JPH0222417Y2 - - Google Patents
Info
- Publication number
- JPH0222417Y2 JPH0222417Y2 JP15020683U JP15020683U JPH0222417Y2 JP H0222417 Y2 JPH0222417 Y2 JP H0222417Y2 JP 15020683 U JP15020683 U JP 15020683U JP 15020683 U JP15020683 U JP 15020683U JP H0222417 Y2 JPH0222417 Y2 JP H0222417Y2
- Authority
- JP
- Japan
- Prior art keywords
- floor
- base block
- floor slab
- slab
- bolts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 10
- 238000002955 isolation Methods 0.000 claims description 6
- 238000004378 air conditioning Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Floor Finish (AREA)
Description
【考案の詳細な説明】
本考案は、クリーンルーム用防振床に係るもの
である。[Detailed Description of the Invention] The present invention relates to a vibration-proof floor for clean rooms.
半導体製造工場等のクリーンルームの床は、通
常、極めて高品質な空調を得るため、また、設備
配管、配線等を設置するため、浮床構造とする場
合が多い。 The floor of a clean room in a semiconductor manufacturing factory or the like usually has a floating floor structure in order to obtain extremely high quality air conditioning and to install equipment piping, wiring, etc.
一方、クリーンルームでは、床に、例えば、
0.5ｇalの垂直加速度に対し振幅が0.1μm以下と云
う高度な防振性能を要する写真蝕刻装置等の特殊
装置乃至機器を置くことも多く、斯様な場合、上
記浮床構造にあつては、床版上に嵩上げコンクリ
ートを打設して部分的に床下空間を無くし、該嵩
上げコンクリートでその特殊装置乃至機器を剛に
支持している。 On the other hand, in a clean room, on the floor, e.g.
In many cases, special equipment such as photolithography equipment is installed that requires advanced vibration isolation performance with an amplitude of 0.1 μm or less for a vertical acceleration of 0.5 gal, and in such cases, in the floating floor structure mentioned above, Raised concrete is placed on the slab to partially eliminate the space under the floor, and the raised concrete rigidly supports the special equipment or equipment.
しかし、最近の半導体製造工場等では、半導体
の急速な進歩に伴い装置乃至機器の変更やレイア
ウトの変更がはげしく、如上の床構造では変更工
事が容易で無い。 However, in modern semiconductor manufacturing factories, equipment and equipment and layouts are frequently changed due to the rapid advancement of semiconductors, and it is not easy to make changes with the above-mentioned floor structure.
また、嵩上げコンクリートの周辺から塵俟が生
じて、空調の品質を低下させる欠点がある。 In addition, there is a drawback that dust is generated around the raised concrete, degrading the quality of air conditioning.
そこで、本考案は、斯る従来の不都合を除去し
ようとするものであり、図示の実施例の通り、床
版１の上に適宜間隔を隔てて床パネル２……を配
した浮床構造のクリーンルーム用床において、防
振を必要とする区域の床版１上に、その床下空間
をうめるようにコンクリート製のベースブロツク
３を載置し、該ベースブロツクには、周面に枠材
３１を装備させて、該枠材にて床版１へボルト等
により取り外し可能に固定し、また、ベースブロ
ツク３上に位置する床パネル２……を該ベースブ
ロツクへボルト等により取り外し可能に固定して
成る。 Therefore, the present invention is an attempt to eliminate such conventional inconveniences, and as shown in the illustrated embodiment, a clean room with a floating floor structure is constructed in which floor panels 2 are placed on a floor slab 1 at appropriate intervals. In the construction floor, a concrete base block 3 is placed on the floor slab 1 in the area requiring vibration isolation so as to fill the space under the floor, and the base block is equipped with a frame material 31 on the circumference. The frame material is then removably fixed to the floor slab 1 with bolts or the like, and the floor panel 2 located on the base block 3 is removably fixed to the base block with bolts or the like. .
以下、図示の実施例について詳細に説明する。 The illustrated embodiment will be described in detail below.
図において、１は、コンクリート床版、２……
は、該床版の上に支持材４を介して適宜間隔を隔
てて配備した多数の床パネル、３は、防振を必要
とする区域の床版上に載置して床パネルを受けた
コンクリート製ベースブロツク、５は、仕切壁で
ある。 In the figure, 1 is a concrete floor slab, 2...
3 is a large number of floor panels placed on the floor slab at appropriate intervals via supports 4, and 3 is a floor panel receiving panel placed on the floor slab in an area requiring vibration isolation. The concrete base block 5 is a partition wall.
床パネル２……は、鋼板製二重構造（第３図、
第４図）と成つており、平板のままのトツプシー
ト２１と、平板を格子状に打ち抜き、各交点部分
２２１……の周辺から複数の起立片２２２……を
突設したボトムシート２２とを、上下に平行させ
て重合し、それらの起立片２２２……の上端をト
ツプシート２１へスポツト溶接して一体化し、平
面形状を正方形に形成している。 Floor panel 2... has a double structure made of steel plates (Fig. 3,
Fig. 4) consists of a top sheet 21 which is a flat plate, and a bottom sheet 22 which is made by punching out a flat plate in a lattice shape and has a plurality of upstanding pieces 222 protruding from the periphery of each intersection portion 221. The upright pieces 222 are stacked vertically in parallel and integrated by spot welding the upper ends of the upright pieces 222 to the top sheet 21, forming a square planar shape.
ベースブロツク３は、厚さを床下空間の高さに
等しく形成し、また、平面形状を長方形、その他
適宜形状で、且つ、支持する特殊装置乃至機器に
適合する大きさに形成し、周面に溝形鋼の枠材３
１を開溝面を外向きにして固定している。 The base block 3 is formed to have a thickness equal to the height of the underfloor space, a rectangular or other suitable planar shape, and a size suitable for the special equipment or equipment to be supported. Channel steel frame material 3
1 is fixed with the open groove surface facing outward.
而して、ベースブロツク３は、床版１の適所に
載置するが、枠材３１に対応させて床版１の上面
に適宜間隔でナツト穴１１……を穿設して、これ
らのナツト穴へアンカーナツト１２……を打ち込
んで固定し、他方の枠体３１には、それらのアン
カーナツトに対応させて下片に透孔３１１……を
穿設し、これらの透孔へボルト６……を通してア
ンカーナツトへ螺合し締め付けて、以てベースブ
ロツク３を床版１上へ取り外し可能に固定してい
る。 The base block 3 is placed in a suitable position on the floor slab 1, but nut holes 11 are bored at appropriate intervals on the upper surface of the floor slab 1 in correspondence with the frame material 31, and these nuts are inserted into the base block 3. Anchor nuts 12 are driven into the holes and fixed, holes 311 are bored in the lower part of the other frame 31 in correspondence with those anchor nuts, and bolts 6 are inserted into these holes. The base block 3 is removably fixed onto the floor slab 1 by screwing and tightening the anchor nut through the base block 1.
また、ベースブロツク３上には、床パネル２…
…を受けるが、該床パネルの適宜な上記交点部分
２２１……に対応させてベースブロツク上面に複
数のナツト穴３２……を穿設して、これらのナツ
ト穴へアンカーナツト３３……を嵌挿固定し、且
つ、床パネル２……には、それらのアンカーナツ
トに対応する上記交点部分２２１……で、トツプ
シート２１及びボトムシート２２を互いに連通す
るさら孔２１１……及び透孔２２３……を穿設
し、トツプシート２１とボトムシート２２との
間、並びに、ボトムシートとベースブロツク３の
上面との隙間に、さら孔２１１……及び透孔２２
３……に連通させてカラー７……及びスペーサ８
……を介在させ、これらの上方からさらボルト９
……を通してアンカーナツト３３……へ螺合し締
め付けて、以て床パネル２……をベースブロツク
３上へ取り外し可能に固定している。 Also, on the base block 3, there is a floor panel 2...
..., a plurality of nut holes 32... are bored in the upper surface of the base block corresponding to the appropriate intersection portions 221... of the floor panel, and anchor nuts 33... are fitted into these nut holes. The floor panel 2 has countersunk holes 211 and through holes 223 that communicate the top sheet 21 and the bottom sheet 22 with each other at the intersection portions 221 corresponding to the anchor nuts. countersunk holes 211 and through holes 22 are bored between the top sheet 21 and the bottom sheet 22 and in the gap between the bottom sheet and the top surface of the base block 3.
3... to communicate with collar 7... and spacer 8
..., and insert countersunk bolts 9 from above these.
The floor panels 2 are removably fixed onto the base block 3 by screwing them through the anchor nuts 33 and tightening them.
本考案によれば、浮床構造において、防振を要
する箇所で、床板１上に床下空間をうめるコンク
リート製ベースブロツク３を配し、該ベースブロ
ツクには、周面に枠材３１を装備させて、該枠材
を以て床版１へボルト等により取り外し可能に固
定し、且つ、ベースブロツク３上の床パネル２…
…をベースブロツクへボルト等により取り外し可
能に固定したから、特殊装置乃至機器の載置に要
求される高度な防振性能を確保でき、また、床版
１上へのベースブロツク３の取り付け、取り外
し、ベースブロツク３上への床パネル２……の取
り付け、取り外しが、極めて容易に行えて、装置
乃至機器、各種設備の変更やレイアウトの変更
に、変更工事を極めて容易に、迅速に、安価に、
行うことができ、床パネル等の部材のロスを無く
すことができる。 According to the present invention, in a floating floor structure, a concrete base block 3 that fills the underfloor space is arranged on the floor plate 1 at a place where vibration isolation is required, and the base block is equipped with a frame material 31 on the circumferential surface. , the frame material is removably fixed to the floor slab 1 with bolts or the like, and the floor panel 2 on the base block 3...
... is removably fixed to the base block with bolts, etc., so it is possible to ensure the high level of vibration-proofing performance required for placing special equipment or equipment. It is extremely easy to install and remove the floor panel 2 on the base block 3, making it extremely easy, quick, and inexpensive to change equipment, equipment, various equipment, or change the layout. ,
This eliminates the loss of members such as floor panels.
更に、床パネル２……から床版１まで連続した
剛構造となるので、この区域に支柱等を起立させ
る場合、床パネルに撓み、変形が生ぜず、防振は
元より、重荷重に耐える堅固な支柱構造が得ら
れ、しかも、ベースブロツク３の周囲が枠材３１
で覆われて、周辺から塵俟を生ぜず、空調の品質
を高度に保つことができる。 Furthermore, since it has a continuous rigid structure from floor panel 2... to floor slab 1, when supports etc. are erected in this area, the floor panel will not bend or deform, and will not only provide vibration isolation but also withstand heavy loads. A solid support structure is obtained, and the base block 3 is surrounded by the frame material 31.
This prevents dust from being generated from the surrounding area and maintains a high level of air conditioning quality.
図面は、本考案の実施例で、第１図は、截断平
面図、第２図は、截断正面図、第３図は、第２図
の要部の拡大断面図、第４図は、要部部材の拡大
底面図である。
１……床版、２……床パネル、３……ベースブ
ロツク、４……支持材、５……支切壁、６……ボ
ルト、７……カラー、８……スペーサ、９……さ
らボルト。
The drawings show an embodiment of the present invention; FIG. 1 is a cutaway plan view, FIG. 2 is a cutaway front view, FIG. 3 is an enlarged sectional view of the main part of FIG. 2, and FIG. It is an enlarged bottom view of a part member. 1... Floor slab, 2... Floor panel, 3... Base block, 4... Supporting material, 5... Partition wall, 6... Bolt, 7... Collar, 8... Spacer, 9... Further... bolt.
Claims (1)
を配した浮床構造のクリーンルーム用床におい
て、防振を必要とする区域の床版１上に、その床
下空間をうめるようにコンクリート製のベースブ
ロツク３を載置し、該ベースブロツクには、周面
に枠材３１を装備させて、該枠材にて床版１へボ
ルト等により取り外し可能に固定し、また、ベー
スブロツク３上に位置する床パネル２……を該ベ
ースブロツクへボルト等により取り外し可能に固
定したことを特徴とするクリーンルーム用防振
床。 Floor panels 2 are placed on top of the floor slab 1 at appropriate intervals...
In a clean room floor with a floating floor structure, a concrete base block 3 is placed on the floor slab 1 in the area requiring vibration isolation so as to fill the space under the floor. A frame material 31 is provided on the surface, and the frame material is used to removably fix the floor slab 1 to the floor slab 1 with bolts, etc., and the floor panel 2 located on the base block 3 is attached to the base block with bolts, etc. A clean room vibration-proof floor characterized by being removably fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020683U JPS6057642U (en) | 1983-09-27 | 1983-09-27 | Vibration-proof floor for clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020683U JPS6057642U (en) | 1983-09-27 | 1983-09-27 | Vibration-proof floor for clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057642U JPS6057642U (en) | 1985-04-22 |
| JPH0222417Y2 true JPH0222417Y2 (en) | 1990-06-18 |
Family
ID=30333210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15020683U Granted JPS6057642U (en) | 1983-09-27 | 1983-09-27 | Vibration-proof floor for clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057642U (en) |
-
1983
- 1983-09-27 JP JP15020683U patent/JPS6057642U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6057642U (en) | 1985-04-22 |
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