JPH0224036A - Moving device - Google Patents

Moving device

Info

Publication number
JPH0224036A
JPH0224036A JP16938888A JP16938888A JPH0224036A JP H0224036 A JPH0224036 A JP H0224036A JP 16938888 A JP16938888 A JP 16938888A JP 16938888 A JP16938888 A JP 16938888A JP H0224036 A JPH0224036 A JP H0224036A
Authority
JP
Japan
Prior art keywords
pressure
driving roller
pressure welding
roller
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16938888A
Other languages
Japanese (ja)
Inventor
Takeo Tanida
武雄 谷田
Yusaku Azuma
雄策 我妻
Masateru Yasuhara
正輝 安原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP16938888A priority Critical patent/JPH0224036A/en
Priority to US07/222,539 priority patent/US4934278A/en
Publication of JPH0224036A publication Critical patent/JPH0224036A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent the wear of a driving roller and partial contact by detecting the slippage of a driving roller and adjusting a pressure welding power according to the slippage thereof, in the device linearly moving a moving body by pressure-welding a driving roller to a traveling passage. CONSTITUTION:A driving roller part 30A rotating by pressure-welding with a guide bar 22 is formed on the driving shaft 30 connected to the output shaft of a motor 26. Moreover, pressure welding rollers 36A, B having the pressure welding means 34 of a roller pressure welding spring 40, etc., are arranged on the traveling face of the other part of the guide bar 22. A pressure welding force is acted on the traveling face of the driving roller 30A and guide bar 22 by this pressure welding roller 36A, B. At this time, the driving roller 30A and guide bar 22 become a defective pressure welding when the spring force of the spring 40 of a pressure welding force generating means is weak and a slip is caused on the driving roller 30A. The spring force of a roller pressure welding spring 40 is adjusted by operating an attached oil pressure mechanism P immediately by detecting this abnormality.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は移動機構に関し、詳しくは、工業用ロボットや
NC工作機械等に使用され、精密な直線運動か要求され
る移動機構に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a moving mechanism, and more particularly to a moving mechanism that is used in industrial robots, NC machine tools, etc. and requires precise linear motion.

[従来の技術] 従来、この種の機械に使用される移動機構としては、例
えば複数の摩擦ローラの組合せで棹部材を挾持し、棹部
材を移動させるようにした特開昭61−117043号
公報に開示されている類のものや、ボールねしを使用し
、ねじに螺合させたナツト部材を移動体側に取付けて、
ねじを回転駆動させることにより移動体をボールねしに
沿って移動させるようにしたものか知られている。
[Prior Art] Conventionally, as a moving mechanism used in this type of machine, for example, Japanese Patent Application Laid-Open No. 117043/1989 discloses a mechanism in which a rod member is held by a combination of a plurality of friction rollers and the rod member is moved. Using the type disclosed in , or a ball screw, attach a nut member screwed onto a screw to the moving body side,
It is known that a moving body is moved along a ball screw by rotationally driving a screw.

工作機械の送り装置として移動体をガイドバーに沿って
摩擦ローラによる摩擦駆動する装置として特公昭5B−
54948号公報及び特開昭61−230835号公報
か知られている。又本出願人の先願に係る考案として実
願昭62−113867号かある。
Special Publication Showa 5B as a device for frictionally driving a moving body along a guide bar using a friction roller as a feeding device for machine tools.
No. 54948 and Japanese Unexamined Patent Publication No. 61-230835 are known. There is also Utility Model Application No. 113867/1983 as a device related to the applicant's earlier application.

[実施例の説明] 第1図乃至第 図は本発明の第1の実施例を示す。[Explanation of Examples] 1 to 1 show a first embodiment of the present invention.

図において、16は固定ベース、18A。In the figure, 16 is a fixed base and 18A.

18Bは固定ベース16上に固定し移動台20の移動方
向に伸びて設けた第1及び第2のガイトレールを示す。
Reference numeral 18B indicates first and second guide rails fixed on the fixed base 16 and extending in the moving direction of the movable table 20.

22はガイドバーを示し、該ガイドバー22はガイドバ
ー保持部材24A、24B (不図示)によって両端を
支持されて固定ベース16の上面より浮上して張設され
ている。
Reference numeral 22 indicates a guide bar, and the guide bar 22 is suspended from the upper surface of the fixed base 16 with both ends supported by guide bar holding members 24A and 24B (not shown).

移動台20は2枚の板、上板20Aと下板20Bと、上
板と下板のスペーサー20C。
The moving table 20 has two plates, an upper plate 20A and a lower plate 20B, and a spacer 20C between the upper plate and the lower plate.

20Cと及び、下板20Bの下面に取り付けてガイトレ
ール18A、18Bと嵌合する摺動部材20D、20D
・・・と後述する摩擦機構を保持するハウジング20E
等から構成する。前記ハウジング20Eは第3図に示す
ように円筒中空形状と成し、その側面に開口部を設ける
。前記ハウジング20Eは中空円筒本体20E、の筒部
側面に開口を設け、筒部上部には移動台の上板20Aと
係合する鍔部20E2を設ける。
20C, and sliding members 20D and 20D that are attached to the lower surface of the lower plate 20B and fit with the guide rails 18A and 18B.
... and a housing 20E that holds a friction mechanism to be described later.
Consists of etc. The housing 20E has a hollow cylindrical shape as shown in FIG. 3, and has an opening on its side surface. The housing 20E has an opening on the side surface of the cylindrical portion of the hollow cylindrical body 20E, and a flange portion 20E2 that engages with the upper plate 20A of the moving table on the upper portion of the cylindrical portion.

該ハウジング20Eは第1図に示すように上板20Aと
下板20Bに穿けた開口に嵌め込みネジにて固定する。
As shown in FIG. 1, the housing 20E is fitted into openings formed in the upper plate 20A and lower plate 20B and fixed with screws.

24は前記ハウジング20Eの鍔部、20E2に嵌合す
るように上板20Aの上面に固定した円筒状のモータ支
持台てあり、該支持台24の上にサーボモータ26を取
り付ける。
Reference numeral 24 denotes a cylindrical motor support stand fixed to the upper surface of the upper plate 20A so as to fit into the flange portion 20E2 of the housing 20E, and a servo motor 26 is mounted on the support stand 24.

26Aはモータ26の出力軸であり、該出力軸26Aは
支持台24の中空の内側に位置し、後述するフレキシブ
ルカップリング部材28によって駆動軸30と結合する
。前記駆動軸30は前記ハウジング20Eの内側に嵌挿
された軸受32A、32Bによってハウジング20Eに
軸支される。前記駆動軸30の略中央部30Aは前記ガ
イドバー22と圧接する駆動ローラ30Aを形成してい
る。
26A is an output shaft of the motor 26, and the output shaft 26A is located inside the hollow of the support base 24, and is coupled to the drive shaft 30 by a flexible coupling member 28, which will be described later. The drive shaft 30 is pivotally supported by the housing 20E by bearings 32A and 32B fitted inside the housing 20E. A substantially central portion 30A of the drive shaft 30 forms a drive roller 30A that comes into pressure contact with the guide bar 22.

34は圧接ローラ36A、36Bをガイドバー22に圧
接する圧接手段を示す。圧接ローラ36 A 、 −3
6Bは鉄、鋼等の金属材料で作り、該ローラ36A、3
6Bはそれぞれのローラの軸36a、36bをローラ保
持用の枠部材38A、38B、38Bによって軸支する
。部材38Aはブロック部38aの上部及び下部からロ
ーラ軸を軸支する板部38b、38b。
Reference numeral 34 denotes pressure contact means for pressing the pressure rollers 36A, 36B against the guide bar 22. Pressure roller 36A, -3
6B is made of metal material such as iron or steel, and the rollers 36A, 3
6B, the shafts 36a and 36b of the respective rollers are supported by frame members 38A, 38B and 38B for holding the rollers. The member 38A includes plate portions 38b and 38b that pivotally support the roller shaft from the upper and lower portions of the block portion 38a.

38C,38Cか伸びている。圧接ローラ36A、36
Bを保持したローラ保持枠38は第1図に示すように移
動台20の上板20Aと下板20Bの間に嵌め込まれる
。枠38のブロック部38には第1図に示すようにロー
ラ圧接用ハネ40を収納する収納用凹部を設け、該凹部
の開口側は蓋部材42によって閉じられる。
38C, 38C is growing. Pressure rollers 36A, 36
The roller holding frame 38 holding B is fitted between the upper plate 20A and the lower plate 20B of the moving table 20, as shown in FIG. As shown in FIG. 1, the block portion 38 of the frame 38 is provided with a housing recess for housing the roller pressure spring 40, and the opening side of the recess is closed by a lid member 42.

前記蓋部材42は前記上板20A又は下板20Bに固定
される。
The lid member 42 is fixed to the upper plate 20A or the lower plate 20B.

第1図に示すようにガイドバー22の一方の走行面はサ
ーボモータ26の出力軸と連結した駆動ローラ30Aが
接し、バー22の他方の走行面は2個の圧接ローラ36
A、36Bが接する。圧接ローラ36A、36Bはバネ
40のバネ力をローラ保持枠38を介して受けてガイド
バーを圧接する。従って駆動ローラ30Aには圧接ロー
ラ36A、36Bの圧接力がガイドバーの走行面に作用
する。符号Pは油圧ポンプを示し、該ポンプPは管P、
を経て上板20Aの孔部に接続する。
As shown in FIG. 1, one running surface of the guide bar 22 is in contact with a drive roller 30A connected to the output shaft of a servo motor 26, and the other running surface of the bar 22 is in contact with two pressure rollers 36.
A and 36B touch. The pressure rollers 36A and 36B receive the spring force of the spring 40 via the roller holding frame 38 to press the guide bar. Therefore, the pressing force of the pressing rollers 36A and 36B acts on the running surface of the guide bar on the driving roller 30A. The symbol P indicates a hydraulic pump, and the pump P is connected to a pipe P,
It is connected to the hole in the upper plate 20A through the .

前述のバネ収納枠38の開口部には鍔部38a、が設け
られており、該鍔部38a、はバネ収納蓋部材42の内
面に嵌装し、枠38と蓋部材42とによって気密室Pa
を形成し、油圧ポンプPからの油圧力はこの気密室Pa
に導かれている。油圧ポンプPの作動により気密室Pa
内の油圧はバネ40のバネ力を解除する方向にバネ収納
枠38を動かすように作動する。
A flange portion 38a is provided at the opening of the spring storage frame 38 described above, and the flange portion 38a is fitted into the inner surface of the spring storage lid member 42, and the airtight chamber Pa is closed by the frame 38 and the lid member 42.
The hydraulic pressure from the hydraulic pump P is applied to this airtight chamber Pa.
guided by. The airtight chamber Pa is opened by the operation of the hydraulic pump P.
The hydraulic pressure inside operates to move the spring storage frame 38 in a direction that releases the spring force of the spring 40.

第2図において44は固定ベース16に取り付けたガイ
ドバー22と平行なうツクギヤを示す。該ラックギヤ4
4はピニオンギヤ46と噛2合し、該ギヤ46は軸を介
して移動台の上板20Aに取り付けた第1のロータリー
エンコーダ48に連結する。
In FIG. 2, reference numeral 44 indicates a sliding gear parallel to the guide bar 22 attached to the fixed base 16. The rack gear 4
4 meshes with a pinion gear 46, and the gear 46 is connected via a shaft to a first rotary encoder 48 attached to the top plate 20A of the moving table.

第2図示50は移動台20上に取り付けたロボットのア
ームを示し該アーム50には不図示のロボットハンド等
を取付アーム上を図示y軸方向に移動する。
The second figure 50 indicates a robot arm mounted on the moving table 20, and a robot hand or the like (not shown) is attached to the arm 50 and moves on the arm in the y-axis direction in the figure.

第3図は第2図示の第1のロータリーエンコータ48を
取り付けた部分の要部断面図を示す。エンコーダ48は
中空円筒部材50に取り付け、該部材50は軸受はケー
ス52を介して移動台の上板20Aに固定する。ケース
52は上板に設けた開口に嵌合して固定する円筒部材5
0の内側には第1エンコータ48の出力軸48Aとピニ
オンギヤ軸54を連結するカップリング56を収納する
FIG. 3 shows a sectional view of a main part of a portion where the first rotary encoder 48 shown in FIG. 2 is attached. The encoder 48 is attached to a hollow cylindrical member 50, and the bearing of the member 50 is fixed to the upper plate 20A of the movable table via a case 52. The case 52 includes a cylindrical member 5 that fits into an opening provided in the upper plate and is fixed.
A coupling 56 that connects the output shaft 48A of the first encoder 48 and the pinion gear shaft 54 is housed inside the shaft 0.

ピニオンギヤ軸54はケース52に保持した軸受58A
、58Bに軸支される。ギヤ軸54の下端(細径部)に
は2枚のピニオンギヤ46A、46Bか取り付けられて
いる。上側のピニオンギヤ46Aはギヤ軸54の細径部
に固定する。下側のピニオンギヤ46Bは上側のピニオ
ンギヤ46Aと重ね合わされており、その状態を第7図
を参照して詳述する。上部ピニオンギヤ46Aにはピン
46a、、46a、と穴46az、46a4を設ける。
The pinion gear shaft 54 has a bearing 58A held in the case 52.
, 58B. Two pinion gears 46A and 46B are attached to the lower end (small diameter portion) of the gear shaft 54. The upper pinion gear 46A is fixed to the narrow diameter portion of the gear shaft 54. The lower pinion gear 46B is overlapped with the upper pinion gear 46A, and this state will be described in detail with reference to FIG. 7. The upper pinion gear 46A is provided with pins 46a, 46a and holes 46az and 46a4.

下部ピニオンギヤ46Bには前記穴46a、、46a、
を貫通して伸びたピン46b、、46b2を植設する。
The lower pinion gear 46B has the holes 46a, 46a,
Pins 46b, , 46b2 extending through are implanted.

60A、60Bはピン46a1と46b1及びピン46
a2と46b2に゛張設したハネ部材である。第7図示
構成のピニオンギヤの構成はラックとピニオンギヤの噛
合のバックラッシュを解消し、ロータリーエンコータの
検出精度を高めることかできる。
60A and 60B are pins 46a1 and 46b1 and pin 46
This is a spring member stretched between a2 and 46b2. The configuration of the pinion gear as shown in FIG. 7 eliminates backlash in the meshing of the rack and pinion gear, and can improve the detection accuracy of the rotary encoder.

第4図は本発明のブロック図を示し、82はロボットの
作動プログラムでロボットの作業の種類に応じてロボッ
トの各部1例えばロボットアーム、フィンガーの動作制
御を命令するプログラムを含む。
FIG. 4 shows a block diagram of the present invention. Reference numeral 82 denotes a robot operation program, which includes a program for instructing the operation control of each part 1 of the robot, such as a robot arm and fingers, according to the type of robot work.

該プログラム82には移動台の移動を制御するプログラ
ムも含む。作動プロクラム82は第1のエンコーダ48
と接続しており、作動プロクラム82の動作命令により
移動台か移動するに際し移動台の移動位置を第1のエン
コータ48で検出し、検出信号を作動制御手段82に送
る。
The program 82 also includes a program for controlling the movement of the moving platform. The operating program 82 is the first encoder 48
The first encoder 48 detects the movement position of the movable base when the movable base moves according to the operation command of the operation program 82, and sends a detection signal to the operation control means 82.

第2のエンコータ80は駆動ローラ軸3oを駆動するサ
ーボモータ26に接続し、モータ26の回転量を検出す
る。
The second encoder 80 is connected to the servo motor 26 that drives the drive roller shaft 3o, and detects the amount of rotation of the motor 26.

84は比較手段を示し、第1と第2のエンコータの信号
を入力して比較情報を出力し、この情報を判別手段86
にて設定情報88に基いて判別操作を行なう。
Reference numeral 84 denotes a comparing means, which inputs the signals of the first and second encoders, outputs comparison information, and uses this information as a discriminating means 86.
A determination operation is performed based on the setting information 88.

90は異常検知手段、92は油圧調整手段である。第1
3図の構成はサーボモータ26に第2のエンコーダ80
か接続した構成以外は前述第2.第3図の構成と同じで
あるのて説明を省く。
90 is an abnormality detection means, and 92 is a hydraulic pressure adjustment means. 1st
The configuration in Figure 3 includes a servo motor 26 and a second encoder 80.
The configuration other than the one connected is the same as described in Section 2 above. Since the configuration is the same as that shown in FIG. 3, the explanation will be omitted.

次に実施例の動作について説明する。Next, the operation of the embodiment will be explained.

ロボット作動制御手段82のプロクラムに従って移動台
20か移動するのであるか、第2図に示した圧接力発生
手段のバネ4oのハネ力が弱いと駆動ローラ30Aとガ
イドバー22の圧接状態か不良となり駆動ローラ30A
かスリップを起こす。
If the movable table 20 moves according to the program of the robot operation control means 82, or if the spring force of the spring 4o of the pressure contact force generating means shown in FIG. Drive roller 30A
or cause a slip.

移動台20の移動すべき移動量は制御手段82内からの
情報によって制御され、一方移動台20の移動位置は第
1のエンコータ48によって検出される。第2のエンコ
ータ80はサーボモータの回転量を検出ル駆動ローラの
スリップか発生しないと第1.第2のエンコータの出力
の差は生じない。駆動ローラのスリットかある場合、駆
動ローラのスリップをともなった圧接状態ての摩擦駆動
において移動台を所定の移動すべき位置に駆動するため
にサーボモータ26はスリップの分たけ余分に回転した
ことになり、第2のエンコータ80には計算上の回転量
とスリップ分の回転量の加算された信号か出力する。
The amount of movement of the moving carriage 20 is controlled by information from within the control means 82, while the position of movement of the moving carriage 20 is detected by the first encoder 48. The second encoder 80 detects the amount of rotation of the servo motor and detects whether the drive roller slips or not. There is no difference in the output of the second encoder. If there is a slit in the drive roller, the servo motor 26 will rotate extra to compensate for the slip in order to drive the movable table to a predetermined position during friction drive in a press-contact state with slip of the drive roller. The second encoder 80 outputs a signal that is the sum of the calculated amount of rotation and the amount of rotation corresponding to the slip.

第1.第2のエンコータの出力を比較手段84で比較す
ると上述の駆動ローラのスリップ量が検出できる。
1st. By comparing the output of the second encoder with the comparison means 84, the amount of slip of the drive roller described above can be detected.

比較手段84からのスリップ量の情報は判別手段86に
て設定情報入力手段88からの信号と比較してスリップ
量の適否の判別か行なわれる。
The slip amount information from the comparing means 84 is compared with the signal from the setting information inputting means 88 in the determining means 86 to determine whether the slip amount is appropriate.

即ち、駆動ローラ30Aのガイドバーとの圧接時におけ
るスリップは成る値以上のスリップ量になると前述した
様な好ましくない状態となるか、スリップ量が成る値以
下の場合にはスリップの影響を無視してさしつかえない
ものである。従って判別手段86てはスリップ量の適否
の判別を行なう。
In other words, if the amount of slip when the drive roller 30A is in pressure contact with the guide bar exceeds the value, the above-mentioned unfavorable state will occur, or if the amount of slip is less than the value, the influence of the slip will be ignored. It is something that cannot be avoided. Therefore, the determining means 86 determines whether the slip amount is appropriate or not.

判別手段86からは前述のスリップ量が適正量をオーバ
ーしている場合には判別手段からの信号か異常検知手段
90に入力し、これによって異常状態を検知し、ロボッ
トの制御手段82に入力し制御手段では移動台の停止動
作を行なう。
If the above-mentioned slip amount exceeds the appropriate amount, the determination means 86 inputs a signal from the determination means to the abnormality detection means 90, which detects an abnormal state, and inputs the signal to the robot control means 82. The control means performs a stopping operation of the moving table.

スリップ量が微少量である場合には判別手段からの信号
は油圧調整手段92に入力し、油圧調整手段92は第2
図の油圧発生手段Pの油圧を調整し、これによってハネ
40の調整が行なわれて駆動ローラのスリップ量の調整
か行なわれる。
If the amount of slip is very small, the signal from the determining means is input to the oil pressure adjusting means 92, and the oil pressure adjusting means 92
The hydraulic pressure of the hydraulic pressure generating means P shown in the figure is adjusted, thereby adjusting the spring 40 and the amount of slip of the drive roller.

[効果] 以上のように本発明に依れば駆動ローラのスリップ量を
検出しスリップ量が適正か否かを判別し、この判別に基
いて移動装置の異常を検知する。又、一方油圧調整手段
によって圧接力の調整を行なう様にしたものである。
[Effects] As described above, according to the present invention, the slip amount of the drive roller is detected, it is determined whether the slip amount is appropriate or not, and an abnormality in the moving device is detected based on this determination. Further, the pressure contact force is adjusted by means of a hydraulic pressure adjustment means.

本発明を移動装置に適用することにより駆動ローラの摩
耗を防ぐこと、ローラの片当りを防げること及びスリッ
プが生じた場合自動的に圧接力を調整することができる
By applying the present invention to a moving device, it is possible to prevent wear of the drive roller, prevent uneven contact of the roller, and automatically adjust the pressure contact force when slip occurs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第4図は本発明の実施例を示し、第1図は本
発明を適用した移動装置の要部断面図、 第2図は移動装置の部分的斜視図、 第3図は第2図のA−A方向断面図。 第4図は制御用ブロック図。 26・・・ローラ駆動用モータ 48・・・第1エンコーダ 80・・・第2エンコーダ 84・・・比較手段 86・・・判別手段 90・・・異常検知手段 92・・・油圧調整手段
1 to 4 show embodiments of the present invention, FIG. 1 is a sectional view of essential parts of a moving device to which the present invention is applied, FIG. 2 is a partial perspective view of the moving device, and FIG. 3 is a partial perspective view of the moving device. FIG. 2 is a cross-sectional view taken along line A-A in FIG. 2; FIG. 4 is a control block diagram. 26...Roller drive motor 48...First encoder 80...Second encoder 84...Comparison means 86...Discrimination means 90...Abnormality detection means 92...Hydraulic pressure adjustment means

Claims (2)

【特許請求の範囲】[Claims] (1)モータの出力軸と連結した駆動ローラを圧接手段
によって走行路に圧接して移動体 を移動する装置において、 前記駆動ローラのスリップ量を検出してス リップ量に応じて前記圧接手段の圧接力を 調整するようにしたことを特徴とする移動 装置。
(1) In a device that moves a movable body by pressing a driving roller connected to an output shaft of a motor against a travel path using a pressing means, the amount of slip of the driving roller is detected and the pressing means is pressed according to the amount of slip. A moving device characterized by adjusting force.
(2)前記スリップ量が適正量を超えている場合に異常
検知状態を知らせることを特徴と する特許請求の範囲第(1)項記載の移動 装置。
(2) The moving device according to claim (1), wherein an abnormality detection state is notified when the slip amount exceeds a proper amount.
JP16938888A 1987-07-27 1988-07-06 Moving device Pending JPH0224036A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16938888A JPH0224036A (en) 1988-07-06 1988-07-06 Moving device
US07/222,539 US4934278A (en) 1987-07-27 1988-07-21 Moving apparatus with track recessed portion to dissipate drive roller contact pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16938888A JPH0224036A (en) 1988-07-06 1988-07-06 Moving device

Publications (1)

Publication Number Publication Date
JPH0224036A true JPH0224036A (en) 1990-01-26

Family

ID=15885671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16938888A Pending JPH0224036A (en) 1987-07-27 1988-07-06 Moving device

Country Status (1)

Country Link
JP (1) JPH0224036A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03287389A (en) * 1990-04-05 1991-12-18 Fanuc Ltd Adjusting device for backlash of straight line moving type industrial robot
JP2008103663A (en) * 2006-09-22 2008-05-01 Ihi Corp Friction drive transport device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03287389A (en) * 1990-04-05 1991-12-18 Fanuc Ltd Adjusting device for backlash of straight line moving type industrial robot
JP2008103663A (en) * 2006-09-22 2008-05-01 Ihi Corp Friction drive transport device
JP4735576B2 (en) * 2006-09-22 2011-07-27 株式会社Ihi Friction drive transfer device

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