JPH0216472B2 - - Google Patents
Info
- Publication number
- JPH0216472B2 JPH0216472B2 JP55148986A JP14898680A JPH0216472B2 JP H0216472 B2 JPH0216472 B2 JP H0216472B2 JP 55148986 A JP55148986 A JP 55148986A JP 14898680 A JP14898680 A JP 14898680A JP H0216472 B2 JPH0216472 B2 JP H0216472B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sample
- secondary electrons
- voltage
- deceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 9
- 230000005684 electric field Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Current Or Voltage (AREA)
- Tests Of Electronic Circuits (AREA)
Description
【発明の詳細な説明】
本発明は試料に電子ビームを照射して該試料面
より放出される２次電子をエネルギ分析して試料
の電圧を測定する電圧測定装置に係り、特にエネ
ルギアナライザ中の電界形成電極を金属板電極で
構成した電圧測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a voltage measuring device that measures the voltage of a sample by irradiating the sample with an electron beam and analyzing the energy of secondary electrons emitted from the surface of the sample. The present invention relates to a voltage measuring device in which an electric field forming electrode is formed of a metal plate electrode.
一般に電子ビームを照射した試料の電圧を２次
電子のエネルギ分析によつて測定することが行わ
れる。これは、２次電子のエネルギスペクトル分
布曲線は試料が定まれば、一定であり、試料に電
圧が印加されれば分布曲線はその形状を変えずに
ピーク値が移動することを利用し、たとえば、分
布曲線のピーク値が試料への電圧印加時と電圧を
印加しない時で異なるので、その移動量を測定す
ることによつて、試料への印加電圧を測定するも
のである。かかる測定方法を行う電圧測定装置と
しては、従来より種々の装置が提案されている
が、従来の最も一般的な構成は第１図に示す。同
図で半円球状の金属メツシユよりなる減速電極１
にはマイナス電位VRが与えられ、該半円球状の
減速電極内に平板状金属メツシユよりなる引き出
し電極２が配置され、プラス電位VDが与えられ
ている。引き出し電極２の下端にはIC等の試料
３が置かれて電子ビーム４を該試料３の表面に照
射することで低エネルギの２次電子５が放出され
る。 Generally, the voltage of a sample irradiated with an electron beam is measured by analyzing the energy of secondary electrons. This takes advantage of the fact that the energy spectrum distribution curve of secondary electrons is constant once the sample is determined, and when a voltage is applied to the sample, the distribution curve does not change its shape and the peak value moves.For example, Since the peak value of the distribution curve differs between when voltage is applied to the sample and when no voltage is applied, the voltage applied to the sample is measured by measuring the amount of movement. Various devices have been proposed as voltage measuring devices for performing such measuring methods, and the most common conventional configuration is shown in FIG. In the same figure, the deceleration electrode 1 is made of a semicircular metal mesh.
A negative potential V R is applied to the deceleration electrode, and an extraction electrode 2 made of a flat metal mesh is disposed within the semicircular deceleration electrode, and a positive potential V D is applied to the deceleration electrode. A sample 3 such as an IC is placed at the lower end of the extraction electrode 2, and by irradiating the surface of the sample 3 with an electron beam 4, low-energy secondary electrons 5 are emitted.
該２次電子は引き出し電極２によつて加速さ
れ、減速電極１に与えられる電圧VR以上のエネ
ルギをもつ２次電子のみをメツシユよりなる減速
電極を通過させて２次電子検出手段６に与えるよ
うにする。 The secondary electrons are accelerated by the extraction electrode 2, and only the secondary electrons having an energy higher than the voltage V R applied to the deceleration electrode 1 are passed through the deceleration electrode made of mesh and provided to the secondary electron detection means 6. Do it like this.
上述の如き従来構成によるときは試料３より放
出された２次電子が引き出し電極２や減速電極１
のメツシユに衝突することで、試料３よりの２次
電子量が減少し、Ｓ／Ｎを悪くし、更にメツシユ
に衝突した試料よりの２次電子はメツシユより他
の２次電子を放出し、試料に影響のない２次電子
がアナライザの出力に混入する可能性があり、電
圧測定精度を劣化させる。また、メツシユは汚れ
が付き易くクリーニングも容易でなく廉価に構成
し得ない欠点を有する。 When using the conventional configuration as described above, the secondary electrons emitted from the sample 3 are transferred to the extraction electrode 2 and the deceleration electrode 1.
By colliding with the mesh, the amount of secondary electrons from sample 3 decreases, worsening the S/N, and furthermore, the secondary electrons from the sample that collide with the mesh emit other secondary electrons from the mesh, Secondary electrons that have no effect on the sample may be mixed into the output of the analyzer, degrading voltage measurement accuracy. Furthermore, the mesh has the disadvantage that it is easily soiled, cannot be cleaned easily, and cannot be constructed at a low cost.
本発明は上記従来の欠点を除去しＳ／Ｎを向上
するとともに電圧測定精度も高まり、簡単な構成
の電圧測定装置を提供することを目的とするもの
で、その特徴とするところはエネルギアナライザ
の電界を構成する電極を複数の円板電極構造とし
て減速半球状電界を同心状の２枚の板状電極で構
成させて試料より放出された２次電子を有効に検
知手段に導くようにしたものである。以下本発明
の実施例を第２図乃至第５図について詳記する。
第２図は本発明の１実施例の電極構成を示す略線
的説明図であり、Ｚ−Z′軸に沿つて電子ビーム４
が入射して試料３を照射する。該試料の上部には
シールド電極７が、該シールド電極の上に更に検
出用減速電極８が該減速電極８より所定の距離を
置いて同じく検出用最終電極９が配され、これら
電極は中心部に電子ビーム及び試料よりの２次電
子５を通過させるアパチヤ７ａ，８ａ，９ａを有
し、金属板等で構成されている。シールド電極は
接地され、減速電極８はマイナス電位−VAが加
えられ、更に最終電極９にはプラス電位VEが与
えられている。 The present invention aims to eliminate the above-mentioned conventional drawbacks, improve S/N, improve voltage measurement accuracy, and provide a voltage measurement device with a simple configuration. The electrodes that make up the electric field have a multiple disk electrode structure, and the decelerating hemispherical electric field is made up of two concentric plate electrodes to effectively guide the secondary electrons emitted from the sample to the detection means. It is. Embodiments of the present invention will be described in detail below with reference to FIGS. 2 to 5.
FIG. 2 is a schematic explanatory diagram showing the electrode configuration of one embodiment of the present invention, in which the electron beam 4 is
enters and irradiates the sample 3. A shield electrode 7 is disposed above the sample, a deceleration electrode 8 for detection is further disposed on the shield electrode, and a final electrode 9 for detection is also disposed at a predetermined distance from the deceleration electrode 8, and these electrodes are arranged at the center. It has apertures 7a, 8a, and 9a through which the electron beam and secondary electrons 5 from the sample pass, and is made of a metal plate or the like. The shield electrode is grounded, a negative potential -V A is applied to the deceleration electrode 8, and a positive potential V E is applied to the final electrode 9.
上述の様に各電極に電圧を加えた場合のＺ−
Z′軸に沿つた電位分布は第３図に示されるように
なる。尚等電位面は第２図の符号１０で示す如く
発生する。即ち第２図の減速電極８、アパチヤ８
ａの中心部Ａでは該減速電極に加えたマイナス電
位−VA以上のエネルギを有する２次電子のみが
該アパチヤ８ａを通過することになる。第３図で
Ｚ−Z′軸に沿う電位分布は、試料３上面Ｓでの電
位を零と考えるとシールド電極７はアースされて
零電位Ｇであり、更に減速電極８のアパチヤ８ａ
ではマイナス電位−VAに相当する電界分布とな
され、−VA近傍以上のエネルギを持つ２次電子が
アパチヤ８ａを通過し、第３図の斜線で示す範囲
のエネルギを持つ２次電子はフイルターされるこ
とになる。アパチヤ８ａを通過した２次電子は、
最終電極９のアパチヤ９ａの中心部近傍Ｅでプラ
ス電位VE迄加速されて、検知手段、例えばシン
チレータ６等に入射して電圧変換される。第４図
及び第５図は本発明の他の実施例を示す電極構造
であり、第１図と同一部分は同一符号を付して示
す。第１図と異なる点は、減速電極が同心円状の
２つの電極により構成されている点であり、第１
の減速電極８ｂには第１図と同様のマイナス電位
−VA1が加えられ、大なるアパチヤ８ｃを有し、
第２の減速電極８ｄには中心にアパチヤ８ｅを有
し、アパチヤ８ｃ内に第２の減速電極８ｄを隙間
をあけて同心的に配置し第２の減速電極にはプラ
ス電位VA2を加えるようになしたもので他の構成
は第１図の場合と同様である。この様な電極配置
による等電位面は第４図の符号１０で示されＺ−
Z′軸に沿う電位分布は第５図に示す斜線で示すエ
ネルギが減衰され、試料３より放出される２次電
子５は第１及び第２の減速電極８ｂ，８ｄに加え
る電位VA1，VA2の関数であるVA（eV）以上のエ
ネルギのみが減速電極８ｄのアパチヤ８ｅを通過
することになる。 Z- when voltage is applied to each electrode as described above
The potential distribution along the Z' axis becomes as shown in FIG. Incidentally, an equipotential surface is generated as shown by the reference numeral 10 in FIG. That is, the deceleration electrode 8 and the aperture 8 in FIG.
At the center A of a, only secondary electrons having energy greater than the negative potential -V A applied to the deceleration electrode will pass through the aperture 8a. The potential distribution along the Z-Z' axis in FIG.
In this case, the electric field distribution corresponds to the negative potential -V A , and secondary electrons with energy near -V A or higher pass through the aperture 8a, and secondary electrons with energy in the shaded range in Fig. 3 pass through the filter. will be done. The secondary electrons that passed through the aperture 8a are
It is accelerated to a positive potential V E near the center E of the aperture 9a of the final electrode 9, enters a detection means, for example, the scintillator 6, and is converted into a voltage. 4 and 5 show electrode structures according to other embodiments of the present invention, and the same parts as in FIG. 1 are designated by the same reference numerals. The difference from Fig. 1 is that the deceleration electrode is composed of two concentric electrodes;
A negative potential -V A1 similar to that in FIG. 1 is applied to the deceleration electrode 8b, and it has a large aperture 8c,
The second deceleration electrode 8d has an aperture 8e in the center, and the second deceleration electrode 8d is arranged concentrically with a gap in the aperture 8c, and a positive potential V A2 is applied to the second deceleration electrode 8d. The other configurations are the same as those shown in FIG. The equipotential surface resulting from such an electrode arrangement is indicated by the reference numeral 10 in FIG.
In the potential distribution along the Z' axis, the energy indicated by diagonal lines in FIG. 5 is attenuated, and the secondary electrons 5 emitted from the sample 3 are applied to the potentials V A1 and V Only energy equal to or higher than V A (eV), which is a function of A2 , will pass through the aperture 8e of the deceleration electrode 8d.
この実施例によれば、減衰電界は従来の半円球
状メツシユ電極を用いた電界と等価に形成出来、
且つ減速電極に加える電位−VA1，VA2によつて
減速電界の形状を制御することも可能となる。 According to this embodiment, an attenuated electric field can be formed equivalent to an electric field using a conventional hemispherical mesh electrode,
Moreover, it is also possible to control the shape of the deceleration electric field by the potentials -V A1 and V A2 applied to the deceleration electrodes.
尚電極の個数、電極電位は上記実施例以外の組
合せが可能であることは明かである。 It is clear that the number of electrodes and the electrode potential may be combined other than those in the above embodiments.
本発明は上述の如く構成させたので、半円球状
のメツシユを用いず同心円状電極を用いて減速電
界を形成出来るので、試料よりの２次電子を検知
手段に導く際にメツシユに衝突して２次電子が試
料側に戻されることもなく、メツシユ等に衝突し
て発生した試料電圧とは直接関係のない２次電子
又はこの２次電子による反射電子等の影響による
幣害を完全に除くことが出来るので試料電圧測定
の精度を向上させることが出来る。更に構造的に
も製作が容易である特徴を有するものである。 Since the present invention is configured as described above, it is possible to form a decelerating electric field using concentric electrodes without using a hemispherical mesh, so that when secondary electrons from the sample are guided to the detection means, they collide with the mesh. The secondary electrons are not returned to the sample side, and damage caused by secondary electrons that are not directly related to the sample voltage generated by colliding with meshes, etc., or reflected electrons caused by these secondary electrons is completely eliminated. Therefore, the accuracy of sample voltage measurement can be improved. Furthermore, it has the feature of being easy to manufacture in terms of structure.
第１図は従来のエネルギアナライザーの減速電
極部分の原理的説明図、第２図は本発明の１実施
例を示す減速電極部分の構成を示す略線図、第３
図は第２図のＺ−Z′軸に沿う電位分布曲線図、第
４図は本発明の他の実施例を示す減速電極部分の
構成の略線図、第５図は第４図のＺ−Z′軸に沿う
電位分布曲線図である。
２…引き出し電極、３…試料、４…電子ビー
ム、５…２次電子、６…検知手段、７…シールド
電極、８，８ｂ…減速電極、９…最終電極、９
ａ，８ａ，７ａ，８ｅ…アパチヤ。
FIG. 1 is a principle explanatory diagram of the deceleration electrode portion of a conventional energy analyzer, FIG. 2 is a schematic diagram showing the configuration of the deceleration electrode portion showing one embodiment of the present invention, and FIG.
The figure is a potential distribution curve diagram along the Z-Z' axis in Figure 2, Figure 4 is a schematic diagram of the configuration of the deceleration electrode section showing another embodiment of the present invention, and Figure 5 is a diagram showing the Z-Z' axis in Figure 4. It is a potential distribution curve diagram along the −Z′ axis. 2... Extraction electrode, 3... Sample, 4... Electron beam, 5... Secondary electron, 6... Detection means, 7... Shield electrode, 8, 8b... Deceleration electrode, 9... Final electrode, 9
a, 8a, 7a, 8e...apachiya.
Claims (1)
放出される２次電子をエネルギアナライズして該
試料の電圧を測定する電圧測定装置に於て、エネ
ルギアナライザー内の電界形成用電極を中心にア
パチヤを有する複数の金属板電極から構成し、且
つ検出用減速電極は同一面上で隙間をあけて同心
的に配置された複数の環状電極で構成してなるこ
とを特徴とする電圧測定装置。1. In a voltage measuring device that measures the voltage of the sample by irradiating the sample with an electron beam and energy analyzing the secondary electrons emitted from the sample surface, 1. A voltage measuring device comprising a plurality of metal plate electrodes having an aperture, and a detection deceleration electrode comprising a plurality of annular electrodes arranged concentrically with gaps on the same surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55148986A JPS5772071A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55148986A JPS5772071A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5772071A JPS5772071A (en) | 1982-05-06 |
| JPH0216472B2 true JPH0216472B2 (en) | 1990-04-17 |
Family
ID=15465133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55148986A Granted JPS5772071A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5772071A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5342278A (en) * | 1976-09-30 | 1978-04-17 | Yokohama Rubber Co Ltd | Treating method and apparatus for large hose after vulcanizing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54134570U (en) * | 1978-03-10 | 1979-09-18 |
-
1980
- 1980-10-24 JP JP55148986A patent/JPS5772071A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5342278A (en) * | 1976-09-30 | 1978-04-17 | Yokohama Rubber Co Ltd | Treating method and apparatus for large hose after vulcanizing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5772071A (en) | 1982-05-06 |
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