JPH0220426B2 - - Google Patents
Info
- Publication number
- JPH0220426B2 JPH0220426B2 JP55151381A JP15138180A JPH0220426B2 JP H0220426 B2 JPH0220426 B2 JP H0220426B2 JP 55151381 A JP55151381 A JP 55151381A JP 15138180 A JP15138180 A JP 15138180A JP H0220426 B2 JPH0220426 B2 JP H0220426B2
- Authority
- JP
- Japan
- Prior art keywords
- screen
- xyθ table
- printing
- xyθ
- screen printing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007639 printing Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 18
- 238000007650 screen-printing Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/08—Machines
- B41F15/0804—Machines for printing sheets
- B41F15/0813—Machines for printing sheets with flat screens
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Screen Printers (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Printing Methods (AREA)
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は主として電子部品の製造のためのスク
リーン印刷方法およびその装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention primarily relates to a screen printing method and apparatus for manufacturing electronic components.
（従来の技術）
この種の一般的なスクリーン印刷装置は第１図
に示すように、基台１を有し、この基台１上には
平行に対向する一対のガイド２ａ，２ｂが水平に
設置され、これらガイド２ａ，２ｂには真空吸着
機構（図示せず）を持つテーブル３が往復動自在
に載架されている。このテーブル３の上面には被
印刷基板４の相隣る二辺に当接する三本の一決め
ピン５ａ，５ｂおよび６が立設されている。ま
た、基台１の一端側には回動自在になる保持具７
を載設した架台８が設置されている。スクリーン
固定枠９はその一端部を保持具７に固着されて回
動自在になつている。スクリーン１０は四隅に配
されたボルト１１によりスクリーン固定枠９に取
り付けられている。(Prior Art) As shown in FIG. 1, this type of general screen printing apparatus has a base 1, on which a pair of parallel guides 2a and 2b are horizontally disposed. A table 3 having a vacuum suction mechanism (not shown) is mounted on these guides 2a and 2b so as to be able to reciprocate. On the upper surface of the table 3, three fixing pins 5a, 5b, and 6 are erected and abut on two adjacent sides of the printed substrate 4. Additionally, a rotatable holder 7 is provided on one end side of the base 1.
A pedestal 8 on which is mounted is installed. The screen fixing frame 9 is fixed at one end to the holder 7 and is rotatable. The screen 10 is attached to the screen fixing frame 9 with bolts 11 placed at the four corners.
上記装置によるスクリーン印刷の方法を説明す
ると、先ず、第一段階として、最初の被印刷基板
４が位置決めピン５ａ，５ｂ，６に押し当られて
位置決めされた後、上記真空吸着機構に保持され
たまま、テーブル３とともにスクリーン１０に形
成されているパターン１２の印刷を行う前にボル
ト１１を緩め、パターン１２の位置が被印刷基板
４と対応するように位置合わせされる。この場
合、図示せぬがスクリーン固定枠９自体をXYθ
方向に微動できるような機構を備えて制度をより
向上したものである。 To explain the screen printing method using the above device, first, as a first step, the first substrate 4 to be printed is pressed against the positioning pins 5a, 5b, 6 and positioned, and then held by the vacuum suction mechanism. Before printing the pattern 12 formed on the screen 10 together with the table 3, the bolt 11 is loosened and the pattern 12 is aligned so as to correspond to the printed substrate 4. In this case, although not shown, the screen fixing frame 9 itself is
It has a mechanism that allows slight movement in the direction, and the system has been further improved.
（発明が解決しようとする課題）
上記のように位置決めピン５ａ，５ｂ，６によ
る位置決めでは多層印刷した場合、スクリーン１
０のパターンと被印刷基板に印刷済みのパターン
との位置合わ精度は0.1mm程度であり、特に高精
度な多層刷りが要求される電子部品においては不
都合であつた。このため、より高精度な印刷を行
うために、被印刷基板をスクリーン１０の下の定
位置に搬送する毎に、低倍率の顕微鏡などを用い
て位置合わせを行つたうえで印刷する方法がとら
れているが、上記顕微鏡の観察を良好にするため
に、スクリーン１０に残つているインキをいちい
ち除去せねばならず、実際的な方法としては不適
当であつた。本発明はこのような事情に鑑みてな
されたもので、再現性にすぐれた高精度なスクリ
ーン印刷方法およびその装置を提供することを目
的とする。(Problem to be Solved by the Invention) As described above, when positioning using the positioning pins 5a, 5b, and 6, when performing multilayer printing, the screen 1
The alignment accuracy between the 0 pattern and the pattern already printed on the printed substrate is about 0.1 mm, which is particularly inconvenient for electronic components that require highly accurate multilayer printing. Therefore, in order to perform printing with higher precision, it is recommended that each time the substrate to be printed is transported to a fixed position under the screen 10, alignment is performed using a low-magnification microscope, etc., and then printing is performed. However, in order to improve observation using the microscope, the ink remaining on the screen 10 must be removed one by one, which is not suitable as a practical method. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a highly accurate screen printing method and apparatus with excellent reproducibility.
［発明の構成］
（課題を解決するための手段と作用］
基台上において、被印刷基板を第１のXYθテ
ーブルに載置し、常に一定位置に停止される第１
の所定位置でスクリーン印刷し、さらにこの被印
刷基板を第１のXYθテーブルに載置したまま第
２の所定位置に後退させて定位置に第２のXYθ
テーブルに設けられた照準光学系の被印刷基板に
対する照準位置を固定するまでの工程を段取り工
程とし、本印刷工程の位置合わせを上記固定され
た照準位置に対する第１のXYθテーブルのXYθ
方向の操作のみとすることによつて、特に高精度
な多層刷り印刷が可能となつた。[Structure of the invention] (Means and effects for solving the problem) A substrate to be printed is placed on a first XYθ table on a base, and the first table is always stopped at a fixed position.
Screen printing is performed at a predetermined position of
The process up to fixing the aiming position of the aiming optical system provided on the table with respect to the printed substrate is called the setup process, and the alignment of the main printing process is performed using the XYθ table of the first XYθ table with respect to the fixed aiming position.
By controlling only the direction, particularly highly accurate multilayer printing has become possible.
（実施例）
以下、実施例を示す図面に基づいて本発明を説
明する。第２図において、基台２０を有し、この
基台２０上には一対のガイドレール２１ａ，２１
ｂが基台２０の上面より所定の高さになりかつ所
定の間隔をおいて支持体２３ａ，２３ｂに平行か
つ水平に支持されている。上記ガイドレール２１
ａ，２１ｂには、真空吸着機構（図示せず）をも
つ第１のXYθテーブル２４がコロ軸受あるいは
ボールスプライン等を介し嵌装されている。基台
２０の一方にはパルスモータ２５が設置されてい
る。このパルスモータ２５の回転軸は第１の
XYθテーブル２４の下部中央および一方の支持
体２３ｂに螺合うする送りねじ２６に接続されて
いる。ガイドレール２１ａ，２１ｂの中途部には
第１のXYθテーブル２４の通過を妨げない袴状
の固定台２７が上記ガイドレール２１ａ，２１ｂ
をまたいで立設されている。固定台２７上には第
１のXYθテーブル２４と同種の第２のXYθテー
ブル２８が載設されている。この第２のXYθテ
ーブル２８のθテーブル部分には照準光学系２９
が対物レンズ側を第１のXYθテーブル２４の載
置面に向けて取り付けられている。この照準光学
系２９は対物レンズ鏡筒を一対連設したタイプ
で、印刷パターンの二箇所の位置合わせマークに
照準できるものである。また、基台２０の上面２
２の他方には、矢印方向に回動自在になる支持具
３０を載設した架台３１が設けられている。支持
具３０にはスクリーン３２を固定するスクリーン
固定枠３３が取り付けられている。ガイドレール
２１ａ，２１ｂの両端側において、スクリーン印
刷位置および照準工学系２９による位置合わせ位
置を一定にするために、第１のXYθテーブル２
４を停止させるストツプセンサ３４ａ，３４ｂが
それぞれ上面２２に設けられている。これらスト
ツプセンサ３４ａ，３４ｂはたとえば差動トラン
スタイプのものが好ましく、第１のXYθテーブ
ル２４の下部に設けた当板３５との接触でパルス
モータ２５の駆動を停止するようになつている。(Example) Hereinafter, the present invention will be described based on drawings showing examples. In FIG. 2, a base 20 is provided, and a pair of guide rails 21a, 21 are mounted on the base 20.
b is at a predetermined height from the upper surface of the base 20, and is supported horizontally and parallel to the supports 23a and 23b at a predetermined interval. The guide rail 21 above
A, 21b are fitted with a first XYθ table 24 having a vacuum suction mechanism (not shown) via roller bearings, ball splines, or the like. A pulse motor 25 is installed on one side of the base 20. The rotation axis of this pulse motor 25 is the first
It is connected to a feed screw 26 that screws into the lower center of the XYθ table 24 and one of the supports 23b. In the middle of the guide rails 21a, 21b, there is a hakama-shaped fixed base 27 that does not obstruct the passage of the first XYθ table 24.
It is erected across the A second XYθ table 28 of the same type as the first XYθ table 24 is mounted on the fixed base 27 . The θ table portion of this second XYθ table 28 has an aiming optical system 29.
is attached with the objective lens side facing the mounting surface of the first XYθ table 24. This aiming optical system 29 is of a type in which a pair of objective lens barrels are arranged in series, and is capable of aiming at two positioning marks on the printed pattern. In addition, the upper surface 2 of the base 20
A pedestal 31 on which a support 30 is mounted is provided on the other side of the frame 2 . A screen fixing frame 33 for fixing the screen 32 is attached to the support 30. On both ends of the guide rails 21a and 21b, a first XYθ table 2 is installed to keep the screen printing position and the alignment position by the aiming engineering system 29 constant.
Stop sensors 34a and 34b are provided on the upper surface 22, respectively, for stopping the motors 4. These stop sensors 34a and 34b are preferably of a differential transformer type, for example, and are adapted to stop the drive of the pulse motor 25 upon contact with a contact plate 35 provided at the bottom of the first XYθ table 24.
次に、上記装置でのスクリーン印刷の方法につ
いて第２図に基づいて説明する。固定枠３３に保
持されたスクリーン３２を支持具３０により水平
に固定する。この場合、このスクリーンは例えば
第２層目の印刷を行うものになつている。つい
で、ストツプセンサ３４ａで照準位置側に停止さ
れている第１のXYθテーブル２４のθテーブル
面の適当な位置にダミーとして位置わせ用の前回
印刷された基板の中の一つである開始基板３６を
真空吸着する。開始基板３６は第１のXYθテー
ブル２４とともにパルスモータ２５の駆動により
ストツプセンサ３４ｂで規制されるスクリーン印
刷位置（破線で示す）へ搬送され、ここでスキー
ジ３７の操作によつて所定のパターンが印刷され
る。ここまでを便宜的に第１の工程と呼ぶ。印刷
された開始基板３６は再びストツプセンサ３４ａ
で規制される位置に戻され、第２のXYθテーブ
ル２８を調節して、上記印刷されたパターンにあ
る二箇所の位置合わせマークに照準光学系のそれ
ぞれの十字線２９を合致させ、第２のXYθテー
ブル２８の照合位置を固定する。この固定を同じ
く第２の工程と呼び、第１、第２の工程までを段
取り工程と呼ぶ。以上の操作が終了した後に二枚
目以降の基板の印刷、すなわち、第３の工程とし
ての本印刷が以下のように行われる。まず、スト
ツプセンサ３４ａで規制される位置において、本
印刷用の基板を開始基板３６と同様に第１の
XYθテーブル２４に吸着した後、このテーブル
のＸ，Ｙおよびθ方向の調節で、固定されている
照準光学系２９の二つの十字線と上記本印刷用の
基板に既にしるされている、つまり前回のスクリ
ーン印刷におけるパターンの二箇所の位置合わせ
マークを合致させる。すなわち、この操作はこの
実施例でいえば、上記第２層目の印刷用のスクリ
ーン３２に形成されている位置合わせマークに対
して、上記本印刷用の基板を載置した第１の
XYθテーブル２４の吸着位置の位置ずれ（位置
合せマークどうしの位置ずれ）が修正される。合
致後は第１のXYθテーブル２４の上記三方向の
移動部分を固定したうえで、ストツプセンサ３４
ｂで規制される位置にて本印刷を行い、以後同様
に他の基板に対して本印刷が繰り返される。な
お、上記第１の工程乃至第３の工程を同じ基板に
繰り返すことで高精度な多層刷りを行うことがで
きる。 Next, a method of screen printing using the above apparatus will be explained based on FIG. 2. A screen 32 held by a fixed frame 33 is horizontally fixed by a support 30. In this case, this screen is used to print, for example, the second layer. Next, a starting board 36, which is one of the previously printed boards for dummy use, is placed at an appropriate position on the θ table surface of the first XYθ table 24 which is stopped at the aiming position side by the stop sensor 34a. Vacuum adsorption. The starting substrate 36 is transported together with the first XYθ table 24 to a screen printing position (indicated by a broken line) regulated by a stop sensor 34b by the drive of the pulse motor 25, where a predetermined pattern is printed by operating a squeegee 37. Ru. The steps up to this point are conveniently referred to as the first step. The printed starting board 36 is again applied to the stop sensor 34a.
The second XYθ table 28 is adjusted to align each crosshair 29 of the aiming optical system with the two positioning marks on the printed pattern, and the second XYθ table 28 is adjusted. The collation position of the XYθ table 28 is fixed. This fixing is also called a second process, and the first and second steps are called a setup process. After the above operations are completed, the printing of the second and subsequent substrates, that is, the main printing as the third step, is performed as follows. First, at a position regulated by the stop sensor 34a, the main printing board is placed in the first position in the same way as the starting board 36.
After being attracted to the XYθ table 24, by adjusting the table in the X, Y and θ directions, the two crosshairs of the fixed aiming optical system 29 and the mark already marked on the above-mentioned main printing board, i.e. Match the two alignment marks on the pattern from the previous screen printing. In other words, in this embodiment, this operation is performed by aligning the first layer on which the main printing substrate is placed with respect to the alignment mark formed on the second layer printing screen 32.
The positional deviation of the suction position of the XYθ table 24 (positional deviation between alignment marks) is corrected. After matching, the moving parts of the first XYθ table 24 in the three directions mentioned above are fixed, and the stop sensor 34
Main printing is performed at the position regulated by b, and thereafter, main printing is repeated on other substrates in the same manner. Note that by repeating the first to third steps described above on the same substrate, highly accurate multilayer printing can be performed.
なお、上記実施例においては、第２のXYθテ
ーブルをコロ軸受やボールスプラインを介してガ
イドレールに嵌装した構成としたが、これらに代
えて静圧流体軸受にすればさらに印刷精度は向上
する。また、位置合わせを目視でなく、光電変換
素子などを用いて電気的に処理する構成にすれば
自動化できることはいうまでもない。 Note that in the above embodiment, the second XYθ table was fitted to the guide rail via roller bearings or ball splines, but if these were replaced with hydrostatic fluid bearings, printing accuracy would be further improved. . Furthermore, it goes without saying that alignment can be automated by employing a configuration in which alignment is electrically processed using a photoelectric conversion element or the like instead of being performed visually.
［発明の効果］
本印刷開始前の段取り工程で、最初のスクリー
ンあるいは交換されたスクリーンによつて印刷さ
れた印刷パターンに対する位置合わせマークの位
置を正確に出してこれを保存し、この保存された
位置を基準として各基板毎に吸着テーブルの吸着
位置を修正し、定位置で印刷するので、高精度な
多層刷りを実現することができた。[Effect of the invention] In the setup process before starting actual printing, the position of the alignment mark with respect to the printing pattern printed by the first screen or the replaced screen is accurately determined and saved, and this saved The suction position of the suction table was corrected for each substrate based on the position, and printing was performed at a fixed position, making it possible to achieve highly accurate multilayer printing.
第１図は従来の装置を示す平面図、第２図は本
発明の一実施例を示す一部切欠した側面図であ
る。
２４……第１のXYθテーブル、２８……第２
のXYθテーブル、２９……照準光学系、３２…
…スクリーン、３７……スキージ。
FIG. 1 is a plan view showing a conventional device, and FIG. 2 is a partially cutaway side view showing an embodiment of the present invention. 24...First XYθ table, 28...Second
XYθ table, 29...Sighting optical system, 32...
...screen, 37...squeegee.
Claims (1)
XYθテーブルを上記第１の所定位置に搬送して
上記開始基板に所定のパターンをスクリーン印刷
する第１の工程と、上記スクリーン印刷された開
始基板を保持した第１のXYθテーブルを第２の
所定位置に搬送し第２のXYθテーブルに載置さ
れた照準光学系の基準線を上記開始基板における
位置合わせマークに上記第２のXYθテーブルの
調整で上記スクリーン印刷方向から合致させこの
合致した調整位置を固定する第２の工程を有した
段取り工程と、上記開始基板を外し所定基板を上
記第１のXYθテーブルに保持し上記固定状態に
なる基準線に上記所定基板におけるパターンの位
置合せマークを上記第１のXYθテーブルの調整
で上記スクリーン印刷方向から合致させこの合致
した調整位置を固定した後上記第１の所定位置で
スクリーン印刷する第３の工程とを備え、スクリ
ーンを変える毎に上記第１乃至第３の工程を行う
ことを特徴とするスクリーン印刷方法。 ２ 基台と、この基台の一方に設けられたスクリ
ーン印刷部と、上記基台の一方から他方に移動自
在になり被印刷用の基板を載置する第１のXYθ
テーブルと、上記基台の他方に設けられた第２の
XYθテーブルと、この第２のXYθテーブルに保
持されスクリーン印刷側から上記基板の位置合わ
せマークに照準合わせをする照準光学系と、第１
のXYθテーブルに対してスクリーン印刷および
照準合わせを行う各所定位置に停止させる一対の
停止機構とを備えたことを特徴とするスクリーン
印刷装置。[Claims] 1. A first substrate holding a starting substrate in a first predetermined position.
a first step of transporting the XYθ table to the first predetermined position and screen-printing a predetermined pattern on the starting substrate; and moving the first XYθ table holding the screen-printed starting substrate to a second predetermined position. The reference line of the aiming optical system transported to the position and placed on the second XYθ table is aligned with the alignment mark on the starting board from the screen printing direction by adjusting the second XYθ table, and the aligned adjustment position is adjusted. a setup process that includes a second step of fixing the starting board, holding the predetermined board on the first XYθ table, and setting the alignment mark of the pattern on the predetermined board to the reference line in the fixed state; a third step of adjusting the first XYθ table to match the screen printing direction, fixing the matched adjustment position, and then printing the screen at the first predetermined position; A screen printing method characterized by performing a third step. 2. A base, a screen printing unit provided on one side of the base, and a first XYθ that is movable from one side of the base to the other and on which a substrate to be printed is placed.
a second table provided on the other side of the table and the base;
a first
What is claimed is: 1. A screen printing device comprising: a pair of stopping mechanisms for stopping the XYθ table at predetermined positions for screen printing and aiming.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15138180A JPS5775889A (en) | 1980-10-30 | 1980-10-30 | Method and device for screen printing |
| DE19813142794 DE3142794C2 (en) | 1980-10-30 | 1981-10-28 | Screen printing process and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15138180A JPS5775889A (en) | 1980-10-30 | 1980-10-30 | Method and device for screen printing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5775889A JPS5775889A (en) | 1982-05-12 |
| JPH0220426B2 true JPH0220426B2 (en) | 1990-05-09 |
Family
ID=15517322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15138180A Granted JPS5775889A (en) | 1980-10-30 | 1980-10-30 | Method and device for screen printing |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5775889A (en) |
| DE (1) | DE3142794C2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE897929A (en) * | 1983-10-06 | 1984-04-06 | Bell Telephone Mfg | SCREEN PRINTING DEVICE |
| JPS61123543A (en) * | 1984-11-21 | 1986-06-11 | Hitachi Ltd | Positioning method of plate in screen printer |
| JPH0529879Y2 (en) * | 1985-01-29 | 1993-07-30 | ||
| IT1184602B (en) * | 1985-06-10 | 1987-10-28 | Ezio Curti | PROCEDURE AND MEANS FOR PRINTING THE PATH OF AN ELECTRONIC CIRCUIT IN THE REGISTER COMPARED TO HOLES PRACTICED IN A SUPPORT PLATE |
| US4864361A (en) * | 1986-09-03 | 1989-09-05 | Sanyo Electric Co., Ltd. | Screen printing machine |
| US4893556A (en) * | 1987-02-23 | 1990-01-16 | Tdk Corporation | Screen printer with double doctor/squeegee, printing pressure sensor and aligning mechanism |
| US4981074A (en) * | 1988-06-01 | 1991-01-01 | Hitachi Techno Engineering Co., Ltd. | Method and apparatus for screen printing |
| DE3928527A1 (en) * | 1989-08-29 | 1991-03-14 | Ind Siebdruck Systeme Neckarwe | Flat bed screen printing machine for PCB(s) - has two cameras with endoscopes slidable between PCB in load position and screen |
| WO2013175639A1 (en) * | 2012-05-25 | 2013-11-28 | マイクロ・テック株式会社 | Screen printer |
| EP3560716B1 (en) * | 2016-12-26 | 2021-06-30 | Fuji Corporation | Screen printing machine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519849A (en) * | 1978-07-31 | 1980-02-12 | Toshiba Corp | Printing of wafer for semiconductor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE8007545U1 (en) * | 1980-03-19 | 1980-06-12 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | ADJUSTMENT DEVICE ON A SCREEN PRINTING MACHINE |
-
1980
- 1980-10-30 JP JP15138180A patent/JPS5775889A/en active Granted
-
1981
- 1981-10-28 DE DE19813142794 patent/DE3142794C2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519849A (en) * | 1978-07-31 | 1980-02-12 | Toshiba Corp | Printing of wafer for semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5775889A (en) | 1982-05-12 |
| DE3142794A1 (en) | 1982-05-19 |
| DE3142794C2 (en) | 1983-11-10 |
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