JPH0222876A - Metal vapor laser and discharge circuit - Google Patents
Metal vapor laser and discharge circuitInfo
- Publication number
- JPH0222876A JPH0222876A JP17322788A JP17322788A JPH0222876A JP H0222876 A JPH0222876 A JP H0222876A JP 17322788 A JP17322788 A JP 17322788A JP 17322788 A JP17322788 A JP 17322788A JP H0222876 A JPH0222876 A JP H0222876A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- electrodes
- metal vapor
- electrode
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 27
- 239000002184 metal Substances 0.000 title claims abstract description 27
- 239000003990 capacitor Substances 0.000 claims abstract description 31
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 238000010304 firing Methods 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、金属蒸気レーザに関し、特に放電の発生方法
に工夫を施した金属蒸気レーザ及び放電回路に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a metal vapor laser, and more particularly to a metal vapor laser and a discharge circuit in which a method of generating electric discharge is devised.
従来、この種の金属蒸気レーザは、放電を形成させるた
めの１対の電極を有するレーザ管に放電回路を接続し、
この放電回路のコンデンサに充電した電力を水素人サイ
ラトロンなどのスイッチング素子を作用させることによ
り、前記の１対の電極間に電圧を発生させ放電を発生さ
せていた。Conventionally, this type of metal vapor laser connects a discharge circuit to a laser tube having a pair of electrodes for forming a discharge,
By applying the electric power charged in the capacitor of this discharge circuit to a switching element such as a hydrogen thyratron, a voltage is generated between the pair of electrodes and a discharge is generated.
上述した従来の金属蒸気レーザは、放電を形成させるた
めの１対の電極しか有していないので、放電を発生させ
るために第３図に示すように電源１より充電用コイル２
，１８．逆電流防止用整流素子３及び保護抵抗４を通し
てコンデンサ１６に充電した電力をスイッチング素子２
０を動作させることにより電荷をコンデンサ１つに移行
させ、金属蒸気レーザ管１７の両端に電圧を発生させて
いた。このような金属蒸気レーザの構造及び使用放電回
路では、高電圧、大電流に耐えるスイッチング素子が必
要となり現在水素大サイラトロンが最も広く使用されて
いるが、水素人サイラストロンは高価でなおかつが命が
５００時間時間上短いという欠点があった。さらに投入
電力の２０〜３０％が水素入すイラトロンで消費され、
総合効率が悪いという欠点があった。The conventional metal vapor laser described above has only one pair of electrodes for generating a discharge, so in order to generate a discharge, a charging coil 2 is connected to a power source 1 as shown in FIG.
,18. The power charged in the capacitor 16 through the rectifying element 3 for preventing reverse current and the protective resistor 4 is transferred to the switching element 2.
By operating 0, the charge was transferred to one capacitor, and a voltage was generated at both ends of the metal vapor laser tube 17. The structure of such a metal vapor laser and the discharge circuit used require switching elements that can withstand high voltage and large current, and hydrogen large thyratrons are currently most widely used, but hydrogen thyratrons are expensive and can be life-threatening. It had the disadvantage of being shorter than 500 hours. Furthermore, 20 to 30% of the input power is consumed by Iratron, which contains hydrogen.
The drawback was that the overall efficiency was poor.
本発明は、放電回路に高価な水素人サイラトロンを用い
ずとも投入電力の９５％以上を金属蒸気レーザ管内で消
費することが可能となる非常に効率の良い金属蒸気レー
ザを得ることを目的としている。The object of the present invention is to obtain a highly efficient metal vapor laser that can consume more than 95% of the input power within the metal vapor laser tube without using an expensive hydrogen thyratron in the discharge circuit. .
本発明の金属蒸気レーザは、レーザ媒体を封入する容器
とこの容器内に設けた一対の電極から成るレーザ管の両
端に共振器用ミラーを有し、さらに、主放電を形成する
１対の電極と電極の間に制御用電極を有している構成と
なっている。また本発明の放電回路は、上述の金属蒸気
レーザを駆動する回路であって、電源、コイル、ダイオ
ード。The metal vapor laser of the present invention has resonator mirrors at both ends of a laser tube consisting of a container enclosing a laser medium and a pair of electrodes provided in the container, and further includes a pair of electrodes forming a main discharge. The structure includes a control electrode between the electrodes. Further, the discharge circuit of the present invention is a circuit for driving the above-mentioned metal vapor laser, and includes a power source, a coil, and a diode.
第１の抵抗、第１のコンデンサを直列接続して成る閉回
路の第１のコンデンサ両端に蒸気レーザの一対の電極を
接続し、第２のコンデンサ、第２の抵抗、制御用電源を
直列接続した回路の第２のコンデンサの一端に制御用電
極を接続し、制御用電源の一端を前述の一対の電極のう
ちの一方の電極に接続する構成となっている。A pair of electrodes of a vapor laser are connected to both ends of a first capacitor of a closed circuit formed by connecting a first resistor and a first capacitor in series, and a second capacitor, a second resistor, and a control power source are connected in series. A control electrode is connected to one end of the second capacitor of the circuit, and one end of the control power source is connected to one of the pair of electrodes described above.
制御用電極は、円筒状または円板状などの形状にするこ
とにより、レーザビームを遮蔽することなく主放電を形
成する一対の電極間の電界を遮蔽することができる。制
御用電極は、コンデンサ。By forming the control electrode into a cylindrical or disc shape, it is possible to shield the electric field between the pair of electrodes that forms the main discharge without shielding the laser beam. The control electrode is a capacitor.
抵抗及び制御用電源を介して一対の電極の一方に接続さ
れる。制御用信号が無い場合は、主放電を形成する一対
の電極間は、高い放電開始電圧を維持できるので並列に
接続したコンデンサに充分高い電圧まで充電できる。制
御用電極に、パルス電圧を印加することにより制御用電
極と主放電を形成する一方の電極との間に予備放電を起
こさせ、発生した電子が他の高電位に維持されている電
極側に流れ込むことによって主放電を形成される。主放
電が発生すると、制御用電極は、プラズマに覆われ制御
機能は失われ主放電を形成する一対の電極間は低インピ
ーダンスとなりレーザ管に並列に接続されたコンデンサ
から大電流がレーザ管内を流れる。この放電は、きわめ
て短い時間に完結しレーザ管内のプラズマは消失し再び
制御用電極の機能が回復し、同じ動作を繰り返すことに
よってパルス放電を発生させることができる。It is connected to one of the pair of electrodes via a resistor and a control power source. When there is no control signal, a high discharge starting voltage can be maintained between the pair of electrodes forming the main discharge, so that the capacitors connected in parallel can be charged to a sufficiently high voltage. By applying a pulse voltage to the control electrode, a preliminary discharge is caused between the control electrode and one electrode that forms the main discharge, and the generated electrons are transferred to the other electrode that is maintained at a high potential. The main discharge is formed by flowing into the main discharge. When the main discharge occurs, the control electrode is covered with plasma and the control function is lost.The impedance between the pair of electrodes forming the main discharge becomes low, and a large current flows inside the laser tube from the capacitor connected in parallel to the laser tube. . This discharge is completed in a very short time, the plasma in the laser tube disappears, the control electrode function is restored, and a pulse discharge can be generated by repeating the same operation.
〔実施例１〕
第１図は本発明の一実施例の金属蒸気レーザ及び回路構
成図である。放電回路は電源１、コイル２、ダイオード
３、抵抗４，１０、コンデンサ５．９、制御用電源１１
から成り、金属蒸気レーザはレーザ管７とレーザ管両端
に備えられた共振器用ミラー（図示省略）とから成って
いる。レーザ管は一対の主放電を形成する電極６．１２
に加えて、この電極６，１２の間に制御用電極８を有し
ている。制御用電極は、放電回路のコンデンサ９、抵抗
１０及び制御用電源１１を介してアース側の電極１２に
接続されている。金属蒸気レーザ管７には並列にコンデ
ンサ５が接続されており、直流電源１より充電コイル２
．ダイオード２及び抵抗４を介してコンデンサ５に充電
される。[Embodiment 1] FIG. 1 is a block diagram of a metal vapor laser and a circuit according to an embodiment of the present invention. The discharge circuit includes a power supply 1, a coil 2, a diode 3, resistors 4 and 10, a capacitor 5.9, and a control power supply 11.
The metal vapor laser consists of a laser tube 7 and resonator mirrors (not shown) provided at both ends of the laser tube. The laser tube has a pair of electrodes 6.12 forming a main discharge.
In addition, a control electrode 8 is provided between the electrodes 6 and 12. The control electrode is connected to a ground-side electrode 12 via a capacitor 9, a resistor 10, and a control power source 11 of the discharge circuit. A capacitor 5 is connected in parallel to the metal vapor laser tube 7, and a charging coil 2 is connected to the DC power source 1.
．． A capacitor 5 is charged via a diode 2 and a resistor 4.
制御用電極８は、モリブデンまたはタンタルなどの金属
を円板状または円筒状などに加工することにより実現で
き、電極１２の近傍に配置されている。The control electrode 8 can be realized by processing a metal such as molybdenum or tantalum into a disk shape or a cylindrical shape, and is arranged near the electrode 12.
〔実施例２〕
第２図は、本発明の実施例２の金属蒸気レーザ及び回路
構成図である。一対の主放電を形成する電極６．１２の
間に制御用電極１３．１４が配置されている。制御用電
極１３，１．４はコンデンサ９、抵抗１０．制御用電源
１１を介して電極１２に接続されている。この他は前述
の実施例と同じである。この実施例では制御用電極が２
個配置されているため、高電位に保持されている電極と
電極１２の間の電界をより確実に遮蔽することができ、
放電開始電圧をより高くできるという利点がある。[Example 2] FIG. 2 is a diagram showing a metal vapor laser and circuit configuration of Example 2 of the present invention. A control electrode 13.14 is arranged between a pair of electrodes 6.12 forming a main discharge. The control electrodes 13, 1.4 are connected to a capacitor 9, a resistor 10. It is connected to the electrode 12 via a control power source 11. The rest is the same as the previous embodiment. In this example, there are two control electrodes.
Since the electrodes are arranged individually, it is possible to more reliably shield the electric field between the electrodes held at a high potential and the electrodes 12.
This has the advantage that the discharge starting voltage can be made higher.
以上説明したように本発明は、主放電を形成する電極間
に制御用電極を配置することにより、コンデンサからの
放電開始時を制御用電極で制御することが可能となるの
で、高価な水素人サイラトロンが不要となるばかりでな
く、コンデンサに充電された電力を全部レーザ管内で消
費することができ、効率が著しく改善できる効果がある
。As explained above, the present invention makes it possible to control the start of discharge from a capacitor by arranging a control electrode between the electrodes that form the main discharge. Not only does a thyratron become unnecessary, but all the power charged in the capacitor can be consumed within the laser tube, resulting in a significant improvement in efficiency.
−ザ及び放電回路構成図、第２図は、本発明の第２の実
施例の金属蒸気レーザ及び放電回路構成図、第３図は、
従来の金属蒸気レーザ及び放電回路構成図である。- Fig. 2 is a block diagram of a metal vapor laser and discharge circuit according to a second embodiment of the present invention; Fig. 3 is a block diagram of a metal vapor laser and discharge circuit according to a second embodiment of the present invention;
FIG. 2 is a configuration diagram of a conventional metal vapor laser and discharge circuit.
１・・・直流電源、２・・・充電用コイル、３・・・ダ
イオード、４・・・抵抗、５・・・コンデンサ、６・・
・電極、７・・・レーザ管、８・・・制御用電極、９・
・・コンデンサ、１０・・・抵抗、１１・・・制御用電
源、１２・・・電極、１３・・・制御用電極、１４・・
・制御用電極、１６・・・コンデンサ、１７・・・レー
ザ管、１８・・・充電用コイル、１９・・・コンデンサ
、２０・・・水素人サイラトロン。1... DC power supply, 2... Charging coil, 3... Diode, 4... Resistor, 5... Capacitor, 6...
・Electrode, 7... Laser tube, 8... Control electrode, 9.
... Capacitor, 10... Resistor, 11... Control power supply, 12... Electrode, 13... Control electrode, 14...
- Control electrode, 16... Capacitor, 17... Laser tube, 18... Charging coil, 19... Capacitor, 20... Hydrogen thyratron.
Claims (2)
両端に配した共振器ミラーとから成 り、レーザ管内で銅または金などの金属を、ネオンまた
はヘリウムなどのバッファガスの放電によって蒸気化し
、発振させて光出力を得る金属蒸気レーザにおいて、主
放電を形成する前記電極間に主放電を制御する１つまた
は複数の制御用電極を有することを特徴とする金属蒸気
レーザ。(1) Consists of a laser tube with a pair of discharge electrodes and resonator mirrors placed at both ends of the laser tube. Metals such as copper or gold are vaporized within the laser tube by discharge of a buffer gas such as neon or helium. . A metal vapor laser that generates optical output by oscillation, characterized in that the metal vapor laser has one or more control electrodes that control the main discharge between the electrodes that form the main discharge.
路であつて、電源、コイル、ダイオー ド、第１の抵抗、第１のコンデンサを直列接続して成る
閉回路の第１のコンデンサの両端を請求項（１）の金属
蒸気レーザの一対の電極に接続し、第２のコンデンサ、
第２の抵抗、制御用電源を直列接続して成る回路の第２
のコンデンサの一端（第２の抵抗に接続していない方）
を請求項（１）の金属蒸気レーザの制御用電極に接続し
制御用電極の一端を前記一対の電極のうちの一方の電極
に接続することを特徴とする金属蒸気レーザの放電回路
。(2) A circuit for driving a metal vapor laser according to claim (1), wherein the first capacitor is a closed circuit formed by connecting a power supply, a coil, a diode, a first resistor, and a first capacitor in series. a second capacitor, both ends of which are connected to the pair of electrodes of the metal vapor laser according to claim (1);
A second resistor and a control power supply connected in series.
One end of the capacitor (the one not connected to the second resistor)
A discharge circuit for a metal vapor laser, characterized in that: is connected to the control electrode of the metal vapor laser according to claim 1, and one end of the control electrode is connected to one of the pair of electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17322788A JPH0222876A (en) | 1988-07-11 | 1988-07-11 | Metal vapor laser and discharge circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17322788A JPH0222876A (en) | 1988-07-11 | 1988-07-11 | Metal vapor laser and discharge circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222876A true JPH0222876A (en) | 1990-01-25 |
Family
ID=15956500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17322788A Pending JPH0222876A (en) | 1988-07-11 | 1988-07-11 | Metal vapor laser and discharge circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222876A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4131949A1 (en) * | 1990-09-25 | 1992-04-30 | Mitsubishi Electric Corp | Switching unit for excimer laser - has series-parallel modules connected to circuit with numerous high velocity switches |
-
1988
- 1988-07-11 JP JP17322788A patent/JPH0222876A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4131949A1 (en) * | 1990-09-25 | 1992-04-30 | Mitsubishi Electric Corp | Switching unit for excimer laser - has series-parallel modules connected to circuit with numerous high velocity switches |
| DE4131949C2 (en) * | 1990-09-25 | 1996-10-10 | Mitsubishi Electric Corp | Switching devices for a discharge-excited pulse laser device |
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