JPH02152010A - Perpendicular magnetic recording medium - Google Patents
Perpendicular magnetic recording mediumInfo
- Publication number
- JPH02152010A JPH02152010A JP30655088A JP30655088A JPH02152010A JP H02152010 A JPH02152010 A JP H02152010A JP 30655088 A JP30655088 A JP 30655088A JP 30655088 A JP30655088 A JP 30655088A JP H02152010 A JPH02152010 A JP H02152010A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- recording medium
- substrate
- magnetic recording
- perpendicular magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 230000003746 surface roughness Effects 0.000 claims abstract description 12
- 229910000684 Cobalt-chrome Inorganic materials 0.000 claims abstract description 7
- 239000010952 cobalt-chrome Substances 0.000 claims abstract description 7
- 230000005415 magnetization Effects 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 28
- 239000002344 surface layer Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 230000001939 inductive effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229910015269 MoCu Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、垂直磁気記録方式の特に固定ディスクに用
いる垂直磁気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a perpendicular magnetic recording medium used in a perpendicular magnetic recording system, particularly a fixed disk.
［従来の技術］
従来より垂直磁気記録媒体としては、例えば刊行物（東
北大通研シンポジウムＰＰ１７７〜１８７（１９８２）
）に、ＣｏＣｒをその記録層とし、下地層として軟磁性
層を用いた媒体が提案されている。その出力は、媒体中
のいかなる場所でも均一した大きさであることが望まし
く、特に同一半径上にある同一トラック上の出力変動は
極力押え込む必要がある。[Prior Art] Conventionally, as a perpendicular magnetic recording medium, for example, a publication (Tohoku University Research Symposium PP177-187 (1982)
), a medium using CoCr as its recording layer and a soft magnetic layer as an underlayer has been proposed. It is desirable that the output is uniform in magnitude anywhere on the medium, and in particular, it is necessary to suppress output fluctuations on the same track located on the same radius as much as possible.
第４図は、磁気記録媒体における一般的な１回転（−周
）中の出力変動を示す特性図（エンベロープ）であり、
横軸は磁気記録媒体の同一トラック中の位置を示す角度
（ｄｅｇ）、縦軸はその出力（相対値）である。−層中
の出力の最大値をｍ ａ ｘ、最小値をｍ ｉ ｎとす
ると変動率ηは
ｒ７ ＝（ｗａｘｌｉｎ）／（ｍａｘ＋ｍ１ｎ）ｘｌｏ
ｏ ％で表すことができる。ｍ ａ ｘ ＝＝ ｍ
ｉ ｎの時η＝０で最も良好である。さて、この出力変
動（エンベロープ）は、例えば刊行物（ＪＭＭＭ Ｐ
Ｐ５４〜５７（１９８６） ）に示されているように、
垂直二媒体の場合には下地層の軟磁性層のトラック方向
の磁気特性の不均一性によるものが大きいとされている
。FIG. 4 is a characteristic diagram (envelope) showing output fluctuations during one general rotation (-round) in a magnetic recording medium,
The horizontal axis is the angle (deg) indicating the position in the same track of the magnetic recording medium, and the vertical axis is the output (relative value). - If the maximum value of the output in the layer is max and the minimum value is min, the fluctuation rate η is r7 = (waxlin) / (max + m1n) xlo
o It can be expressed as %. m a x == m
When i n, η=0 is the best. Now, this output fluctuation (envelope) can be calculated from, for example, the publication (JMMM P
P54-57 (1986)),
In the case of perpendicular dual media, it is said that the non-uniformity of the magnetic properties of the soft magnetic layer of the underlayer in the track direction is a major factor.
そのため従来は、款磁性層成膜時に基板回転を行ってい
た。Conventionally, therefore, the substrate was rotated during the deposition of the magnetic layer.
［発明が解決しようとする課題］
しかしながら、従来の方法ではある程度出力変動は改善
されるがまだ充分ではない。すなわち、第２図は、この
発明の実施例の垂直磁気記録媒体の保持力変動と従来の
ものを比較する保持力変動を示す特性図であり、横軸は
磁気記録媒体の同一トラック中の位置を示す角度（ｄｅ
ｇ）、縦軸はトラック方向保持力Ｈｅ（Ｏｅ）である。[Problems to be Solved by the Invention] However, although the conventional method improves the output fluctuation to some extent, it is still not sufficient. That is, FIG. 2 is a characteristic diagram showing the coercive force variation of the perpendicular magnetic recording medium according to the embodiment of the present invention and the conventional one, and the horizontal axis represents the position in the same track of the magnetic recording medium. An angle (de
g), the vertical axis is the track direction holding force He (Oe).
図において、（Ａ）は基板として表面硬化層の表面粗度
的２０スの通常のポリッシュ基板を用い、ＭｏＣｕ合金
をターゲットとして上記基板を１５ｒｐｍで回転させて
軟磁性層を成膜して得た磁気媒体の特性、 （Ｂ）は軟
磁性層成膜中基板を回転しない他は上記と同様にして得
た磁気媒体の特性である。図から解るように、軟磁性層
の成膜中に基板を回転することにより、トランク方向の
保持力（Ｈｃ ）の変動率は３８％から２７％まで改善
されただけである。なお、第３図は第２図に示した垂直
磁気記録媒体の同一トラック中の位置を示す角度の測定
方法を示す垂直磁気記録媒体の構成図であり、矢印（５
）を基準としたもので、矢印（５）はスパッタリング時
の＾ｒガス導入方向と一致している。In the figure, (A) is obtained by using an ordinary polished substrate with a hardened surface layer having a surface roughness of 20 degrees, and forming a soft magnetic layer by rotating the substrate at 15 rpm using MoCu alloy as a target. Characteristics of magnetic medium. (B) shows the characteristics of a magnetic medium obtained in the same manner as above except that the substrate was not rotated during the deposition of the soft magnetic layer. As can be seen from the figure, by rotating the substrate during the deposition of the soft magnetic layer, the variation rate of the coercive force (Hc) in the trunk direction was only improved from 38% to 27%. Note that FIG. 3 is a configuration diagram of the perpendicular magnetic recording medium showing a method of measuring the angle indicating the position in the same track of the perpendicular magnetic recording medium shown in FIG.
), and the arrow (5) coincides with the ^r gas introduction direction during sputtering.
この発明は、かかる課題を解決するためになされたもの
で、出力変動の改善された垂直磁気記録媒体を得ること
を目的とするものである。The present invention was made to solve this problem, and an object of the present invention is to obtain a perpendicular magnetic recording medium with improved output fluctuation.
［課題を解決するための手段］
この発明の垂直磁気記録媒体は、基板、この基板に設け
られた同心円状テクスチャを施した平均粗さ１００ス以
上の表面粗度を有する表面硬化層、この表面硬化層に設
けた軟磁性層、およびこの軟磁性層に設けた上記基板と
ほぼ垂直方向に磁化容易軸を有するＣｏＣｒで形成され
た記録層を備えたものである。[Means for Solving the Problems] The perpendicular magnetic recording medium of the present invention comprises: a substrate; a hardened surface layer provided on the substrate with a concentric texture and having a surface roughness of 100 squares or more; This device includes a soft magnetic layer provided as a hardened layer, and a recording layer formed of CoCr having an axis of easy magnetization substantially perpendicular to the substrate provided on the soft magnetic layer.
［作用］
この発明において、テクスチャが同心円状であるためト
ラック方向に誘導磁気異方性がつき、その為トラック方
向の保持力の変動が低減される。[Function] In the present invention, since the texture is concentric, induced magnetic anisotropy occurs in the track direction, and therefore fluctuations in the holding force in the track direction are reduced.
［実施例コ
第１図はこの発明の一実施例の垂直磁気記録媒体の新面
図である。図において、（Ｉ）は基板、（２）は表面硬
化層、（３）は軟磁性層、（４）は記録層である。Embodiment FIG. 1 is a new view of a perpendicular magnetic recording medium according to an embodiment of the present invention. In the figure, (I) is a substrate, (2) is a hardened surface layer, (3) is a soft magnetic layer, and (4) is a recording layer.
実施例
表面硬化層（２）を有する基板（１）に周知のテクスチ
ャ方法で同心円状にテクスチャを施す。その表面粗度は
２００スと６００スとした。次に公知のスパッタリング
技術によりＭｏＭに合金をターゲットとしてＭｏＭに合
金の軟磁性ＦＪ （３）を０．５μｍを設け、つぎに公
知のスパッタリング方法によりＣｏ８２Ｃｒ１８合金を
ターゲットとしてＣｏＣｒ層の記録Ｎ（４）を０．３μ
ＩＩ＋設けこの発明の実施例の垂直磁気記録媒体を得た
。又第２図の（Ｃ）および（Ｄ）は、各々表面粗度が２
００＾および６００スの表面硬化層を用いた時のこの発
明の実施例の垂直磁気記録媒体の保持力変動を示す特性
を示す。第２図から解るように、この発明の実施例の垂
直磁気記録媒体のトラック方向の保持力の変動はほとん
ど無く、その保持力Ｈｅは０．２０ｅ未満であり、従来
のポリッシュ基板を用いた場合（Ａ）（Ｂ）と比較して
も著しく高い値ではない。EXAMPLE A substrate (1) having a surface hardening layer (2) is textured concentrically by a known texturing method. The surface roughness was 200s and 600s. Next, a 0.5 μm thick soft magnetic FJ (3) of the alloy is provided on the MoM using a known sputtering technique using an alloy as a target, and then a CoCr layer is recorded using a Co82Cr18 alloy as a target using a known sputtering method. 0.3μ
A perpendicular magnetic recording medium according to an embodiment of the present invention was obtained by providing II+. In addition, (C) and (D) in Fig. 2 each have a surface roughness of 2.
2 shows the characteristics showing the coercive force fluctuation of the perpendicular magnetic recording medium according to the embodiment of the present invention when using a hardened surface layer of 00^ and 600s. As can be seen from FIG. 2, there is almost no variation in the coercive force in the track direction of the perpendicular magnetic recording medium according to the embodiment of the present invention, and the coercive force He is less than 0.20e, and when a conventional polished substrate is used. Even when compared with (A) and (B), it is not a significantly high value.
次に、上記この発明の実施例および従来の垂直磁気記録
媒体を単ａｐｉ型ヘッドを用いて測定したところ、その
エンベロープは第５図（ａ）、 （ｂ）および（Ｑ）
となった。即ち、 （ａ）は通常のポリッシュ基板を用
いた場合、 （ｂ）および（ｃ）は各々上記この発明の
実施例の表面硬化層が２００大および６００大の同心円
状テクスチャを施した場合のエンベロープであり、それ
によると（ａ）の場合はη＝３４％、 （ｂ）の場合は
η＝３％、 （ｃ）はη二６％である。以上のことから
、表面硬化層の表面粗度が１００ス以上で従来より垂直
磁気記録媒体の出力変動が小さくなるのが解るが、第５
図（Ｃ）から表面粗度が８００スの表面硬化層を用いた
時は、その出力変動がギザギザとなるため、最も望まし
い表面硬化層の表面粗度は、１００〜４００スであるこ
とが解る。Next, when the above-mentioned embodiment of the present invention and the conventional perpendicular magnetic recording medium were measured using a single API type head, the envelopes were as shown in FIGS. 5(a), (b) and (Q).
It became. That is, (a) is the envelope when a normal polished substrate is used, (b) and (c) are the envelopes when the surface hardened layer of the above embodiment of the present invention has a concentric texture of 200 and 600, respectively. According to this, in case (a), η=34%, in case (b), η=3%, and in (c), η26%. From the above, it can be seen that when the surface roughness of the hardened surface layer is 100 degrees or more, the output fluctuation of the perpendicular magnetic recording medium becomes smaller than that of the conventional one.
From Figure (C), it can be seen that when a surface hardened layer with a surface roughness of 800s is used, the output fluctuation becomes jagged, so the most desirable surface roughness of the surface hardened layer is 100 to 400s. .
［発明の効果］
以上説明したとうり、この発明は基板、この基板に設け
られた同心円状テクスチャを施した平均粗さ１００ス以
上の表面粗度を有する表面硬化層、この表面硬化層に設
けた軟磁性層、およびこの軟磁性層に設けた上記基板と
ほぼ垂直方向に磁化容易易軸を有するＣｏＣｒで形成さ
れた記録層を備えたものである。[Effects of the Invention] As explained above, the present invention provides a substrate, a hardened surface layer provided on the substrate with a concentric texture and having a surface roughness of 100 squares or more, and a hardened surface layer provided on the hardened surface layer. A recording layer formed of CoCr and having an easy axis of magnetization in a direction substantially perpendicular to the substrate is provided on the soft magnetic layer.
第１図はこの発明の一実施例の垂直磁気記録媒体の所面
図、第２図は、この発明の実施例の垂直磁気記録媒体の
保持力変動と従来のものを比較する保持力変動を示す特
性図、第３図は垂直磁気記録媒体の同一トラック中の位
置を示す角度の測定方法を示す垂直磁気記録媒体の構成
図、第４図は、磁気記録媒体における一般的な１回転（
−周）中の出力変動を示す特性図、第５図（、）〜（ｃ
）はこの発明の実施例および従来の垂直磁気記録媒体を
単磁極型ヘッドを用いて測定したそのエンベロープであ
る。
図において、（１）は基板、（２）は表面硬化層、（３
）は軟磁性層、（４）は記９層である。Fig. 1 is a top view of a perpendicular magnetic recording medium according to an embodiment of the present invention, and Fig. 2 shows a coercive force variation comparing the coercive force variation of the perpendicular magnetic recording medium according to the embodiment of the present invention with a conventional one. 3 is a configuration diagram of a perpendicular magnetic recording medium showing a method for measuring angles indicating positions in the same track of a perpendicular magnetic recording medium. FIG. 4 is a typical one-rotation (
- Characteristic diagram showing output fluctuation during cycle), Figure 5 (,) to (c
) is an envelope measured using a single magnetic pole head for an embodiment of the present invention and a conventional perpendicular magnetic recording medium. In the figure, (1) is the substrate, (2) is the surface hardening layer, and (3) is the substrate.
) is a soft magnetic layer, and (4) is the ninth layer.
Claims (1)
た平均粗さ１００Å以上の表面粗度を有する表面硬化層
、この表面硬化層に設けた軟磁性層、およびこの軟磁性
層に設けた上記基板とほぼ垂直方向に磁化容易軸を有す
るＣｏＣｒで形成された記録層を備えた垂直磁気記録媒
体。A substrate, a surface hardened layer provided on this substrate with a concentric texture and having a surface roughness of 100 Å or more, a soft magnetic layer provided on this hardened surface layer, and the above substrate provided on this soft magnetic layer. A perpendicular magnetic recording medium comprising a recording layer made of CoCr and having an axis of easy magnetization in a direction substantially perpendicular to .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30655088A JPH02152010A (en) | 1988-12-02 | 1988-12-02 | Perpendicular magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30655088A JPH02152010A (en) | 1988-12-02 | 1988-12-02 | Perpendicular magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02152010A true JPH02152010A (en) | 1990-06-12 |
Family
ID=17958390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30655088A Pending JPH02152010A (en) | 1988-12-02 | 1988-12-02 | Perpendicular magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02152010A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG116496A1 (en) * | 2002-07-27 | 2005-11-28 | Samsung Electronics Co Ltd | Perpendicular magnetic recording media. |
-
1988
- 1988-12-02 JP JP30655088A patent/JPH02152010A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG116496A1 (en) * | 2002-07-27 | 2005-11-28 | Samsung Electronics Co Ltd | Perpendicular magnetic recording media. |
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