JPH02292878A - Gas laser oscillation device - Google Patents
Gas laser oscillation deviceInfo
- Publication number
- JPH02292878A JPH02292878A JP11376589A JP11376589A JPH02292878A JP H02292878 A JPH02292878 A JP H02292878A JP 11376589 A JP11376589 A JP 11376589A JP 11376589 A JP11376589 A JP 11376589A JP H02292878 A JPH02292878 A JP H02292878A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- waveform
- gas laser
- frequency
- sound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 title claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 7
- 238000010891 electric arc Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 4
- 208000028659 discharge Diseases 0.000 abstract 11
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明はガスレーザ発振装置に係り、特に放電状態を検
出する装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a gas laser oscillation device, and particularly to a device for detecting a discharge state.
（従来の技術）
ＴＥＡＣＯ２レーザやエキシマレーザ等の横励起形のレ
ーザ発振装置では、ガスレーザ媒質を励起するための放
電はグロー放電となっている。(Prior Art) In a transverse excitation type laser oscillation device such as a TEACO2 laser or an excimer laser, the discharge for exciting the gas laser medium is a glow discharge.
このグロー放電が安定している場合は特に問題は無いが
、異常放電と呼ばれるアーク放電が発生すると、放電部
分の周囲の温度が異常に上昇し、ガスレーザ媒質に対す
る劣化作用を及ぼしたり、或いは電極のアーク放電部分
を蒸発させて損傷したり、この蒸発による金属ガスの存
在によってアーク放電がさらに助長されるといった問題
点が生じる。このため、レーザ発振中にアーク放電を検
出する必要が出てくる。従来では特開昭６１−１２９８
９１号公報にあるように、アーク放電検出装置には放電
の光を検出する光方式と放電電流を検出する電気方式の
ものがあることを前提として、複数の陰極を、それぞれ
、ダイオードを介して並列に接続すると共に、該接続点
の電圧が、別に設定された基準電圧より高い場合に、信
号を出力する比較器を設けてアーク放電を検出する技術
が開示されている。If this glow discharge is stable, there will be no particular problem, but if an arc discharge called abnormal discharge occurs, the temperature around the discharge part will rise abnormally, causing a deterioration effect on the gas laser medium or damaging the electrode. Problems arise in that the arc discharge portion may be evaporated and damaged, and the presence of metal gas caused by this evaporation may further aggravate the arc discharge. Therefore, it becomes necessary to detect arc discharge during laser oscillation. Previously, JP-A-61-1298
As stated in Publication No. 91, assuming that there are two types of arc discharge detection devices: an optical type that detects discharge light and an electric type that detects discharge current, multiple cathodes are connected to each other via diodes. A technique has been disclosed for detecting arc discharge by connecting in parallel and providing a comparator that outputs a signal when the voltage at the connection point is higher than a separately set reference voltage.
（発明が解決すべき課題）
放電部において、アーク放電の発生部分は特に決まって
いるわけではないので、光検出素子が置かれている所で
発生すれば検出できるが、そうでないときには当然検出
できなくなり、異常放電状態を放置してしまう問題があ
った。また、放電電流を検出する電気方式では、一般に
全電流を検出するので、僅かな電流変化によってアーク
放電の移行を正確に検出することが難しい問題があった
。さらに。上記公報の技術は、主放電電極の少なくとも
一方が複数になる、例えばピン電極状の構成の装置には
適用できても、横断面がいわゆるチャン型、またはかま
ぼこ状で全体的にはほぼ板状の電極を一対組合わせた構
成のガスレーザ発振装置には適用できない問題があった
。本発明はこのような事情に鑑みてなされたもので、ほ
ぼ板状の一対の主放電電極を有したガスレーザ発振装置
におけるアーク放電を確実に検出する手段を備えた装置
を提供淘ることを目的とする。(Problem to be Solved by the Invention) In the discharge section, the part where arc discharge occurs is not particularly determined, so if it occurs where the photodetection element is placed, it can be detected, but if it is not, of course it cannot be detected. There was a problem in that the abnormal discharge state was left unattended. Further, in the electrical method of detecting the discharge current, since the entire current is generally detected, there is a problem in that it is difficult to accurately detect the transition of arc discharge due to a slight change in the current. moreover. Although the technique of the above-mentioned publication can be applied to a device in which at least one of the main discharge electrodes has a plurality of main discharge electrodes, for example, a pin electrode configuration, the cross section is so-called chang-shaped or semi-cylindrical, and the overall shape is almost plate-like. There was a problem that the method could not be applied to a gas laser oscillation device configured by combining a pair of electrodes. The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a device that is equipped with means for reliably detecting arc discharge in a gas laser oscillation device that has a pair of main discharge electrodes that are substantially plate-shaped. shall be.
［発明の構成コ
（課題を解決するための手段と作用）
気密容器内に相対向して設けられこの気密容器内に封入
されたガスレーザ媒質を励起する少なくとも一対の主放
電電極を備えたガスレーザ発振装置において、上記主放
電電極の放電音を検出する検出手段と、この検出手段で
検出した上記放電音の周波数を解析する周波数解析器と
、この周波数解析器で得た上記放電音の波形を基準波形
と比較して放電状態を判別する判別部とを備えた構成と
したもので、アーク放電と他の放電とを明確に区別する
。[Configuration of the Invention (Means and Effects for Solving the Problems) Gas laser oscillation comprising at least a pair of main discharge electrodes that are provided opposite to each other in an airtight container and excite a gas laser medium sealed in the airtight container. The apparatus includes a detection means for detecting the discharge sound of the main discharge electrode, a frequency analyzer for analyzing the frequency of the discharge sound detected by the detection means, and a waveform of the discharge sound obtained by the frequency analyzer as a reference. This configuration includes a discriminator that discriminates the discharge state by comparing it with the waveform, and clearly distinguishes arc discharge from other discharges.
（実施例） 以下、実施例を示す図面に基づいて本発明を説明する。(Example) EMBODIMENT OF THE INVENTION Hereinafter, the present invention will be described based on drawings showing examples.
第１図に示す実施例のように本発明は大きく分けて、ガ
スレーザ発振装置と、放電音を採取して放電状態を検出
する検出手段とで構成されている。上記ガスレーザ発振
装置はガスレーザ媒質の流れる方向と、主放電方向およ
び共娠軸方向の三方向が互いに直交するいわゆる三軸直
交形で、円筒状の気密容器（１）と、この気密容器（１
）内に所定の間隔を開け、それぞれ支持体（３ａ），
（３ｂ）に支持されて設けられ、断面がいわゆるチャン
型の一対の主放電電極（４）． （５１ と、同じく気
密容器（１）内に設けられ封入されたガスレーザ媒質を
冷却する熱交換器（６）および冷却されたガスレーザ媒
質を容器内で循環させて主放電空間部に供給する循環手
段としての送風機（７）と、気密容器（１）の両側部に
気密に取付けられた共振ミラー（８ａ）（８ｂ）と、主
放電電極（４）． （５）に放電電荷を供給する高圧劃
１９）と、上記放電電荷を制御する制御部（１０）とを
備えている。As shown in the embodiment shown in FIG. 1, the present invention is broadly divided into a gas laser oscillation device and a detection means for collecting discharge sound and detecting the discharge state. The above-mentioned gas laser oscillation device is of a so-called triaxial orthogonal type in which the flow direction of the gas laser medium, the main discharge direction, and the coplanar axis direction are orthogonal to each other, and includes a cylindrical airtight container (1) and this airtight container (1).
) with a predetermined interval between the supports (3a),
(3b), a pair of main discharge electrodes (4). (51), a heat exchanger (6) that is also provided in the airtight container (1) and cools the sealed gas laser medium, and a circulation means that circulates the cooled gas laser medium within the container and supplies it to the main discharge space. a blower (7), a resonant mirror (8a) (8b) airtightly attached to both sides of the airtight container (1), and a high-pressure generator that supplies discharge charge to the main discharge electrodes (4) and (5). 19), and a control section (10) that controls the discharged charge.
一方、上記検出手段は集音器としてのマイクロホン（１
１）と、このマイクロホン（１ｌ）で集めた音の周波数
を解析する周波数解析器（ｌ２）と、所定の周波数波形
、例えばアーク発生時の周波数の所定時間における波形
を基準信号として周波数解析器（１２）からの波形信号
とを比較し、その比較結果によって上記放電状態を判別
し、または上記制御部（１０）に放電電荷を制御する制
御信号を発する判別部（ｌ３）とからなっている。なお
、周波数解析器（ｌ２）は不要な音をカットするフィル
ター（図示せず）が備えられている。On the other hand, the detection means uses a microphone (1) as a sound collector.
1), a frequency analyzer (l2) that analyzes the frequency of the sound collected by this microphone (ll), and a frequency analyzer (l2) that uses a predetermined frequency waveform, for example, the waveform of the frequency at the time of arc occurrence at a predetermined time as a reference signal. 12), and determines the discharge state based on the comparison result, or issues a control signal to the control unit (10) to control the discharge charge. Note that the frequency analyzer (l2) is equipped with a filter (not shown) for cutting unnecessary sounds.
次に上記の構成の作用について説明する。ガスレーザ媒
質が循環され、また主放電電極（４）． （５１の放電
でレーザ発振が開始される。このレーザ発振中、主放電
電極（４）． （５）間の放電音と送風機（７）の作動
音とがマイクロホン（１１）検出される。この検出され
た音は周波数解析器（ｌ２）に入力され、ここで送風機
（７）の作動音がカットされ、周波数波形が解析さされ
る。第２図は周波数解析器（１２）で検出された主放電
発生時の通常状態（グロー放電）における周波数波形（
Ａ）、第３図は同じく異常状態（アーク放電）の周波数
波形（Ｂ）であり、横軸は周波数を示し、縦軸は音ｆｆ
ｉ（ｄＢ）であるが、測定においては電圧に変換されて
検出される。Next, the operation of the above configuration will be explained. A gas laser medium is circulated and the main discharge electrode (4). (Laser oscillation starts with the discharge of 51. During this laser oscillation, the discharge sound between the main discharge electrodes (4) and (5) and the operating sound of the blower (7) are detected by the microphone (11). The detected sound is input to the frequency analyzer (12), where the operating sound of the blower (7) is cut and the frequency waveform is analyzed. Figure 2 shows the main sound detected by the frequency analyzer (12). Frequency waveform in normal state (glow discharge) when discharge occurs (
A), Figure 3 shows the frequency waveform (B) in the same abnormal state (arc discharge), where the horizontal axis shows the frequency and the vertical axis shows the sound ff.
i (dB), but during measurement, it is converted to voltage and detected.
ただし、これら周波数波形はレーザ管の形状等で異なる
ので、その形状毎に基準波形を校正する必要がある。上
記第２図、第３図の周波数波形から明らかなように、２
〜４ｋＨｚの間で波形が相違していることが分かる。こ
の相違は判別部（１３）で判別され発振を停止されるか
、または、グロー放電に移行させる制御信号が制御部（
９）に送られる。However, since these frequency waveforms differ depending on the shape of the laser tube, etc., it is necessary to calibrate the reference waveform for each shape. As is clear from the frequency waveforms in Figures 2 and 3 above, 2
It can be seen that the waveforms are different between 4 kHz and 4 kHz. This difference is determined by the discriminator (13) and the oscillation is stopped, or the control signal for transitioning to glow discharge is sent to the control unit (13).
9).
なお、周波数波形（Ｂ）は主放電全体がアークになった
場合でも、部分的にアークになった場合でも当然異なる
。Note that the frequency waveform (B) naturally differs whether the main discharge is entirely arced or partially arced.
なお、上記実施例では一対のほぼ板状の主放電電極を備
えたガスレーザ発振装置の場合について説明したが、こ
れに限らず一方がピン状電極の場合についても適用でき
る。Note that, in the above embodiment, a gas laser oscillation device including a pair of substantially plate-shaped main discharge electrodes has been described, but the present invention is not limited to this, and can also be applied to a case in which one of the main discharge electrodes is a pin-shaped electrode.
［発明の効果］
主放電が全体的にアークに移行したときはもちろん、部
分的に移行した場合でも周波数スペクトルの変化で確実
に検出でき、異常放電状態をそのまま放置してしまって
いた問題を解消することができた。[Effects of the invention] Not only when the main discharge has completely shifted to an arc, but also when it has partially shifted, it can be reliably detected by changes in the frequency spectrum, solving the problem of leaving abnormal discharge states as they are. We were able to.
第１図は本発明の一実施例を示す縦断面図、第（Ｉ２） 判別部 FIG. 1 is a vertical sectional view showing one embodiment of the present invention, No. (I2) Discrimination part
Claims (1)
されたガスレーザ媒質を励起する少なくとも一対の主放
電電極を備えたガスレーザ発振装置において、上記主放
電電極の放電音を検出する検出手段と、この検出手段で
検出された上記放電音の周波数を解析する周波数解析器
と、この周波数解析器で得た上記放電音の波形を基準波
形と比較して放電状態を判別する判別部とを備えたこと
を特徴とするガスレーザ発振装置。In a gas laser oscillator device comprising at least a pair of main discharge electrodes that are provided opposite to each other in an airtight container and excite a gas laser medium sealed in the airtight container, a detection means for detecting discharge sound of the main discharge electrodes; , comprising a frequency analyzer that analyzes the frequency of the discharge sound detected by the detection means, and a discriminator that compares the waveform of the discharge sound obtained by the frequency analyzer with a reference waveform to determine the discharge state. A gas laser oscillation device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376589A JPH02292878A (en) | 1989-05-08 | 1989-05-08 | Gas laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376589A JPH02292878A (en) | 1989-05-08 | 1989-05-08 | Gas laser oscillation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02292878A true JPH02292878A (en) | 1990-12-04 |
Family
ID=14620576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11376589A Pending JPH02292878A (en) | 1989-05-08 | 1989-05-08 | Gas laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02292878A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0691385A1 (en) * | 1994-05-06 | 1996-01-10 | Tektronix, Inc. | Phase change inks and methods for using them in an ink jet printer |
-
1989
- 1989-05-08 JP JP11376589A patent/JPH02292878A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0691385A1 (en) * | 1994-05-06 | 1996-01-10 | Tektronix, Inc. | Phase change inks and methods for using them in an ink jet printer |
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