JPH0236348A - Electrochemical sensor - Google Patents
Electrochemical sensorInfo
- Publication number
- JPH0236348A JPH0236348A JP63187511A JP18751188A JPH0236348A JP H0236348 A JPH0236348 A JP H0236348A JP 63187511 A JP63187511 A JP 63187511A JP 18751188 A JP18751188 A JP 18751188A JP H0236348 A JPH0236348 A JP H0236348A
- Authority
- JP
- Japan
- Prior art keywords
- water
- solid electrolyte
- electrolyte layer
- storage tank
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000008400 supply water Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 230000007613 environmental effect Effects 0.000 abstract description 7
- 239000003792 electrolyte Substances 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000011244 liquid electrolyte Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 101100283604 Caenorhabditis elegans pigk-1 gene Proteins 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052815 sulfur oxide Inorganic materials 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は電気化学式センサに関し、詳しくは、電解反
応を利用して特定のガス成分等を検出したり定量したり
する、電解型の電気化学式センサに関するものである。[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to an electrochemical sensor, and more specifically, an electrochemical sensor that detects or quantifies a specific gas component using an electrolytic reaction. It is related to sensors.
電気化学的な酸化還元反応を利用して、大気中ノカス、
例工ば一酸化炭素、水素、アルコール。By using electrochemical redox reactions,
Examples include carbon monoxide, hydrogen, and alcohol.
窒素酸化物、硫黄酸化物などを検知する電気化学式ガス
センサは、これまでにも数多く報告されている。−船釣
に、この種のガスセンサは、高いガス感度を有している
ことから、工業用のガス濃度検知器などの分野において
利用されている。Many electrochemical gas sensors that detect nitrogen oxides, sulfur oxides, etc. have been reported so far. - This type of gas sensor has high gas sensitivity and is used in fields such as industrial gas concentration detectors for boat fishing.
近年、電気化学式センサにおいて、電極間に設けられる
イオン（プロトン）伝導用の電解質として、スルホン化
パーフルオロカーボン等の高分子固体電解質を用いたガ
スセンサが研究されており、例えば、特開昭５３−１１
５２９３号公報等に開示されている。In recent years, in electrochemical sensors, gas sensors using solid polymer electrolytes such as sulfonated perfluorocarbons as electrolytes for ion (proton) conduction provided between electrodes have been studied.
It is disclosed in Japanese Patent No. 5293 and the like.
このセンサは、基本的な構造としては、それまでの液体
電解質を用いたガスセンサと同様に、感知電極、参照電
極、逆電極が設けられており、電解質として液体電解質
のかわりに固体電解質を用いた点が特徴となっている。The basic structure of this sensor is the same as previous gas sensors that used liquid electrolytes, including a sensing electrode, a reference electrode, and a counter electrode. It is characterized by points.
このように、固体電解質を用いた電気化学式センサは、
液体電解質を用いたものに比べて、より小型で低価格な
センサ素子を作製できる。In this way, electrochemical sensors using solid electrolytes are
Compared to those using liquid electrolytes, it is possible to produce smaller and cheaper sensor elements.
さらに、センサ素子の構造を、上記従来技術のように、
感知電極および参照電極と逆電極とが、間に固体電解質
を挟んで対向する対向型電橋構成から、平面型電極構成
、すなわち１枚の基板の同一平面上に３つの電極を形成
し、その上に固体電解質を配置した構造にすることによ
って、現在半導体製造分野等に用いられている、薄膜形
成技術や印刷回路形成技術、写真製版技術等が応用でき
、ますます小型化、製造の簡略化を推し進めることが可
能になると考え、発明者らは、このような平面型電極構
成、すなわちプレーナ型電気化学式センサに関して、先
に特願昭６３−４２８４４号等において特許出願してい
る。Furthermore, the structure of the sensor element is changed as in the above conventional technology.
From the opposed electric bridge configuration in which the sensing electrode, the reference electrode, and the counter electrode face each other with a solid electrolyte in between, to the planar electrode configuration, in which three electrodes are formed on the same plane of one substrate, By creating a structure with a solid electrolyte placed on top, thin film formation technology, printed circuit formation technology, photolithography technology, etc. currently used in the semiconductor manufacturing field can be applied, resulting in further miniaturization and simplified manufacturing. The inventors have previously filed patent applications for such a planar electrode configuration, that is, a planar electrochemical sensor, in Japanese Patent Application No. 63-42844.
ところが、上記のような固体電解質を用いたプレーナ型
電気化学式センサにおいても、若干の問題が残されてお
り、そのうちの一つとして、湿度依存性が非常に大きい
という欠点がある。However, even in the planar electrochemical sensor using a solid electrolyte as described above, some problems remain, one of which is that it has a very large humidity dependence.
固体電解質として利用される高分子プロトン伝導体は、
通常の状態で水分を含んでいる。この水分の量すなわち
含水率が周囲の環境湿度によって大きく変化し、その結
果として電解質膜の電気抵抗（インピーダンス）も大き
く変化することになる。電極間を流れる検出電流によっ
てガス等を検知する電気化学式センサとしては、上記し
た環境湿度の変化にもとづく電解質膜の電気抵抗の変化
によってセンサの検知感度に大きなに’Ｓを受け、セン
サとして安定した出力が得られなくなるのである。Polymer proton conductors used as solid electrolytes are
Contains water under normal conditions. The amount of water, that is, the water content, changes greatly depending on the surrounding environmental humidity, and as a result, the electrical resistance (impedance) of the electrolyte membrane also changes greatly. As an electrochemical sensor that detects gas, etc. using a detection current flowing between electrodes, the detection sensitivity of the sensor is greatly affected by changes in the electrical resistance of the electrolyte membrane due to changes in the environmental humidity mentioned above, and it is difficult to stabilize the sensor. No output can be obtained.
そこで、この発明の課題は、湿度依存性が小さく、広い
湿度範囲において良好で安定した性能を発揮できる電気
化学式センサを提供することにある。Therefore, an object of the present invention is to provide an electrochemical sensor that has low humidity dependence and can exhibit good and stable performance over a wide humidity range.
上記課題を解決する、この発明は、固体電解質層に水を
供給する貯水槽を備え、貯水槽と固体電解質層の間が水
供給手段で連結されているようにしている。The present invention, which solves the above problems, includes a water storage tank that supplies water to the solid electrolyte layer, and the water storage tank and the solid electrolyte layer are connected by a water supply means.
固体電解質層に貯水槽から水供給手段を経て水を供給で
きるようにしておけば、環境湿度が変化して固体電解質
層内の水分が蒸発しても、その蒸発量に見合う水分を供
給することができ、固体電解質層の含水率を一定に保つ
ことができる。したがって、固体電解質膜の電気抵抗も
安定し、その結果センサのガス感度は常に良好で安定す
る。By making it possible to supply water to the solid electrolyte layer from a water storage tank via a water supply means, even if the environmental humidity changes and the moisture in the solid electrolyte layer evaporates, it is possible to supply moisture commensurate with the amount of evaporation. The water content of the solid electrolyte layer can be kept constant. Therefore, the electrical resistance of the solid electrolyte membrane is also stabilized, and as a result, the gas sensitivity of the sensor is always good and stable.
ついで、この発明を、実施例を示す図面を参照しながら
、以下に説明する。Next, the present invention will be described below with reference to drawings showing embodiments.
第１図は、センサの断面構造を模式的に示している。適
宜合成樹脂材料やセラミック材料からなる絶縁基板１０
の上に、金、白金その他の電極材料からなる作用極２０
．対極３０．参照極４０の３つの電極が設けられ、各種
２０・・・の上およびその間を覆って、前記パーフルオ
ロカーボン等の固体電解質５０が設けられている。固体
電解質５０は、絶縁基板ｌＯの外周に沿って設けられた
外枠１１の内部に収容されている。これらの電気化学式
センサの基本構造については、従来のプレーナ型センサ
の構造と同様である。例えば、各種２０・・・には、外
部回路と接続するための接続部を固体電解質５０の外ま
で延長形成したり、感度を向上させるために作用極２０
と対極３０を櫛型構造にしたり、同じく感度向上のため
に作用極２０．対極の表面を凹凸形成したりする。これ
らの、プレーナ型センサの構造については、発明者らが
先に発明し特許出願している特願昭６３−４２８４１号
等に開示されており、詳細な説明は省略する。FIG. 1 schematically shows the cross-sectional structure of the sensor. Insulating substrate 10 made of synthetic resin material or ceramic material as appropriate
A working electrode 20 made of gold, platinum or other electrode material is placed on top of the
．． Counterpoint 30. Three electrodes of the reference electrode 40 are provided, and a solid electrolyte 50 such as the perfluorocarbon is provided to cover the various electrodes 20 and between them. The solid electrolyte 50 is housed inside an outer frame 11 provided along the outer periphery of the insulating substrate IO. The basic structure of these electrochemical sensors is similar to that of conventional planar sensors. For example, in various types 20..., a connection part for connecting to an external circuit may be formed to extend outside the solid electrolyte 50, or the working electrode 20 may be formed to extend outside the solid electrolyte 50 to improve sensitivity.
The working electrode 20. and the counter electrode 30 are made into a comb-shaped structure, and the working electrode 20. The surface of the opposite electrode may be made uneven. The structure of these planar type sensors is disclosed in Japanese Patent Application No. 63-42841, which the inventors previously invented and applied for a patent, and a detailed explanation thereof will be omitted.
絶縁基板１０の下部には、絶縁基板１０と同様の各種合
成樹脂あるいはセラミンク材料等からなる外郭体７０に
よって構成された空洞状の貯水槽６０を備えており、貯
水槽６０の内部には、固体電解質層５０に供給するため
の水Ｗが収容されている。貯水槽６０の上部には貫通孔
６１が設けられ、この貫通孔６１を経て、貯水槽６０の
内部から固体電解質層５０の表面に接触するように、ビ
ック６２を設けている。このビック６２は、吸水性の繊
維体からなり、毛細管現象によって、水を貯水槽６０か
ら固体電解質層５０へと供給できるものである。したが
って、貯水槽６０内の水は、ビック６２を伝わって、固
体電解質層５０の表面に供給されるようになっている。A hollow water storage tank 60 is provided at the bottom of the insulating substrate 10, and is formed by an outer body 70 made of various synthetic resins or ceramic materials similar to the insulating substrate 10. Water W to be supplied to the electrolyte layer 50 is accommodated. A through hole 61 is provided in the upper part of the water storage tank 60, and a vik 62 is provided so as to come into contact with the surface of the solid electrolyte layer 50 from inside the water storage tank 60 through the through hole 61. This big 62 is made of a water-absorbing fiber and can supply water from the water storage tank 60 to the solid electrolyte layer 50 by capillary action. Therefore, the water in the water tank 60 is supplied to the surface of the solid electrolyte layer 50 through the big 62.
上記した実施例の作用を説明すると、まず、ビック６２
によって、貯水槽６０から固体電解質層５０の表面へと
常に水分が供給されているので、例えば環境湿度が下降
して、固体電解質層５０の水分の蒸発が増えても、すく
に水分が補給され、固体電解質層５０は常に、良好なイ
オン伝導（プロトン伝導）が行われる高含水状態に維持
される。したがって、環境湿度の変化に関わらず、固体
電解質５０の含水率は一定に維持され、固体電解質５０
の含水率に影響される電気抵抗も安定し、その結果セン
サの感度が常に良好に保たれる。To explain the operation of the above-mentioned embodiment, first, the BIC 62
As a result, water is constantly supplied from the water storage tank 60 to the surface of the solid electrolyte layer 50, so even if, for example, the environmental humidity decreases and evaporation of water in the solid electrolyte layer 50 increases, the water is quickly replenished. The solid electrolyte layer 50 is always maintained in a highly water-containing state where good ion conduction (proton conduction) occurs. Therefore, regardless of changes in environmental humidity, the water content of the solid electrolyte 50 is maintained constant, and the solid electrolyte 50
The electrical resistance, which is affected by the water content, is also stable, and as a result, the sensitivity of the sensor is always maintained at a good level.
次に、第２図は、貯水槽６０から固体電解質層５０への
水の供給手段が異なる実施例を示している。Next, FIG. 2 shows an embodiment in which the means for supplying water from the water storage tank 60 to the solid electrolyte layer 50 is different.
貯水槽６０が絶縁基板１０の周囲を囲むように配置され
、絶縁基板１０は貯水槽６０を構成する外郭体７０の中
央に嵌まり込んだ状態になっている。貯水槽６０の内壁
から外郭体７０を経て絶縁基板１０の下面に達する水路
６３と、この水路６３の上方で絶縁基板１０の底面に貫
通形成された細孔１２が設けられており、この水路６３
および細孔１２を通って固体電解質層５０の底面に水分
を供給するようになっている。The water tank 60 is arranged to surround the insulating substrate 10, and the insulating substrate 10 is fitted into the center of an outer body 70 constituting the water tank 60. A water channel 63 that reaches the bottom surface of the insulating substrate 10 from the inner wall of the water tank 60 via the outer shell 70 is provided, and a pore 12 is formed through the bottom surface of the insulating substrate 10 above this water channel 63.
Moisture is supplied to the bottom surface of the solid electrolyte layer 50 through the pores 12 and the pores 12 .
貯水槽６０から固体電解質槽５０へと水を供給する手段
としては、上記した各実施例のほかにも、センサの構造
や用途によって適宜手段が採用できる。As a means for supplying water from the water storage tank 60 to the solid electrolyte tank 50, in addition to the above-mentioned embodiments, appropriate means can be adopted depending on the structure and purpose of the sensor.
この発明にかかる電気化学式センサにおいて、絶縁基板
１０や各電極２０・・・の材料は、通常の各種センサ等
と同様の材料で自由に実施される。固体電解質層５０を
構成する固体電解質は、通常の電気化学式センサに用い
られているものが使用でき、前記したパーフルオロスル
ホネートポリマ（商品名ナフィオン：デュポン社製）の
ほか、このパーフルオロスルホネートポリマにＨ，ＳＯ
４を含有したもの、Ｓｂ２０． ・４Ｈ２０、Ｚｒ（
ＨＰＯ４）、 ・４Ｈ２０等が挙げられる。In the electrochemical sensor according to the present invention, the materials of the insulating substrate 10 and each electrode 20 can be freely implemented using the same materials as those of various ordinary sensors. As the solid electrolyte constituting the solid electrolyte layer 50, those used in ordinary electrochemical sensors can be used, and in addition to the above-mentioned perfluorosulfonate polymer (trade name: Nafion, manufactured by DuPont), H.S.O.
4, Sb20.・4H20, Zr(
Examples include HPO4), ・4H20, etc.
各電極２０・・・の構造も、各種の電気化学式センサと
同様の構造で実施できるが、例えば、第３図に示すよう
に、作用極２０および対極３０が多数の凹凸からなる凹
凸状電極であって、固体電解質５０が各電極２０．３０
の凹凸の谷間部分を途中まで埋めているものを用いると
、固体電解質５０と電極２０．３０および外界によって
、電気化学的な３相界面が形成され、センサの感度向上
に極めて好ましいものとなる。この実施例では、絶縁基
板ＩＯの上に外枠１１を設けず、絶縁基板１０の中央を
堀込んで、その内部に固体電解質層５０を収容している
。すなわち、前記実施例における平坦な絶縁基板１０と
外枠１１とが一体形成された構造になっている。なお、
第３図は、貯水槽や水の供給手段については図示を省略
しているが、前記第１図および第２図等と同様の構造で
実施される。The structure of each electrode 20 can be similar to that of various electrochemical sensors, but for example, as shown in FIG. The solid electrolyte 50 is connected to each electrode 20.30
If a material that partially fills the valleys of the unevenness is used, an electrochemical three-phase interface is formed between the solid electrolyte 50, the electrodes 20 and 30, and the outside world, which is extremely preferable for improving the sensitivity of the sensor. In this embodiment, the outer frame 11 is not provided on the insulating substrate IO, but the center of the insulating substrate 10 is dug, and the solid electrolyte layer 50 is accommodated therein. That is, the structure is such that the flat insulating substrate 10 and the outer frame 11 in the embodiment described above are integrally formed. In addition,
Although the water storage tank and water supply means are not shown in FIG. 3, they are implemented with the same structure as in FIGS. 1 and 2, etc. described above.
貯水槽６０には、水をそのまま収容しておいてもよいが
、貯水槽６０内に吸水性ゲルを収容して、この吸水性ゲ
ルに水を含ませておいてもよい。Water may be stored in the water storage tank 60 as it is, but a water-absorbing gel may be stored in the water storage tank 60 and water may be contained in the water-absorbing gel.
以上に述べた、この発明にかかる電気化学式センサによ
れば、固体電解質層に貯水槽から水供給手段を経て水を
供給でき、環境湿度の変化にかかわらず、固体電解質層
の含水率を一定に保つことができるので、固体電解質膜
の電気抵抗を常に一定に維持することができ、その結果
センサの検知感度は常に良好で安定する。According to the electrochemical sensor according to the present invention described above, water can be supplied to the solid electrolyte layer from the water storage tank via the water supply means, and the water content of the solid electrolyte layer can be kept constant regardless of changes in environmental humidity. Therefore, the electrical resistance of the solid electrolyte membrane can always be maintained constant, and as a result, the detection sensitivity of the sensor is always good and stable.
第１図はこの発明にかかる実施例の断面図、第２図は別
の実施例を示す断面図、第３図は電極構造の異なる実施
例の要部を示す断面図である。
１０・・・絶縁基板 ２０・・・作用極 ３０・・・対
極４０・・・参照極 ５０・・・固体電解質層 ６０・
・・貯水槽
代理人 弁理士 松 本 武 彦FIG. 1 is a sectional view of an embodiment according to the present invention, FIG. 2 is a sectional view of another embodiment, and FIG. 3 is a sectional view of a main part of an embodiment with a different electrode structure. 10... Insulating substrate 20... Working electrode 30... Counter electrode 40... Reference electrode 50... Solid electrolyte layer 60.
...Water tank agent, patent attorney Takehiko Matsumoto
Claims (1)
設けられ、各極およびその間を覆って固体電解質層が設
けられた電気化学式センサにおいて、固体電解質層に水
を供給する貯水槽を備え、貯水槽と固体電解質層の間が
水供給手段で連結されていることを特徴とする電気化学
式センサ。1. An electrochemical sensor in which a working electrode, a counter electrode, and a reference electrode are provided on the same surface of an insulating substrate, and a solid electrolyte layer is provided covering each electrode and between the electrodes, and a water storage tank is provided to supply water to the solid electrolyte layer. , an electrochemical sensor characterized in that a water storage tank and a solid electrolyte layer are connected by a water supply means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63187511A JPH0236348A (en) | 1988-07-26 | 1988-07-26 | Electrochemical sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63187511A JPH0236348A (en) | 1988-07-26 | 1988-07-26 | Electrochemical sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0236348A true JPH0236348A (en) | 1990-02-06 |
Family
ID=16207348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63187511A Pending JPH0236348A (en) | 1988-07-26 | 1988-07-26 | Electrochemical sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0236348A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6488245A (en) * | 1987-07-15 | 1989-04-03 | Stanford Res Inst Int | Ready response microsensor for gaseous and vaporous object |
| JPS6488354A (en) * | 1987-07-15 | 1989-04-03 | Stanford Res Inst Int | Surface type microelectronic gas and steam sensor |
-
1988
- 1988-07-26 JP JP63187511A patent/JPH0236348A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6488245A (en) * | 1987-07-15 | 1989-04-03 | Stanford Res Inst Int | Ready response microsensor for gaseous and vaporous object |
| JPS6488354A (en) * | 1987-07-15 | 1989-04-03 | Stanford Res Inst Int | Surface type microelectronic gas and steam sensor |
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