JPH02179380A - Wrist axis structure of laser robot - Google Patents
Wrist axis structure of laser robotInfo
- Publication number
- JPH02179380A JPH02179380A JP63335540A JP33554088A JPH02179380A JP H02179380 A JPH02179380 A JP H02179380A JP 63335540 A JP63335540 A JP 63335540A JP 33554088 A JP33554088 A JP 33554088A JP H02179380 A JPH02179380 A JP H02179380A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- wrist
- optical path
- reducer
- reduction gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000707 wrist Anatomy 0.000 title claims abstract description 61
- 230000003287 optical effect Effects 0.000 claims abstract description 40
- 239000003638 chemical reducing agent Substances 0.000 claims description 31
- 230000005540 biological transmission Effects 0.000 abstract description 7
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
Landscapes
- Manipulator (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、産業用ロボットにおけるレーザーロボットに
関するものであり、溶接、切断、パリ取り等に用いるレ
ーザービームを射出する光路を合理的に形成したロボッ
ト手首軸構造に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a laser robot used in industrial robots, and is a laser robot that has a rationally formed optical path for emitting a laser beam used for welding, cutting, deburring, etc. This relates to the robot wrist shaft structure.
近時、レーザービームを射出するビーム出力端をロボッ
ト機体の先端に具備して、溶接、切断、成形品のパリ取
り等に適用するようにしたレーザーロボットが提供され
ている。Recently, laser robots have been provided which are equipped with a beam output end for emitting a laser beam at the tip of the robot body and are used for welding, cutting, deburring molded products, and the like.
この種のレーザーロボットにおいては、レーザー光源か
らロボット機体に導入したレーザービームをロボット手
首先端に装着したノズル型ビーム出力部へ誘導する光学
的構造が必要であると共に、レーザービームを照射経路
に沿って移動させるための手首の動作自由度を付与する
必要を満たさねばならない。This type of laser robot requires an optical structure that guides the laser beam introduced from the laser light source into the robot body to a nozzle-type beam output section attached to the tip of the robot's wrist, and also that the laser beam is guided along the irradiation path. The need to provide freedom of movement of the wrist for movement must be met.
第2図は、上述の如き条件の下に設計された従来の2回
転自由度を有するレーザーロボット手首軸構造である。FIG. 2 shows a conventional laser robot wrist shaft structure with two rotational degrees of freedom designed under the above conditions.
即ち、図示の如く、ロボットアーム21の先端に取付け
られた手首22は、ハウジング23.24、軸受ホルダ
ー25.26等の機枠部材と、これら機枠部材内に設け
られた1対のスプロケット27a、27b1及びスデロ
ケッ)27aの取付けられた第1手首軸28a1スデロ
ケツ)27bを有する第2手首軸28bを具備し、また
ハウジング24の先端にはレーザービームを射出するノ
ズル8aを有するビーム出力部8が配置されている。そ
してロボットアームの後端側からは減速機(図示なし)
で減速されたT軸回転が、チェーン30aからスプロケ
ット27aを介して第1手首軸28Hに人力され、β軸
回転がチェーン30bからスプロケット27bを介して
第2手首軸28bに入力され、そして、第1手首回転入
力は1対のベベルギヤ31a、31bで直角に回転方向
が変換されて、レーザービーム出力部8をT軸回転させ
、第2手首軸回転入力はハウジング24及び軸受ホルダ
ー26をβ軸回転させて、ハウジング24と共にレーザ
ー出力部8にもβ軸回転を付与する。That is, as shown in the figure, the wrist 22 attached to the tip of the robot arm 21 is attached to machine frame members such as a housing 23, 24 and a bearing holder 25, 26, and a pair of sprockets 27a provided within these machine frame members. , 27b1 and a second wrist shaft 28b to which a second wrist shaft 27b is attached, and a beam output section 8 having a nozzle 8a for emitting a laser beam at the tip of the housing 24. It is located. And from the rear end of the robot arm is a reducer (not shown).
The T-axis rotation decelerated by the chain 30a is manually applied to the first wrist shaft 28H via the sprocket 27a, and the β-axis rotation is input from the chain 30b to the second wrist shaft 28B via the sprocket 27b. The rotational direction of the first wrist rotation input is converted at right angles by a pair of bevel gears 31a and 31b, causing the laser beam output section 8 to rotate on the T axis, and the second wrist rotation input rotates the housing 24 and bearing holder 26 on the β axis. In this way, β-axis rotation is applied to the laser output unit 8 as well as the housing 24.
いっぽう、レーザービームは、レーザービーム光源(図
示なし)からロボット機体の外部に設けたビーム管路3
2内を通って、ロボット手首22のハウジング24に取
付けられた反射ミラーホルダー33上の第1ミラー34
によりβ軸線と同心に導入され、次いで反射ミラーホル
ダー35上の第2ミラー36によりT軸線と同心方向に
進路変更されて、更に出力部8上の第3ミラー37によ
って放出方向に向けられ、集光レンズ9を通してノズル
8aから射出されるようになっている。On the other hand, the laser beam is transmitted from a laser beam light source (not shown) to a beam conduit 3 provided outside the robot body.
2 and on a reflective mirror holder 33 attached to the housing 24 of the robot wrist 22.
The beam is introduced concentrically with the β-axis, then deflected by the second mirror 36 on the reflection mirror holder 35 to be concentric with the T-axis, and then directed in the emission direction by the third mirror 37 on the output section 8 to be focused. The light is emitted from a nozzle 8a through a light lens 9.
上述した従来のレーザーロボット用手首軸構造にあって
は、レーザービームの進路(光路)を形成するビーム管
路32が、ロボットの外部配管であって手首機体の外側
に配置されているため、管路32からビームノズル8a
に至る経路に光学系ミラーの3個を高精度に配置する必
要があって、ロボット手首の°製造・組立てが容易でな
い。その上レーザー光路の配管がアーム部、及び手首部
の外部配置であるために、ロボットの動作による外部干
渉領域が大であって、作業領域内の治具やワーク等と干
渉して作業可能範囲が制限される。In the above-described conventional wrist shaft structure for a laser robot, the beam pipe 32 that forms the course (optical path) of the laser beam is an external pipe of the robot and is placed outside the wrist body. Beam nozzle 8a from channel 32
It is necessary to place three optical system mirrors with high precision on the path leading to the robot wrist, making it difficult to manufacture and assemble the robot wrist. Furthermore, since the piping for the laser beam path is located outside the arm and wrist, there is a large area of external interference due to robot movement, and interference with jigs, workpieces, etc. in the work area makes it difficult to work. is limited.
また、ロボット手首部のβ軸回転及びT軸回転力の人力
は既に減速機により減速された回転入力がチェーン、及
びスプロケットを介して伝達されるため、減速機より下
流の伝達機構部で必然的に生起する、例えばチェーンの
伸びによる回転誤差やベベルギヤのバックラッシュがロ
ボット手首部の回転動作の高精度制御の阻害要因となっ
ていた。In addition, the human power of the β-axis rotation and T-axis rotation of the robot wrist is transmitted through the chain and sprocket after the rotational input has already been decelerated by the reducer, so it is inevitably transmitted to the transmission mechanism downstream of the reducer. For example, rotational errors due to chain elongation and backlash of bevel gears that occur during rotation are factors that impede high-precision control of the rotational movement of the robot wrist.
本発明の目的は、上述の如き従来のロボット手首部が有
していた問題点を改善又は解消することにある。An object of the present invention is to improve or eliminate the problems that the conventional robot wrist portion as described above had.
〔課題を解決するための手段及び作用〕例えば第1図に
示す如く、基端がγ軸RV減速機15の出力端に固定さ
れたロボットアーム1の内部に、光路P1を有し且つ基
端をβ軸モータMβで駆動する手首駆動軸2を貫通し、
アーム1先端のハウジング3内に支承したベベルギヤ4
を手首駆動軸2に嵌着すると共に、β軸RV減速機7の
入力部遊星ギヤ6と噛合う内歯リングギヤ5の外周全歯
をベベルギヤ4に噛合してβ軸RV減速機7の中心部に
光路P2を貫設し、該減速機7の出力端面に光路P3及
びノズル8aを備えた出力ユニット8を固定し、駆動軸
2の光路P+ と減速機7の光路P2との交差部に第1
ミラー10を、光路P2と出力ユニットの光路P3との
交差部に第2ミラー11を配設して、レーザービームを
手首駆動軸2からノズル8aまで屈折案内するように構
成した。[Means and effects for solving the problem] For example, as shown in FIG. passes through the wrist drive shaft 2 driven by the β-axis motor Mβ,
Bevel gear 4 supported in housing 3 at the tip of arm 1
At the same time, all teeth on the outer periphery of the internal ring gear 5 that meshes with the input planetary gear 6 of the β-axis RV reducer 7 are engaged with the bevel gear 4, and the central part of the β-axis RV reducer 7 is fitted to the wrist drive shaft 2. An output unit 8 having an optical path P3 and a nozzle 8a is fixed to the output end face of the reducer 7, and an optical path P2 of the drive shaft 2 and an optical path P2 of the reducer 7 intersect with each other. 1
The mirror 10 is configured to refract and guide the laser beam from the wrist drive shaft 2 to the nozzle 8a by disposing a second mirror 11 at the intersection of the optical path P2 and the optical path P3 of the output unit.
レーザービーム光路は、アーム中央部に貫挿された手首
駆動軸内から手首部のβ軸RV減速機の中央部を経てノ
ズルに通されるため、手首部の外形が小さく、且つ簡素
となり、アーム部及び手首部の外部には光路用配管がな
く、従ってロボットの動作時のアーム及び手首部の外部
干渉領域が小となった。また手首部へのミラーの組込み
も2個で良くなり、手首部の構造の簡略化と相まって組
立てが容易となった。The laser beam optical path passes from the wrist drive shaft inserted into the center of the arm, through the center of the β-axis RV reducer in the wrist, and through the nozzle, so the outer shape of the wrist is small and simple, and the arm There is no optical path piping outside of the arm and wrist, so the area of external interference between the arm and wrist during robot operation is small. In addition, only two mirrors are required to be assembled into the wrist, which, combined with the simplification of the structure of the wrist, facilitates assembly.
また、アームのβ軸回転も手首先端のβ軸回転も共に各
減速機出力端面から伝達機構を介在せずに付与されるた
め、各モータと各減速機との伝達経路で生起するバック
ラッシュ等による回転誤差も適切に減速機で減少出来て
、手首部のβ軸回転及びβ軸回転が高精度で制御出来た
。In addition, since both the β-axis rotation of the arm and the β-axis rotation of the wrist tip are applied from the output end face of each reducer without the intervention of a transmission mechanism, backlash, etc. that occur in the transmission path between each motor and each reduction gear, etc. The rotational error due to this can be appropriately reduced by the reducer, and the β-axis rotation and β-axis rotation of the wrist can be controlled with high precision.
第1図に示す如く、ロボットアーム1の基部の取付板I
已にT軸モータM丁とβ軸モータMβとを配置し、取付
板IB上に固定したr@RV減速機15の出力端面とア
ーム基端とを固定し、中空光路P1を有する手首駆動軸
2をアーム1及びT軸RV減速機15の中心部に貫挿す
ると共に、モータMyをヘリカルギヤ12及びT軸入力
リングギャ13を介してT軸入力部遊星ギヤ14に接続
し、モータMβをヘリカルギヤ16及びギヤ17を介し
て手首駆動軸2に接続した。手首部の機枠を構成するハ
ウジング3には、ベベルギヤ4を回動自在に支承した軸
受ホルダ一部3aと、β軸入力用の内歯リングギヤ5を
回動自在に支承した軸受ホルダ一部3bとを直角関係に
配し、ベベルギヤ4を駆動軸2の先端に嵌合係止すると
共にアーム1の先端をハウジング3の軸受ホルダ一部3
aと固定した。また、軸受ホルダ−3b部内の内歯リン
グギヤ5の外周の全歯をベベルギヤ4に噛合すると共に
、リングギヤ5の内歯には、中央に光路P2の貫通した
β軸RV減速機7のβ軸入力部遊星ギヤ6を噛合させて
減速機7をハウジングの軸受ホルダ一部3b端面に固定
し、β軸RV減速機7の出力端面に光路P3を有する出
力ユニット8を取付けた。そして光路P1と光路P2と
の交差部にはハウジング上の保持部材3Cを介して第1
ミラー10を、出力ユニット後端の光路P2と光路P3
との交差部には保持部材3dを介して第2ミラー11を
配設し、各ミラーによって各光路内のビームを直角に屈
折するように構成した。なお、出力ユニット8自体は従
来装置と同様に集光レンズ9を介してノズル8aからビ
ームを射出するものである。As shown in FIG. 1, the mounting plate I at the base of the robot arm 1
On the other hand, a T-axis motor M and a β-axis motor Mβ are arranged, and the output end surface of the r@RV reducer 15 fixed on the mounting plate IB and the base end of the arm are fixed, and the wrist drive shaft has a hollow optical path P1. 2 is inserted into the center of the arm 1 and the T-axis RV speed reducer 15, the motor My is connected to the T-axis input unit planetary gear 14 via the helical gear 12 and the T-axis input ring gear 13, and the motor Mβ is connected to the helical gear 16. and connected to the wrist drive shaft 2 via a gear 17. The housing 3 constituting the machine frame of the wrist part includes a bearing holder part 3a that rotatably supports a bevel gear 4, and a bearing holder part 3b that rotatably supports an internally toothed ring gear 5 for β-axis input. The bevel gear 4 is fitted and locked to the tip of the drive shaft 2, and the tip of the arm 1 is connected to the bearing holder part 3 of the housing 3.
It was fixed as a. In addition, all teeth on the outer periphery of the internal ring gear 5 in the bearing holder 3b are engaged with the bevel gear 4, and the internal teeth of the ring gear 5 are connected to the β-axis input of the β-axis RV speed reducer 7 through which the optical path P2 passes through the center. The reduction gear 7 was fixed to the end face of the bearing holder part 3b of the housing by engaging the partial planetary gear 6, and the output unit 8 having the optical path P3 was attached to the output end face of the β-axis RV reduction gear 7. Then, at the intersection of the optical path P1 and the optical path P2, a first
Mirror 10 is connected to optical path P2 and optical path P3 at the rear end of the output unit.
A second mirror 11 is disposed at the intersection with a holding member 3d, and each mirror is configured to refract the beam in each optical path at right angles. Note that the output unit 8 itself emits a beam from a nozzle 8a through a condenser lens 9, similar to the conventional device.
得られたレーザーロボットの手首軸構造にあっては、レ
ーザービームが光源(図示なし)から駆動軸2内の光路
P、を通って第1ミラー10で直角に屈折してβ軸減速
機7内の光路P2を直進し、第2ミラー11で直角に屈
折して光路P3を通って集光レンズ9で集束されてノズ
ル8aから射出するので、アーム及び手首部の外部にレ
ーザー光路用の配管は何も存在せず、従って、ロボット
の動作時にレーザー光路による外部干渉は無くなった。In the wrist shaft structure of the laser robot obtained, the laser beam passes from the light source (not shown) through the optical path P in the drive shaft 2, is refracted at a right angle by the first mirror 10, and is reflected in the β-axis reducer 7. The laser beam travels straight along the optical path P2, is refracted at a right angle by the second mirror 11, passes through the optical path P3, is focused by the condensing lens 9, and is emitted from the nozzle 8a, so there is no piping for the laser optical path outside the arm and wrist. There are no external interferences due to the laser beam path during the operation of the robot.
また、手首先端の出力ユニット8がβ軸減速機7の出力
端に固定されているため、モータMβからβ軸減速機7
までの伝達過程で生起されるバックラッシュ等の回転誤
差も減速機で減少されると共に、1回転するアーム1も
基端がγ軸RV減速機15の出力端に固定されているた
め、モータMyからr@RV減速機15までの伝達過程
で生起されるバックラッシュ等の回転誤差も減速機で減
少され、従って、アーム先端の手首軸のT軸回転及びβ
軸回転の制御は高精度に実施出来た。In addition, since the output unit 8 at the tip of the wrist is fixed to the output end of the β-axis reducer 7, the motor Mβ is connected to the β-axis reducer 7.
Rotational errors such as backlash that occur during the transmission process up to Rotational errors such as backlash that occur during the transmission process from r@RV to the RV reducer 15 are also reduced by the reducer, and therefore the T-axis rotation of the wrist axis at the end of the arm and β
The shaft rotation could be controlled with high precision.
また、手首部内のβ軸RV減速機の入力部が内歯リング
ギヤであるため、β軸RV減速機全体の中央部に光路用
の空孔が形成出来、手首構造の外形が小さくなり、動作
性能が向上すると共に、製造、組立ても容易となった。In addition, since the input part of the β-axis RV reducer in the wrist is an internally toothed ring gear, a hole for the optical path can be formed in the center of the entire β-axis RV reducer, which reduces the external size of the wrist structure and improves operating performance. In addition to improved performance, manufacturing and assembly have also become easier.
各減速機の出力端から伝導機構を介さずにγ軸、β軸回
転を行うため、手首の回転制御が高精度になる。Since γ- and β-axis rotation is performed from the output end of each speed reducer without going through a transmission mechanism, wrist rotation control becomes highly accurate.
レーザービーム光路がアーム及び手首部の外部に存在し
ないため、ロボットの動作領域が従来のものより広がる
。Since the laser beam optical path does not exist outside the arm and wrist, the robot's operating range is wider than that of conventional robots.
手首内に配置した手首先端(出力ユニット)に直結した
β軸RV減速機自体に光路P2が形成出来たため、手首
構造の外形が小型且つ簡素となり、製造及び組立てが安
価且つ容易であるばかりでなく、手首部の動作時の作業
性も向上する。Since the optical path P2 can be formed in the β-axis RV reducer itself, which is directly connected to the wrist tip (output unit) placed inside the wrist, the external shape of the wrist structure is small and simple, and manufacturing and assembly are not only cheap and easy, but also This also improves the workability of the wrist.
第1vi!Jは、本発明実施例の側断面図である。
第2図は、従来例の側断面図である。
l・・・アーム、 2・・・手首駆動軸、3・・
・ハウジング、 4・・・ベベルギヤ、5・・・内
歯リングギヤ、6・・・入力部遊星ギヤ、7・・・β軸
RV減速機、訃・・出力ユニット、8a・・・ノズル、
9・・・集光レンズ、10・・・第1ミラー、
11・・・第2ミラー13・・・入力リングギヤ、
14・・・入力部遊星ギヤ、
15・・・γ軸RV減速機、
Mβ・・・β軸モータ、 M丁・・・T軸モータ、p、
、p、、p、・・・光路。1st vi! J is a side sectional view of an embodiment of the present invention. FIG. 2 is a side sectional view of a conventional example. l...Arm, 2...Wrist drive shaft, 3...
・Housing, 4... Bevel gear, 5... Internal tooth ring gear, 6... Input planetary gear, 7... β-axis RV reducer, End... Output unit, 8a... Nozzle,
9... Condensing lens, 10... First mirror,
DESCRIPTION OF SYMBOLS 11... Second mirror 13... Input ring gear, 14... Input planetary gear, 15... γ-axis RV reducer, Mβ... β-axis motor, M-double... T-axis motor, p,
,p,,p,... optical path.
Claims (1)
有する手首駆動軸(2)を貫通し、アーム先端のハウジ
ング(3)内に支承したベベルギヤ(4)を手首駆動軸
に取付けると共に、β軸RV減速機(7)の入力部遊星
ギヤ(6)と噛合う内歯リングギヤ(5)をベベルギヤ
(4)に噛合してβ軸RV減速機(7)中心部に光路(
P_2)を貫設し、該減速機7の出力端面に光路(P_
3)及びノズル(8a)を備えた出力ユニット(8)を
固定し、駆動軸(2)の光路(P_1)と減速機(7)
の光路(P_2)との交差部に第1ミラー(10)を、
光路(P_2)と出力ユニットの光路(P_3)との交
差部に第2ミラー(11)を配設して、レーザービーム
を手首駆動軸(2)からノズル(8a)まで屈折案内す
るレーザーロボットの手首軸構造。 2、ロボットアーム(1)の基端をγ軸RV減速機(1
5)の出力端面と固着すると共に、手首駆動軸(2)が
γ軸RV減速機(15)の中心部を貫通した請求項1に
記載のレーザーロボットの手首軸構造。[Claims] 1. A wrist drive shaft (2) having an optical path (P_1) passes through the inside of the robot arm (1), and a bevel gear (4) supported in a housing (3) at the tip of the arm is connected to the wrist. The internal tooth ring gear (5), which is attached to the drive shaft and meshes with the input planetary gear (6) of the β-axis RV reducer (7), is meshed with the bevel gear (4) to connect the central part of the β-axis RV reducer (7). The optical path (
P_2) is installed through the reducer 7, and an optical path (P_2) is provided on the output end face of the reducer 7.
3) and the output unit (8) with the nozzle (8a) are fixed, and the optical path (P_1) of the drive shaft (2) and the reducer (7) are fixed.
A first mirror (10) is placed at the intersection with the optical path (P_2) of
A laser robot is equipped with a second mirror (11) at the intersection of the optical path (P_2) and the optical path (P_3) of the output unit to refract and guide the laser beam from the wrist drive shaft (2) to the nozzle (8a). Wrist axis structure. 2. Connect the base end of the robot arm (1) to the γ-axis RV reducer (1).
2. The wrist shaft structure of a laser robot according to claim 1, wherein the wrist drive shaft (2) is fixed to the output end face of the laser robot (5), and the wrist drive shaft (2) passes through the center of the γ-axis RV speed reducer (15).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63335540A JPH02179380A (en) | 1988-12-29 | 1988-12-29 | Wrist axis structure of laser robot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63335540A JPH02179380A (en) | 1988-12-29 | 1988-12-29 | Wrist axis structure of laser robot |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02179380A true JPH02179380A (en) | 1990-07-12 |
Family
ID=18289717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63335540A Pending JPH02179380A (en) | 1988-12-29 | 1988-12-29 | Wrist axis structure of laser robot |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02179380A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0531534A1 (en) * | 1991-01-30 | 1993-03-17 | Fanuc Ltd. | Piping arrangement for wrist of laser robot |
-
1988
- 1988-12-29 JP JP63335540A patent/JPH02179380A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0531534A1 (en) * | 1991-01-30 | 1993-03-17 | Fanuc Ltd. | Piping arrangement for wrist of laser robot |
US5296671A (en) * | 1991-01-30 | 1994-03-22 | Fanuc Ltd. | Piping arrangement for a laser robot wrist |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5132887A (en) | Multi-articulation type robot for laser operation | |
US4761114A (en) | Articulated head for an industrial robot and a robot equipped with a head of this type | |
US6858814B2 (en) | Buckling arm robot | |
CN110842357A (en) | Laser welding mechanism and laser equipment applying same | |
JPWO2018139019A1 (en) | Laser processing head and laser processing apparatus using the same | |
JPH02179380A (en) | Wrist axis structure of laser robot | |
JPH02200390A (en) | Wrist structure of industrial laser robot | |
KR20110053398A (en) | Robot | |
US8555757B2 (en) | Tool for machining workpiece surfaces | |
JPH0284291A (en) | Wrist construction for laser beam robot | |
WO2017012558A1 (en) | Zero backlash right angle transmission system and method | |
JPH04300190A (en) | Wrist device for industrial robot | |
JPH0284290A (en) | Wrist construction for laser beam robot | |
JP2824170B2 (en) | Laser processing equipment for robots | |
JP2559859B2 (en) | Polar coordinate multi-degree-of-freedom laser robot | |
CN110666346A (en) | Curved surface cutting device | |
JP2680101B2 (en) | Laser processing head | |
CN114799496B (en) | Transmission mechanism for laser robot, support arm module and laser robot | |
CA2028111A1 (en) | Method of and apparatus for laser beam machining employing an off-axis parabolic reflector | |
JP2672994B2 (en) | Laser processing head | |
JPH04313481A (en) | Joint mechanism of laser robot | |
CN211438578U (en) | Curved surface cutting device | |
JPH05318347A (en) | Small locus working unit | |
JPH09225882A (en) | Turning device for chuck in robot arm | |
JP6983856B2 (en) | Processing machine |