JPH02263308A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH02263308A JPH02263308A JP5464090A JP5464090A JPH02263308A JP H02263308 A JPH02263308 A JP H02263308A JP 5464090 A JP5464090 A JP 5464090A JP 5464090 A JP5464090 A JP 5464090A JP H02263308 A JPH02263308 A JP H02263308A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- magnetic head
- read
- groove
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010802 sludge Substances 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000000605 extraction Methods 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、スライダに読み書き素子を備えた浮上型の磁
気ヘッドに関し、レール部間の面の全体を、実質的に同
一の平面とすることにより、高速応答及び高密度記録対
応の小型磁気ヘットの場合には特に、製造工程数が少な
くて済み、切粉やスラッジ等を確実に除去でき、スライ
ダ端面の面積を拡大して取出電極等の設計の自由度を上
げた磁気ヘッドを提供できるようにしたものである。[Detailed Description of the Invention] <Industrial Field of Application> The present invention relates to a floating magnetic head having a read/write element on a slider, in which the entire surface between the rail portions is substantially the same plane. Therefore, especially in the case of small magnetic heads that support high-speed response and high-density recording, the number of manufacturing steps is reduced, chips and sludge can be reliably removed, and the area of the slider end face can be expanded to make it easier to remove lead-out electrodes, etc. This makes it possible to provide a magnetic head with increased freedom in design.
〈従来の技術〉
浮上型６ｉｉ気ヘツドは、磁気ディスクに対して相対的
に高速９！ａする時に空気の粘性によって発生する動圧
を利用して、磁気ディスク面との間に微小な浮上量を発
生させるようにしたもので、第３図に従来の一般的な構
造を示す。図において、１はスライダ、２は読み書き素
子、３は保護膜、４は読み書き素子２の取出電極である
。<Prior Art> The floating type 6II air head has a relatively high speed of 9! compared to the magnetic disk. This system uses the dynamic pressure generated by the viscosity of the air when moving a magnetic disk to generate a small amount of flying height between the magnetic disk and the surface of the magnetic disk. FIG. 3 shows a conventional general structure. In the figure, 1 is a slider, 2 is a read/write element, 3 is a protective film, and 4 is an extraction electrode of the read/write element 2.
スライダ１は、磁気ディスクとの対向面側に、空気流れ
方向ａに沿い、間隔をおいて突設した２つのレール部１
０１．１０２を有し、レール部１０１．１０２の表面１
０３．１０４を浮上面として利用すると共に、表面１０
３．１０４の空気流入方向の端部にテーバ面１０３ａ、
１０４ａを設けである。The slider 1 has two rail portions 1 protruding from the surface facing the magnetic disk along the air flow direction a with an interval.
01.102, surface 1 of the rail part 101.102
03.104 is used as the air bearing surface, and the surface 10
3. Taper surface 103a at the end of 104 in the air inflow direction,
104a is provided.
レール部１０１−１０２間のスライダ面は、第４図にも
示すように、レール部１０１．１０２の内面に沿って形
成された第１の凹溝１０５及び第２の凹溝１０６と、両
凹溝１０５−１０６間に形成された面１０７とを含んで
いる。第１の凹溝１０５及び第２の凹溝１０６は、レー
ル部１０１．１０２を機械加工によって形成する際のチ
ッピングを防止すると共に、レール部１０１．１０２の
幅を画定するために設けられたものである。両凹溝１０
５．１０６及び面１０７は、レール部１０１．１０２の
表面１０３．１０４から面１０７までの深さをα、面１
０７から第１の凹溝１０５及び第２の凹溝１０６の底面
までの深さをβとしたとき、αが約１００μｍ、βが約
１５０μｍとなるように形成してあった。As shown in FIG. 4, the slider surface between the rail parts 101 and 102 has a first groove 105 and a second groove 106 formed along the inner surface of the rail parts 101 and 102, and a double groove. and a surface 107 formed between the grooves 105 and 106. The first groove 105 and the second groove 106 are provided to prevent chipping when forming the rail portion 101.102 by machining and to define the width of the rail portion 101.102. It is. Double concave groove 10
5.106 and surface 107, α is the depth from surface 103.104 of rail part 101.102 to surface 107, and surface 1
When β is the depth from 07 to the bottom of the first groove 105 and the second groove 106, α is approximately 100 μm and β is approximately 150 μm.
更に、レール部１０１．１０２の外面にも、第１の凹溝
１０５及び第２の凹溝１０６と同様の深さを有する第３
の凹溝１０８及び第４の凹溝１０９を設けである。第３
の凹溝１０８及び第４の凹溝１０９も、レール部１０１
．１０２を機械加工によって形成する際のチッピング防
止、レール幅画定のために設けられたものである。Further, a third groove having the same depth as the first groove 105 and the second groove 106 is formed on the outer surface of the rail portion 101.102.
A groove 108 and a fourth groove 109 are provided. Third
The groove 108 and the fourth groove 109 are also connected to the rail part 101.
．． This is provided to prevent chipping when forming the rail 102 by machining and to define the rail width.
第５図（ａ）、（ｂ）は、凹溝加工工程を示す図である
。多数の磁気ヘッドを整列して形成したウェハーより、
多数の磁気ヘッドＡ、、Ａ２、Ａ３．、、有する列単位
の磁気ヘッド集合体を切出した後、第５図（ａ）に示す
ように、各磁気ヘッドＡ、、Ａ２、Ａ３毎に、斜線領域
で示す溝加工を施し、第１の凹溝１０５〜第４の凹溝１
０９を形成する。第１の凹溝１０５〜第４の凹溝１０９
は、レール部１０１．１０２の表面１０３．１０４から
の深さδが、約２５０ μｍ程度となるように形成する
。第１の凹溝１０５〜第４の凹溝１０９の幅ｄ１〜ｄ４
は、レール部１０１−１０２間の間隔よりも著しく小さ
い微小間隔であって、幅ｄ１と幅ｄ２、幅ｄ３と幅ｄ４
がほぼ等しくなるように形成する。FIGS. 5(a) and 5(b) are diagrams showing the groove machining process. From a wafer formed by aligning many magnetic heads,
A large number of magnetic heads A, , A2, A3 . , , after cutting out the magnetic head assembly in units of rows, as shown in FIG. Concave groove 105 to fourth concave groove 1
09 is formed. First groove 105 to fourth groove 109
is formed so that the depth δ from the surface 103.104 of the rail portion 101.102 is approximately 250 μm. Widths d1 to d4 of the first groove 105 to the fourth groove 109
are extremely small intervals that are significantly smaller than the interval between the rail parts 101 and 102, and the widths d1 and d2, and the widths d3 and d4.
are formed so that they are almost equal.
次に、第５図（ｂ）に示すように、第１の凹溝１０５と
第２の凹溝１０６との間のスライダ面の斜線領域を機械
加工によって研削する。このときの深さは、１００．μ
ｍ程度である。これにより、レール部１０１．１０２の
表面１０３．１０４から面１０７までの深さαが約１０
０μｍ１面１０７から第１の凹溝１０５及び第２の凹溝
１０６の底面までの深さβが約１５０μｍの磁気ヘッド
となる。Next, as shown in FIG. 5(b), the shaded area of the slider surface between the first groove 105 and the second groove 106 is ground by machining. The depth at this time is 100. μ
It is about m. As a result, the depth α from the surface 103.104 of the rail portion 101.102 to the surface 107 is approximately 10
The magnetic head has a depth β of about 150 μm from the 0 μm surface 107 to the bottom surfaces of the first groove 105 and the second groove 106.
そして、切断線Ｘ−ｘで切断して、磁気ヘッドの車体を
取り出す。Then, it is cut along the cutting line X-x and the body of the magnetic head is taken out.
読み書き素子２は、ＩＣ製造テクノロジと同様のプロセ
スにしたがって形成された薄膜素子である。読み書き素
子２は、通常、２個備えられ、レール部１０１．１０２
の略中間部において、スライダ１の空気流出方向で見た
端面に付着させ、アルミナ等でなる保護膜３により覆っ
である。The read/write element 2 is a thin film element formed according to a process similar to IC manufacturing technology. Usually, two read/write elements 2 are provided, and the rail parts 101 and 102
The protective film 3 made of alumina or the like is attached to the end face of the slider 1 when viewed in the air outflow direction, and is covered with a protective film 3 made of alumina or the like.
取出電極４は、読み書ぎ素子２のそれぞれに一対備えら
れており、読み書き素子２を構成する導体コイル膜（０
図示しない）に電気的に導通している。この取出室′Ｆ
ｉ４には、図示しない＆ｎ気ディスク装置から導かれた
リード線が接続される。A pair of lead-out electrodes 4 are provided for each of the read/write elements 2, and a pair of lead-out electrodes 4 are provided on each of the read/write elements 2.
(not shown). This extraction chamber'F
A lead wire led from an unillustrated disk device is connected to i4.
〈発明が解決しようとする課題〉
上述した溝加工及び磁気ヘット導体を切出すときの切断
工程において、第１の凹溝１０５〜第４の凹溝１０９内
に切粉やスラッジ等が残る。これらの切粉やスラッジ等
は、磁気記録媒体表面の損傷や、ヘッドクラッシュ等の
原因になるので、従来は、自動刷毛洗浄装置等を使用し
て排除していた。<Problems to be Solved by the Invention> In the above-described groove processing and cutting process when cutting out the magnetic head conductor, chips, sludge, etc. remain in the first to fourth grooves 105 to 109. Since these chips, sludge, etc. cause damage to the surface of the magnetic recording medium and head crashes, conventionally, automatic brush cleaning equipment or the like has been used to remove them.
この場合、第３の凹溝１０８及び第４の凹溝１０９は、
−側部が外部に開いているので、切粉やスラッジ等は上
述の自動刷毛洗浄工程により容易に除去できる。In this case, the third groove 108 and the fourth groove 109 are
- Since the sides are open to the outside, chips, sludge, etc. can be easily removed by the automatic brush cleaning process described above.
ところが、第１の凹溝１０５及び第２の凹溝１０６は、
両側がレール部１０１．１０２の内面及び面の内面によ
って閉じられていて、平面部１０７の表面からの深さβ
が約１５０μｍと、かなり深いため、両凹溝１０５．１
０６内に入った切粉やスラッジ等が除去しにくく、凹溝
１０５．１０６内の残存した切粉やスラッジ等により、
磁気記録媒体表面の損傷や、ヘッドクラッシュ等を招く
ことがあった。However, the first groove 105 and the second groove 106 are
Both sides are closed by the inner surface of the rail portion 101, 102 and the inner surface of the surface, and the depth β from the surface of the plane portion 107 is
is approximately 150 μm, which is quite deep, so the double concave groove 105.1
It is difficult to remove the chips and sludge that have entered the grooves 105 and 106, and the chips and sludge that remain in the grooves 105 and 106 may cause
This may lead to damage to the surface of the magnetic recording medium, head crash, etc.
特に、磁気ヘッドは、コンピュータとの組合せにおいて
、データ転送の高速化及び磁気記録の高密度化に対応す
るため、全体形状が益々小型化される傾向にある。磁気
ヘッドは小型になるほど、質量が低下し、高速アクセス
が可能になり、高速応答性、高密度記録及び記憶容量増
大に貢献できるようになる。このような小型の磁気ヘッ
ドでは、凹溝１０５．１０６の幅も小さくなり、切粉や
スラッジ等の排除が益々困難になっている。In particular, in combination with a computer, the overall shape of magnetic heads tends to become smaller and smaller in order to accommodate faster data transfer and higher density magnetic recording. As the magnetic head becomes smaller, its mass decreases, high-speed access becomes possible, and it becomes possible to contribute to high-speed response, high-density recording, and increased storage capacity. In such a small magnetic head, the width of the grooves 105 and 106 is also reduced, making it increasingly difficult to remove chips, sludge, and the like.
また、第１の凹溝１０５及び第２の凹溝１０６が深いた
め、小型磁気ヘッドでは特に、取出電極４を形成する面
積が小さくなり、取出電極４を形成するための余裕度が
小さくなるという問題点もあった。In addition, since the first groove 105 and the second groove 106 are deep, the area for forming the extraction electrode 4 is small, especially in a small magnetic head, and the margin for forming the extraction electrode 4 is small. There were also problems.
そこで、本発明の課題は、上述する従来の問題点を解決
し、特に小型の磁気ヘッドにおいて、製造工程数が少な
くて済み、切粉やスラッジ等を確実に除去でき、スライ
ダ端面の面積を拡大して取出電極等の設計の自由度を上
げた磁気ヘットを提供することである。Therefore, the object of the present invention is to solve the above-mentioned conventional problems, and to reduce the number of manufacturing steps, especially in small magnetic heads, to reliably remove chips and sludge, and to increase the area of the slider end face. An object of the present invention is to provide a magnetic head in which the degree of freedom in designing extraction electrodes and the like is increased.
〈課題を解決するための手段〉
上述する課題を解決するため、本発明は、スライダに読
み書き素子を備えた磁気ヘッドであって、
前記スライダは、磁気記録媒体と対向する面側に、空気
流出方向に沿う２つのレール部が間隔を隔てて突設され
ており、
前記レール部間のスライダ面は、その全体が実質的に同
一の平面を構成していること
を特（牧とする。<Means for Solving the Problems> In order to solve the above-mentioned problems, the present invention provides a magnetic head including a read/write element on a slider, the slider having an air outflow on the side facing the magnetic recording medium. It is particularly important that two rail portions extending along the direction protrude at a distance from each other, and that the entire slider surface between the rail portions constitutes substantially the same plane.
〈作用〉
レール部間のスライダ面はその全体が実質的に同一の平
面を構成しているので、高速アクセ各及び高密度記録対
応の小型磁気ヘッドにおいても、切粉やスラッジ等を確
実に除去できる。<Function> Since the entire slider surface between the rail sections forms substantially the same plane, chips, sludge, etc. can be reliably removed even in small magnetic heads compatible with high-speed access and high-density recording. can.
また、スライダ端面の面積か増大するので、小型磁気ヘ
ッドにおいても、取出電極を形成するための面積余裕度
が増す。Furthermore, since the area of the slider end face is increased, even in a small magnetic head, the area margin for forming the extraction electrode is increased.
〈実施例〉
第１図は本発明に係る浮上型磁気ヘッドの斜視図である
。図において、第３図と同一の参照符号は同一性ある構
成部分を示し、レール部１０１−１０２間の面１０７の
全体が実質的に同一の平面を構成している。従来のレー
ル部内側部の凹溝が存在せず、平坦な面となるので、切
粉やスラッジ等を簡単、かつ、確実に除去できる。<Embodiment> FIG. 1 is a perspective view of a floating magnetic head according to the present invention. In the figure, the same reference numerals as in FIG. 3 indicate the same components, and the entire surface 107 between the rail portions 101 and 102 constitutes substantially the same plane. Since there is no concave groove on the inside of the conventional rail part and the surface is flat, chips, sludge, etc. can be easily and reliably removed.
また、レール部内側部の凹溝が不要であるため、加工工
程数が少なくて済み、製品コストが安価になる。Further, since a groove on the inner side of the rail portion is not required, the number of processing steps is reduced, and the product cost is reduced.
更に、取出電極４を形成するための面積が増大し、その
設計の自由度が上がる。Furthermore, the area for forming the extraction electrode 4 increases, increasing the degree of freedom in its design.
実施例において、２木のレール部１０１．１０２のうち
、レール部１０１の空気イ血出端部にのみ読み書き素子
２を備え、レール部１０２には読み書き素子は備えない
。或いは第２図に示すように、レール部１０２の空気流
出端部にのみ、読み書き素子２を備え、レール部１０１
には読み書き素子を備えない。従来、この種の磁気ヘッ
ドでは、第３図に示すように、２つのレール部１０１．
１０２のそれぞれに読み書き素子２を備えるのが普通で
あるが、磁気ディスク装置として使用する場合、２つの
読み書ぎ素子２のすべてが使用される訳ではなく、何れ
か一方の読み書き素子２のみが使用される。それにもか
かわらず、従来の磁気ヘッドでは、２つの読み書き素子
２を備えているため、読み書き素子２に起因するトラブ
ル発生の確率が高くなる。例えば、浮上面１０３．１０
４の平面度を出すための研磨工程における割れ、クラッ
ク等の発生確率は、読み書き素子の数が多い程、高くな
る。これらの欠陥は歩留を低下させ、浮上特性及び読み
書き動作に悪影響を与える。In the embodiment, of the two rail sections 101 and 102, only the air bleeding end of the rail section 101 is provided with the read/write element 2, and the rail section 102 is not provided with a read/write element. Alternatively, as shown in FIG. 2, the read/write element 2 is provided only at the air outflow end of the rail section 102,
does not have read/write elements. Conventionally, in this type of magnetic head, as shown in FIG. 3, two rail sections 101.
102 is normally provided with a read/write element 2, but when used as a magnetic disk device, not all of the two read/write elements 2 are used, and only one of the read/write elements 2 is used. used. Nevertheless, since the conventional magnetic head includes two read/write elements 2, the probability of trouble occurring due to the read/write elements 2 is high. For example, air bearing surface 103.10
The probability of occurrence of cracks, cracks, etc. in the polishing process to obtain a flatness of 4 increases as the number of read/write elements increases. These defects reduce yield and adversely affect flying characteristics and read/write operations.
実施例に示す如く、２つのレール部１０１．１０２の一
方にのみ、読み書き素子２を備えさせる構造であると、
２つのレール部１０１．１０２の両者に読み書き素子２
を備える一般的構造に比較して、読み書き素子２に起因
するトラブル発生の確率が低下し、歩留りが向上すると
共に、浮上特性及び磁気記録再生特性が向上するという
効果が得られる。また、１個の読み書き素子２を備える
だけであるので、この１個の読み書き素子２に必要なス
ペースまで形状を小型化し、高速応答及び高密度記録対
応の小型の磁気ヘッドを提供できる。As shown in the embodiment, only one of the two rail parts 101 and 102 is provided with the read/write element 2,
Read/write elements 2 are provided on both of the two rail parts 101 and 102.
Compared to a general structure including the read/write element 2, the probability of trouble occurring due to the read/write element 2 is reduced, the yield is improved, and the flying characteristics and magnetic recording/reproducing characteristics are improved. Furthermore, since only one reading/writing element 2 is provided, the size can be reduced to the space required for this one reading/writing element 2, and a compact magnetic head capable of high-speed response and high-density recording can be provided.
レール部１０１．１０２のどちらに読み書き素子を担持
させるかは、磁気ディスク装置の要求によって定まるが
、第１図及び第２図の磁気ヘッドを用意すれば、この要
求に充分に対応できる。Which of the rail portions 101 and 102 should carry the read/write element is determined by the requirements of the magnetic disk device, but this requirement can be satisfactorily met by providing the magnetic heads shown in FIGS. 1 and 2.
〈発明の効果〉
以上述べたように、本発明は、スライダに読み書き素子
を備えた磁気ヘッドであって、スライダは、磁気記録媒
体と対向する面側に、空気流出方向に沿う２つのレール
部が間隔を隔てて突設されており、レール部間の面は、
全体として実質的に同一の平面を構成しているから、特
に高速応答及び高密度記録対応の小型磁気ヘッドにおい
ても、切粉やスラッジ等を簡単、かつ、確実に除去し、
磁気記録媒体表面の損傷や、ヘッドクラッシュ等を防止
すると共に、スライダ側端面の面積を増大させて、取出
電極等を形成するのに必要な面積を確保し、設計の自由
度及びリード線接続作業性を向上させた磁気ヘッドを提
供できる。<Effects of the Invention> As described above, the present invention provides a magnetic head that includes a read/write element on a slider, and the slider has two rail portions along the air outflow direction on the side facing the magnetic recording medium. are protruded at intervals, and the surface between the rails is
Since the entire plane is substantially the same, chips and sludge can be easily and reliably removed, especially in small magnetic heads that support high-speed response and high-density recording.
In addition to preventing damage to the surface of the magnetic recording medium and head crashes, the area of the end face on the slider side is increased to secure the area necessary for forming the extraction electrodes, etc., and improve flexibility in design and lead wire connection work. A magnetic head with improved performance can be provided.
第１図は本発明に係る浮上型磁気ヘッドの斜視図、第２
図は同じく空気流出端側から見た側面図第３図は従来の
磁気ヘッドの斜視図、第４図は同じく空気流出端側から
見た側面図、第５図（ａ）、（ｂ）はスライダ溝加工工
程を示す図である。
１・・・スライダ ２・・・読み書き素子１０１・
・・端面
１０１．１０２・・・レール部
１０３．１０４・・・レール部の表面
１０５・・・第１の凹溝
１０６・・・第２の凹溝
１０７・・・面
第１ 図
第３国
第２図
’＠４１ｎFIG. 1 is a perspective view of a floating magnetic head according to the present invention, and FIG.
3 is a perspective view of a conventional magnetic head, FIG. 4 is a side view similarly seen from the air outflow end, and FIGS. 5(a) and (b) are It is a figure showing a slider groove processing process. 1... Slider 2... Read/write element 101.
...End face 101.102...Rail part 103.104...Rail part surface 105...First groove 106...Second groove 107...Surface 1 Figure 3 Country Figure 2'@41n
Claims (2)
って、 前記スライダは、磁気記録媒体と対向する面側に、空気
流れ方向に沿う２つのレール部が間隔を隔てて突設され
ており、 前記レール部間の面は、全体として実質的に同一の平面
を構成していること を特徴とする磁気ヘッド。(1) A magnetic head including a read/write element on a slider, wherein the slider has two rails protruding from a surface facing the magnetic recording medium at a distance along the air flow direction, and A magnetic head characterized in that the surfaces between the rail portions constitute substantially the same plane as a whole.
にのみ、備えられていること を特徴とする特許請求の範囲第１項に記載の磁気ヘッド
。(2) The magnetic head according to claim 1, wherein the read/write element is provided only on one of the two rail sections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5464090A JPH02263308A (en) | 1990-03-06 | 1990-03-06 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5464090A JPH02263308A (en) | 1990-03-06 | 1990-03-06 | Magnetic head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9533988A Division JPH01267821A (en) | 1988-04-18 | 1988-04-18 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02263308A true JPH02263308A (en) | 1990-10-26 |
Family
ID=12976376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5464090A Pending JPH02263308A (en) | 1990-03-06 | 1990-03-06 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02263308A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60247872A (en) * | 1984-05-24 | 1985-12-07 | Mitsubishi Electric Corp | Working method of negative pressure type slider |
| JPS61144784A (en) * | 1984-12-17 | 1986-07-02 | Tdk Corp | Magnetic disk device |
-
1990
- 1990-03-06 JP JP5464090A patent/JPH02263308A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60247872A (en) * | 1984-05-24 | 1985-12-07 | Mitsubishi Electric Corp | Working method of negative pressure type slider |
| JPS61144784A (en) * | 1984-12-17 | 1986-07-02 | Tdk Corp | Magnetic disk device |
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