JPH02304837A - Method of cleaning part for electronic tube - Google Patents
Method of cleaning part for electronic tubeInfo
- Publication number
- JPH02304837A JPH02304837A JP12500289A JP12500289A JPH02304837A JP H02304837 A JPH02304837 A JP H02304837A JP 12500289 A JP12500289 A JP 12500289A JP 12500289 A JP12500289 A JP 12500289A JP H02304837 A JPH02304837 A JP H02304837A
- Authority
- JP
- Japan
- Prior art keywords
- limonene
- cleaned
- cleaning
- electronic tube
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 24
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 claims abstract description 66
- 235000001510 limonene Nutrition 0.000 claims abstract description 33
- 229940087305 limonene Drugs 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 6
- 238000005238 degreasing Methods 0.000 abstract description 7
- 230000002411 adverse Effects 0.000 abstract description 5
- 230000006378 damage Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000006837 decompression Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000002896 organic halogen compounds Chemical class 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000013020 steam cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- 206010000369 Accident Diseases 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- -1 terpene compound Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は電子管用部品の洗浄方法に関し、特に、人体お
よび環境への悪影響が少ないリモネン（テルペン化合物
の一種）を用い洗浄方法を改良した電子管用部品の洗浄
方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for cleaning parts for electron tubes, and in particular to an improved cleaning method using limonene (a type of terpene compound) that has less adverse effects on the human body and the environment. This invention relates to a method for cleaning pipe parts.
脱脂洗浄（以下洗浄と記す）は、種々の部品材料および
機械類などの表面を清浄化し、塗装その地衣工程の処理
を容易にする下地処理として広〈実施されている。Degreasing and cleaning (hereinafter referred to as cleaning) is widely practiced as a surface treatment to clean the surfaces of various parts and materials, machinery, etc., and to facilitate painting and lichen processes.
特に、電子管の製造においては部品表面の汚れが管内真
空度に重大な影響を及ぼすため、十分な洗浄がほとんど
全ての部品に実施されている。Particularly in the manufacture of electron tubes, dirt on the surfaces of parts has a serious effect on the degree of vacuum inside the tube, so almost all parts are thoroughly cleaned.
従来、このような洗浄工程においては、有機ハロゲン化
合物から成る溶剤、例えば、１，１．１トリクロルエタ
ンやフロン１１３などが広く用いられて来た。ところが
、近年、有機ハロゲン化合物溶剤による地下水の汚染や
オゾン層の破壊による人体への悪影響が大きな問題とな
って来た。Conventionally, in such a cleaning process, solvents made of organic halogen compounds, such as 1,1.1 trichloroethane and Freon 113, have been widely used. However, in recent years, the negative effects on the human body due to groundwater contamination and ozone layer destruction caused by organic halogen compound solvents have become a major problem.
こうした情勢から、全地球的規模での有機ハロゲン化合
物溶剤の使用制限が叫ばれ、代替剤の開発と切替えが進
みつつある。リモネンはこうした要請にもとづき選択れ
な物質で第１表に示す特性を持つ。In view of this situation, there are calls for restrictions on the use of organic halogen compound solvents on a global scale, and progress is being made in developing and switching to alternative agents. Limonene is a substance selected based on these requirements and has the properties shown in Table 1.
以下余白
第１表
ここで、従来の１．１．１トリクロルエタン（以下トリ
エタンと記す）を用いた脱脂方法および装置の一例につ
きその概略を説明する。The following is a margin: Table 1 Here, an outline of an example of a conventional degreasing method and apparatus using 1.1.1 trichloroethane (hereinafter referred to as triethane) will be explained.
この方法では多くの場合、複数の洗浄槽を備えた多槽式
洗浄装置が広く用いられている。例えは、二槽式の例で
は、洗浄物は、先ず、約５０℃に加熱した温浴槽（第１
槽）に入り、表面の油脂類をトリエタンに溶解洗浄する
。In this method, a multi-tank cleaning device equipped with a plurality of cleaning tanks is widely used in many cases. For example, in the case of a two-tank system, the items to be washed are first heated to about 50°C in a hot tub (first
tank), and dissolve the oils and fats on the surface in triethane for cleaning.
次に、はぼ室温で第１槽より汚れの少ない冷浴槽く第２
槽）に入り、更に、洗浄される。Next, a second cold bath, which is at room temperature and has less dirt than the first bath, is placed.
tank) and is further cleaned.
最後に、トリエタンを沸騰させた蒸気浴（第３槽）でト
リエタン蒸気中に保持される。トリエタン蒸気は、冷浴
槽（第２槽）で冷却された処理物表面で凝縮して清浄な
トリエタンの液体となり、洗浄物を、さらに、きれいに
洗浄する。Finally, it is kept in triethane vapor in a steam bath (third tank) in which triethane is boiled. The triethane vapor condenses on the surface of the object cooled in the cold bath (second tank) to become a clean liquid triethane, thereby further cleaning the object.
その後は、処理物の温度が上昇し、トリエタンの蒸気温
度と同程度になると、表面が乾燥状態となり、洗浄を終
了する。Thereafter, the temperature of the material to be treated increases and when it reaches the same level as the vapor temperature of triethane, the surface becomes dry and the cleaning is completed.
一方、リモネンで前記トリエタンと同じプロセスで洗浄
しようとする場合には、次の欠点がある。On the other hand, when cleaning with limonene in the same process as with triethane, there are the following drawbacks.
（１）リモネンは引火性であり蒸気洗浄は困難である。(1) Limonene is flammable and difficult to clean with steam.
（危険物第４類第二石油） （２）沸点が高く蒸発し難いので乾燥に時間がかかる。(Dangerous Goods Class 4 Class 2 Petroleum) (2) It takes a long time to dry because it has a high boiling point and is difficult to evaporate.
さらに、電子管用の部品では、多くの狭隘部を持つマグ
ネトロンの陽極部品、クライストロンの共振空胴部品、
進行波管のへリックスミ極など、リモネン液が滞留し易
い構造が多い。しかも、これ等の部品は電子管の最重要
部で、かつ、動作中に高温となるため、部品表面の清浄
度が管内の真空度、ひいては、性能と寿命に直接影響を
与える。以上の理由から、脱脂溶剤と云えども完全に除
去する必要が生じる。このため、蒸気洗浄や高温の空気
や不活性ガスを吹付けてリモネンを乾燥しようとすると
、微少部品やグリッド等変形し易い部品の破損や酸化な
どが発生する恐れがあり好ましくない。In addition, we offer electron tube parts such as magnetron anode parts with many narrow parts, klystron resonant cavity parts,
There are many structures where limonene liquid tends to accumulate, such as the helical poles of traveling wave tubes. Moreover, these parts are the most important parts of the electron tube and reach high temperatures during operation, so the cleanliness of the parts' surfaces directly affects the degree of vacuum inside the tube and, ultimately, its performance and life. For the above reasons, it is necessary to completely remove the degreasing solvent. For this reason, attempting to dry limonene by steam cleaning or by blowing high-temperature air or inert gas is undesirable because it may cause damage or oxidation to easily deformed parts such as minute parts and grids.
また、アセトン等の蒸発し易い溶剤に浸漬してリモネン
とアセトンを置換した後、乾燥する方法も知られている
が、これ等の溶剤は、リモネンよりさらに引火点が低く
、火災事故を起す危険性が大で、多量の使用は種々の制
約がある。Another known method is to replace limonene with acetone by immersing it in a solvent that evaporates easily, such as acetone, and then drying it.However, these solvents have an even lower flash point than limonene, and pose a risk of causing a fire accident. There are various restrictions on the use of large quantities.
上述した従来の電子管用部品の洗浄方法では、有機ハロ
ゲン化合物溶剤による人体への悪影響が大きな問題点と
なっていた。In the above-described conventional method for cleaning electron tube parts, a major problem is that the organic halogen compound solvent has an adverse effect on the human body.
また、リモネンを使用した場合には、蒸気洗浄が困難で
、乾燥に時間がかかり、変形し易い部品の破損や酸化等
が発生するという問題点もあつた。Furthermore, when limonene was used, there were also problems in that steam cleaning was difficult, drying took a long time, and easily deformable parts were damaged or oxidized.
本発明の目的は、人体への悪影響や部品の破損や酸化等
のない、効率の良い電子管用部品の洗浄方法を提供する
ことにある。An object of the present invention is to provide an efficient method for cleaning electron tube parts that does not have an adverse effect on the human body or cause damage or oxidation of the parts.
本発明は、リモネンを９５％以上含む洗浄液を用いて電
子管用部品の脱脂洗浄を行なう電子管用部品の洗浄方法
において、前記洗浄液により前記電子管用部品を洗浄し
た後減圧乾燥する工程を含んでいる。The present invention provides a method for cleaning electron tube parts in which the electron tube parts are degreased and cleaned using a cleaning liquid containing 95% or more of limonene, which includes the step of cleaning the electron tube parts with the cleaning liquid and then drying them under reduced pressure.
次に、本発明の実施例について図面を参照して詳細に説
明する。Next, embodiments of the present invention will be described in detail with reference to the drawings.
第１図は本発明の第１の実施例の概略を示す工程図、第
２図は本発明の第１の実施例の溶剤脱脂装置の概略構成
図である。FIG. 1 is a process diagram showing an outline of a first embodiment of the present invention, and FIG. 2 is a schematic diagram of a solvent degreasing apparatus according to the first embodiment of the present invention.
第１の実施例は、第１図及び第２図に示すように、先ず
、洗浄物（電子管用部品）６は、脱脂装置の専用搬送ト
レイ（ステンレスかご）内に入れ、自動搬送機１ｌｌ（
図示せず）によって、第１槽１ａのリモネン液に浸漬す
る。この第１槽１ａの底部には、水蒸気による加熱パイ
プヒータ８が配置されており、リモネン液を４０℃±５
℃に加温し、洗浄効率を高めている。In the first embodiment, as shown in FIG. 1 and FIG.
(not shown) in the limonene solution in the first tank 1a. A water vapor heating pipe heater 8 is placed at the bottom of the first tank 1a, and the limonene liquid is heated at 40°C±5°C.
℃ to increase cleaning efficiency.
次に、所定時間浸漬後、自動搬送機構により、洗浄物６
を第２槽１ｂに移す。この第２槽１ｂの洗浄液（リモネ
ン）は、第１槽１ａより清浄なものが第３槽ＩＣから流
入する。この方式は多くの多槽式洗浄装置の洗浄液の流
入方式として広く用いられていて、最後の槽に清浄な新
しい洗浄液を投入し、オーバーフローにより順次前の槽
に流下する。従って、洗浄物は順次清浄度が高い液で洗
浄され、すすぎ洗いされる。Next, after soaking for a predetermined period of time, the cleaning object 6 is transported by an automatic conveyance mechanism.
is transferred to the second tank 1b. The cleaning liquid (limonene) in the second tank 1b is cleaner than the first tank 1a and flows from the third tank IC. This system is widely used as the inlet method for cleaning liquid in many multi-tank cleaning apparatuses, in which clean new cleaning liquid is introduced into the last tank, and the overflow causes it to flow down into the previous tanks. Therefore, the object to be washed is sequentially washed with a liquid having a high degree of cleanliness and then rinsed.
次に、第３槽ＩＣの最終洗浄を終えた洗浄物６は、隣接
する液切り室１ｄに移され、所定時間静置してリモネン
を滴下、除去する。ここで、大部分のリモネンが除去さ
れるが、表面に濡れている分や細孔中に入っているもの
は残留する。Next, the cleaning object 6 that has completed the final cleaning of the third tank IC is moved to the adjacent liquid draining chamber 1d, and is left standing for a predetermined period of time to drip and remove limonene. At this point, most of the limonene is removed, but some that is wet on the surface and in the pores remains.
次に、洗浄物６を減圧質２に移し、ふた２ａを閉じてか
ら、カットバルブ２ｂを開は減圧ポンプ３により室内を
排気する。減圧条件は、リモネンのその温度における飽
和蒸気以下とするのが効率的であり、リモネンの飽和蒸
気圧は、第２表に示す通りで、室内が５ ｔｏｒｒ以下
の圧力となったのを第２表
確認した後３分間保持し、大気圧に戻し、洗浄物６を取
出す。Next, the object to be washed 6 is transferred to the vacuum chamber 2, the lid 2a is closed, and the cut valve 2b is opened to exhaust the interior of the room using the vacuum pump 3. It is efficient to reduce the pressure to below the saturated vapor pressure of limonene at that temperature, and the saturated vapor pressure of limonene is as shown in Table 2. After checking the surface, the pressure is maintained for 3 minutes, the pressure is returned to atmospheric pressure, and the object 6 to be washed is taken out.
第３図は本発明の第２の実施例の概略を示す工程図であ
る。FIG. 3 is a process diagram showing an outline of a second embodiment of the present invention.
第２の実施例は、第３図に示すように、リモネンによる
洗浄工程は、前記第１の実施例と同じもので、減圧乾燥
工程に新たな工夫を加えたものである。In the second embodiment, as shown in FIG. 3, the washing step with limonene is the same as in the first embodiment, but a new idea is added to the reduced-pressure drying step.
即ち、前記第１の実施例ては、減圧室２と排気ポンプ３
はカットバルブ２ｂを介して連結されていたが、これに
対し、第２の実施例では、減圧室２０と排気ポンプ３０
の間に水冷式トラップ４０を装備した例である。That is, in the first embodiment, the decompression chamber 2 and the exhaust pump 3
were connected via a cut valve 2b, whereas in the second embodiment, the decompression chamber 20 and the exhaust pump 30
This is an example in which a water-cooled trap 40 is installed between the two.
これにより、排気ポンプ油中へのリモネンの溶解による
混入が減少し、設備保守（油交換）期間か著しく延長し
た。This reduced the amount of dissolved limonene in the exhaust pump oil and significantly extended the equipment maintenance (oil change) period.
また、同時に、水冷式トラップ４０により回収されるリ
モネンは、リモネン回収再利用システム５０により精製
され、再び洗浄用として利用可能となった。At the same time, the limonene recovered by the water-cooled trap 40 is purified by the limonene recovery and reuse system 50, and can be used again for cleaning.
尚、このトラップには、さらに、低温の液体窒素を用い
ても良く、排気中のリモネン蒸気の分圧によって適宜選
択することも可能である。In addition, low-temperature liquid nitrogen may also be used for this trap, and it is also possible to appropriately select it depending on the partial pressure of limonene vapor in the exhaust gas.
また、減圧室２０の内壁にもかなりのリモネンが凝縮付
着する場合もあり、これもドレンバルブ２３を適時開き
回収再利用される。Furthermore, a considerable amount of limonene may condense and adhere to the inner wall of the decompression chamber 20, and this is also collected and reused by opening the drain valve 23 at an appropriate time.
尚、本発明は実施例に示した洗浄プロセス條件および減
圧室の材質や構造、および、排気の方法や温度等に限定
されるものではなく、リモネンを９５％以上含む洗浄剤
を用いて洗浄した後、洗浄物に残留するリモネンを減圧
下で強制的に蒸発除去する全ての場合を含むことは本文
の記述内容から明白である。Note that the present invention is not limited to the cleaning process conditions, the material and structure of the decompression chamber, the exhaust method and temperature, etc. shown in the examples, and cleaning was performed using a cleaning agent containing 95% or more of limonene. It is clear from the description in the main text that this includes all cases where limonene remaining in the washed material is forcibly evaporated off under reduced pressure.
以上説明したように本発明の洗浄方法では、減圧室を設
は減圧乾燥することによって、電子管用部品を自然環境
への悪影響が無いリモネンを用いて効率よく脱脂洗浄す
ることが可能となる効果がある。As explained above, in the cleaning method of the present invention, by setting up a vacuum chamber and drying under reduced pressure, electron tube parts can be efficiently degreased and cleaned using limonene, which has no negative impact on the natural environment. be.
図面の簡単な説明
第１図は本発明の第１の実施例の概略を示す工程図、第
２図は本発明の第１の実施例の溶剤脱脂装置の概略構成
図、第３図は本発明の第２の実施例の概略を示す工程図
である。Brief Description of the Drawings Fig. 1 is a process diagram showing an outline of the first embodiment of the present invention, Fig. 2 is a schematic configuration diagram of the solvent degreasing apparatus of the first embodiment of the present invention, and Fig. 3 is a diagram showing the outline of the solvent degreasing apparatus of the first embodiment of the present invention. It is a process diagram showing the outline of a second example of the invention.
１．１０・・・洗浄システム、１ａ・・・第１槽、１ｂ
・・・第２槽、ＩＣ・・・第３槽、１ｄ・・・液切り室
、２゜２０・・・減圧室、２ａ・・・ふた、２ｂ、２１
．４２・・・カットバルブ、２２・・・リークバルブ、
２３．４３・・・ドレンバルブ、３，３０・・・排気ポ
ンプ、６・・・洗浄物、４０・・・水冷式トラップ、４
１・・・ウォータークーラ、５０・・・リモネン回収再
利用システム。1.10...Cleaning system, 1a...First tank, 1b
...Second tank, IC...Third tank, 1d...Liquid draining chamber, 2゜20...Decompression chamber, 2a...Lid, 2b, 21
．． 42...Cut valve, 22...Leak valve,
23.43... Drain valve, 3, 30... Exhaust pump, 6... Cleaning item, 40... Water-cooled trap, 4
1...Water cooler, 50...Limonene recovery and reuse system.
代理人 弁理士 内 原 音 躬Ｚ図Agent Patent Attorney Oto Uchihara Tsuji Z diagram
Claims (1)
の脱脂洗浄を行なう電子管用部品の洗浄方法において、
前記洗浄液により前記電子管用部品を洗浄した後減圧乾
燥する工程を含むことを特徴とする電子管用部品の洗浄
方法。In a method for cleaning electron tube parts, the electron tube parts are degreased and cleaned using a cleaning solution containing 95% or more of limonene,
A method for cleaning electron tube parts, the method comprising the step of cleaning the electron tube parts with the cleaning liquid and then drying them under reduced pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500289A JPH02304837A (en) | 1989-05-17 | 1989-05-17 | Method of cleaning part for electronic tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500289A JPH02304837A (en) | 1989-05-17 | 1989-05-17 | Method of cleaning part for electronic tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02304837A true JPH02304837A (en) | 1990-12-18 |
Family
ID=14899447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12500289A Pending JPH02304837A (en) | 1989-05-17 | 1989-05-17 | Method of cleaning part for electronic tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02304837A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223471A (en) * | 1982-06-23 | 1983-12-26 | 旭化成株式会社 | Cleaning method and apparatus |
| JPS60187682A (en) * | 1984-03-06 | 1985-09-25 | Toshiba Corp | Manufacture of shadow mask |
| JPS6469699A (en) * | 1987-09-10 | 1989-03-15 | Earth Chemical Co | Detergent composition for aerosol |
-
1989
- 1989-05-17 JP JP12500289A patent/JPH02304837A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223471A (en) * | 1982-06-23 | 1983-12-26 | 旭化成株式会社 | Cleaning method and apparatus |
| JPS60187682A (en) * | 1984-03-06 | 1985-09-25 | Toshiba Corp | Manufacture of shadow mask |
| JPS6469699A (en) * | 1987-09-10 | 1989-03-15 | Earth Chemical Co | Detergent composition for aerosol |
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