JPH0223057A - Manufacture of coil for linear motor - Google Patents
Manufacture of coil for linear motorInfo
- Publication number
- JPH0223057A JPH0223057A JP16951488A JP16951488A JPH0223057A JP H0223057 A JPH0223057 A JP H0223057A JP 16951488 A JP16951488 A JP 16951488A JP 16951488 A JP16951488 A JP 16951488A JP H0223057 A JPH0223057 A JP H0223057A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- linear motor
- manufacturing
- manufacture
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000919 ceramic Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 abstract description 8
- 238000004804 winding Methods 0.000 abstract description 4
- 238000010030 laminating Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
Landscapes
- Linear Motors (AREA)
Abstract
Description
【発明の詳細な説明】
〔（既要〕
直動ステージを駆動するリニアモータのコイルの製造方
法に関し、
コイル組立の容易な、リニアモータのコイル製造方法を
提供することを目的とし、
磁石と鉄心間にボビンに保持されたコイルを配置し、電
磁力により推力を発生するリニアモータのコイル製造方
法であって、前記コイルはセラミ・７クスを基板材とす
るプリント板上に、エツチングでコイル状パターンを形
成し、それらを複数枚積層して構成する。[Detailed Description of the Invention] [(Already required)] The present invention relates to a method for manufacturing a coil for a linear motor that drives a linear motion stage, and aims to provide a method for manufacturing a coil for a linear motor that is easy to assemble. A method of manufacturing a coil for a linear motor in which a coil held by a bobbin is placed between the coils and thrust is generated by electromagnetic force, and the coil is etched into a coil shape on a printed board whose substrate material is ceramic 7x. A pattern is formed and a plurality of patterns are laminated to form a structure.
本発明は、直動ステージを駆動するリニアモータのコイ
ルの製造方法に関する。The present invention relates to a method of manufacturing a coil for a linear motor that drives a linear motion stage.
リニアモータは、回転モータと異なりボールネジのよう
な回転−直進変換機構を必要とせず、直動ステージを直
接非接触駆動できるため、高精度の位置決めを必要とす
る精密ステージによく用いられでいる。Unlike rotary motors, linear motors do not require a rotation-linear conversion mechanism such as a ball screw, and can directly drive a linear stage in a non-contact manner, so they are often used in precision stages that require highly accurate positioning.
ところが、リニアモータは駆動するステージの大きさや
可動範囲から最適な既製品を選択することが難しく、殆
どの場合ステージに合わせて特別注文しなければならな
いのが現状である。However, it is difficult to select an optimal off-the-shelf linear motor based on the size and movable range of the stage to be driven, and in most cases, the current situation is that a special order must be made to match the stage.
そのため、必然的にコストが高（なり、特にコイルの製
造組立の難易が、リニアモータの製造コストに大きな影
響を与えるため、少量でも簡易にコイルを製造する方法
が強（望まれている。As a result, costs are inevitably high, and the difficulty in manufacturing and assembling the coils in particular has a large impact on the manufacturing cost of linear motors, so a method for easily manufacturing coils even in small quantities is strongly desired.
コイル可動型の多極型リニアモータの構造を第３図に示
す。FIG. 3 shows the structure of a coil movable multipolar linear motor.
図において、レーストラック型に巻かれた複数のコイル
１は、ボビン２に一定間隔で貼りつけられており、磁石
３と鉄心４で構成する交番磁界の中に置かれている。各
コイルｌに磁石３の境目テ反転するような電流を流すと
、コイル１は同一方向に推力を発生し、ボビン２に直結
された直動ステージ（図示せず）を駆動する構成である
。In the figure, a plurality of coils 1 wound in a racetrack shape are attached to a bobbin 2 at regular intervals, and are placed in an alternating magnetic field formed by a magnet 3 and an iron core 4. When a current is applied to each coil 1 such that the boundary between the magnets 3 is reversed, the coil 1 generates a thrust in the same direction to drive a direct-acting stage (not shown) directly connected to the bobbin 2.
上記コイル１の製造方法としては、従来第４図に示すよ
うに一つずつ丸型或いは長円型の断面を持つ銅線を手巻
により製作し、それをボビン２に一定間隔で接着し、コ
イル引き出し線処理をしていた。Conventionally, as shown in FIG. 4, the method for manufacturing the coil 1 involves manually winding copper wires each having a round or oval cross section, and bonding them to the bobbin 2 at regular intervals. I was processing the coil lead wire.
また、電気回路用のガラスエポキシ製のプリント基板を
ボビンとして、その上に一層のコイルをエツチングで作
る方法であった。Another method was to use a printed circuit board made of glass epoxy for electrical circuits as a bobbin, and then etching a layer of coils on top of it.
上記リニアモータのコイル１は、第４図のように断面が
丸型或いは長円型の銅線６を、治具５を中心に手巻きに
より楕円形状に製作し、それをボビン２へ接着していた
が、線径が０．５〜１．０１と細く、巻ずれないように
巻くのに工数がかかり、さらにコイル引き出し線の処理
（コイルの引出し線を端子等に固定する作業）など組立
作業にかなりの工数を必要とし、コストを高くとなると
云う問題が生じていた。The coil 1 of the above-mentioned linear motor is made by manually winding a copper wire 6 having a round or oval cross section around a jig 5 into an oval shape as shown in FIG. However, the wire diameter was 0.5 to 1.01 mm, so it took a lot of man-hours to wind it so that it would not slip, and it also required assembly work such as processing the coil lead wire (fixing the coil lead wire to the terminal etc.). A problem has arisen in that the work requires a considerable number of man-hours and increases the cost.
また、ガラスエポキシ製のプリント基板をボビンとして
、その上に一層のコイルをエツチングで作ると云う方法
は、大型なリニアモータではガラスエポキシの強度が不
足するため、基板の厚みを厚くしなければならず、その
ために、磁石３と鉄心４の間隔が広（なって、コイル部
分で十分な磁束密度が得られなくなると云う欠点があっ
た。又、コイルのパターンには大きな電流が流れるので
、線径を極端に細くすることが出来ず、コイル巻数が制
限されると云う欠点があった。Additionally, the method of using a glass epoxy printed circuit board as a bobbin and etching a layer of coils on top of it requires a thicker board because the strength of glass epoxy is insufficient for large linear motors. Therefore, the distance between the magnet 3 and the iron core 4 is wide (therefore, there is a drawback that sufficient magnetic flux density cannot be obtained in the coil part. Also, since a large current flows through the coil pattern, the wire There was a drawback that the diameter could not be made extremely thin and the number of coil turns was limited.
そこで、本発明はコイルが容易に製造でき、コスト高と
ならないリニアモータのコイル製造方法を提供すること
を目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for manufacturing a coil for a linear motor that allows the coil to be easily manufactured and does not increase costs.
第１図は本発明の原理図を示す。 FIG. 1 shows a diagram of the principle of the present invention.
図において、９はエツチングによりセラミックス基板１
０上に形成されたコイル状パターンである。In the figure, 9 is a ceramic substrate 1 formed by etching.
This is a coiled pattern formed on 0.
これら基板１０を上下に重ね合わせると、上のコイル状
パターン９の引き出し線１１の一本が、下のコイル状パ
ターン９の引き出し％１１１の一本と接触するように形
成されている。単純に重ね合わせるだけで電気的に一本
につながった多層のコイルが形成されている。なお、接
触が不十分な場合は、基板１０にスルーホールをあけて
つなぎ構成する。When these substrates 10 are stacked one above the other, one of the lead wires 11 of the upper coiled pattern 9 is formed so as to contact one of the lead wires 111 of the lower coiled pattern 9. By simply stacking them on top of each other, a multilayer coil is formed that is electrically connected to one another. Note that if the contact is insufficient, a through hole is made in the substrate 10 and a connection is made.
即ち、エツチングによりコイル状パターン９を形成した
セラミック基板１０を、単純に重ね合わせるだけで、電
気的に１本につながった多層のコイルとしているので、
従来のように複数のコイルを銅線で巻いて作る必要がな
く、製造が容易である。That is, by simply overlapping the ceramic substrates 10 on which the coiled patterns 9 have been formed by etching, a multilayered coil electrically connected to each other is created.
It is easy to manufacture as there is no need to wind multiple coils with copper wire as in the past.
また、従来の銅線では十分な巻数が得られなかったが、
本発明のコイル状パターン９を多層にすることによって
、十分な巻数のコイルとすることが出来る。In addition, although it was not possible to obtain a sufficient number of turns with conventional copper wire,
By forming the coil pattern 9 of the present invention into multiple layers, a coil with a sufficient number of turns can be obtained.
セラミックスは強度があり、基板に用いることにより、
全体を薄くしても基板の曲がり等が少なくなり、その結
果、（第３図参照）磁石３と鉄心４間の隙間が狭くなっ
て、エネルギ積の小さな安価な磁石を用いても、コイル
部分で高い磁束密度を確保することが出来る。Ceramics are strong, and by using them as substrates,
Even if the overall thickness is made thinner, there will be less bending of the board, and as a result (see Figure 3) the gap between the magnet 3 and the iron core 4 will become narrower, and even if an inexpensive magnet with a small energy product is used, the coil portion It is possible to secure high magnetic flux density.
さらに、コイルの引き出し線１１もエツチングで形成す
ることにより、パターン端部をコネクタ部にしておけば
、コネクタの取り付けが簡単になり、引き出し線の処理
も簡略化される。Furthermore, if the lead wire 11 of the coil is also formed by etching and the end of the pattern is made into a connector portion, attachment of the connector becomes easy and processing of the lead wire is also simplified.
その他、セラミックスには導電性がないため、渦電流の
発生が無く、リニアモータ駆動中に余計なダンピング力
がかからないといった効果や、セラミックスは伝熱性が
よいため、コイルで発生しる
た熱を効率良く発散す←ことが出来ると云った効果があ
る。In addition, since ceramics have no conductivity, there is no generation of eddy currents, and no unnecessary damping force is applied while driving the linear motor. Ceramics have good heat conductivity, so they efficiently dissipate the heat generated by the coil. It has the effect of being able to radiate well←.
例では例えば、（第１図参照）厚さ０．１ｍｍのセラミ
ックス基板１０上にコイル状パターン９を、公知のエツ
チング技術で形成して、これを公知の多層技術で積層し
たものである。積層厚さが１〜２ＩＩＩＩ１１で８〜ｌ
Ｏ層のコイルが容易にできるので、コイル〔実施例〕
第２図は本発明の一実施、例構成図である。なお、企図
を通し同一符号は同一対象物である。In an example (see FIG. 1), a coil pattern 9 is formed on a ceramic substrate 10 with a thickness of 0.1 mm using a known etching technique, and then this is laminated using a known multilayer technique. Lamination thickness is 1-2III11 and 8-1
Since the O-layer coil can be easily produced, the coil [Embodiment] FIG. 2 is a block diagram of an embodiment of the present invention. Note that the same reference numerals refer to the same objects throughout the plan.
第２図は一軸の直動ステージを示している。該ステージ
は中央にエアベアリング直動案内機構１２を、両側にコ
イル可動式多極型リニアモータＢによって移動する。エ
アベアリング直動案内機構１２は、エアベアリング可動
部１４がエアベアリング固定部１７にエアベアリングを
介して係合して構成される。ステージ可動部１３は、前
記エアベアリング可動部１４に固定された連結板１８と
、この連結板１８の両側に固定した本発明の多層のコイ
ルをエツチングで形成して積層したセラミックス多層基
板ｌＯ′からなる。セラミックス多層基板１０′は、実
施の吸引力によって、鉄心がたわむのを支えるものであ
る。FIG. 2 shows a uniaxial linear motion stage. The stage is moved by an air bearing linear guide mechanism 12 in the center and coil movable multipolar linear motors B on both sides. The air bearing linear motion guide mechanism 12 is configured such that the air bearing movable part 14 engages with the air bearing fixed part 17 via an air bearing. The stage movable section 13 is made of a ceramic multilayer substrate lO' in which a connecting plate 18 fixed to the air bearing movable section 14 and a multilayer coil of the present invention fixed on both sides of the connecting plate 18 are formed and laminated by etching. Become. The ceramic multilayer substrate 10' supports the bending of the iron core due to the attraction force.
また、セラミックス多層基板１０′には、その直ぐ両側
の磁石３から発生する磁束が貫いており、基板１０゛上
に形成されたコイルｌに電流を流すと、電磁推進力がス
テージ可動部１３の進行方向に発生する。従って、コイ
ルに流す電流の方向をコイルｌが磁石の境目に来た時に
反転させれば、ステージ可動部１３を常に同じ方向に駆
動することが出来る。Further, the ceramic multilayer substrate 10' is penetrated by magnetic flux generated from the magnets 3 on both sides thereof, and when a current is passed through the coil l formed on the substrate 10', an electromagnetic propulsive force is applied to the stage movable part 13. Occurs in the direction of travel. Therefore, by reversing the direction of the current flowing through the coil when the coil l reaches the boundary between the magnets, the stage movable section 13 can always be driven in the same direction.
なお、本実施例の効果については、第１図において説明
したと同様であり、説明が重複するのでここでは説明を
省略する。Note that the effects of this embodiment are the same as those explained in FIG. 1, and the explanation will be omitted here since the explanation will be redundant.
以上は多極型リニアモータのコイルで説明したが、単極
のリニアモータのコイルの製造方法に対しても適用可能
である。Although the above description has been made using the coil of a multipolar linear motor, the present invention can also be applied to a method of manufacturing a coil of a single-polar linear motor.
以上説明したように本発明によれば、リニアモータのコ
イルを多層セラミックス基板の製造技術を用いて容易に
製造することが出来るため、従来のように導線を巻く手
間が省けると共に、引き出し線の処理も容易になる等、
リニアモータの製造組立の簡略化に寄与するところが大
きい。As explained above, according to the present invention, the coils of linear motors can be easily manufactured using the manufacturing technology of multilayer ceramic substrates, thereby eliminating the need for winding the conductor wires as in the conventional method, and processing the lead wires. It becomes easier, etc.
This greatly contributes to simplifying the manufacturing and assembly of linear motors.
第１図は本発明の原理図、
第２図は本発明の一実施例構成図、
第３図は従来の多極型リニアモータを説明する図、
第４図は従来のリニアモータのコイルを説明す図である
。
図において、
ｌはコイル、
８はプリント誉反、
９はコイル状パターン、
１０はセラミックス基板、
１０’はセラミックス多層基板、
１１は引き出し線、
１２はエアーベアリング直動案内機構、１３はステージ
可動部、
１６は支持板、
１７はエアーベアリング固定部、
そｔ米のリニア七−夕のコイルと橢〕月ス吐茅 ４ 図Fig. 1 is a diagram of the principle of the present invention, Fig. 2 is a configuration diagram of an embodiment of the present invention, Fig. 3 is a diagram explaining a conventional multi-polar linear motor, and Fig. 4 is a diagram illustrating the coils of a conventional linear motor. FIG. In the figure, 1 is a coil, 8 is a printed copy, 9 is a coiled pattern, 10 is a ceramic substrate, 10' is a ceramic multilayer substrate, 11 is a lead wire, 12 is an air bearing linear motion guide mechanism, and 13 is a stage movable part , 16 is the support plate, 17 is the air bearing fixing part, and the linear Tanabata coil and spool are shown in Figure 4.
Claims (1)
を鉄心（４）間に配置し、電磁力により推力を発生する
リニアモータ（Ａ）のコイル製造方法であって、 前記コイル（１）はセラミックス等を基板材とするプリ
ント板上に、エッチングでコイル状パターン（９）を形
成し、それらを複数枚積層して形成したことを特徴とす
るリニアモータのコイル製造方法。[Claims] Coil (1) held on a bobbin (2) on a magnet (3)
A method for manufacturing a coil for a linear motor (A) in which a coil is placed between iron cores (4) and thrust is generated by electromagnetic force, the coil (1) being etched onto a printed board whose substrate material is ceramics or the like. A method for manufacturing a coil for a linear motor, characterized in that a coil pattern (9) is formed and a plurality of coil patterns (9) are laminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16951488A JPH0223057A (en) | 1988-07-07 | 1988-07-07 | Manufacture of coil for linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16951488A JPH0223057A (en) | 1988-07-07 | 1988-07-07 | Manufacture of coil for linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0223057A true JPH0223057A (en) | 1990-01-25 |
Family
ID=15887919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16951488A Pending JPH0223057A (en) | 1988-07-07 | 1988-07-07 | Manufacture of coil for linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0223057A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999053600A1 (en) * | 1998-04-10 | 1999-10-21 | Nikon Corporation | Linear motor having polygonal coil unit |
| US8145043B2 (en) | 1998-06-24 | 2012-03-27 | Samsung Electronics Co., Ltd. | Recording medium for storing information for still picture, recording and/or reproducing method and apparatus therefor |
| KR102371396B1 (en) * | 2020-10-14 | 2022-03-07 | 주식회사 투에이치앤엠 | a linear motor and a linear motor system. |
-
1988
- 1988-07-07 JP JP16951488A patent/JPH0223057A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999053600A1 (en) * | 1998-04-10 | 1999-10-21 | Nikon Corporation | Linear motor having polygonal coil unit |
| US6355993B1 (en) | 1998-04-10 | 2002-03-12 | Nikon Corporation | Linear motor having polygonal shaped coil units |
| US8145043B2 (en) | 1998-06-24 | 2012-03-27 | Samsung Electronics Co., Ltd. | Recording medium for storing information for still picture, recording and/or reproducing method and apparatus therefor |
| US8750691B2 (en) | 1998-06-24 | 2014-06-10 | Samsung Electronics Co., Ltd. | Recording medium for storing information for still picture, recording and/or reproducing method and apparatus therefor |
| US9225954B2 (en) | 1998-06-24 | 2015-12-29 | Samsung Electronics Co., Ltd. | Recording medium for storing information for still picture, recording and/or reproducing method and apparatus therefor |
| KR102371396B1 (en) * | 2020-10-14 | 2022-03-07 | 주식회사 투에이치앤엠 | a linear motor and a linear motor system. |
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