JPH02204717A - Liquid crystal display device and production thereof - Google Patents

Liquid crystal display device and production thereof

Info

Publication number
JPH02204717A
JPH02204717A JP1024971A JP2497189A JPH02204717A JP H02204717 A JPH02204717 A JP H02204717A JP 1024971 A JP1024971 A JP 1024971A JP 2497189 A JP2497189 A JP 2497189A JP H02204717 A JPH02204717 A JP H02204717A
Authority
JP
Japan
Prior art keywords
photosensitive resin
liquid crystal
black
crystal display
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1024971A
Other languages
Japanese (ja)
Inventor
Yoshio Iwai
義夫 岩井
Hisahide Wakita
尚英 脇田
Tsuyoshi Kamimura
強 上村
Satoru Kimura
哲 木村
Kazuhiro Jiyouten
一浩 上天
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1024971A priority Critical patent/JPH02204717A/en
Publication of JPH02204717A publication Critical patent/JPH02204717A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE:To easily form black stripes in accordance with the trend toward the higher fineness without requiring mask alignment by applying a black photosensitive resin on a substrate surface formed with metallic films having a light shielding effect on transparent electrodes, then exposing the black photosensitive resin from the rear surface of the substrate. CONSTITUTION:A thin ITO film 2 is formed on the glass substrate 1 and a photoresist 8 is applied thereon and is patterned and dry etched to form the stripe-shaped transparent electrodes 2. The metallic films 7 consisting of Ni-P are then formed by plating on the transparent electrodes 2. The metallic films 7 are not deposited on the glass 1 at this time. The black photosensitive resin 9 of a negative type is then applied thereon and is exposed from the rear surface. Since the metallic films 7 act as a photomask at this time, the photosensitive resin 9 remains only in the space parts by developing and the black stripes 3 having the light shielding effect are formed. The metallic films 7 are thereafter removed by etching. The removal of the black stripes 3 is not executed in this way.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、表示用電極間に遮光作用のあるブラックスト
ライプを有する液晶表示装置およびその製造法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a liquid crystal display device having black stripes with a light-shielding effect between display electrodes, and a method for manufacturing the same.

従来の技術 近年、ニューメディア機器、OA機器への適用をめざし
て、液晶表示パネルの高精細化、大容量表示化が盛んに
進められている。高精細化、大容量表示化に伴って、従
来以上に表示品位を高める必要が生じてきた。
BACKGROUND OF THE INVENTION In recent years, progress has been made to increase the definition and capacity of liquid crystal display panels for application to new media equipment and OA equipment. With the trend toward higher definition and larger capacity displays, it has become necessary to improve display quality more than ever before.

従来より、液晶表示装置の表示品位を高める方法の1つ
として、表示用電極間に遮光作用を存するブラックスト
ライプを形成して、表示用電極間からの漏れ光をなくし
てコントラストを高める方法が用いられている。
Conventionally, one method of improving the display quality of liquid crystal display devices is to form black stripes between display electrodes that have a light-shielding effect to eliminate light leakage from between the display electrodes and increase contrast. It is being

ブラックストライプ形成方法には、基板上に感光性の樹
脂を塗布して、基板とブラックストライプ形成用のフォ
トマスクとのアライメント(マスク合せ)を行った後、
露光、現像して表示用電極間にブラックストライプを形
成するフォトリソグラフィ一方法と、印刷版を用いて染
料等を表示用電極間に印刷してブラックストライプを形
成する印刷法とがある。
The black stripe formation method involves applying a photosensitive resin onto the substrate, aligning the substrate and a photomask for forming the black stripe (mask alignment), and then
There is a photolithography method in which black stripes are formed between display electrodes by exposure and development, and a printing method in which black stripes are formed by printing dye or the like between display electrodes using a printing plate.

発明が解決しようとする課題 フォトリソグラフィー法の場合、感光性樹脂を露光する
際にフォトマスクをアライメントする必要がある。表示
用電極の高精細化、大容量化に伴って、従来以上に大面
積にわたって高精度にマスク合せをする必要がある。そ
のためマスクの位置合せ不良のため、スペーサが所定の
位置に形成なれない状態がしばしば発生し、歩留りの低
下を招いている。
Problems to be Solved by the Invention In the case of photolithography, it is necessary to align a photomask when exposing a photosensitive resin. As display electrodes become more precise and have a larger capacity, it is necessary to perform mask alignment over a larger area with higher precision than ever before. Therefore, due to poor mask alignment, spacers often cannot be formed at predetermined positions, resulting in a decrease in yield.

印刷法の場合、印刷版自体の加工精度及び印刷版の位置
合せに限界があり、高精細化、大容量化に対応できない
という問題点がある。
In the case of the printing method, there are limits to the processing accuracy of the printing plate itself and the alignment of the printing plate, and there is a problem that it cannot respond to higher definition and larger capacity.

課題を解決するための手段 上記課題を解決するために、本発明の液晶表示装置と液
晶表示装置の製造法は複数のストライプ状に形成した透
明電極上に遮光作用を有する金属被膜をコーティングし
た基板表面に、黒色の感光性の樹脂を塗布した後、前記
基板裏面より黒色の感光性の樹脂を露光するものである
Means for Solving the Problems In order to solve the above problems, the liquid crystal display device and the method for manufacturing the liquid crystal display device of the present invention include a substrate in which a metal film having a light-shielding effect is coated on transparent electrodes formed in a plurality of stripes. After a black photosensitive resin is applied to the surface, the black photosensitive resin is exposed to light from the back side of the substrate.

作用 上記構成によれば、透明電極上にコーティングした金属
被膜が遮光作用を有してフォトマスクとして作用するの
で、マスク合せを行う必要がなく、基板裏面より露光を
行うだけで遮光作用のあるブラックストライプを形成す
ることができる。
Function According to the above structure, the metal film coated on the transparent electrode has a light-shielding effect and acts as a photomask, so there is no need to perform mask alignment, and a black film with a light-shielding effect can be created by simply exposing from the back side of the substrate. Stripes can be formed.

実施例 以下に本発明の一実施例について図面を参照しながら説
明する。
EXAMPLE An example of the present invention will be described below with reference to the drawings.

第1図は本発明の液晶表示装置の構成図の1例である。FIG. 1 is an example of a configuration diagram of a liquid crystal display device of the present invention.

1はガラス基板、2は透明電極、3はブラックストライ
プ、4は配向膜、5はシール材、6は液晶層である。
1 is a glass substrate, 2 is a transparent electrode, 3 is a black stripe, 4 is an alignment film, 5 is a sealing material, and 6 is a liquid crystal layer.

第2図(a)〜(f)は、本発明の液晶表示装置の製造
法の1例を示す工程図である。
FIGS. 2(a) to 2(f) are process diagrams showing one example of the method for manufacturing the liquid crystal display device of the present invention.

各図の順序に従って工程を説明すると、第1図(a)に
示される様に、ガラス基板1上にEB蒸着法により酸化
インジュウム錫(I To)の薄膜2を形成する。IT
Oの表面抵抗値は1oΩ/口である。
To explain the steps according to the order of each figure, as shown in FIG. 1(a), a thin film 2 of indium tin oxide (I 2 To) is formed on a glass substrate 1 by EB evaporation. IT
The surface resistance value of O is 10Ω/mouth.

その後、フォトレジスト8をスピンナーにより塗布する
。第1図[有])に示す様に、所定の方法によりバター
ニングを行い、ドライエツチングを行うことにより透明
電極2を形成する。
Thereafter, photoresist 8 is applied using a spinner. As shown in FIG. 1, a transparent electrode 2 is formed by patterning and dry etching according to a predetermined method.

次に無電解Niメツキを行うことにより、透明電極2上
にN1−Pの金属被膜7を形成する。無電解Niメツキ
は選択性があり、金属被膜7はITOからなる透明電極
2上のみに析出して、ガラス上に析出することはない、
金属被膜7の膜厚は約0.5〜1μm程度であり、十分
遮光作用を有する。
Next, an N1-P metal coating 7 is formed on the transparent electrode 2 by electroless Ni plating. Electroless Ni plating is selective, and the metal coating 7 is deposited only on the transparent electrode 2 made of ITO, and is not deposited on the glass.
The thickness of the metal coating 7 is approximately 0.5 to 1 μm, and has a sufficient light shielding effect.

上記構成のガラス基板1表面上にネガ型の黒色の感光性
樹脂9をスピンナーまたはロールコータにより塗布する
。次にガラス基板1を裏面から露光する。この時、金属
被膜7はフォトマスクとして作用するので、金属被膜7
上の黒色の感光性樹脂9は露光されず、電極間のスペー
ス部分のみ露光される。次に現像することによって、ス
ペース部分にのみ感光性の樹脂9が残り、遮光作用のあ
るブラックストライプ3が形成される。
A negative black photosensitive resin 9 is applied onto the surface of the glass substrate 1 having the above structure using a spinner or a roll coater. Next, the glass substrate 1 is exposed from the back side. At this time, since the metal coating 7 acts as a photomask, the metal coating 7
The upper black photosensitive resin 9 is not exposed, and only the space between the electrodes is exposed. Next, by developing, the photosensitive resin 9 remains only in the space portion, and a black stripe 3 having a light blocking effect is formed.

金属被膜7をエツチングにより除去する。この時エツチ
ングによりブラックストライプ3が除去されることはな
い。
The metal coating 7 is removed by etching. At this time, the black stripe 3 is not removed by etching.

上記により作製した基板に配向処理を施した後、直交方
向に2枚貼り合せることによって、絵素内ブラックスト
ライプを形成することができる。上述の製造法により作
製した液晶表示装置はブラックマトリックスにより電極
間からの漏れ光を防止でき、優れた表示品位を得ること
ができる。工法的にもフォトマスクが不要であり、かつ
マスク合せをする必要がないので、電極ピッチの高精細
化、または大容量化に対して、容易に実現できる。
After the substrates produced as described above are subjected to alignment treatment, the two substrates are bonded in orthogonal directions to form black stripes within picture elements. The liquid crystal display device manufactured by the above-mentioned manufacturing method can prevent light leakage from between the electrodes due to the black matrix, and can obtain excellent display quality. Since the construction method does not require a photomask and does not require mask alignment, it is easy to achieve higher definition electrode pitch or larger capacity.

発明の効果 本発明の液晶表示装置と液晶表示装置の製造法は表示用
の透明電極上にコーティングした金属被膜がフォトマス
クとして作用するので、マスク合せを行うことなくブラ
ンクスドライブを容易に形成することができ、表示品位
を高めることができかつ表示の高精細化、大容量表示化
を図れ、非常に大きな効果がある。
Effects of the Invention In the liquid crystal display device and the method for manufacturing the liquid crystal display device of the present invention, a metal film coated on a transparent electrode for display acts as a photomask, so a blank drive can be easily formed without mask alignment. It is possible to improve the display quality, and also to achieve high definition and large capacity display, which has a very large effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の液晶表示装置の構成図、第2図は液晶
表示装置の製造法の工程図である。 1・・・・・・ガラス基板、2・・・・・・透明電極、
3・・・・・・ブラックストライプ。 代理人の氏名 弁理士 粟野重孝 はか1名へ 6 派 味
FIG. 1 is a block diagram of a liquid crystal display device of the present invention, and FIG. 2 is a process diagram of a method for manufacturing a liquid crystal display device. 1...Glass substrate, 2...Transparent electrode,
3...Black stripe. Name of agent: Patent attorney Shigetaka Awano To 1 person 6.

Claims (6)

【特許請求の範囲】[Claims] (1)複数のストライプ状に形成した透明電極上に遮光
作用を有する金属被膜をコーティングした基板表面に、
黒色の感光性の樹脂を塗布した後、前記基板裏面より黒
色の感光性の樹脂を露光することにより前記透明電極間
に遮光作用のあるブラックストライプを形成したことを
特徴とする液晶表示装置。
(1) A substrate surface coated with a metal film having a light-shielding effect on transparent electrodes formed in a plurality of stripes,
A liquid crystal display device characterized in that, after coating a black photosensitive resin, the black photosensitive resin is exposed from the back side of the substrate to form a black stripe having a light shielding effect between the transparent electrodes.
(2)遮光作用のある金属被膜をコーティングした複数
の透明電極を有する基板表面に黒色の感光性の樹脂を塗
布した後、前記基板裏面より黒色の感光性の樹脂を露光
することにより前記透明電極間に遮光作用のあるブラッ
クストライプを形成することを特徴とする液晶表示装置
の製造法。
(2) After applying a black photosensitive resin to the surface of a substrate having a plurality of transparent electrodes coated with a metal film having a light-shielding effect, the transparent electrodes are formed by exposing the black photosensitive resin from the back side of the substrate. A method for manufacturing a liquid crystal display device characterized by forming black stripes with a light-shielding effect between them.
(3)遮光作用のある金属被膜を無電解ニッケルメッキ
によって形成することを特徴とする請求項(1)記載の
液晶表示装置。
(3) The liquid crystal display device according to claim (1), wherein the metal film having a light-shielding effect is formed by electroless nickel plating.
(4)遮光作用のある金属被膜を無電解ニッケルメッキ
によって形成することを特徴とする請求項(2)記載の
液晶表示装置の製造法。
(4) The method for manufacturing a liquid crystal display device according to claim (2), wherein the metal film having a light-shielding effect is formed by electroless nickel plating.
(5)黒色の感光性の樹脂がネガ型であることを特徴と
する請求項(1)記載の液晶表示装置。
(5) The liquid crystal display device according to claim (1), wherein the black photosensitive resin is of negative type.
(6)黒色の感光性の樹脂がネガ型であることを特徴と
する請求項(2)記載の液晶表示装置の製造法。
(6) The method for manufacturing a liquid crystal display device according to claim (2), wherein the black photosensitive resin is of negative type.
JP1024971A 1989-02-03 1989-02-03 Liquid crystal display device and production thereof Pending JPH02204717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1024971A JPH02204717A (en) 1989-02-03 1989-02-03 Liquid crystal display device and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1024971A JPH02204717A (en) 1989-02-03 1989-02-03 Liquid crystal display device and production thereof

Publications (1)

Publication Number Publication Date
JPH02204717A true JPH02204717A (en) 1990-08-14

Family

ID=12152856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1024971A Pending JPH02204717A (en) 1989-02-03 1989-02-03 Liquid crystal display device and production thereof

Country Status (1)

Country Link
JP (1) JPH02204717A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5419991A (en) * 1991-12-19 1995-05-30 Sony Corporation Method of manufacturing a liquid crystal display
WO1996036903A1 (en) * 1995-05-16 1996-11-21 Citizen Watch Co., Ltd. Liquid crystal display, method of manufacturing active substrate, and method of manufacturing color filter substrate
JP2009034960A (en) * 2007-08-03 2009-02-19 Toppan Printing Co Ltd Regeneration method of elimination plate for reverse offset printing, and elimination plate for reverse offset printing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5419991A (en) * 1991-12-19 1995-05-30 Sony Corporation Method of manufacturing a liquid crystal display
WO1996036903A1 (en) * 1995-05-16 1996-11-21 Citizen Watch Co., Ltd. Liquid crystal display, method of manufacturing active substrate, and method of manufacturing color filter substrate
JP2009034960A (en) * 2007-08-03 2009-02-19 Toppan Printing Co Ltd Regeneration method of elimination plate for reverse offset printing, and elimination plate for reverse offset printing

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