JPH02252111A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH02252111A JPH02252111A JP7453589A JP7453589A JPH02252111A JP H02252111 A JPH02252111 A JP H02252111A JP 7453589 A JP7453589 A JP 7453589A JP 7453589 A JP7453589 A JP 7453589A JP H02252111 A JPH02252111 A JP H02252111A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- stress
- thin film
- anisotropy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 22
- 239000010408 film Substances 0.000 claims description 53
- 230000000694 effects Effects 0.000 abstract description 11
- 230000035699 permeability Effects 0.000 abstract description 5
- 230000001939 inductive effect Effects 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000005381 magnetic domain Effects 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 9
- 230000005415 magnetization Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は磁気ディスク等の磁気記録媒体に信号を記録
し、再生する薄膜磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a thin film magnetic head for recording and reproducing signals on a magnetic recording medium such as a magnetic disk.
「従来の技術」
第５図は従来の薄膜磁気ヘッドの構成例を示す断面図で
あり、この図において、■は非磁性体の基板、２はＳｉ
Ｏ３あるいはＡｌｔｏｓ等の下部保護膜、３は高透磁率
の磁性膜（下部へラドコア）、４は非磁性膜である。"Prior Art" FIG. 5 is a cross-sectional view showing an example of the structure of a conventional thin film magnetic head.
A lower protective film such as O3 or Altos, 3 a high magnetic permeability magnetic film (lower rad core), and 4 a non-magnetic film.
また、５は電気絶縁膜、６はコイル、７は電気絶縁膜、
８は高透磁率の磁性膜（」二部へラドコア）、９はギャ
ップ、１０はポールティップである。Further, 5 is an electrical insulating film, 6 is a coil, 7 is an electrical insulating film,
8 is a magnetic film with high magnetic permeability (the second part is a rad core), 9 is a gap, and 10 is a pole tip.
「発明が解決しようとする課題」
ところで、上述した薄膜磁気ヘッドには、高周波で高い
透磁率を得るために、面内に一軸異方性を持つ磁性膜３
および８が用いられ、かつ、これらは磁化困難軸方向で
動作している。従って、磁性膜３および８には、第６図
に示ず磁区構造となるように、膜形成時あるいは膜形成
後の磁場処理等により誘導磁気異方性が付与されている
（特開昭６３−２９４．０６号公報参照）。"Problems to be Solved by the Invention" By the way, in order to obtain high magnetic permeability at high frequencies, the above-mentioned thin film magnetic head uses a magnetic film 3 having uniaxial anisotropy in the plane.
and 8 are used, and these are operating in the hard axis direction. Therefore, the magnetic films 3 and 8 are given induced magnetic anisotropy by magnetic field treatment during or after film formation so as to have a magnetic domain structure not shown in FIG. (Refer to Publication No.-294.06).
ところが、この薄膜磁気ヘッドの３次元応力分布に起因
する応力誘起異方性および磁性膜３と８との形状に起因
する形状異方性等によって第６図の磁区構造が崩れる場
合がある。However, the magnetic domain structure shown in FIG. 6 may collapse due to stress-induced anisotropy caused by the three-dimensional stress distribution of the thin film magnetic head and shape anisotropy caused by the shapes of the magnetic films 3 and 8.
まず、応力誘起異方性について説明する。磁性膜３およ
び８のポールティップ１０の先端部の応力が共にギャッ
プ９の深さ方向にあるため、これらの磁性膜３および８
の磁歪定数が正であると、逆磁歪効果により、応力誘起
異方性が膜形成時および膜形成後に付与された誘導磁気
異方性を打ち消す。これにより、ポールティップ１０の
磁区構造は動作方向に対して平行方向が磁化容易軸とな
ってしまう。また、磁性膜３および８のポールティップ
１０以外の部分（以下、ヘッドコア後部という）におい
ては、応力はほぼ等方向であるが、逆磁歪効果により、
周辺部では周囲方向に磁化容易軸が生じ、この部分の磁
区構造は湾曲する（第７図参照）。First, stress-induced anisotropy will be explained. Since the stress at the tip of the pole tip 10 of the magnetic films 3 and 8 is both in the depth direction of the gap 9, these magnetic films 3 and 8
When the magnetostriction constant of is positive, the stress-induced anisotropy cancels the induced magnetic anisotropy imparted during and after film formation due to the inverse magnetostriction effect. As a result, in the magnetic domain structure of the pole tip 10, the axis of easy magnetization is parallel to the operating direction. In addition, in the parts of the magnetic films 3 and 8 other than the pole tip 10 (hereinafter referred to as the rear part of the head core), the stress is approximately in the same direction, but due to the inverse magnetostrictive effect,
In the peripheral region, an axis of easy magnetization occurs in the circumferential direction, and the magnetic domain structure in this region is curved (see FIG. 7).
次に、形状異方性について説明する。ポールティップ１
０の部分においては、形状に起因する動作方向に対して
平行方向の形状異方性が膜形成時および膜形成後に付与
された誘導磁気異方性を打ち消す。これにより、ポール
ティップ１０の磁区構造は第７図と同様な磁区構造とな
ってしまう。Next, shape anisotropy will be explained. pole tip 1
In the 0 portion, the shape anisotropy in the direction parallel to the operating direction due to the shape cancels the induced magnetic anisotropy imparted during and after film formation. As a result, the magnetic domain structure of the pole tip 10 becomes a magnetic domain structure similar to that shown in FIG.
そして、ポールティップＩＯの磁区構造が第７図の磁区
構造になることにより、膜形成時および膜形成後にイτ
ｊ与された誘導磁気異方性の磁化容易軸と垂直な方向へ
磁壁が移動する、即ち、ゆらぎが発生し、このゆらぎが
薄膜磁気ヘッドの再生波形の歪その他の特性劣化の原因
となるという問題があった。また、ヘッドコア後部の磁
区構造が第７図の磁区構造になることにより、上部およ
び下部ヘッドコア３および８の保磁力が増大し、軟磁気
特性が低下するという問題があった。Since the magnetic domain structure of the pole tip IO becomes the magnetic domain structure shown in FIG.
It is said that the domain wall moves in a direction perpendicular to the axis of easy magnetization of the given induced magnetic anisotropy, that is, fluctuation occurs, and this fluctuation causes distortion of the reproduced waveform of the thin-film magnetic head and other characteristic deterioration. There was a problem. Further, since the magnetic domain structure at the rear of the head core becomes the magnetic domain structure shown in FIG. 7, there is a problem in that the coercive force of the upper and lower head cores 3 and 8 increases, and the soft magnetic characteristics deteriorate.
そこで、ポールティップＩＯの部分の応力誘起異方性お
よび形状異方性の影響を除去し、誘導磁気異方性を強め
ることが必要である。但し、誘導磁気異方性を必要以上
に強めると、透磁率が低下するので、形状異方性に打ち
勝つ程度にする必要がある。この内、形状異方性に関し
ては、薄膜磁気ヘッドの形状を形状異方性の方向が変わ
るほど変更することは難しいが、応力誘起異方性に関し
ては、磁性膜３および８の組成および膜形成条件を変更
して磁歪定数の制御をすることにより、その影響を低減
することが可能であり、所定の磁歪定数を持つ薄膜磁気
ヘッドの磁性膜３および８の組成および膜形成条件を規
定した幾つかの従来例がある。そして、この従来例にお
いては、磁性膜３および８全体の磁歪定数を同一として
その値を〜３
規定しているが、磁性膜３および８の各部において応力
分布が異なるため、これに起因する応力誘起異方性も磁
性膜３および８の各部において異なり、最適な設計がさ
れないという欠点があった。Therefore, it is necessary to eliminate the effects of stress-induced anisotropy and shape anisotropy in the pole tip IO portion and to strengthen the induced magnetic anisotropy. However, if the induced magnetic anisotropy is strengthened more than necessary, the magnetic permeability will decrease, so it is necessary to increase the induced magnetic anisotropy to an extent that overcomes the shape anisotropy. Regarding shape anisotropy, it is difficult to change the shape of a thin film magnetic head to the extent that the direction of shape anisotropy changes, but regarding stress-induced anisotropy, the composition and film formation of magnetic films 3 and 8 are difficult to change. By changing the conditions and controlling the magnetostriction constant, it is possible to reduce the effect, and it is possible to reduce the effect by controlling the magnetostriction constant. There is a conventional example of this. In this conventional example, the magnetostriction constant of the entire magnetic films 3 and 8 is set to be the same and the value is defined as ~3, but since the stress distribution is different in each part of the magnetic films 3 and 8, the stress caused by this is The induced anisotropy also differs in each part of the magnetic films 3 and 8, which has the disadvantage that an optimal design cannot be made.
また、応力による影響を完全に除去するために磁歪定数
を零にする考え方（特開昭６２−２８１１０６号公報参
照）もあるが、この場合には、磁性膜３および８の組成
および膜形成条件の制御が難しいという欠点と、形状異
方性に対する補償効果が得られないという欠点とがあっ
た。There is also a concept of zeroing out the magnetostriction constant in order to completely eliminate the influence of stress (see Japanese Patent Laid-Open No. 62-281106), but in this case, the composition of the magnetic films 3 and 8 and the film formation conditions The disadvantages are that it is difficult to control and that no compensation effect for shape anisotropy can be obtained.
この発明は上述した事情に鑑みてなされたもので、再生
波形の歪その他の特性劣化がない薄膜磁気ヘッドを提供
することを目的としている。The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a thin film magnetic head that is free from distortion of reproduced waveforms and other characteristic deterioration.
「課題を解決するための手段」
この発明による薄膜磁気ヘッドは、零ないし負の磁歪定
数を持つ磁性膜によって形成されたポールティップと、
零ないし正の磁歪定数を持つ磁性膜によって形成された
ヘッドコア後部とを具備することを特徴としている。"Means for Solving the Problems" A thin film magnetic head according to the present invention includes a pole tip formed of a magnetic film having a zero or negative magnetostriction constant;
The head core is characterized by having a rear portion of the head core formed of a magnetic film having a magnetostriction constant of zero to positive.
「作用」
この発明によれば、ポールティップの磁区構造は動作方
向に対して垂直方向が磁化容易軸となる。"Operation" According to the present invention, the magnetic domain structure of the pole tip has an axis of easy magnetization in the direction perpendicular to the operating direction.
「実施例」
以下、図面を参照してこの発明の一実施例について説明
する。第１図はこの発明の第１の実施例による薄膜磁気
ヘッドの構成を示す斜視図であり、この図において、第
５図の各部に対応する部分には同一の符号を付け、その
説明を省略する。第１図においては、磁性膜８に代えて
、零ないし負の磁歪定数（０〜−１０ＸＩＯ−’）を持
つ磁性膜１１および零ないし正の磁歪定数を持つ磁性膜
１２が新たに形成されている。従って、磁性膜１１のポ
ールティップ１０の先端部の応力がギャップ９の深さ方
向にあっても、逆磁歪効果による応力誘起異方性が膜形
成時および膜形成後に付与された誘導磁気異方性を打ち
消すことはない。これにより、磁性膜１１および１２の
磁区構造は第６図とほぼ同様となる。"Embodiment" Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the structure of a thin film magnetic head according to a first embodiment of the present invention. In this figure, parts corresponding to those in FIG. do. In FIG. 1, instead of the magnetic film 8, a magnetic film 11 having a zero to negative magnetostriction constant (0 to -10XIO-') and a magnetic film 12 having a zero to positive magnetostriction constant are newly formed. There is. Therefore, even if the stress at the tip of the pole tip 10 of the magnetic film 11 is in the depth direction of the gap 9, the stress-induced anisotropy due to the inverse magnetostrictive effect is caused by the induced magnetic anisotropy imparted during and after film formation. It doesn't cancel out gender. As a result, the magnetic domain structures of the magnetic films 11 and 12 become almost the same as that shown in FIG.
次に、この発明の第２の実施例について説明する。第２
図はこの発明の第２の実施例による薄膜磁気ヘッドの構
成を示す断面図であり、この図において、第１図および
第５図の各部に対応する部分には同一の符号を付Ｕ１そ
の説明を省略する。Next, a second embodiment of the invention will be described. Second
The figure is a sectional view showing the structure of a thin film magnetic head according to a second embodiment of the present invention. In this figure, parts corresponding to those in FIGS. 1 and 5 are denoted by the same reference numerals. omitted.
第２図においては、磁性膜１１および１２に代えて、零
ないし負の磁歪定数（０〜−１０ｘｌＯ−０）を持つ磁
性膜１３および零ないし正の磁歪定数を持つ磁性膜１４
が新たに形成されている。従って、磁性膜１３のポール
ティップ１０の先端部の応力がギャップ９の深さ方向に
あっても、逆磁歪効果による応力誘起異方性が膜形成時
および膜形成後に付与された誘導磁気異方性を打ち消す
ことはない。これにより、磁性膜１３および１４の磁区
構造は第６図とほぼ同様となる。In FIG. 2, instead of the magnetic films 11 and 12, a magnetic film 13 having a zero to negative magnetostriction constant (0 to -10xlO-0) and a magnetic film 14 having a zero to positive magnetostriction constant are used.
is newly formed. Therefore, even if the stress at the tip of the pole tip 10 of the magnetic film 13 is in the depth direction of the gap 9, the stress-induced anisotropy due to the inverse magnetostrictive effect is caused by the induced magnetic anisotropy imparted during and after film formation. It doesn't cancel out gender. As a result, the magnetic domain structures of the magnetic films 13 and 14 become almost the same as that shown in FIG.
さらに、この発明の第３の実施例について説明する。第
３図はこの発明の第３の実施例による薄膜磁気ヘッドの
構成を示す断面図であり、この図において、第２図の各
部に対応する部分には同一の符号を付け、その説明を省
略する。第３図においては、磁性膜１３および１４に代
えて、零ないし正の磁歪定数を持つ磁性膜１５および零
ないし負の磁歪定数（０〜−］ Ｏｘ Ｉ Ｏ−’）を
持つ磁性膜１６が新たに形成されている。従って、磁性
膜１５のポールティップｌＯの先端部の応力がギャップ
９の深さ方向にあっても、逆磁歪効果による応力誘起異
方性が膜形成時および膜形成後に付与された誘導磁気異
方性を打ち消すこと（Ｊない。これにより、磁性膜１５
および１６の磁区構造は第６図とほぼ同様となる。Furthermore, a third embodiment of the invention will be described. FIG. 3 is a sectional view showing the structure of a thin film magnetic head according to a third embodiment of the present invention. In this figure, parts corresponding to those in FIG. do. In FIG. 3, instead of the magnetic films 13 and 14, a magnetic film 15 having a zero to positive magnetostriction constant and a magnetic film 16 having a zero to negative magnetostriction constant (0 to -] Ox I O-') are used. newly formed. Therefore, even if the stress at the tip of the pole tip lO of the magnetic film 15 is in the depth direction of the gap 9, the stress-induced anisotropy due to the inverse magnetostriction effect is caused by the induced magnetic anisotropy imparted during and after film formation. This cancels out the magnetic properties of the magnetic film 15.
The magnetic domain structures of and 16 are almost the same as in FIG.
さらに、この発明の第４の実施例について説明する。第
４図はこの発明の第４の実施例による薄膜磁気ヘッドの
構成を示す断面図であり、この図において、第３図の各
部に対応する部分には同一の符号を付け、その説明を省
略する。第４図においては、磁性膜３に代えて、零ない
し負の磁歪定数（０〜−１０ｘ’ｌ ０−０）を持つ磁
性膜１７および零ないし正の磁歪定数を持つ磁性膜１８
およびが新たに形成されている。従って、磁性膜１７の
ポールティップ１０の先端部の応力がギャップ９の深さ
方向にあっても、逆磁歪効果による応力誘起異方性が膜
形成時および膜形成後に付与された一
誘導磁気異方性を打ち消すことはない。これにより、磁
性膜１７および１８の磁区構造は第６図とほぼ同様とな
る。Furthermore, a fourth embodiment of the present invention will be described. FIG. 4 is a cross-sectional view showing the structure of a thin film magnetic head according to a fourth embodiment of the present invention. In this figure, parts corresponding to those in FIG. do. In FIG. 4, instead of the magnetic film 3, a magnetic film 17 having a zero to negative magnetostriction constant (0 to -10x'l 0-0) and a magnetic film 18 having a zero to positive magnetostriction constant are used.
and are newly formed. Therefore, even if the stress at the tip of the pole tip 10 of the magnetic film 17 is in the depth direction of the gap 9, the stress-induced anisotropy due to the inverse magnetostriction effect is due to the one-induced magnetic anisotropy imparted during and after film formation. It does not cancel out direction. As a result, the magnetic domain structures of the magnetic films 17 and 18 become almost the same as that shown in FIG.
「発明の効果」
以」二説明したように、この発明によれば、零ないし負
の磁歪定数を持つ磁性膜によって形成されたポールティ
ップと、零ないし正の磁歪定数を持つ磁性膜によって形
成されたヘッドコア後部とを設けたので、この薄膜磁気
ヘッドの再生波形の歪その他の特性劣化がないという効
果がある。``Effects of the Invention'' As explained hereinafter, according to the present invention, the pole tip is formed of a magnetic film having a zero to negative magnetostriction constant, and the pole tip is formed of a magnetic film having a zero to positive magnetostriction constant. Since the thin film magnetic head is provided with a rear part of the head core, there is no distortion of the reproduced waveform or other characteristic deterioration of the thin film magnetic head.
第１図はこの発明の第１の実施例による薄膜磁気ヘッド
の構成を示す斜視図、第２図はこの発明の第２の実施例
による薄膜磁気ヘッドの構成を示す断面図、第３図およ
び第４図はそれぞれこの発明の第３および第４の実施例
による薄膜磁気ヘッドの構成を示す断面図、第５図は従
来の薄膜磁気ヘッドの構成例を示す断面図、第６図は従
来例およびこの発明の一実施例による薄膜磁気ヘッドの
へラドコアの磁区構造を示す図、第７図は従来の薄膜磁
気ヘッドのへラドコアの磁区構造を示す図である。
１１−１８・・・・・・磁性膜。FIG. 1 is a perspective view showing the structure of a thin film magnetic head according to a first embodiment of the invention, FIG. 2 is a sectional view showing the structure of a thin film magnetic head according to a second embodiment of the invention, and FIGS. FIG. 4 is a sectional view showing the structure of a thin film magnetic head according to a third and fourth embodiment of the present invention, FIG. 5 is a sectional view showing an example of the structure of a conventional thin film magnetic head, and FIG. 6 is a conventional example. FIG. 7 is a diagram showing the magnetic domain structure of the herad core of a thin film magnetic head according to an embodiment of the present invention, and FIG. 7 is a diagram showing the magnetic domain structure of the herad core of a conventional thin film magnetic head. 11-18...Magnetic film.
Claims (1)
ポールティップと、零ないし正の磁歪定数を持つ磁性膜
によって形成されたヘッドコア後部とを具備することを
特徴とする薄膜磁気ヘッド。A thin film magnetic head comprising a pole tip formed of a magnetic film having a zero to negative magnetostriction constant and a head core rear part formed of a magnetic film having a zero to positive magnetostriction constant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1074535A JP2721540B2 (en) | 1989-03-27 | 1989-03-27 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1074535A JP2721540B2 (en) | 1989-03-27 | 1989-03-27 | Thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02252111A true JPH02252111A (en) | 1990-10-09 |
| JP2721540B2 JP2721540B2 (en) | 1998-03-04 |
Family
ID=13550079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1074535A Expired - Lifetime JP2721540B2 (en) | 1989-03-27 | 1989-03-27 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2721540B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714120A (en) * | 1992-09-09 | 1995-01-17 | Internatl Business Mach Corp <Ibm> | Thin-film head with different magnetostriction region |
| US7312951B2 (en) * | 2004-06-23 | 2007-12-25 | Tdk Corporation | Magnetic head for perpendicular magnetic recording |
| US7576950B2 (en) | 2004-08-06 | 2009-08-18 | Sae Magnetics (H.K.) Ltd. | Perpendicular magnetic recording head utilizing tensile stress to optimize magnetic pole layer domain structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6473603A (en) * | 1987-09-14 | 1989-03-17 | Nippon Telegraph & Telephone | Articifial magnetic lattice film |
-
1989
- 1989-03-27 JP JP1074535A patent/JP2721540B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6473603A (en) * | 1987-09-14 | 1989-03-17 | Nippon Telegraph & Telephone | Articifial magnetic lattice film |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714120A (en) * | 1992-09-09 | 1995-01-17 | Internatl Business Mach Corp <Ibm> | Thin-film head with different magnetostriction region |
| US7312951B2 (en) * | 2004-06-23 | 2007-12-25 | Tdk Corporation | Magnetic head for perpendicular magnetic recording |
| US7576950B2 (en) | 2004-08-06 | 2009-08-18 | Sae Magnetics (H.K.) Ltd. | Perpendicular magnetic recording head utilizing tensile stress to optimize magnetic pole layer domain structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2721540B2 (en) | 1998-03-04 |
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