学系の構成図、第５
図は同放物面鏡加工ヘッド部の作用説明図である。
Ｉ ＣＯ□レーザ発振器、２−Ｈｅ−ＮＩＩＩＬ／ −
ザ究振器、３−光路反射鏡、５−角度ＴＡ整機構、６
・放物面鏡、６ａ 放物面、６ｂ・・基準面、７・加工
ヘッド反射鏡、８・ＣＯ□レーザ光、９Ｔ（ｅ −Ｎ
ｅ Ｌ／−ザ光、１０ ・光路、１１・・光軸変換機構
、１２−１（ｅ−Ｎ ｅレーザ光用反射鏡（Ｃ０２レー
ザ光の光軸にＨｅ −Ｎ ｅレーザ光の光軸を一致させ
る手段）、１６，１７ 反射鏡、１８孔付き反射鏡、
１８ａ 孔、１９ 駆動装置、２１ スクリーン（反
射光を観察する手ｖｉ）。
なお、図中同一符号は同−又は相当部分を示す。[Brief Description of the Drawings] Fig. 1 is a configuration diagram of an optical system showing a laser device according to an embodiment of the present invention, Fig. 2 is an enlarged view of the parabolic mirror portion, and Fig. 3 is an enlarged view of the parabolic mirror portion.
The figure is an enlarged view showing the main parts of the optical axis conversion 8JI#lII section.
Figure 4 is a configuration diagram of the optical system showing a conventional laser device, Figure 5
The figure is an explanatory diagram of the operation of the parabolic mirror processing head. I CO□Laser oscillator, 2-He-NIIIL/-
The research device, 3- optical path reflector, 5- angle TA adjustment mechanism, 6
・Paraboloid mirror, 6a Paraboloid, 6b... Reference plane, 7. Processing head reflector, 8. CO□ laser beam, 9T (e -N
e L/- laser beam, 10 ・Optical path, 11... Optical axis conversion mechanism, 12-1 (e-Ne laser beam reflector (the optical axis of the He-Ne laser beam is aligned with the optical axis of the C02 laser beam) matching means), 16, 17 reflecting mirror, reflecting mirror with 18 holes,
18a hole, 19 drive device, 21 screen (hand vi for observing reflected light). Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
上記ＣＯ＿２レーザ発振器から発振したＣＯ＿２レーザ
光の光軸にＨｅ−Ｎｅレーザ発振器から発振したＨｅ−
Ｎｅレーザ光の光軸を一致させる手段と、上記ＣＯ＿２
レーザ光を集光する放物面鏡と、ＣＯ＿２レーザ光を上
記放物面鏡に導くための反射鏡と、放物面鏡の角度調整
機構とを具備したレーザ装置において、Ｈｅ−Ｎｅレー
ザ光を平行移動させるための２枚の反射鏡と、これらの
反射鏡で反射されたＨｅ−Ｎｅレーザ光が通る孔を設け
た孔付き反射鏡と、上記孔から出たＨｅ−Ｎｅレーザ光
を放物面鏡へ入射するＣＯ＿２レーザ光の光軸と平行に
上記放物面鏡に設けた基準面に当てて反射させ反射光を
上記孔付き反射鏡でさらに反射させて光路外に取り出し
この反射光を観察する手段とを有する光軸変換機構を備
え、光路外に取り出した反射光を観察しつつ上記角度調
整機構によって放物面鏡の角度調整が行えるようにした
ことを特徴とするレーザ装置。CO_2 laser oscillator, He-Ne laser oscillator,
The optical axis of the CO_2 laser beam oscillated from the above CO_2 laser oscillator is the He-Ne laser oscillator.
A means for aligning the optical axes of the Ne laser beams and the above CO_2
In a laser device equipped with a parabolic mirror for condensing a laser beam, a reflecting mirror for guiding the CO_2 laser beam to the parabolic mirror, and an angle adjustment mechanism for the parabolic mirror, the He-Ne laser beam is two reflecting mirrors for parallel translation, a reflecting mirror with a hole through which the He-Ne laser beam reflected by these mirrors passes, and a reflecting mirror with a hole through which the He-Ne laser beam emitted from the hole is emitted. The CO_2 laser beam incident on the object mirror is reflected by hitting a reference plane provided on the parabolic mirror parallel to the optical axis, and the reflected light is further reflected by the holed reflector and taken out of the optical path. What is claimed is: 1. A laser device comprising: an optical axis conversion mechanism having means for observing a parabolic mirror;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63195223A JPH0246991A (en) | 1988-08-04 | 1988-08-04 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63195223A JPH0246991A (en) | 1988-08-04 | 1988-08-04 | Laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246991A true JPH0246991A (en) | 1990-02-16 |
Family
ID=16337513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63195223A Pending JPH0246991A (en) | 1988-08-04 | 1988-08-04 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246991A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08118055A (en) * | 1994-10-21 | 1996-05-14 | Shinozaki Seisakusho:Kk | Coaxial observation device in laser machining |
| FR2925176A1 (en) * | 2007-12-18 | 2009-06-19 | Thales Sa | IMAGING MIRROR, METHOD OF MANUFACTURING AND APPLICATION TO A LASER IMAGING SYSTEM |
-
1988
- 1988-08-04 JP JP63195223A patent/JPH0246991A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08118055A (en) * | 1994-10-21 | 1996-05-14 | Shinozaki Seisakusho:Kk | Coaxial observation device in laser machining |
| FR2925176A1 (en) * | 2007-12-18 | 2009-06-19 | Thales Sa | IMAGING MIRROR, METHOD OF MANUFACTURING AND APPLICATION TO A LASER IMAGING SYSTEM |
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