JPH021493U - - Google Patents
Info
- Publication number
- JPH021493U JPH021493U JP7770888U JP7770888U JPH021493U JP H021493 U JPH021493 U JP H021493U JP 7770888 U JP7770888 U JP 7770888U JP 7770888 U JP7770888 U JP 7770888U JP H021493 U JPH021493 U JP H021493U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- casing
- lubricant supply
- supply box
- lubricant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000314 lubricant Substances 0.000 claims description 8
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図ａ及び第１図ｂは本考案の一実施例を示
すターボ分子ポンプの軸受剤置の断面図、第２図
は従来のターボ分子ポンプの軸受装置の断面図で
ある。
１……ケーシング、２……回転軸、３……ころ
がり軸受、４……軸受ハウジング、５……弾性ゴ
ム、６……バネ、８……潤滑剤供給箱、９……潤
滑剤、１０……ピストン、１２……圧電素子、１
３……供給孔。
1a and 1b are sectional views of a bearing device of a turbo-molecular pump showing an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional bearing device of a turbo-molecular pump. DESCRIPTION OF SYMBOLS 1...Casing, 2...Rotating shaft, 3...Rolling bearing, 4...Bearing housing, 5...Elastic rubber, 6...Spring, 8...Lubricant supply box, 9...Lubricant, 10... ... Piston, 12 ... Piezoelectric element, 1
3... Supply hole.
Claims (1)
転軸を回転自在に支承する軸受と、この軸受の外
周に嵌合しケーシング内周とは所定の間隙を配し
た軸受ハウジングと、この軸受ハウジングとケー
シングとにより形成される間隙に軸方向に離間し
て配置した一対の弾性体とを備えた軸受装置にお
いて、前記ケーシングにその一端が前記軸受の上
方で開口する潤滑剤の供給穴を形成し、この供給
穴に連通する油潤剤供給箱を設け、この油潤剤供
給箱内に潤滑剤を押圧するピストンと潤滑剤の流
出量を調整する圧電素子を配設したことを特徴と
するターボ分子ポンプの軸受装置。 A casing, a bearing disposed within the casing and rotatably supporting a rotating shaft, a bearing housing that fits on the outer circumference of the bearing and is spaced apart from the inner circumference of the casing by a predetermined distance, and the bearing housing and the casing. A bearing device comprising a pair of elastic bodies disposed axially apart from each other in a gap formed therein, wherein a lubricant supply hole is formed in the casing, one end of which opens above the bearing, and the supply hole A bearing for a turbo molecular pump, characterized in that an oil lubricant supply box communicating with the oil lubricant supply box is provided, and a piston for pressing the lubricant and a piezoelectric element for adjusting the outflow amount of the lubricant are arranged in the oil lubricant supply box. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7770888U JPH021493U (en) | 1988-06-14 | 1988-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7770888U JPH021493U (en) | 1988-06-14 | 1988-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021493U true JPH021493U (en) | 1990-01-08 |
Family
ID=31302674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7770888U Pending JPH021493U (en) | 1988-06-14 | 1988-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021493U (en) |
-
1988
- 1988-06-14 JP JP7770888U patent/JPH021493U/ja active Pending