JPH0226231U - - Google Patents
Info
- Publication number
- JPH0226231U JPH0226231U JP10428088U JP10428088U JPH0226231U JP H0226231 U JPH0226231 U JP H0226231U JP 10428088 U JP10428088 U JP 10428088U JP 10428088 U JP10428088 U JP 10428088U JP H0226231 U JPH0226231 U JP H0226231U
- Authority
- JP
- Japan
- Prior art keywords
- micropatterns
- densely arranged
- dummy
- areas
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図は一実施例を示す平面図、第２図は従来
のパターンを示す平面図である。 ２……下地、４……アルミニウム配線、６……
ダミーパターン、Ａ……微細パターンが密に配置
された領域、Ｂ……本来のパターンが疎な領域。
のパターンを示す平面図である。 ２……下地、４……アルミニウム配線、６……
ダミーパターン、Ａ……微細パターンが密に配置
された領域、Ｂ……本来のパターンが疎な領域。
Claims (1)
- 密に配置された微細パターンをもつ層内でパタ
ーン密度が疎な領域に密に配置されたダミー微細
パターンが設けられている半導体集積回路装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10428088U JPH0226231U (ja) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10428088U JPH0226231U (ja) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226231U true JPH0226231U (ja) | 1990-02-21 |
Family
ID=31335857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10428088U Pending JPH0226231U (ja) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226231U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196424A (ja) * | 1989-01-25 | 1990-08-03 | Rohm Co Ltd | 半導体装置の製造方法 |
| JPH0669214A (ja) * | 1991-03-01 | 1994-03-11 | Nec Corp | 半導体装置 |
-
1988
- 1988-08-05 JP JP10428088U patent/JPH0226231U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196424A (ja) * | 1989-01-25 | 1990-08-03 | Rohm Co Ltd | 半導体装置の製造方法 |
| JPH0669214A (ja) * | 1991-03-01 | 1994-03-11 | Nec Corp | 半導体装置 |