JPH02161788A - Transmission path of gas laser device - Google Patents
Transmission path of gas laser deviceInfo
- Publication number
- JPH02161788A JPH02161788A JP63314849A JP31484988A JPH02161788A JP H02161788 A JPH02161788 A JP H02161788A JP 63314849 A JP63314849 A JP 63314849A JP 31484988 A JP31484988 A JP 31484988A JP H02161788 A JPH02161788 A JP H02161788A
- Authority
- JP
- Japan
- Prior art keywords
- orifice plate
- laser
- transmission path
- gas
- duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 42
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、風洞内への外気の侵入を防いだガスレーザ装
置の伝送路に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a transmission path for a gas laser device that prevents outside air from entering into a wind tunnel.
（従来の技術）
従来のガスレーザ装置の伝送路の一例を示す第２図にお
いて、図示しない共振器が内蔵されレーザガスが減圧封
入された風洞１の左側壁のレーザ光の出射部には、左側
に反射鏡２ａを収納した窓ダクト２の右端が取付られ、
この窓ダクト２の上部は上方に設けられた窓ダクト３の
右端に接続されている。(Prior Art) In FIG. 2 showing an example of a transmission path of a conventional gas laser device, there is a laser beam emitting part on the left side wall of a wind tunnel 1 in which a resonator (not shown) is built in and a laser gas is sealed under reduced pressure. The right end of the window duct 2 that houses the reflector 2a is attached,
The upper part of this window duct 2 is connected to the right end of a window duct 3 provided above.
そして、この窓ダクト３の右端には凹面鏡３ａが、左端
には凹面鏡３ｂがそれぞれ収納され、窓ダクト３の左端
には図示しないレーザ加工ヘッドに接続される伝送路４
の基端が接続されており、更に窓ダクト３の中間やや左
寄りの下部には、下端に排気ポンプ６が接続された排気
ダクト５が接続され、窓ダクト３内の排気ダクト５の接
続部のすぐ左側には、オリフス板４ａが、やや有余りに
はオリフス板４ｂがそれぞれ設けられている。A concave mirror 3a is housed at the right end of the window duct 3, and a concave mirror 3b is housed at the left end. At the left end of the window duct 3, a transmission line 4 is connected to a laser processing head (not shown).
Furthermore, an exhaust duct 5 with an exhaust pump 6 connected to the lower end is connected to the lower part of the window duct 3 slightly to the left, and the connection part of the exhaust duct 5 inside the window duct 3 is connected to the base end of the window duct 3. An orifice plate 4a is provided immediately to the left, and an orifice plate 4b is provided slightly further away.
この結果、風洞１から出射されたレーザ光は、反射鏡２
ａで上方に直角に反射され、凹面鏡３ａに入射後左力に
反射されて窓ダクト３の中央で集光後、拡大されて左端
の凹面鏡３ｂに入射する。すると、このレーザ光は、下
方に直角に反射されて伝送路４を経て図示しない加工ヘ
ッドから図示しないワークに照射される。As a result, the laser beam emitted from the wind tunnel 1 is transmitted to the reflecting mirror 2.
It is reflected upward at a right angle at point a, enters the concave mirror 3a, is reflected to the left, is focused at the center of the window duct 3, is magnified, and enters the concave mirror 3b at the left end. Then, this laser light is reflected downward at right angles, passes through the transmission path 4, and is irradiated onto a workpiece (not shown) from a processing head (not shown).
（発明が解決しようとする課題）
ところが、このように構成されたガスレーザ装置の伝送
路では、図示しない伝送路から侵入した外気がもし窓ダ
クト２，３を経て風洞１内に入ると、風洞１内のレーザ
ガスの濃度が下って発振器の出力が下がるおそれがある
。(Problem to be Solved by the Invention) However, in the transmission path of the gas laser device configured as described above, if outside air enters the wind tunnel 1 from the transmission path (not shown) through the window ducts 2 and 3, the wind tunnel 1 There is a risk that the concentration of the laser gas inside the oscillator will drop and the output of the oscillator will drop.
そのため、伝送路内の圧力を更に下げることも考えられ
るが、すると排気ポンプの容量が増える。Therefore, it may be possible to further reduce the pressure in the transmission line, but this would increase the capacity of the exhaust pump.
そこで本発明の目的は、排気ポンプの容量を増やすこと
なく、風洞１内への外気の侵入を防ぐことのできるガス
レーザ装置の伝送路を得ることである。〔発明の構成〕
（課題を解決するための手段と作用）
本発明は、レーザ発振器から出射されたレーザ光を伝送
する伝送路の出射口近くに、レーザ光を反射して伝送す
る一対の凹面反射鏡を設け、この凹面反射鏡の焦点とそ
の前後にオリフス板を設け、前方と中間のオリフス板間
に排気ダクトを、中間と後方のオリフス板間にガス供給
ダクトを接続し酸素検出器を挿入し、酸素検出器の検出
信号でガス供給ダクトからのレーザガスの供給量を制御
することで、排気ダクトに接続された排気ポンプの容量
を上げることなく、レーザ風洞内への外気の侵入を防い
だガスレーザ装置の伝送路である。SUMMARY OF THE INVENTION An object of the present invention is to provide a transmission path for a gas laser device that can prevent outside air from entering the wind tunnel 1 without increasing the capacity of the exhaust pump. [Structure of the Invention] (Means and Effects for Solving the Problems) The present invention provides a pair of concave surfaces that reflect and transmit the laser light near the exit of a transmission line that transmits the laser light emitted from the laser oscillator. A reflector is provided, an orifice plate is provided at the focal point of this concave reflector and before and after it, an exhaust duct is connected between the front and middle orifice plates, a gas supply duct is connected between the middle and rear orifice plates, and an oxygen detector is installed. By controlling the amount of laser gas supplied from the gas supply duct using the detection signal from the oxygen detector, it is possible to prevent outside air from entering the laser wind tunnel without increasing the capacity of the exhaust pump connected to the exhaust duct. This is the transmission line for the gas laser device.
（実施例）
以下、本発明のガスレーザ装置の伝送路の一実施例を図
面を参照して説明する。但し、第２図と重複する部分は
省く。(Embodiment) Hereinafter, one embodiment of the transmission path of the gas laser device of the present invention will be described with reference to the drawings. However, parts that overlap with Figure 2 are omitted.
第１図において、窓ダクト３の中央部内側のほぼレーザ
光の集束部には、環状のオリフス板４ｃが設けられ、窓
ダクト３の下面には、オリフス板４ｃとその右側のオリ
フス板４ｂ間にガス供給ダクト７が接続され、このガス
供給ダクト７の下部には、電磁弁７を介してレーザガス
ボンベ９が接続されている。そして、窓ダクト３のオリ
フス４ｂと４ｃ間には、酸素検出器ＩＯが取付られ、こ
の酸素検出器ＩＯの検出信号線１０ａは電磁弁８を駆動
する電磁弁駆動装置１１の入力端に接続され、この電磁
弁駆動装置１１の出力側は電磁弁８に接続されている。In FIG. 1, an annular orifice plate 4c is provided almost at the laser beam convergence part inside the central part of the window duct 3, and an annular orifice plate 4c is provided on the lower surface of the window duct 3 between the orifice plate 4c and the orifice plate 4b on the right side thereof. A gas supply duct 7 is connected to the gas supply duct 7 , and a laser gas cylinder 9 is connected to the lower part of the gas supply duct 7 via a solenoid valve 7 . An oxygen detector IO is installed between the orifices 4b and 4c of the window duct 3, and a detection signal line 10a of the oxygen detector IO is connected to the input end of a solenoid valve driving device 11 that drives the solenoid valve 8. , the output side of this electromagnetic valve drive device 11 is connected to the electromagnetic valve 8.
このような構成のガスレーザ装置の伝送路において、今
、レーザガスボンベ９から少量のレーザガスを出しなが
ら真空ポンプ６を起動すると、窓ダクト３内の圧力は排
気ダクト５の接続部が最低となって、図示しない加工ヘ
ッドの方から侵入した外気がオリフス板４ｃより中に入
ることはない。In the transmission path of the gas laser device having such a configuration, if the vacuum pump 6 is started while discharging a small amount of laser gas from the laser gas cylinder 9, the pressure inside the window duct 3 will be the lowest at the connection part of the exhaust duct 5. Outside air entering from the processing head (not shown) does not enter through the orifice plate 4c.
更に、レーザガスボンベ９内の圧力の低下で、もし、外
気がオリフス板４ｃよりも内部に入っても、酸素検出器
１０の検出信号により電磁弁駆動装置１１で電磁弁１１
の開き角度を拡げることで対応することができる。Furthermore, even if outside air enters the inside of the laser gas cylinder 9 through the orifice plate 4c due to a decrease in the pressure inside the laser gas cylinder 9, the solenoid valve drive device 11 operates the solenoid valve 11 according to the detection signal of the oxygen detector 10.
This can be addressed by widening the opening angle.
この結果、排気ポンプ６の容量を減らすことができるだ
けでなく、レーザガスボンベ９からのレーザガスの供給
量もボンベ内の圧力の変化に対応して必要最小限に抑え
ることができる。As a result, not only can the capacity of the exhaust pump 6 be reduced, but also the amount of laser gas supplied from the laser gas cylinder 9 can be suppressed to the necessary minimum in response to changes in the pressure inside the cylinder.
なお上記実施例において、オリフス板４ａ、４ｂ、４ｃ
は内径も同径となっているが、中央のオリフス板４ｃの
内径はレーザ光の集束径に会わせて最小限にしてもよい
。そのときは窓ダクト３内の排気ダクト５の結合部とガ
ス供給ダクト７の結合部との圧力比を上げることができ
るので更に効果がある。In the above embodiment, the orifice plates 4a, 4b, 4c
The inner diameter of the center orifice plate 4c is also the same, but the inner diameter of the central orifice plate 4c may be minimized to match the focusing diameter of the laser beam. In that case, it is possible to increase the pressure ratio between the joint part of the exhaust duct 5 and the joint part of the gas supply duct 7 in the window duct 3, which is more effective.
更に上記実施例では、酸素検出器１０はオリフス板４ｂ
、４ｃの中央部に設けであるが、なるべくオリフス板４
ｃに近づけてもよい。このときは検出ガスである外部か
らの空気の通路が狭いので、検出がより容易になる利点
がある。Furthermore, in the embodiment described above, the oxygen detector 10 includes the orifice plate 4b.
, 4c, but preferably located at the center of the orifice plate 4c.
It may be closer to c. At this time, the passage of air from the outside, which is the detection gas, is narrow, so there is an advantage that detection becomes easier.
〔発明の効果〕
以上、本発明によれば、ガスレーザ発振器から出射され
たレーザ光を伝送する伝送路の出射口寄りに、レーザ光
を反射して伝送する一対の凹面反射鏡を設け、この凹面
反射鏡の焦点と焦点の前後にオリフス板を設け、前方の
オリフス板間に排気ダクトを接続し、後方のオリフス板
間にレーザガスボンベからレーザガスを供給するガス供
給ダクトの接続部と酸素検出器を設けて、この酸素検出
器の信号でガス供給ダクトからのレーザガス量を制御し
たので、排気ポンプの容量を増やすことなく、レーザ風
洞内への伝送路からの外気の侵入を防ぐことのできるガ
スレーザ装置の伝送路を得ることができる。[Effects of the Invention] As described above, according to the present invention, a pair of concave reflecting mirrors that reflect and transmit the laser beam are provided near the exit of the transmission line that transmits the laser beam emitted from the gas laser oscillator. An orifice plate is provided before and after the focal point of the reflector, an exhaust duct is connected between the front orifice plates, and a gas supply duct connection for supplying laser gas from a laser gas cylinder and an oxygen detector are connected between the rear orifice plates. Since the laser gas amount from the gas supply duct was controlled by the signal from this oxygen detector, it is possible to prevent outside air from entering the laser wind tunnel from the transmission path without increasing the capacity of the exhaust pump. transmission path can be obtained.
第１図は本発明のガスレーザ装置の伝送路の一実施例を
示す部分断面図、第２図は従来のガスレーザ装置の伝送
路を示す部分断面図である。
３・・・レーザ光伝送路としての窓ダクト４ａ、４ｂ、
４Ｇ・・・オリフス板
５゛・・・排気ダクト
７・・・ガス供給ダクト
８・・・電磁弁
ｌＯ・・・酸素検出器
（８７３３） 代理人 弁理士 猪 股 祥 晃（ほ
か１名）FIG. 1 is a partial sectional view showing an embodiment of the transmission path of a gas laser device of the present invention, and FIG. 2 is a partial sectional view showing a transmission path of a conventional gas laser device. 3... Window ducts 4a, 4b as laser light transmission paths,
4G...Orifice plate 5゛...Exhaust duct 7...Gas supply duct 8...Solenoid valve lO...Oxygen detector (8733) Agent: Patent attorney Yoshiaki Inomata (and 1 other person)
Claims (1)
端近傍に前記レーザ光を反射して前記伝送路の先端へ伝
送する一対の凹面反射鏡が設けられ、この凹面反射鏡間
の前記レーザ光の焦点の前後にオリフス板が設けられ、
前記レーザ光の焦点と前記前方のオリフス板間に排気ダ
クトが接続されたガスレーザ装置の伝送路において、 前記伝送路の前記レーザ光の焦点に第３のオリフス板を
設け、この第３のオリフス板と前記後方のオリフス板間
にレーザガス供給ダクトの供給口と出力側が前記レーザ
ガス供給ダクトの電磁弁に接続された酸素検出器を設け
たことを特徴とするガスレーザ装置の伝送路。[Scope of Claims] A pair of concave reflecting mirrors are provided near the base end of a transmission path for laser light emitted from a gas laser oscillator, and reflect the laser beam and transmit it to the tip of the transmission path. an orifice plate is provided before and after the focal point of the laser beam between;
In a transmission path of a gas laser device in which an exhaust duct is connected between the focal point of the laser beam and the front orifice plate, a third orifice plate is provided at the focal point of the laser beam of the transmission path, and the third orifice plate A transmission path for a gas laser apparatus, characterized in that an oxygen detector is provided between the rear orifice plate and the supply port and output side of the laser gas supply duct are connected to the solenoid valve of the laser gas supply duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63314849A JP2607653B2 (en) | 1988-12-15 | 1988-12-15 | Transmission path of gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63314849A JP2607653B2 (en) | 1988-12-15 | 1988-12-15 | Transmission path of gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02161788A true JPH02161788A (en) | 1990-06-21 |
| JP2607653B2 JP2607653B2 (en) | 1997-05-07 |
Family
ID=18058351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63314849A Expired - Lifetime JP2607653B2 (en) | 1988-12-15 | 1988-12-15 | Transmission path of gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2607653B2 (en) |
-
1988
- 1988-12-15 JP JP63314849A patent/JP2607653B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2607653B2 (en) | 1997-05-07 |
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