JPH02223183A - Temperature control device - Google Patents
Temperature control deviceInfo
- Publication number
- JPH02223183A JPH02223183A JP4237489A JP4237489A JPH02223183A JP H02223183 A JPH02223183 A JP H02223183A JP 4237489 A JP4237489 A JP 4237489A JP 4237489 A JP4237489 A JP 4237489A JP H02223183 A JPH02223183 A JP H02223183A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- timer
- relay
- output signal
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 25
- 230000005284 excitation Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、ひも状ヒータを用いた電気カーベント等の採
暖具の温度制御装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a temperature control device for a heating device such as an electric car vent using a string-shaped heater.
従来の技術
従来の技術を電気カーペットの温度制御装置の一例で説
明する。2. Description of the Related Art The prior art will be explained using an example of a temperature control device for an electric carpet.
第３図は、電気カーペットの本体構成図である。FIG. 3 is a block diagram of the main body of the electric carpet.
本体Ｉには、消費電力Ｐ＋（ｗ）で長さｊ！＋（ｍ）の
ひも状ヒータ２と温度検知線３が配されている。Main body I has power consumption P+(w) and length j! +(m) string-like heaters 2 and temperature detection wires 3 are arranged.
４はコントローラであり、温度検知線３によって検出さ
れる温度信号によって単に設定温度に制御するものであ
る。第４図に、従来の電気カーペットの表面温度の立上
りを示す。ａは、通電を開始すると一定時間（ｔｏ）の
間所望の設定温度にかかわらず最高の設定温度で制御し
、その後所望の設定温度で制御する。この事により、カ
ーペント表面温度ができるだけ速く上昇する事を意図し
たものである。さらに、電気カーベントの通常の使用方
法として本体１の上には、カバー（図示せず）を使用す
ることから、カバーの上の温度上昇の速度はカバーを用
いない時と比べてより遅くなる事は自明である。また、
ｂは通電開始時点から所望の設定温度で制御したもので
ある。これは、表面温度との熱的な結合より、ひも状ヒ
ータと温度検知線との熱的な結合が結いため、表面温度
がまだ所望の温度に達していなくても、ひも状ヒータへ
の通電を停止してしまうことより非常に表面温度の立上
りが遅くなる。Reference numeral 4 denotes a controller, which simply controls the temperature to a set temperature based on a temperature signal detected by the temperature detection line 3. FIG. 4 shows the rise in surface temperature of a conventional electric carpet. When the current supply starts, control is performed at the highest set temperature for a certain period of time (to), regardless of the desired set temperature, and thereafter, control is performed at the desired set temperature. This is intended to cause the carpent surface temperature to rise as quickly as possible. Furthermore, since a cover (not shown) is used over the main body 1 as a normal method of using an electric car vent, the rate of temperature rise above the cover will be slower than when the cover is not used. is self-evident. Also,
b indicates that the temperature was controlled at a desired set temperature from the start of energization. This is because the thermal bond between the string heater and the temperature detection wire is stronger than the thermal bond with the surface temperature, so even if the surface temperature has not yet reached the desired temperature, the string heater cannot be energized. If the surface temperature is stopped, the rise in surface temperature will be much slower.
発明が解決しようとする課題
すなわち、電気カーペット等では、その表面温度ができ
るだけ速く上昇することが要望されている。電気カーペ
ット等では、単位面積当りの投入電力を大きくすればす
るほど表面温度の立上りが速くなるが、ひも状ヒータの
長さを長くして、例えば投入電力密度Ｐ ＋ ／ ｌ
＋ （ｗ／ ｍ）以下で構成すれば、線温度は、設定
温度が従来と同一であれは従来と同等またはそれ以下と
なり、安全上も課題はないが、使用する際、人体が自分
の体重でひも状ヒータの存在感を感じる、いわゆる違和
感を惑しやすくなる事や、電気カーベントの製作上、ひ
も状ヒータが長くなった分だけ材料費が増加したり、ひ
も状ヒータの配線に時間がかかる等といったコストｕｐ
を生じるという課題が発生する。The problem to be solved by the invention is that it is desired that the surface temperature of electric carpets and the like rise as quickly as possible. For electric carpets, etc., the surface temperature rises faster as the input power per unit area increases, but by increasing the length of the string heater, for example, the input power density P + / l
+ (w/m) or less, the linear temperature will be the same or lower than the conventional one even if the set temperature is the same as the conventional one, and there is no safety issue, but when using the It is easy to feel the presence of the string-shaped heater, which is a so-called strange feeling, and when manufacturing an electric car vent, the material cost increases due to the length of the string-shaped heater, and it takes time to wire the string-shaped heater. Increased costs such as
The problem arises that
また、単にひも状ヒータの長さを従来と同一にして違和
感やコス）ｕｐをなくしても、従来の様に単に設定温度
に制御する方式であれば、ひも状ヒータの線温度は上昇
し、人体がひも状ヒータの上に座った場合、特に周囲温
度が低く検知温度が設定温度より低く連続してひも状ヒ
ータが通電される場合、線温度は過度にあがり人体への
熱量の投入は従来より多くなり、やけど等の安全上の課
題も生じて来る。In addition, even if the length of the string heater is simply made the same as before to eliminate the discomfort and cost increase, if the temperature is simply controlled to the set temperature as in the past, the linear temperature of the string heater will increase, When a human body sits on a string heater, especially when the ambient temperature is low and the detected temperature is lower than the set temperature and the string heater is continuously energized, the wire temperature rises excessively and the amount of heat input to the human body is As the number of cases increases, safety issues such as burns also arise.
また、従来は通電後、一定時間ｔ０だけ所望の設定温度
にかかわらず最高の設定温度で制御する構成であるため
、通電開始時点の周囲温度や電気カーベントの表面温度
によらずＬ０時間最高の設定温度で制御されることにな
り、所望の設定温度以上になり熱すぎたり、また反対に
不十分であったりするという課題があった。さらにまた
、投入電力を増加させれば、このことは従来以上に課題
となるのは明白である。In addition, conventionally, after energization, the control is performed at the highest set temperature for a certain period of time t0, regardless of the desired set temperature. Since the temperature is controlled by the temperature, there is a problem that the temperature may exceed the desired set temperature and become too hot, or may be insufficient. Furthermore, it is clear that if the input power is increased, this problem will become more of a problem than before.
本発明は、かかる従来の課題を解決するもので、通電を
開始してから速く電気カーペットの表面温度を設定温度
に上昇させ、ひも状ヒータの長さを従来より長くするこ
となく、安全上の課題も発生しない電気カーペット等の
温度制御装置を提供するものである。The present invention solves such conventional problems by quickly raising the surface temperature of the electric carpet to the set temperature after the start of electricity supply, and without increasing the length of the string heater compared to the conventional one. The present invention provides a temperature control device for electric carpets, etc., which does not cause any problems.
課題を解決するための手段
上記課題を解決するため、本発明の温度制御装置は、ワ
ット密度が高いひも状ヒータと、このひも状ヒータの通
電を制御するリレーと、前記ひも状ヒータの温度を検出
する温度検知線と温度検出回路とからなる温度検出部と
、この温度検出部で検出された検出温度信号と、前記ひ
も状ヒータの温度設定を行なう温度設定部と、この温度
設定部で設定された設定温度信号と前記検出温度信号と
を比較する比較部と、前記ひも状ヒータへの通電開始及
び終了を指示するスイッチと、このスイッチの通電開始
信号が入力された後の最初の（検出温度）＝（設定温度
）の関係になった時の比較部の出力信号によって起動す
ると共に前記温度設定部の設定温度をその期間最高の設
定温度とする第１のタイマと、この第１のタイマ動作終
了後に動作しく検出温度）〈（設定温度）の関係になっ
た時の比較部の出力信号によって起動する第２のタイマ
と、（検出温度）≧（設定温度）の場合の比較部の出力
信号又は第２のタイマの動作終了によって起動する第３
のタイマと、前記第１のタイマ終了後は、比較部の出力
信号と第２のタイマ出力信号のＡＮＤ信号でリレーをＯ
Ｎさせ、また比較部の出力信号と第３のタイマの出力信
号のＯＲ信号でリレーをＯＦＦさせ、第１のタイマ終了
以前は比較部の出力信号でリレーをＯＮ、ＯＦＦさせる
制御部とで構成したものである。Means for Solving the Problems In order to solve the above problems, the temperature control device of the present invention includes a string heater having a high watt density, a relay for controlling the energization of the string heater, and a temperature control device for controlling the temperature of the string heater. A temperature detection section consisting of a temperature detection line to be detected and a temperature detection circuit, a detected temperature signal detected by the temperature detection section, a temperature setting section for setting the temperature of the string heater, and a temperature setting section for setting the temperature of the string heater. a comparison unit that compares the detected temperature signal with the detected temperature signal; a switch that instructs the start and end of energization of the string heater; a first timer that is activated by the output signal of the comparison section when the relationship (temperature) = (set temperature) is established, and sets the set temperature of the temperature setting section to the highest set temperature for that period; A second timer is activated by the output signal of the comparator when the relationship of (detected temperature) < (set temperature) is reached after the operation is completed, and the output of the comparator when (detected temperature) ≧ (set temperature). a third timer activated by a signal or by the end of the second timer;
After the first timer ends, the relay is turned on by the AND signal of the output signal of the comparison section and the second timer output signal.
and a control section that turns the relay OFF using the OR signal of the output signal of the comparison section and the output signal of the third timer, and turns the relay ON and OFF using the output signal of the comparison section before the end of the first timer. This is what I did.
作用
上記構成によって、スイッチによって通電開始を指示す
れば、ワット密度の高いひも状ヒータに所望の設定温度
に検出温度が達するまでフル通電することによって一気
に温度を上昇させ、さらにその後一定時間（第１のタイ
マ動作時間）設定温度の最高温度で制御することによっ
て周囲の温度等によらず所望の設定温度に最短の時間で
最適に達する。Effect With the above configuration, when the switch is used to instruct the start of energization, the string heater with high watt density is fully energized until the detected temperature reaches the desired set temperature, thereby raising the temperature at once, and then for a certain period of time (the first (timer operating time) By controlling the temperature at the maximum set temperature, the desired set temperature can be reached in the shortest possible time regardless of the ambient temperature, etc.
また、第１のタイマ終了後は、連続してリレーをＯＮす
る条件（（検出温度）＜（設定温度））であっても一定
時間以上連続してＯＮすることはなく、又、リレーをＯ
ＦＦする条件（（検出温度）≧（設定温度））となれば
第３のタイマ動作中にたとえ設定温度を変えたりするこ
とによってリレーをＯＮする条件（（検出温度）〈（設
定温度））になっても一定時間以上連続してＯＦＦする
。このことによって最大の投入電力量を制限し、人体が
ひも状ヒータ上に座った時などのその部分のひも状ヒー
タの過度な温度上昇を防止する。In addition, after the first timer ends, even if the condition is to turn on the relay continuously ((detected temperature) < (set temperature)), the relay will not be turned on continuously for a certain period of time or longer, and the relay will not be turned on continuously.
If the condition for FF is reached ((detected temperature) ≧ (set temperature)), even if the set temperature is changed during the operation of the third timer, the condition for turning on the relay ((detected temperature) < (set temperature)) is reached. Even if it does, it will remain OFF for a certain period of time or more. This limits the maximum amount of power input and prevents the temperature of the string heater from rising excessively when a human body sits on the string heater.
実施例 以下、本発明の一実施例を図面にもとづいて説明する。Example Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図は本発明の一実施例である電気カーペットの温度
制御装置の回路構成図である。２はワット密度が高いひ
も状ヒータである。５〜８は抵抗、９・１０はダイオー
ド、１１は電解コンデンサであり、温度検知線３に流れ
る電流を電圧に変換する温度検出回路１２を構成してい
る。そして、温度検知線３と温度検出回路とで温度検出
部１３を構成している。また、温度検知線３は、温度に
よってインピーダンスが変化する特性を有している。FIG. 1 is a circuit diagram of a temperature control device for an electric carpet, which is an embodiment of the present invention. 2 is a string-shaped heater with high wattage density. 5 to 8 are resistors, 9 and 10 are diodes, and 11 is an electrolytic capacitor, forming a temperature detection circuit 12 that converts the current flowing through the temperature detection line 3 into voltage. The temperature detection line 3 and the temperature detection circuit constitute a temperature detection section 13. Further, the temperature detection line 3 has a characteristic that its impedance changes depending on the temperature.
温度設定部の設定温度信号１４と温度検出部１３の検出
温度信号１５を比較部１６で比較し、設定温度信号１４
と検出温度信号１５の関係がスイッチ１７が通電開始を
指示つまりＯＮした後はじめて（検出温度）〉（設定温
度）の関係になった時起動する第１のタイマを存し、第
１のタイマが起動するまではトランジスタ２１をＯＮＬ
、、リレー１７をフル通電し、第１のタイマ動作中は温
度設定部の設定温度を所望の設定温度にかかわらず最高
の温度で制御する。The comparison unit 16 compares the set temperature signal 14 of the temperature setting unit and the detected temperature signal 15 of the temperature detection unit 13, and the set temperature signal 14
The first timer is activated when the relationship between the detected temperature signal 15 and the detected temperature signal 15 becomes (detected temperature)>(set temperature) for the first time after the switch 17 instructs to start energization, that is, turns ON. Transistor 21 is ON until it starts up.
,, the relay 17 is fully energized, and during the first timer operation, the set temperature of the temperature setting section is controlled at the highest temperature regardless of the desired set temperature.
第１のタイマ動作終了後は、所望の（設定温度）〈（検
出温度）の関係の時は、第２のタイマを起動し、（設定
温度）＜（検出温度）の時の比較部１６の出力信号と第
２のタイマの出力信号のＡＮＤ信号でリレー２５をＯＮ
させる。１８はＡＮＤ素子、１９はリレー駆動用のトラ
ンジスタである。つまり一定時間以上連続してＯＮＬな
いこととなる。また、−度、リレー２５がＯＦＦした後
は、（検出温度）≧（設定温度）の場合の比較部１６の
出力信号又は、第２のタイマの動作終了によって起動す
る第３のタイマ出力信号と比較部１６の出力信号のＯＲ
信号でリレー２５をＯＦＦする。２０はＯＲ素子、２２
は制御部である。２３はリレー２５を動作させる直？Ｊ
Ｌ電源、２４はリレー２５のコイルの逆起電力を吸収す
るダイオードである。After the first timer operation is completed, when the desired relationship of (set temperature) < (detected temperature) is established, the second timer is activated, and when (set temperature) < (detected temperature), the comparator 16 is activated. Turn on the relay 25 with the AND signal of the output signal and the output signal of the second timer
let 18 is an AND element, and 19 is a relay driving transistor. In other words, there is no ONL continuously for a certain period of time or more. - degree, after the relay 25 is turned off, the output signal of the comparator 16 in the case of (detected temperature) ≧ (set temperature) or the third timer output signal activated by the end of the second timer operation. OR of the output signals of the comparator 16
The signal turns off relay 25. 20 is an OR element, 22
is the control section. Is 23 the direct link to operate relay 25? J
The L power supply 24 is a diode that absorbs the back electromotive force of the coil of the relay 25.
第２図は、本発明の一実施例を示すタイムチャートであ
る。スイッチ１７をＯＮさせれば、ａの期間は（検出温
度）＜（設定温度）でありリレー２５はフル通電となる
。そして（検出温度）＝（設定温度）になった時点より
第１のタイマを起動させｂの期間（ｔｂ待時間設定温度
を最高の温度で制御する。ｂの期間、図では表面温度が
最高の設定温度に達していないのにリレー２５がＯＮ
ＯＦＦしているのは、温度検知線３とひも状ヒータ２
の熱的結合が、温度検知線３と表面温度の熱的結合より
も強いため、表面温度が最高の設定温度に達しなくても
温度検知線３はひも状ヒータ２の熱を惑し最高の設定温
度に達するからである。特に温度立上りの時はこれが顕
著にあられれる。そして、Ｃの期間は（検出温度）〉（
設定温度）となりリレー２５はＯＦＦする。ｄの期間は
（検出温度）と（設定温度）に従ってリレー２５をＯＮ
、ＯＦＦさせている。ｅの期間は、設定温度を上げた期
間である。従って、例え（検出温度）〈（設定温度）で
あっても第２のタイマの出力信号１．時間を過ぎると、
第３のタイマの出力信号り、の時間だけＯＦＦする。即
ち、ひも状ヒータ２はこのひも状ヒータの消費電力をＰ
８とするとＰｔＸｔ、／（ｔ！＋ｔ、）が最大の平均消
費電力、つまり投入電力となり、投入電力量と比例する
。従って高いワットのひも状ヒータを用いても従来のひ
も状ヒータの消費電力をＰ、とすればｐ、＝ｐ、Ｘｔ。FIG. 2 is a time chart showing one embodiment of the present invention. When the switch 17 is turned on, during the period a, (detected temperature)<(set temperature), and the relay 25 is fully energized. Then, from the time when (detected temperature) = (set temperature), the first timer is started and the waiting time temperature is controlled at the highest temperature for the period b (tb). Relay 25 turns on even though the set temperature has not been reached
The ones that are OFF are the temperature detection wire 3 and the string heater 2.
Since the thermal coupling between the temperature detection wire 3 and the surface temperature is stronger than that between the temperature detection wire 3 and the surface temperature, even if the surface temperature does not reach the maximum setting temperature, the temperature detection wire 3 distracts the heat of the string heater 2 and reaches the maximum temperature. This is because the set temperature is reached. This is especially noticeable when the temperature rises. And the period of C is (detected temperature)〉(
set temperature), and the relay 25 is turned off. During period d, relay 25 is turned on according to (detected temperature) and (set temperature)
, is turned off. The period e is a period during which the set temperature is increased. Therefore, even if (detected temperature) < (set temperature), the output signal of the second timer 1. When time passes,
The output signal of the third timer is turned off for a period of time. That is, the string-shaped heater 2 reduces the power consumption of this string-shaped heater by P
8, PtXt,/(t!+t,) becomes the maximum average power consumption, that is, the input power, and is proportional to the input power amount. Therefore, even if a high wattage string heater is used, if the power consumption of the conventional string heater is P, then p, = p, Xt.
／ （１−１＋ １３）つまり、ｔｚ ／ （ｔｚ ＋
Ｌ、）＝Ｐ、／Ｐ、の関係になる様にＬ２とｔ、の関係
をとれば、ひも状ヒータの過度な温度上昇を防止するこ
とができる。また、ａ及びｂの期間は従来のひも状ヒー
タの時よりも投入電力が大きいからそれだけ温度の立上
りも速くなる。また、設定温度及び検出温度に応じてａ
の期間の実際の時間は最適の時間をとることから従来例
の様に周囲の温度等による電力の投入しすぎ及び不十分
といった欠点が解消される。/ (1-1+ 13) That is, tz / (tz +
By establishing a relationship between L2 and t such that L, ) = P, /P, excessive temperature rise of the string heater can be prevented. Furthermore, during periods a and b, the input power is greater than in the case of the conventional string heater, so the temperature rises faster. Also, depending on the set temperature and detected temperature, a
Since the actual time of the period is an optimum time, the drawbacks of the conventional example such as excessive or insufficient power input due to the ambient temperature etc. are eliminated.
発明の効果
以上の実施例の説明より明らかなように、本発明の温度
制御装置によれば次のような効果が得られる。Effects of the Invention As is clear from the description of the embodiments above, the temperature control device of the present invention provides the following effects.
（１） ワット密度の高いひも状ヒータを用い、（検
出温度）＝（設定温度）になるまでフル通電し、その後
、第１のタイマで設定した一定時間、設定温度の最高温
度で制御することから、周囲の温度等によらず、温度立
上りが速く最短時間で所望の設定温度に到達することが
できる。(1) Using a string heater with high watt density, fully energize until (detected temperature) = (set temperature), and then control at the highest temperature of the set temperature for a certain period of time set by the first timer. Therefore, the temperature rises quickly and the desired set temperature can be reached in the shortest possible time, regardless of the ambient temperature or the like.
（２）連続的にひも状ヒータを通電する条件、即ち（検
出温度）＜（設定温度）であっても、ＯＮの連続時間を
第２のタイマで、ＯＦＦの連続時間を第３のタイマで設
定し、その関係をｔｚ ／ （ｔｔ＋ｔ、）＝Ｐ＋ ／
Ｐｇとすることによって最大の投入電力量を従来と同一
にすることができ過度な温度上昇を防止することができ
安全性に極めてすぐれるという効果を有する。(2) Even under the condition that the string heater is continuously energized, that is, (detected temperature) < (set temperature), the continuous ON time is set to the second timer, and the continuous OFF time is set to the third timer. and the relationship is tz / (tt+t,)=P+ /
By using Pg, the maximum amount of power input can be made the same as in the past, excessive temperature rise can be prevented, and safety is extremely improved.
第１図は本発明の温度制御装置の一実施例を示す回路構
成図、第２図は同装置のタイムチャート、第３図は従来
の電気カーペットの本体構成図、第４図は同電気カーペ
ットの表面温度の立上り特性を示す図である。
２・・・・・・ひも状ヒータ、３・・・・・・温度検知
線、１２・・・・・・温度検出回路、１３・・・・・・
温度検出部、１６・・・・・・比較部、１７・・・・・
・スイッチ、２２・・・・・・制御部、２５・・・・・
・リレ第 ３ 図
代理人の氏名 弁理士 粟野重孝 はか】多塩 ４ 口Fig. 1 is a circuit configuration diagram showing an embodiment of the temperature control device of the present invention, Fig. 2 is a time chart of the same device, Fig. 3 is a main body configuration diagram of a conventional electric carpet, and Fig. 4 is the same electric carpet. FIG. 2... String heater, 3... Temperature detection line, 12... Temperature detection circuit, 13...
Temperature detection section, 16... Comparison section, 17...
・Switch, 22... Control section, 25...
・Lille No. 3 Name of agent Patent attorney Shigetaka Awano Haka] Tashio 4 mouths
Claims (1)
通電を制御するリレーと、前記ひも状ヒータの温度を検
出する温度検知線と温度検出回路とからなる温度検出部
と、この温度検出部で検出された検出温度信号と、前記
ひも状ヒータの温度設定を行なう温度設定部と、この温
度設定部で設定された設定温度信号と前記検出温度信号
とを比較する比較部と、前記ひも状ヒータへの通電開始
及び終了を指示するスイッチと、このスイッチの通電開
始信号が入力された後の最初の（検出温度）＝（設定温
度）の関係になった時の比較部の出力信号によって起動
すると共に前記温度設定部の設定温度をその期間最高の
設定温度とする第１のタイマと、この第１のタイマ動作
終了後に動作し（検出温度）＜（設定温度）の関係にな
った時の比較部の出力信号によって起動する第２のタイ
マと、（検出温度）≧（設定温度）の場合の比較部の出
力信号又は、第２のタイマの動作終了によって起動する
第３のタイマと、前記第１のタイマ終了後は、比較部の
出力信号と第２のタイマ出力信号のＡＮＤ信号でリレー
をＯＮさせ、また比較部の出力信号と第３のタイマの出
力信号のＯＲ信号でリレーをＯＦＦさせ、第１のタイマ
終了以前は比較部の出力信号でリレーをＯＮ、ＯＦＦさ
せる制御部とで構成した温度制御装置。A temperature detection section consisting of a string heater having a high wattage density, a relay that controls energization of the string heater, a temperature detection line and a temperature detection circuit that detects the temperature of the string heater, and this temperature detection section. a temperature setting section that sets the detected temperature signal and the temperature of the string heater; a comparison section that compares the set temperature signal set by the temperature setting section with the detected temperature signal; and a comparison section that sets the temperature of the string heater. It is activated by the output signal of the comparator when the initial relationship of (detected temperature) = (set temperature) is established after the switch instructs to start and end energization and the energization start signal of this switch is input. and a first timer that sets the set temperature of the temperature setting section to the highest set temperature during that period, and a comparison when the first timer operates after the end of the operation and the relationship (detected temperature) < (set temperature) is established. a second timer activated by the output signal of the comparator, a third timer activated by the output signal of the comparator when (detected temperature)≧(set temperature) or the end of operation of the second timer; After the first timer ends, the relay is turned ON by the AND signal of the output signal of the comparison section and the second timer output signal, and the relay is turned OFF by the OR signal of the output signal of the comparison section and the output signal of the third timer. , and a control section that turns on and off the relay using the output signal of the comparison section before the first timer expires.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4237489A JPH02223183A (en) | 1989-02-22 | 1989-02-22 | Temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4237489A JPH02223183A (en) | 1989-02-22 | 1989-02-22 | Temperature control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02223183A true JPH02223183A (en) | 1990-09-05 |
Family
ID=12634274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4237489A Pending JPH02223183A (en) | 1989-02-22 | 1989-02-22 | Temperature control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02223183A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011192991A (en) * | 2010-03-12 | 2011-09-29 | Asml Netherlands Bv | Lithographic apparatus and method |
-
1989
- 1989-02-22 JP JP4237489A patent/JPH02223183A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011192991A (en) * | 2010-03-12 | 2011-09-29 | Asml Netherlands Bv | Lithographic apparatus and method |
| US9632435B2 (en) | 2010-03-12 | 2017-04-25 | Asml Netherlands B.V. | Lithographic apparatus and method |
| US10551752B2 (en) | 2010-03-12 | 2020-02-04 | Asml Netherlands B.V. | Lithographic apparatus and method |
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