JPH02240605A - Fluoride optical fiber subjected to coating on end face and production thereof - Google Patents
Fluoride optical fiber subjected to coating on end face and production thereofInfo
- Publication number
- JPH02240605A JPH02240605A JP1060880A JP6088089A JPH02240605A JP H02240605 A JPH02240605 A JP H02240605A JP 1060880 A JP1060880 A JP 1060880A JP 6088089 A JP6088089 A JP 6088089A JP H02240605 A JPH02240605 A JP H02240605A
- Authority
- JP
- Japan
- Prior art keywords
- fluoride
- face
- film
- optical fiber
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims abstract description 50
- 239000013307 optical fiber Substances 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000005383 fluoride glass Substances 0.000 claims abstract description 12
- 239000000835 fiber Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract description 3
- 150000002222 fluorine compounds Chemical class 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminium flouride Chemical compound F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 229910001632 barium fluoride Inorganic materials 0.000 abstract 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 abstract 1
- 229910001634 calcium fluoride Inorganic materials 0.000 abstract 1
- 230000008595 infiltration Effects 0.000 abstract 1
- 238000001764 infiltration Methods 0.000 abstract 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract 1
- 229910001637 strontium fluoride Inorganic materials 0.000 abstract 1
- FVRNDBHWWSPNOM-UHFFFAOYSA-L strontium fluoride Chemical compound [F-].[F-].[Sr+2] FVRNDBHWWSPNOM-UHFFFAOYSA-L 0.000 abstract 1
- 239000010408 film Substances 0.000 description 20
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000282994 Cervidae Species 0.000 description 1
- 241000272201 Columbiformes Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/104—Coating to obtain optical fibres
- C03C25/106—Single coatings
- C03C25/1061—Inorganic coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＥ ｒ−ＹへＧレーザーなど高出力の中赤外線
光のレーザーメス装置やレーザー加工機に用いるパワー
伝送用として優れた、端面コートされたフッ化物光ファ
イバおよびその製造方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides an end surface coating that is excellent for power transmission for use in laser scalpel devices and laser processing machines that use high-output mid-infrared light such as Er-Y to G lasers. The present invention relates to a fluoride optical fiber and a method for manufacturing the same.
近年、ＺｒＦｔ、 ＨｆＦｔ、 ＢａＦｔ、 ＬａＦｓ
、 ＭＦＩ、 ＮａＦＰｂＦｔその他のフッ化物を主成
分としてなるフッ化物光ファイバは、波長２〜４ｐの中
赤外線光の透過性が優れているため、Ｅ ｒ−Ｙ Ａ
Ｇレーザー（２゜９４−光発振）などの高出力パワーレ
ーザーの伝送路等として注目されている。In recent years, ZrFt, HfFt, BaFt, LaFs
, MFI, NaFPbFt and other fluoride optical fibers have excellent transmittance for mid-infrared light with a wavelength of 2 to 4p, so E r-Y A
It is attracting attention as a transmission path for high-output power lasers such as G laser (2°94-optical oscillation).
しかしながら、フッ化物ガラスは耐湿性に劣っており、
例えばファイバ端面を大気中に長時間さらした場合、大
気中の水分と反応してしまい、ガラスの透明均質度を大
きく損なう表面結晶化が生じ、高パワー赤外光を入射さ
せた場合、表面結晶化部分に熱がたまり、ガラスが融解
して、最終的にはパワー伝送が困難な状態が生じていた
。However, fluoride glass has poor moisture resistance,
For example, if a fiber end face is exposed to the atmosphere for a long time, it will react with moisture in the atmosphere, causing surface crystallization that greatly impairs the transparency and homogeneity of the glass. Heat accumulates in the glass and melts the glass, ultimately making power transmission difficult.
本発明はこのような従来のフッ化物光ファイバにおける
問題点を解決して、高出力パワー伝送に優れた端面コー
トフッ化物光ファイバ及びそのコーティング法を提供し
ようとするものである。The present invention aims to solve the problems with conventional fluoride optical fibers and provide an end-coated fluoride optical fiber that is excellent in transmitting high output power and a coating method for the same.
本発明においては、フッ化物ガラスとの密着性に優れ、
且つ不水溶性、耐湿性に優れたフッ化物膜をフッ化物光
ファイバ端面にコーティングすることにより、フッ化物
光フッ化物端面への湿気の浸入を防止し、大気中におい
ても端面の劣化が生じず、高出力パワー伝送を可能とし
た。In the present invention, it has excellent adhesion to fluoride glass,
In addition, by coating the end face of a fluoride optical fiber with a fluoride film that is water-insoluble and has excellent moisture resistance, it prevents moisture from entering the end face of the fluoride optical fiber, and the end face does not deteriorate even in the atmosphere. , enabling high output power transmission.
すなわち、本発明は少なくともコアがフッ化物ガラスよ
り構成されているフッ化物光ファイバにおいて、端面に
ＩＡＩＦ！、 ５ｒＦｘ、 ＣａＦｓ、 ＢａＦｌ、
ＡｌＦｍの少なくとも１種よりなるフッ化物膜をコーテ
ィングされてなる端面コートされたフッ化物光ファイバ
である。That is, the present invention provides a fluoride optical fiber in which at least the core is made of fluoride glass, with IAIF! on the end face. , 5rFx, CaFs, BaFl,
This is a fluoride optical fiber whose end face is coated with a fluoride film made of at least one type of AlFm.
また、本発明は少なくともコアがフッ化物ガラスより構
成される光ファイバの端面をハロゲン系ガスの減圧プラ
ズマ下にさらして脱水・清浄化した後、該端面にｌｖｌ
ｇＦｔ、 ＳｒＦ＊、 ＣａＦｔ、 ＢａＦｔ、 ＡＪ
！Ｆｓの少なくとも１種をコーティングすることを特徴
とする端面コートされたフッ化物光ファイバの製造方法
に関する。Further, the present invention provides that after dehydrating and cleaning the end face of an optical fiber whose core is made of fluoride glass by exposing it to a reduced pressure plasma of a halogen gas,
gFt, SrF*, CaFt, BaFt, AJ
! The present invention relates to a method for producing a fluoride optical fiber whose end face is coated, the fiber being coated with at least one type of Fs.
第１図は本発明の端面コートされたフッ化物光ファイバ
の一例の断面図であり、１はフッ化物光ファイバでコア
２Ｉとクラッド２２を有し、２３はその端面のＷｋ、
Ｓｒ、 Ｃａ、 ８ａ及び／又はＭのフッ化物のすくな
くとも１種からなるコートである。FIG. 1 is a cross-sectional view of an example of a fluoride optical fiber whose end face is coated according to the present invention, where 1 is a fluoride optical fiber having a core 2I and a cladding 22, 23 is Wk of the end face,
The coat is made of at least one of Sr, Ca, 8a and/or M fluoride.
本発明のフッ化物光ファイバは少なくともそのコアが例
えばＺｒＦ（、１ＩｆＦ４． ＢａＦｇ、 ＬａＦｘ、
ＡＩＦａ、 ＮａＦ、ＰｂＦｚ等のフッ化物を主成分
とするフッ化物ガラスから構成されるものである。The fluoride optical fiber of the present invention has at least its core made of, for example, ZrF (, 1IfF4, BaFg, LaFx,
It is composed of fluoride glass whose main component is fluoride such as AIFa, NaF, PbFz, etc.
本発明においては上記のフッ化物光ファイバの端面にｋ
ｋＦ＊、 ５ｒＦｘ、 ＣａＦｔ、 ＢａＦｔ、 ＭＦ
ｘの少なくとも１種よりなるフッ化物膜をコーティング
するが、コーティング手段としては、例えば真空蒸着法
。In the present invention, the end face of the above-mentioned fluoride optical fiber is
kF*, 5rFx, CaFt, BaFt, MF
A fluoride film made of at least one of
スパッタリング法等が採用できる。その条件等は、この
種の方法における一般的な範囲から適宜選択できる。Sputtering method etc. can be adopted. The conditions can be appropriately selected from the general range for this type of method.
本発明に係る端面のフッ化物膜の厚さは３．０００人〜
８．０００人程鹿の範囲内が好ましい。３．０００Å以
下では目的とする効果を得られず、また８、 ０００人
を越えてもそれ以上の効果は得られず無意味である。The thickness of the fluoride film on the end surface according to the present invention is 3,000 ~
Preferably within the range of about 8,000 deer. If it is less than 3,000 Å, the desired effect cannot be obtained, and if it exceeds 8,000 people, no further effect can be obtained and it is meaningless.
上記のフッ化物膜のコーティングに先立ち、該フッ化物
光ファイバの端面を、減圧プラズマ下に晒し、ファイバ
表面に付着している異物や水分を除去することは、ガラ
ス表面の均質化とフッ化物膜の密着性向上の点で特に好
ましい。このようなプラズマエツチングの減圧は、ｉｏ
−”〜ｌ Ｔｏｒｒ程度、またプラズマガスとしては例
えばＮＦ２． ＣＦＩ。Prior to coating the fluoride film, the end face of the fluoride optical fiber is exposed to a reduced pressure plasma to remove foreign matter and moisture adhering to the fiber surface. It is particularly preferable in terms of improving the adhesion of. Such reduced pressure for plasma etching is io
-'' to 1 Torr, and the plasma gas is, for example, NF2.CFI.
ｃ ｃ ｅ＜等のハロゲン系ガスを用いることができる
。A halogen gas such as c c e < can be used.
プラズマエツチング、端面コーティングの具体的手段の
詳細は、後記の実施例にて説明する。Details of specific means for plasma etching and edge coating will be explained in Examples below.
本発明においてフッ化物光ファイバの端面にコーティン
グするＭｇＦｔ、 ５ｒＦｔ、 ＣａＦｔ、 ＢａＦｔ
、 ＡｊＦｓのようなフッ化物膜は、不水溶性で耐水性
に優れ、しかも赤外線に対して透明であることから、密
封コーテイング膜としての働きと光に対する透過窓の働
きを兼ねることができる。また、これらのフッ化物は、
真空蒸着法及びスパッタ法等により比較的容易に薄膜化
可能である。更にこれらフッ化物膜はフッ化物ガラスと
の密着性に優れ、屈折率においてもフッ化物ガラス（ｎ
ｏ ＝１．５ ）より低い（ＭｇＦｔ： ｎＤ ＝１
．３８．５ｒＦ＝： ｎｏ ＝１．４ 、 ＣａＦｚ：
ｎｏ ＝１．４２． ＢａＦｔ： ｎｏ ＝１．３
、 ＡＩＦｓ： ｎｏ ＝１．４）ため、レーザー光に
対して反射防止膜としても作用する。特に好ましくは膜
材としての耐水性の点で）ｉ４ｇＦ！、 ＢａＦ宜であ
る。MgFt, 5rFt, CaFt, BaFt coated on the end face of a fluoride optical fiber in the present invention
A fluoride film such as AjFs is water-insoluble, has excellent water resistance, and is transparent to infrared rays, so it can function both as a sealing coating film and as a light-transmitting window. In addition, these fluorides are
It can be made into a thin film relatively easily by vacuum evaporation, sputtering, or the like. Furthermore, these fluoride films have excellent adhesion to fluoride glass, and have a refractive index that is comparable to that of fluoride glass (n
o = 1.5) lower than (MgFt: nD = 1
．． 38.5rF=: no=1.4, CaFz:
no=1.42. BaFt: no = 1.3
, AIFs: no = 1.4), so it also acts as an anti-reflection film against laser light. Particularly preferred in terms of water resistance as a membrane material) i4gF! , BaFyi.
以上のことより、ＭｇＦｔ、 ５ｒＦｔ、 ＣａＦｘ、
ＢａＦ、、 ＭＦｓのようなフッ化物膜は、フッ化物
光ファイバの端面コーテイング膜として最も有効である
。From the above, MgFt, 5rFt, CaFx,
Fluoride films such as BaF, MFs are most effective as end-face coating films for fluoride optical fibers.
また５、端面コーティングに先立つプラズマエツチング
をハロゲン系ガスプラズマ中で行なうことにより、ガラ
ス表面の異物及び水分除去という利点がある。5. Performing plasma etching in a halogen gas plasma prior to end face coating has the advantage of removing foreign matter and moisture from the glass surface.
第２図に示す端面コーティング装置の概略図を用いて、
本発明の製造方法を説明する。真空容器２の内部には予
めコーティング材ＭｇＦｔ蒸着用ベレット７の入ったる
つぼ８をるつぼ台９にセットしておき、次にフッ化物光
ファイバｌの端面を真空容器２に挿入する。ガス導入口
５よりＮＦＩガスを容器２内に導入し、容器２内が十分
にＮＦｓガスで満たされるようにする。ガス導入口５．
ガス排気口６の調整によりｔｏ−’〜１Ｏ−１ＴＯ「「
程度のＮＦｓガス圧とし、高周波コイル３に高電圧を高
周波電源４から印加し、プラズマ発生部でＮＦｓラジカ
ルを発生させる。この発生したＮＦ、ラジカルはフッ化
物光フアイバ端面に付着した水分及び有機物等の異物と
反応し、それらを除去する。その後、ガス導入口５、ガ
ス排気口６の調整により１０−６〜１０−７Ｔｏｒｒ程
度のＮＦｓガス圧とし、熱陰極１０の電流値を１０ｍＡ
とし、るつぼ８内の鳩Ｆ！ペレット７に電子ビーム照射
した。１１は冷却水管である。Using the schematic diagram of the edge coating device shown in Fig. 2,
The manufacturing method of the present invention will be explained. A crucible 8 containing a pellet 7 for depositing coating material MgFt is set in advance on a crucible stand 9 inside the vacuum container 2, and then the end face of the fluoride optical fiber 1 is inserted into the vacuum container 2. NFI gas is introduced into the container 2 through the gas inlet 5 so that the inside of the container 2 is sufficiently filled with NFs gas. Gas inlet 5.
By adjusting the gas exhaust port 6, to-' to 1O-1TO ""
A high voltage is applied to the high frequency coil 3 from the high frequency power source 4, and NFs radicals are generated in the plasma generating section. The generated NF and radicals react with foreign substances such as moisture and organic substances adhering to the end face of the fluoride optical fiber, and remove them. After that, the NFs gas pressure is set to about 10-6 to 10-7 Torr by adjusting the gas inlet 5 and gas exhaust port 6, and the current value of the hot cathode 10 is set to 10 mA.
Then, pigeon F in crucible 8! Pellet 7 was irradiated with an electron beam. 11 is a cooling water pipe.
ここでは、コアが５１（モル％、以下同じ）ＺｒＦｓ−
２１Ｂａ Ｆｔ ４．５１ａ Ｆｓ ２．５Ａ
ｔ’ Ｆｓ １７ｔ’ｂ Ｆからなり、コア径が１６
０／ａ１ クラツド径が２００ ／ｊのフッ化物光ファ
イバの一方の端面に、Ｅ ｒ−Ｙ Ａ Ｇ （２，９１
１１発振）レーザー光の反射防止用として、厚さ０．５
３３−のＭｇＦ！蒸着膜を施した。この厚さとした理由
は次のとおりである。すなわち、ファイバコアの屈折率
Ｎ、反射防止膜の屈折率をＮ２とすると、入射光Ｉ、に
対し反射光が無くなる反射防止膜の条件は、理論的には
単層膜ではＮ、＝ｖ’Ｎ、 ｄフλ／４Ｎ！ （λ
は入射光１１の波長）である。ここでコアの屈折率は２
．３７だから、最適な反射防止膜の屈折率はｖ’ ２．
３７＝ １．５４、厚みは２．９４ｐｍ ／ ４ ／１
、３８ （Ｍｇ Ｆｓの屈折率） −０，５３３となる
。同様にして、該フッ化物光ファイバのもう一方の端面
にも）ｉ４ｇＦｚ蒸着膜をつけた。Here, the core is 51 (mol%, same hereinafter) ZrFs-
21Ba Ft 4.51a Fs 2.5A
t' Fs 17t'b F, core diameter is 16
0/a1 E r-Y A G (2,91
11 oscillation) Thickness 0.5 to prevent reflection of laser light.
33-MgF! A vapor deposited film was applied. The reason for this thickness is as follows. That is, assuming that the refractive index of the fiber core is N and the refractive index of the anti-reflection film is N2, the conditions for the anti-reflection film to eliminate reflected light with respect to the incident light I are theoretically N, = v' for a single layer film. N, dfuλ/4N! (λ
is the wavelength of the incident light 11). Here, the refractive index of the core is 2
．． 37, the optimal refractive index of the antireflection film is v'2.
37=1.54, thickness is 2.94pm/4/1
, 38 (refractive index of Mg Fs) -0,533. Similarly, an i4gFz vapor deposited film was applied to the other end face of the fluoride optical fiber.
このようにして得られた、本発明の端面をに４ｇＦｇコ
ーティングしたフッ化物光ファイバの一端から１ワツト
のＥ ｒ−Ｙ Ａ Ｇレーザーを入射したところ、ファ
イバの両端面に何ら状態の変化が起こることなく、他端
よりレーザー光を出射させことができた。When a 1 watt Er-YAG laser was incident on one end of the thus obtained fluoride optical fiber of the present invention, the end face of which was coated with 4gFg, no change in the state occurred on both end faces of the fiber. The laser beam could be emitted from the other end without any trouble.
上記実施例ではに４ｇＦ寓１種からなるフッ化物コ・−
トを例にしたが、２種以上のフッ化物からなるコーティ
ングでも同様に有効であった。In the above example, a fluoride co-container consisting of 4gF and 1 species was used.
Although fluoride was used as an example, a coating consisting of two or more types of fluoride was similarly effective.
以上説明したように、本発明の端面コートフッ化物光フ
ァイバは、大気中に放置しても湿気による端面劣化が生
じることなく、高出力パワー伝送を高効率に行なうこと
ができる。さらに、端面のフッ化物膜は反射防止膜の作
用も有する利点がある。従って、本発明の端面コートさ
れたフッ化物光ファイバは、Ｅ ｒ−Ｙ Ａ Ｇレーザ
ーのレーザーメス装置やレーザー加工機用伝送路として
用いると効果的である。As explained above, the end-face-coated fluoride optical fiber of the present invention does not suffer from end-face deterioration due to moisture even when left in the atmosphere, and can perform high-output power transmission with high efficiency. Furthermore, the fluoride film on the end face also has the advantage of acting as an antireflection film. Therefore, the fluoride optical fiber whose end face is coated according to the present invention is effective when used as a transmission line for a laser scalpel device of an Er-Y AG laser or a laser processing machine.
そして本発明の製造方法は、このような端面コートフッ
化物ファイバを水分や異物による悪影響を排除して製造
できる優れた方法である。The manufacturing method of the present invention is an excellent method for manufacturing such end-face coated fluoride fibers while eliminating the adverse effects of moisture and foreign matter.
第１図は本発明の端面コートされたフッ化物光ファイバ
を説明する断面図、第２図は本発明の端面コートされた
フッ化物光ファイバの製法を説明する概略断面図である
。
図中、ｌはフッ化物光ファイバ、２は真空容器３は高周
波発振コイル、４は高周波電源、５はガス導入口、６は
ガス排出口、７は蒸着用ペレット（ＭｇＦ＊） 、８は
るつぼ、９はるつぼ台、１０は熱陰極、１２は冷却水管
、２２は端面にコーティングしたフッ化物膜を表す。FIG. 1 is a cross-sectional view illustrating a fluoride optical fiber whose end surface is coated according to the present invention, and FIG. 2 is a schematic cross-sectional view illustrating a method for manufacturing the fluoride optical fiber whose end surface is coated according to the present invention. In the figure, l is a fluoride optical fiber, 2 is a vacuum container 3 is a high-frequency oscillation coil, 4 is a high-frequency power source, 5 is a gas inlet, 6 is a gas outlet, 7 is a pellet for vapor deposition (MgF*), 8 is a crucible , 9 is a crucible stand, 10 is a hot cathode, 12 is a cooling water pipe, and 22 is a fluoride film coated on the end surface.
Claims (2)
該ファイバの端面にＭｇＦ＿２、ＳｒＦ＿２、ＣａＦ＿
２、ＢａＦ＿２、ＡｌＦ＿２の少なくとも１種よりなる
フッ化物膜をコーティングしてなる端面コートされたフ
ッ化物光ファイバ。(1) At least the core is made of fluoride glass, and the end face of the fiber is MgF_2, SrF_2, CaF_
2. A fluoride optical fiber whose end surface is coated with a fluoride film made of at least one of BaF_2 and AlF_2.
光ファイバの端面をハロゲン系ガスの減圧プラズマ下に
さらして脱水・清浄化した後、該端面にＭｇＦ＿２、Ｓ
ｒＦ＿２、ＣａＦ＿２、ＢａＦ＿２、ＡｌＦ＿２の少な
くとも１種をコーティングすることを特徴とする端面コ
ートされたフッ化物光ファイバの製造方法。(2) After dehydrating and cleaning the end face of an optical fiber whose core is made of fluoride glass by exposing it to a reduced pressure plasma of halogen gas, the end face is coated with MgF_2, S
A method for producing an end-coated fluoride optical fiber, the method comprising coating with at least one of rF_2, CaF_2, BaF_2, and AlF_2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1060880A JPH02240605A (en) | 1989-03-15 | 1989-03-15 | Fluoride optical fiber subjected to coating on end face and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1060880A JPH02240605A (en) | 1989-03-15 | 1989-03-15 | Fluoride optical fiber subjected to coating on end face and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02240605A true JPH02240605A (en) | 1990-09-25 |
Family
ID=13155133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1060880A Pending JPH02240605A (en) | 1989-03-15 | 1989-03-15 | Fluoride optical fiber subjected to coating on end face and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02240605A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140707A (en) * | 1992-10-27 | 1994-05-20 | Showa Koki Seizo Kk | Antireflection film of deliquescent optical crystal |
| WO1999041630A1 (en) * | 1998-02-12 | 1999-08-19 | Tyco Electronics Logistics Ag | System for protecting the front surface of a light wave-guide |
| US6383179B1 (en) * | 1999-08-11 | 2002-05-07 | Ceramoptec Industries Inc. | Diode laser scalpel |
| JP2011008014A (en) * | 2009-06-25 | 2011-01-13 | Fujifilm Corp | Optical fiber connection structure and endoscope system |
| JP2015153919A (en) * | 2014-02-17 | 2015-08-24 | 三星ダイヤモンド工業株式会社 | Optical fiber and laser oscillator using the same |
-
1989
- 1989-03-15 JP JP1060880A patent/JPH02240605A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140707A (en) * | 1992-10-27 | 1994-05-20 | Showa Koki Seizo Kk | Antireflection film of deliquescent optical crystal |
| WO1999041630A1 (en) * | 1998-02-12 | 1999-08-19 | Tyco Electronics Logistics Ag | System for protecting the front surface of a light wave-guide |
| US6383179B1 (en) * | 1999-08-11 | 2002-05-07 | Ceramoptec Industries Inc. | Diode laser scalpel |
| JP2011008014A (en) * | 2009-06-25 | 2011-01-13 | Fujifilm Corp | Optical fiber connection structure and endoscope system |
| JP2015153919A (en) * | 2014-02-17 | 2015-08-24 | 三星ダイヤモンド工業株式会社 | Optical fiber and laser oscillator using the same |
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