JPH02291493A - Self-cooling sealing liquid supply device for vacuum pump - Google Patents
Self-cooling sealing liquid supply device for vacuum pumpInfo
- Publication number
- JPH02291493A JPH02291493A JP1112018A JP11201889A JPH02291493A JP H02291493 A JPH02291493 A JP H02291493A JP 1112018 A JP1112018 A JP 1112018A JP 11201889 A JP11201889 A JP 11201889A JP H02291493 A JPH02291493 A JP H02291493A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- tube passage
- liquid
- supply device
- hollow body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 42
- 238000001816 cooling Methods 0.000 title claims abstract description 13
- 238000007789 sealing Methods 0.000 title abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 35
- 238000009834 vaporization Methods 0.000 abstract description 3
- 230000008016 vaporization Effects 0.000 abstract description 3
- 238000005470 impregnation Methods 0.000 abstract 2
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 229920006395 saturated elastomer Polymers 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000110 cooling liquid Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は吸入側から水等の封入液を供給し、シ−リング
及び冷却効果を持たせた真空ポンプに使用される封入液
供給装置に関するものである。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a sealed liquid supply device used in a vacuum pump that supplies a sealed liquid such as water from the suction side and has a sealing and cooling effect. It is something.
真空ポンプは圧縮機と原理的には同じであり、吸入した
ガスを圧縮するためにかなりの高温になる。そのため、
吸引するガスとともに冷却用の水等の液体を供給するタ
イプのものが知られている。A vacuum pump is basically the same as a compressor, and in order to compress the gas it sucks in, it reaches a fairly high temperature. Therefore,
A type that supplies liquid such as water for cooling along with the gas to be sucked is known.
その場合、この液体は冷却と同時にロータとケーシング
間等の密閉すなわちシーリングを向上させるためにも役
立てられている。In this case, this liquid is used not only for cooling but also for improving the sealing between the rotor and the casing.
しかるに、このような液封式真空ポンプは、封入された
水温によってポンプの性能が大きく変化する。これは水
温によって水の飽和蒸気圧が変わり、，ポンプ内の圧力
が冷却用水の水温に対応した飽和蒸気圧以下には下がら
ないためである。たとえば水温が１００゜Ｃであれば、
飽和蒸気圧は７６０ｍｎ＋Ｈｇ（以下ｒｍｍＨｇ」をｒ
Ｔｏｒｒ，４で表す。）であり、水温が２０゜Ｃであれ
ば、飽和蒸気圧は１７ Ｔｏｒｒになる。第３図は、真
空ポンプ内の封入水の温度によって、真空ポンプの到達
し得る真空度、すなわち到達真空度が変化する様子を示
した線図である。これによれば、冷却用の水温が１５゜
Ｃであれば到達真空度は１０〜１５Ｔｏｒｒに達するが
、３０゜Ｃでは２ ５〜３ ０Ｔｏｒｒ， ４ ｏ”ｃ
では３５Ｔｏｒｒ〜４０Ｔｏｒｒとなって、到達真空度
が封入される水の温度に大きく影響を受けることがわか
る。However, the performance of such liquid-ring vacuum pumps varies greatly depending on the temperature of the water sealed in the pump. This is because the saturated vapor pressure of water changes depending on the water temperature, and the pressure inside the pump does not fall below the saturated vapor pressure corresponding to the temperature of the cooling water. For example, if the water temperature is 100°C,
The saturated vapor pressure is 760 mn+Hg (rmmHg)
It is expressed as Torr,4. ), and if the water temperature is 20°C, the saturated vapor pressure will be 17 Torr. FIG. 3 is a diagram showing how the degree of vacuum that the vacuum pump can reach, that is, the ultimate degree of vacuum, changes depending on the temperature of the water sealed in the vacuum pump. According to this, if the cooling water temperature is 15°C, the ultimate vacuum will reach 10 to 15 Torr, but at 30°C, it will reach 25 to 30 Torr, 4 o"c
It becomes 35 Torr to 40 Torr, and it can be seen that the ultimate vacuum degree is greatly affected by the temperature of the water sealed.
実際に真空ポンプを使用する場合、封入水用の低温の水
を豊富に使用できれば問題はないが、水の確保が難しい
場合がある。また封入水には真空ポンプを通過するガス
に含まれた物質が溶け込むので、その物質によっては公
害の原因となり、封入水を放流出来ない場合もある。そ
の場合は真空ポンプの吐出側でガスから分離した水を再
利用するが、当然この封入水の温度は、真空ポンプの圧
縮作用を受けて上昇しており、前述の飽和蒸気圧が上昇
している。したがって、真空ポンプは高真空に到達でき
ず、性能がダウンしてしまう。When actually using a vacuum pump, there is no problem as long as you can use plenty of low-temperature water for the sealed water, but it may be difficult to secure water. Furthermore, since substances contained in the gas passing through the vacuum pump dissolve in the sealed water, some of these substances may cause pollution, and the sealed water may not be able to be discharged. In that case, the water separated from the gas on the discharge side of the vacuum pump is reused, but of course the temperature of this sealed water rises due to the compression action of the vacuum pump, and the saturated vapor pressure mentioned above rises. There is. Therefore, the vacuum pump cannot reach a high vacuum and its performance decreases.
この問題を解決するものとして、第４図に示すシステム
が知られている。このシステムにおいては、まず、真空
ポンプａから吐出された水等の混大したガスを、消音セ
パレー夕タンクｂでガスと水に分離する。次に、分離さ
れた水を熱交換機Ｃで冷却する。ｄは熱交換機Ｃを冷却
するチラーである。こうして冷却された水を再び真空ボ
ンプａの吸入口から供給し、循環して使用することとし
ている。A system shown in FIG. 4 is known as a solution to this problem. In this system, first, a mixed gas such as water discharged from a vacuum pump a is separated into gas and water in a sound-deadening separator tank b. Next, the separated water is cooled by heat exchanger C. d is a chiller that cools the heat exchanger C. The water cooled in this manner is supplied again from the suction port of the vacuum pump a, and is circulated for use.
液封式真空ポンプは、封入水温度が１５゜Ｃ以下であれ
ば、乾式真空ポンプに比べて優れたものとなる。しかし
ながら、上記第４図のシステムのように装置が大掛かり
となり、高価なものとなってしまうという問題があった
。A liquid ring vacuum pump is superior to a dry vacuum pump if the temperature of the sealed water is 15°C or less. However, like the system shown in FIG. 4 above, there is a problem in that the apparatus is large-scale and expensive.
本発明は上記の事実に鑑みてなされたもので、簡単な構
成で低温の封入液を確保できる真空ポンプ用の自冷式封
入液供給装置を提供することを目的としている。The present invention has been made in view of the above-mentioned facts, and an object of the present invention is to provide a self-cooled filled liquid supply device for a vacuum pump that can secure a low-temperature filled liquid with a simple configuration.
上記の目的を達成するために本発明は、真空ポンプの吸
入口と連通し得る内管路と、両端が閉止された外管路と
からなる二重管路の外壁に、前記外管路に連通ずる封入
液用の注入口を形成し、前記内管路内に前記外管路と連
通ずる液貯留用の中空体を設置し、該中空体に封入液噴
出用のノズル孔を穿設した構成としている。In order to achieve the above object, the present invention provides a method for connecting the external pipe line to the outer wall of a double pipe line consisting of an inner pipe line that can communicate with the suction port of a vacuum pump and an outer pipe line that is closed at both ends. An injection port for the sealed liquid was formed in the inner pipe, and a hollow body for storing the liquid communicating with the outer pipe was installed in the inner pipe, and a nozzle hole for spouting the filled liquid was bored in the hollow body. It is structured as follows.
または、真空ポンプの吸入口と連通し得る管路の外壁に
封入液用の注入口を形成し、該注入口から管路内に細径
のチューブを曲折して配設し、該チューブに封入液噴出
用のノズル孔を穿設した構成としている。Alternatively, an inlet for the sealed liquid is formed on the outer wall of the conduit that can communicate with the suction port of the vacuum pump, a small diameter tube is bent and arranged from the inlet into the conduit, and the sealed liquid is placed in the tube. It is constructed with a nozzle hole for ejecting liquid.
注入口から二重管路の外管路に注入された液体は外管路
を通って内管路内の中空体内に入り、中空体に穿設され
たノズル孔から内管路内に噴出する。そして噴出した液
体は吸入口の真空度に応じて飽和するまで蒸発する。こ
の蒸発によって周囲から気化熱を奪い、それによって液
体自身が冷却され、冷却用液体として適当な温度に下が
り、真空ポンプ内に送りこまれる。The liquid injected from the injection port into the outer pipe of the double pipe passes through the outer pipe and enters the hollow body in the inner pipe, and is ejected into the inner pipe from a nozzle hole drilled in the hollow body. . The ejected liquid then evaporates until it is saturated depending on the degree of vacuum at the suction port. This evaporation removes vaporization heat from the surroundings, thereby cooling the liquid itself, lowering the temperature to an appropriate level as a cooling liquid, and feeding it into the vacuum pump.
または、真空ポンプの吸入口と連設した管路内に設けら
れた細径のチューブに液体を供給する。Alternatively, the liquid is supplied to a small diameter tube provided in a conduit connected to the suction port of the vacuum pump.
液体はチューブに穿設されたノズル孔から管路内に噴出
する。そして噴出した液体は上記と同様に冷却され、真
空ポンプ内に送りこまれる。The liquid is ejected into the conduit from a nozzle hole formed in the tube. The ejected liquid is then cooled in the same manner as above and sent into the vacuum pump.
〔実施例］ 以下に図面を用いて本発明の実施例を説明する。〔Example] Embodiments of the present invention will be described below with reference to the drawings.
本発明の自冷式封入液供給装置は、液封式の真空ポンプ
であればどんなタイプにも使用できるものであるが、実
施例においてはスクリューロータ弐の真空ポンプに使用
している。第１図は本発明の一実施例を示す図である。Although the self-cooled sealed liquid supply device of the present invention can be used with any type of liquid-ring type vacuum pump, in the embodiment, it is used with a screw rotor two vacuum pump. FIG. 1 is a diagram showing an embodiment of the present invention.
同図において、１は真空ポンプで、２はその吸入口、３
はケーシングである。ケーシング３内には、主従のスク
リューロータ４，５が噛み合うように配置され、矢印Ａ
の方向に回転して吸入口２からガスを吸引する。吸引さ
れたガスは矢印Ｂの方向に流れてスクリューロータ４，
５の右側に設けられた図示しない吐出口から排出される
。一方冷却用の液体は吸入口２からガスと共に供給され
、ケーシング３内に進入して真空ポンプ１を冷却する。In the figure, 1 is a vacuum pump, 2 is its suction port, and 3 is a vacuum pump.
is the casing. Inside the casing 3, master and slave screw rotors 4 and 5 are arranged so as to mesh with each other, as indicated by the arrow A.
The gas is sucked from the suction port 2 by rotating in the direction of . The sucked gas flows in the direction of arrow B to the screw rotor 4,
The liquid is discharged from an unillustrated discharge port provided on the right side of 5. On the other hand, cooling liquid is supplied from the suction port 2 together with the gas, enters the casing 3, and cools the vacuum pump 1.
同時にスクリューロータ４，５相互間およびスクリュー
ロータ４，５とケーシング３間をシールして真空度の向
上も図っている。At the same time, the degree of vacuum is improved by sealing between the screw rotors 4 and 5 and between the screw rotors 4 and 5 and the casing 3.
本発明の自冷式封入液供給装置は、上記の真空ボンプ１
の吸入口２に取付けられるものである。The self-cooling type sealed liquid supply device of the present invention has the above-mentioned vacuum pump 1.
It is attached to the inlet 2 of the.
第１図により装置の構成を説明する。６は二重管路で、
管路内壁７ａによって内管路７と外管路８に分かれてい
る。内管路７は、真空ポンプ１の吸入口２と連通し、外
管路８の両端は閉止されている。この二重管路６の両端
にはフランジ継手９，１０があり、一方のフランジ継手
９と真空ボンプ１の吸入口２とが接続され、他方のフラ
ンジ継手１０は図示しない吸入側の管路に接続される。The configuration of the apparatus will be explained with reference to FIG. 6 is a double pipe,
The pipe is divided into an inner pipe 7 and an outer pipe 8 by an inner pipe wall 7a. The inner pipe line 7 communicates with the suction port 2 of the vacuum pump 1, and both ends of the outer pipe line 8 are closed. There are flange joints 9 and 10 at both ends of this double pipe line 6, one flange joint 9 is connected to the suction port 2 of the vacuum pump 1, and the other flange joint 10 is connected to the suction side pipe line (not shown). Connected.
二重管路６の外壁６ａの右端近傍には、外管路８に連通
ずる封入液用の注入口１１が形成されている。Near the right end of the outer wall 6a of the double conduit 6, an injection port 11 for the sealed liquid is formed which communicates with the outer conduit 8.
一方内管路７内の左端近傍には、前記外管路８と直径方
向の両端で連通ずる管路１２が設けられ、中間に吐出孔
１２ａが穿設されている。管路１２の吐出孔１２ａ近傍
部分は、周囲を液貯留用の中空体１３で覆われ、この中
空体１３には封入液噴出用の多数のノズル孔１３ａが穿
設されている。On the other hand, in the vicinity of the left end of the inner pipe line 7, a pipe line 12 is provided which communicates with the outer pipe line 8 at both ends in the diametrical direction, and a discharge hole 12a is bored in the middle. A portion of the conduit 12 near the discharge hole 12a is surrounded by a hollow body 13 for storing liquid, and this hollow body 13 has a large number of nozzle holes 13a for ejecting the sealed liquid.
封入液用の注入口１１から、例えば真空ポンプの吐出ガ
スから分離され循環してきた高温になっている水等の液
体が注入される。注入口１１から入った水は外管路８を
通り、管路１２から吐出口１２ａを経て中空体１３に達
し、多数のノズル孔１３ａから一斉に内管路７内に噴出
される。内管路７内は真空ポンプ１の吸入口２と連通し
ており、圧力が真空近くまで低くなっている。そのため
ノズル孔１３ａから噴出された水は内管路７内で飽和す
るまで急速に気化し、周囲から気化熱を奪い水の温度を
大きくしかも簡単に下げる。中空体１３を内管路７の左
端、すなわち二重管路６におけるガスの流れの上流側に
配置しているので、外管路８内の水も管路内壁７ａを通
して冷却される。A liquid such as high-temperature water, which has been separated from the discharge gas of a vacuum pump and circulated, is injected from an injection port 11 for the sealed liquid. Water entering from the inlet 11 passes through the outer pipe line 8, reaches the hollow body 13 from the pipe line 12 through the discharge port 12a, and is ejected into the inner pipe line 7 from a large number of nozzle holes 13a all at once. The inside of the inner pipe line 7 communicates with the suction port 2 of the vacuum pump 1, and the pressure is low to near vacuum. Therefore, the water ejected from the nozzle hole 13a rapidly vaporizes in the inner pipe 7 until it is saturated, absorbs vaporization heat from the surroundings, and greatly and easily lowers the temperature of the water. Since the hollow body 13 is disposed at the left end of the inner pipe line 7, that is, on the upstream side of the gas flow in the double pipe line 6, the water in the outer pipe line 8 is also cooled through the inner pipe wall 7a.
したがって、管路内壁７ａを銅などの熱伝導性の良い材
料で製造すれば冷却効果はより大きくなる。Therefore, if the pipe inner wall 7a is made of a material with good thermal conductivity such as copper, the cooling effect will be greater.
このようにして二重管路６を通過してきた水は、真空ポ
ンプ１の冷却用に適した温度となり、ポンプ１内に送り
こまれる。The water that has passed through the double pipe line 6 in this manner has a temperature suitable for cooling the vacuum pump 1, and is fed into the pump 1.
第２図は本発明の第二の実施例の図である。まず構成か
ら説明するが、真空ポンプｌに関しては前述した実施例
と同じであるから省略する。この真空ボンプ１の吸入口
２と連通する管路１５を設け、管路１５の一方のフラン
ジ継手１６で吸入口２と接続し、他方のフランジ継手１
７で図示しない吸入側配管と接続する。管路１５の外壁
１５ａに封入液用の注入口１８を形成し、この注入口１
８から管路１５内に管路径より細径のチューブ１９を入
れ、管路１５内にコイル状に曲折して配置する。コイル
は注入口１８から管路１５の左端にまで達するように形
成されている。チューブ１９の先端は折曲されてコイル
の中心に配され、この先端部分に多数のノズル孔１９ａ
を穿設する。FIG. 2 is a diagram of a second embodiment of the invention. First, the configuration will be explained, but since the vacuum pump 1 is the same as the above-mentioned embodiment, the explanation will be omitted. A conduit 15 communicating with the suction port 2 of the vacuum pump 1 is provided, and one flange joint 16 of the conduit 15 is connected to the suction port 2, and the other flange joint 1 is connected to the suction port 2.
Connect with suction side piping (not shown) at 7. An injection port 18 for the sealed liquid is formed in the outer wall 15a of the conduit 15, and this injection port 1
A tube 19 having a smaller diameter than the pipe diameter is inserted into the pipe line 15 from 8, and is bent into a coil shape and placed inside the pipe line 15. The coil is formed to extend from the injection port 18 to the left end of the conduit 15. The tip of the tube 19 is bent and placed at the center of the coil, and a number of nozzle holes 19a are formed at this tip.
to be drilled.
第１図の実施例と同様に真空ポンプの吐出ガスから分離
された高温の水を循環して、注入口１８から供給する。As in the embodiment of FIG. 1, high temperature water separated from the discharge gas of the vacuum pump is circulated and supplied from the inlet 18.
高温の水はコイル状のチューブ１９内を進行し、先端に
穿設された多数のノズル孔１９ａから管路１５内に噴出
される。噴出された水は第１図の実施例と同様に冷却さ
れ、真空ポンプ１内に封入水として送りこまれる。The high temperature water travels through the coiled tube 19 and is ejected into the conduit 15 from a number of nozzle holes 19a formed at the tip. The ejected water is cooled in the same manner as in the embodiment shown in FIG. 1, and is sent into the vacuum pump 1 as sealed water.
チューブｌ９はコイル状に成形され、先端がコイルの中
心に来るようにしてあるので、ノズル孔１９ａから噴出
された水はコイル全体にかかり、コイル内の水も冷却さ
れる。チューブ１９が熱伝導のよい銅管などであれば、
より効果的である。Since the tube 19 is formed into a coil shape and its tip is placed at the center of the coil, the water ejected from the nozzle hole 19a covers the entire coil, and the water inside the coil is also cooled. If the tube 19 is a copper tube with good heat conduction,
more effective.
なおチューブ１９の形状はコイル状に限定されるもので
はなく、管路１５内に適当な形状で曲折を持って配置さ
れていれば、同様の効果を奏するものである。Note that the shape of the tube 19 is not limited to a coiled shape, and the same effect can be achieved as long as the tube 19 is arranged in an appropriate shape and bent within the conduit 15.
以上説明したように本発明によれば、非常に簡単な装置
によって、冷却液の温度を下げることができ、真空ポン
プの吐出側ガスから分離した水を循環させても、充分冷
却用として適正な温度まで低下させることができる。ま
た、清掃等のための分解組み立ても不要であり、メンテ
ナンスも容易で、トータルとして安価になる。As explained above, according to the present invention, it is possible to lower the temperature of the cooling liquid with a very simple device, and even when water separated from the discharge side gas of the vacuum pump is circulated, it is not sufficient for cooling. temperature can be lowered. Furthermore, there is no need to disassemble and reassemble for cleaning, etc., and maintenance is easy, resulting in a total cost.
第１図は本発明の一実施例を示す縦断面図、第２図は本
発明の他の実施例を示す縦断面図、第３図は冷却用の水
温と到達真空度の関係を示す線図、
第４図は従来の冷却水循環システムの構成図である。
６・・・二重管路、６ａ・・・外壁、７・・・内管路、
８・・・外管路、１１．１８・・・注入口、１３・・・
中空体、ｌ３ａ ，１９ａ・・・ノズル孔、１５・・・
管路、１９・・・細径のチューブ。Fig. 1 is a longitudinal sectional view showing one embodiment of the present invention, Fig. 2 is a longitudinal sectional view showing another embodiment of the invention, and Fig. 3 is a line showing the relationship between cooling water temperature and ultimate vacuum degree. Figure 4 is a configuration diagram of a conventional cooling water circulation system. 6...Double pipe line, 6a...Outer wall, 7...Inner pipe line,
8...Outer pipe line, 11.18...Inlet, 13...
Hollow body, l3a, 19a... nozzle hole, 15...
Conduit, 19...Small diameter tube.
Claims (2)
が閉止された外管路とからなる二重管路の外壁に、前記
外管路に連通する封入液用の注入口を形成し、前記内管
路内に前記外管路と連通する液貯留用の中空体を設置し
、該中空体に封入液噴出用のノズル孔を穿設したことを
特徴とする真空ポンプ用自冷式封入液供給装置。(1) An inlet for the sealed liquid that communicates with the outer pipe is installed on the outer wall of the double pipe, which consists of an inner pipe that can communicate with the suction port of the vacuum pump, and an outer pipe that is closed at both ends. a hollow body for liquid storage that communicates with the outer conduit is installed in the inner conduit, and a nozzle hole for ejecting the enclosed liquid is bored in the hollow body. Cold type sealed liquid supply device.
入液用の注入口を形成し、該注入口から管路内に細径の
チューブを曲折して配設し、該チューブに封入液噴出用
のノズル孔を穿設したことを特徴とする真空ポンプ用自
冷式封入液供給装置。(2) An inlet for the sealed liquid is formed on the outer wall of the conduit that can communicate with the inlet of the vacuum pump, and a small diameter tube is bent and arranged from the inlet into the conduit. A self-cooling filled liquid supply device for a vacuum pump, characterized by having a nozzle hole for spouting out the filled liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1112018A JP2644039B2 (en) | 1989-05-02 | 1989-05-02 | Self-cooling type sealed liquid supply device for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1112018A JP2644039B2 (en) | 1989-05-02 | 1989-05-02 | Self-cooling type sealed liquid supply device for vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02291493A true JPH02291493A (en) | 1990-12-03 |
| JP2644039B2 JP2644039B2 (en) | 1997-08-25 |
Family
ID=14575921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1112018A Expired - Lifetime JP2644039B2 (en) | 1989-05-02 | 1989-05-02 | Self-cooling type sealed liquid supply device for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2644039B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009108696A (en) * | 2007-10-26 | 2009-05-21 | Kobe Steel Ltd | Screw compressor |
| CN103423129A (en) * | 2012-05-24 | 2013-12-04 | 三菱电机株式会社 | Sealed rotary refrigeration compressor |
| JP2016033372A (en) * | 2015-10-15 | 2016-03-10 | 三菱電機株式会社 | Hermetic rotary type refrigerant compressor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562494A (en) * | 1979-06-22 | 1981-01-12 | Hitachi Ltd | Rotary compressor |
| JPS6256782U (en) * | 1985-09-27 | 1987-04-08 | ||
| JPS6256783U (en) * | 1985-09-27 | 1987-04-08 |
-
1989
- 1989-05-02 JP JP1112018A patent/JP2644039B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562494A (en) * | 1979-06-22 | 1981-01-12 | Hitachi Ltd | Rotary compressor |
| JPS6256782U (en) * | 1985-09-27 | 1987-04-08 | ||
| JPS6256783U (en) * | 1985-09-27 | 1987-04-08 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009108696A (en) * | 2007-10-26 | 2009-05-21 | Kobe Steel Ltd | Screw compressor |
| CN103423129A (en) * | 2012-05-24 | 2013-12-04 | 三菱电机株式会社 | Sealed rotary refrigeration compressor |
| JP2016033372A (en) * | 2015-10-15 | 2016-03-10 | 三菱電機株式会社 | Hermetic rotary type refrigerant compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2644039B2 (en) | 1997-08-25 |
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