JPH02141283A - Optical recording medium - Google Patents
Optical recording mediumInfo
- Publication number
- JPH02141283A JPH02141283A JP63295570A JP29557088A JPH02141283A JP H02141283 A JPH02141283 A JP H02141283A JP 63295570 A JP63295570 A JP 63295570A JP 29557088 A JP29557088 A JP 29557088A JP H02141283 A JPH02141283 A JP H02141283A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- recording film
- film
- pit
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 15
- 239000000956 alloy Substances 0.000 claims abstract description 15
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 26
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 17
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 74
- 239000010410 layer Substances 0.000 description 42
- 230000035945 sensitivity Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- -1 Te and Se Chemical class 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910001370 Se alloy Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B7/2433—Metals or elements of Groups 13, 14, 15 or 16 of the Periodic Table, e.g. B, Si, Ge, As, Sb, Bi, Se or Te
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B7/2572—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of organic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は光（たとえばレーザ光）を照射することにより
情報の記録および再生を行う光学記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an optical recording medium that records and reproduces information by irradiating it with light (eg, laser light).
［従来の技術〕
レーザ光によって情報の記録および再生を行う光学記録
媒体は、半導体レーザ、記録材料および成膜方法などの
基本技術の向上と、大容量記録が可能であるという特徴
により、最近急速に実用化の道が開かれてきた。上記光
学記録媒体の記録方法としては、レーザ光の照射による
熱エネルギーによって、（１）記録膜を変形してビット
（穴または凹部）またはバブル（***部）を形成する方
法、（２）記録膜の相変化により反射率等の光学的性質
を変化させる方法などが提案されている。[Prior Art] Optical recording media, which record and reproduce information using laser light, have been rapidly increasing in recent years due to improvements in basic technologies such as semiconductor lasers, recording materials, and film-forming methods, as well as the ability to record large amounts of data. The path to practical application has been opened. Recording methods for the above-mentioned optical recording medium include (1) a method of deforming the recording film to form bits (holes or recesses) or bubbles (protrusions) using thermal energy generated by laser beam irradiation; Methods have been proposed in which optical properties such as reflectance are changed by phase change.
略構成を第６図に示す。第６図において、プラスデック
等の基板１１の表面に、ＴｅやＳｅ等を主成分とした記
録膜１２を設け、集束レーザ光により局部的に上記記録
膜を溶融除去してピット１３を形成し、これにより情報
の記録を行い、再生時には、このピットの有無をレーザ
光の反射強度の違いによって検出する。A schematic configuration is shown in FIG. In FIG. 6, a recording film 12 mainly composed of Te, Se, etc. is provided on the surface of a substrate 11 such as a Plus Deck, and pits 13 are formed by locally melting and removing the recording film using a focused laser beam. This records information, and during reproduction, the presence or absence of these pits is detected by the difference in the reflected intensity of the laser beam.
ここで、上記集束レーザ光が当たった記録膜のごく一部
に熱運動による穴かあき、表面張力によれて、上記ピッ
トは形成される。Here, the pits are formed due to hole formation due to thermal movement and surface tension in a small portion of the recording film that is irradiated with the focused laser beam.
一方、記録膜が変形してバブルが形成されることにより
記録される光学記録媒体には、（イ）分解ガス発生層を
積層するもの（たとえば特開昭５６−１２７９３７号）
、（ロ）金属層がガス発生層となるもの（たとえば特開
昭５８−７１１９４号、特開昭６１−１７８７４２号）
、（八）基板がガス発生層となるもの等がある。On the other hand, optical recording media in which recording is performed by deforming the recording film and forming bubbles include (a) those in which a decomposed gas generating layer is laminated (for example, JP-A-56-127937);
, (b) Those in which the metal layer serves as a gas generating layer (for example, JP-A-58-71194, JP-A-61-178742)
(8) The substrate serves as a gas generating layer.
特開昭５６−１２７９３７号の光学記録媒体は、基板上
に有機中間層、金属質光吸収層を順に形成しており、金
属質光吸収層の局部加熱により有機中間層も加熱し、有
機中間層から発生するガスにより金属質光吸収層を***
させバブルを形成する。The optical recording medium disclosed in JP-A-56-127937 has an organic intermediate layer and a metallic light-absorbing layer formed in this order on a substrate, and the organic intermediate layer is also heated by local heating of the metallic light-absorbing layer. The gas generated from the layer causes the metallic light absorption layer to bulge and form bubbles.
特開昭５８−７１１９４号には、低融点金属を含むエネ
ルギー吸収膜が基板上に設けられており、上記エネルギ
ー吸収膜が記録のための光を吸収して***することによ
りバブルか形成される光学記録媒体が示されている。In JP-A-58-71194, an energy absorbing film containing a low melting point metal is provided on a substrate, and bubbles are formed when the energy absorbing film absorbs recording light and bulges. An optical recording medium is shown.
まｒ二特開昭６１−１７８７．４２号の光学記録媒体は
、基板上に金属炭化物マトリクス中に金属微粒子及び有
機物を分散させた記録膜を有しており、金属微粒子の吸
収熱により有機物が加熱されてガスを発生し、上記記録
膜にバブルが形成される。The optical recording medium disclosed in JP-A-61-1787.42 has a recording film on a substrate in which fine metal particles and organic matter are dispersed in a metal carbide matrix, and the organic matter is absorbed by the heat absorbed by the fine metal particles. When heated, gas is generated and bubbles are formed in the recording film.
し発明か解決しようとする課題］
ところが、上記ピットを形成する光学記録媒体では、ピ
ットの形成がリムと称されろピット周辺の肉盛り１４の
生成を伴い再生信号のＣＮＲ（キャリア・ノイズ比）を
低下させる問題がある。しかも上記リム形状は必ずしも
一様ではなく、記録膜が不均一に凝固したｉリムか形成
されろとＣＮＲはさらに低下する。このためＰｂ、 Ｂ
ｉ等の元素を添カ目してピットの形状を改善する試みが
なされているが、やはりビットエツジは不鮮明になりや
すく、マーク長５己録（こは適さない。However, in the optical recording medium in which the pits are formed, the formation of the pits is accompanied by the generation of a build-up 14 around the pits, which reduces the CNR (carrier-to-noise ratio) of the reproduced signal. There is a problem that reduces the Moreover, the shape of the rim is not necessarily uniform, and if an i-rim is formed in which the recording film is non-uniformly solidified, the CNR will further decrease. Therefore, Pb, B
Attempts have been made to improve the shape of pits by adding elements such as i, but the bit edges tend to become unclear, and a mark length of 5 mm is not suitable.
一方、上記バブルを形成する光学記録媒体は、ピットを
形成するものに比べて記録部のエツジは安定するが、記
録感度は劣っていた。また記録部の反射率が上昇するも
のが多く、高反射率を有する光学記録媒体に高コントラ
ストで記録ずろことは困難であった。On the other hand, in the optical recording medium in which bubbles are formed, the edges of the recording portion are more stable than those in which pits are formed, but the recording sensitivity is inferior. In addition, in many cases, the reflectance of the recording portion increases, making it difficult to record with high contrast on an optical recording medium having a high reflectance.
この発明は、上記課題に鑑みてなされたしので、基板に
記録膜が形成され、所定の波長領域の光を強く吸収して
、該先によって、記録膜に反射率の低いピットを形成す
ることによってデータが書き込まれる光学記録媒体にお
いて、高コントラストの記録が行われ、かつ、ピットエ
ツジが安定しており、マーク長記録の行える光学記録媒
体を提供することを目的としている。This invention has been made in view of the above-mentioned problems.The present invention has been developed by forming a recording film on a substrate, strongly absorbing light in a predetermined wavelength range, and forming pits with low reflectance on the recording film. An object of the present invention is to provide an optical recording medium on which data is written by a method, on which high-contrast recording is performed, pit edges are stable, and mark length recording is possible.
［課題を解決するための手段］
上記の目的を達成するために、この出願の請求項（１）
の光学記録媒体は、基板と記録膜とを有し、上記記録膜
に光を照射することによって記録膜を変形して情報を記
録する光学記録媒体において、上記記録膜が延性の大き
な金属あるいは合金を含み、上記光照射によって上記記
録膜は弾性限度を超えて膨張変形し、かつ、変形部の頂
上は破壊限度を超えて欠損することにより情報が記録さ
れていることを特徴とする
請求項（２）の発明は請求項（１）において、上記基板
上にフロロカーボンを含む中間層が形成されており、上
記記録膜は上記フロロカーボン中間層上に形成されてい
ることを特徴とする光学記録媒体である。[Means for solving the problem] In order to achieve the above object, claim (1) of this application
The optical recording medium has a substrate and a recording film, and records information by deforming the recording film by irradiating the recording film with light, in which the recording film is made of a highly ductile metal or alloy. Claim characterized in that the recording film expands and deforms beyond its elastic limit due to the light irradiation, and information is recorded by the top of the deformed portion being damaged beyond its destructive limit ( The invention of 2) is an optical recording medium according to claim 1, wherein an intermediate layer containing fluorocarbon is formed on the substrate, and the recording film is formed on the fluorocarbon intermediate layer. be.
請求項（３）の光学記録媒体は上記記録膜にＡｕを含ん
でいろ。In the optical recording medium according to claim (3), the recording film may contain Au.
第１図ないし第３図、第４図および第５図はこの発明の
光学記録媒体にピットが形成される様子を示す概略断面
図である。上記光学記録媒体では基板１上に記録膜２が
形成されている。なお、ここではフロロカーボン中間層
５を設けた光学記録媒体を示している。この光学記録媒
体に基板側から記録のための光（レーザ光）を照射する
と記録膜２が加熱されて塑性変形し、第２図または第４
図に示す空隙６が形成される。記録時にさらに加熱され
ると上記空隙６の頂上が吹き飛び、第３図または第５図
に示すようにピット（穴部）７が形成される。1 to 3, FIG. 4, and FIG. 5 are schematic cross-sectional views showing how pits are formed in the optical recording medium of the present invention. In the above optical recording medium, a recording film 2 is formed on a substrate 1. Note that an optical recording medium provided with a fluorocarbon intermediate layer 5 is shown here. When this optical recording medium is irradiated with recording light (laser light) from the substrate side, the recording film 2 is heated and plastically deformed, as shown in FIG.
A void 6 shown in the figure is formed. When the recording material is further heated during recording, the top of the void 6 is blown off, and a pit (hole) 7 is formed as shown in FIG. 3 or FIG. 5.
この発明の光学記録媒体において上記記録膜は第１図な
いし第３図の概略断面図に示すように多層膜であってら
、第４図または第５図の概略断面図に示すように単層膜
であっても良い。ここで、記録膜が多層である場合は、
記録のための光の照射側である基板側にある第１の層３
に延性の大きな金属あるいは合金を含むことが好ましい
。この場合、第１の層上に積層された第２の層４は低融
点物質であると書き込み感度が高くなるので好適である
。上記低融点物質としてはＴｅ、 Ｓｅ等の単金属、Ｔ
ｅ−３ｅまたはこれらとＢｉとの合金が好ましい。In the optical recording medium of the present invention, the recording film is a multilayer film as shown in the schematic cross-sectional views of FIGS. 1 to 3, and a single-layer film as shown in the schematic cross-sectional views of FIGS. It may be. Here, if the recording film is multilayer,
A first layer 3 on the substrate side, which is the side on which light is irradiated for recording.
It is preferable that the metal or alloy contains a highly ductile metal or alloy. In this case, it is preferable that the second layer 4 laminated on the first layer is made of a low melting point material because the writing sensitivity will be high. The above-mentioned low melting point substances include single metals such as Te and Se, T
e-3e or an alloy of these and Bi is preferred.
なお上記延性の大きな金属としてはＡｕ、 ＰｔＳＡｇ
およびＣｕ等が挙げられる。Note that the metals with high ductility include Au and PtSAg.
and Cu.
一方、記録膜が単層である場合は、上記延性の大きな金
属あるいはその合金からなる記録膜であってら良（、ま
たは上記低融点物質等の膜中に上記延性の大きな金属を
分散させてら良い。この場合は延性の大きな金属の濃度
は記録のための光の照射側である基板側が高く、記録膜
の深さ方向に向かって低くなるような濃度勾配をらっで
分散されていることが好ましい。ここで、上記延性の大
きな金属の濃度は、基板側表面では３０原子数パ一セン
ト以上であるのが良い。そして、基板側から記録膜表面
側に向かって膜厚が増加するにつれて上記濃度は急激に
低下し、記録膜の全膜厚の略ｌ／２よりも記録膜表面側
では上記濃度はＯであるのが良い。なお、この出願にお
ける濃度とは、ＥＳＣＡ法により上記記録膜の深さ方向
の組成分析を行った結果書られる値である。On the other hand, when the recording film is a single layer, it is preferable that the recording film is made of the above-mentioned highly ductile metal or its alloy (or it is preferable that the above-mentioned highly ductile metal is dispersed in the film of the above-mentioned low melting point substance, etc.). In this case, the concentration of the highly ductile metal is high on the substrate side, which is the side irradiated with light for recording, and is dispersed through a concentration gradient that decreases toward the depth of the recording film. Preferably. Here, the concentration of the highly ductile metal is preferably 30 atomic percent or more on the substrate side surface.Then, as the film thickness increases from the substrate side to the recording film surface side, the above-mentioned concentration increases. The concentration rapidly decreases, and it is preferable that the above concentration is O at the surface side of the recording film from approximately 1/2 of the total film thickness of the recording film. This is the value written as a result of the composition analysis in the depth direction.
この出願の光学記録媒体はフロロカーボン中間層５を設
けることができる。上記フロロカーホン中間層を設ける
と記録ピット形状かさらに均一化し、記録の際の高感度
化が達成されろ。ＥＳＣＡ法による分析から得られる、
上記フロロカーホン層におけるＦの含有量は、Ｆ／（Ｆ
十Ｃ）Ｘ１００で表されるＦの原子数パーセントか４０
％以上６５％以下であれば良い。この範囲を越え、Ｆが
少なすぎると、記録ピットの均一化および記録の際の高
感度化といつに効果が薄れ、逆に多すぎると、中間層と
記録膜との密着性が悪くなり、記録膜がはがれ易く、ま
た記録ピットの形状制御か困難になるといった問題か生
じる。The optical recording medium of this application can be provided with a fluorocarbon intermediate layer 5. By providing the fluorocarbon intermediate layer, the shape of the recording pits becomes more uniform, and higher sensitivity during recording can be achieved. Obtained from analysis using the ESCA method,
The F content in the fluorocarbon layer is F/(F
10C) Number of atoms of F expressed in X100 percent or 40
% or more and 65% or less. If F exceeds this range and is too small, the effect of making recording pits uniform and increasing sensitivity during recording will be diminished, while if it is too large, the adhesion between the intermediate layer and the recording film will deteriorate. Problems arise in that the recording film is likely to peel off and it becomes difficult to control the shape of the recording pits.
上記延性の大きな金属としてＡｕ元素を用いると、Ａｕ
元素は合成樹脂基板やフロロカーボン中間層との密着性
が低いために、高い記録感度が得られるので好ましい。When Au element is used as the metal with high ductility, Au
Elements are preferable because they have low adhesion to the synthetic resin substrate and the fluorocarbon intermediate layer, so high recording sensitivity can be obtained.
フロロカーボン中間層を設け、上記中間層上にＡｕを含
む記録膜を設けた場合、フロロカーボン中間層と上記記
録膜との界面部分におけるＡｕの濃度が３０原子数パ一
セント以上、より好ましくは７０原子数パ一セント以上
であるのが良い。When a fluorocarbon intermediate layer is provided and a recording film containing Au is provided on the intermediate layer, the concentration of Au at the interface between the fluorocarbon intermediate layer and the recording film is 30 atomic percent or more, more preferably 70 atoms. It is better if it is more than a few percentage points.
上記Ａｕの濃度が３０原子数パ一セント未満であると、
記録膜が溶融して表面張力によって広がることにより、
ピットが形成されてしまうので好ましくない。なお上記
Ａｕを含む記録膜は多層記録膜の上記第１の層がＡｕを
含んでいても良く、Ａｕ元素が分散された単層記録膜で
あってもよい。When the concentration of Au is less than 30 atomic percent,
When the recording film melts and spreads due to surface tension,
This is not preferable because pits will be formed. Note that the recording film containing Au may be such that the first layer of a multilayer recording film contains Au, or may be a single layer recording film in which Au elements are dispersed.
この発明の光学記録媒体の記録膜には上記低融点物質等
を含むことができろが、特に高反射率を資するものがよ
く、レーザ光を入射したときの記録前の反射率が４０％
以上であるしのが好ましい。Although the recording film of the optical recording medium of the present invention can contain the above-mentioned low melting point substance, it is particularly preferable to use a material that contributes to high reflectance, and the reflectance before recording when laser light is incident is 40%.
The above is preferable.
特にコンパクトディスク（ＣＤ） 、レーザーディスク
（ＬＤ）等のプレーヤーで再生するためには上記反射率
が６０％以上であることか好ましい。In particular, for playback on a player such as a compact disc (CD) or a laser disc (LD), it is preferable that the reflectance is 60% or more.
上記記録膜がこの様な反射率を何するためには元素配合
によって差はあるが、一般に５〜２００ｎｍの＠厚であ
る。In order for the recording film to have such a reflectance, it generally has a thickness of 5 to 200 nm, although it varies depending on the element composition.
本発明において記録膜の成膜方法は特に限定されろもの
ではなく、スパッタリング法、真空蒸着法、イオンブレ
ーティング法等既存の成膜方法で行うことができる。そ
して、真空蒸着法にょぢ成膜時には延性の大きな金属の
蒸着源に印加する直流パワーを徐々に小さくする、また
は、スパッタリング法によるときには延性の大きな金属
のターゲットへの印加電力パワーを徐々に小さくする等
によって、所望の濃度勾配を得ることができる。In the present invention, the method of forming the recording film is not particularly limited, and existing film forming methods such as sputtering, vacuum evaporation, and ion blating may be used. Then, when forming a film using the vacuum evaporation method, the DC power applied to the evaporation source of a highly ductile metal is gradually reduced, or when using the sputtering method, the power applied to the target of a highly ductile metal is gradually reduced. etc., a desired concentration gradient can be obtained.
また、上記フロロカーボン中間層はスパッタリング法等
を用いて形成することができる。上記フロロカーホン層
の厚さは５〜ｌｏｏｎｍ／＋（適当である。Furthermore, the fluorocarbon intermediate layer can be formed using a sputtering method or the like. The thickness of the fluorocarbon layer is 5 to 10 m/+ (appropriate).
用いられる基板としては、レーザ光を透過するのに十分
透明であれば何でも使用できる。例えば、ガラス、ポリ
エステル樹脂、ポリオレフィン樹脂、ポリアミド樹脂、
ポリカーボネイト樹脂およびポリメタクリル樹脂等の透
明性にすぐれた基板材料が使用できる。上記透明性基板
上に記録膜を形成するか、または中間層を積層して記録
膜を形成し、この記録膜上に任意の不透明性部材を貼り
合わせても良い。また、上記記録膜上に任意の透明保護
層を積層することもできる。基板の影状は円形、方形等
であっても良く、ティスフ状、カード状等であってもよ
い。上記基板は例えばトラッキング等のための案内溝の
ような凹凸を有していても良い。Any substrate can be used as long as it is transparent enough to transmit laser light. For example, glass, polyester resin, polyolefin resin, polyamide resin,
Substrate materials with excellent transparency such as polycarbonate resin and polymethacrylic resin can be used. A recording film may be formed on the transparent substrate, or a recording film may be formed by laminating an intermediate layer, and an arbitrary opaque member may be bonded onto this recording film. Furthermore, an arbitrary transparent protective layer can be laminated on the recording film. The shape of the shadow on the substrate may be circular, rectangular, etc., or may be tissue-shaped, card-shaped, etc. The substrate may have irregularities such as guide grooves for tracking and the like.
記録等のために用いるレーザ光の波長は特に限定するも
のではないが、１ＱＱＯｎＩ！１以下のものが使用に適
している。したがって現在の半導体レーザで、波長か７
５０〜８５Ｑｎｍ領域のものが、有効に使われる。The wavelength of the laser beam used for recording etc. is not particularly limited, but 1QQOnI! 1 or less are suitable for use. Therefore, with current semiconductor lasers, the wavelength is
Those in the 50-85 Qnm range are effectively used.
この場合記録時のパワーとしては、一般に１＝１５ｔｏ
ｗ程度の範囲が用いられろ。In this case, the recording power is generally 1=15to
A range of about w should be used.
［作 用］
この出願の光学記録媒体に記録のためのレーザ光を照射
すると記録膜は加熱されろ。上記記録膜には延性の大き
な金属あるいは合金が含まれているので、加熱による熱
膨張（およびガス発生等）により記録膜は空隙６を形成
して***し、弾性限度を越えて塑性変形する。そして、
***部の頂上部で記録膜の破壊限界を超えると記録膜が
欠損し、ピット（穴部）７が形成する。ここで上記記録
膜は塑性変形しているので、上記ピットの裾部８（第３
図、第５図）はカルデラ状に残存する。上記により記録
されたピットを基板側から照射する再生レーザ光により
再生するときには、裾部と基板（あるいはフロロカーボ
ン中間層）との接点部９（第３図、第５図）によりピッ
トのエツジが検出されろ。[Function] When the optical recording medium of this application is irradiated with laser light for recording, the recording film is heated. Since the recording film contains a highly ductile metal or alloy, the recording film forms voids 6 and bulges due to thermal expansion due to heating (and gas generation, etc.), and is plastically deformed beyond its elastic limit. and,
When the destruction limit of the recording film is exceeded at the top of the raised portion, the recording film is damaged and pits (holes) 7 are formed. Here, since the recording film is plastically deformed, the bottom part 8 of the pit (the third
Figure 5) remains in the shape of a caldera. When reproducing the pits recorded in the above manner using a reproducing laser beam irradiated from the substrate side, the edges of the pits are detected by the contact portion 9 (Fig. 3, Fig. 5) between the skirt and the substrate (or fluorocarbon intermediate layer). Be it.
［実施例］ 以下、実施例により本発明をより詳細に説明する。[Example] Hereinafter, the present invention will be explained in more detail with reference to Examples.
（実施例１）
記録部であるグループ部およびトラック案内溝てめろラ
ンド部を有するポリカーボネイト製透明円板上にフロロ
カーボン中間層と、Ａｕ層とＴｅ−Ｓｅ合金膜とを積層
した記録膜とをスパッタリング法によって成膜した。以
下にその成膜条件を示す。(Example 1) A recording film was prepared by laminating a fluorocarbon intermediate layer, an Au layer, and a Te-Se alloy film on a polycarbonate transparent disk having a group part, which is a recording part, a track guide groove, and a land part. The film was formed by a sputtering method. The film forming conditions are shown below.
チャンバー内を５ｘ １０−’Ｔｏｒｒまで真空引きし
、そののちＡｒガスを導入し、Ａｒガス圧を５ｘ ｔｏ
−’Ｔｏｒｒに設定した。ターゲットとしては、ポリテ
トラフロロエチレンのターゲット、Ｔｅａ。Ｓｅｔ。組
成（原子数比）の合金ターゲットおよびＡｕのターゲッ
トを用いた。まずポリテトラフロロエチレンのターゲッ
トに高周波パワーを印加し、厚さが２０ｎｍのフロロカ
ーボン薄膜を形成した。なお同じ条件で成膜したフロロ
カーボン薄膜をＥＳ ＣＡ法によって組成分析すると、
Ｆの含有量は、Ｆ／（Ｆ＋−Ｃ）ｘｌｏｏで表わされる
Ｆの原子数パーセントか４８％であった。上記７０口カ
ーボン中間層を形成したのち、Ａｕターゲットに直流パ
ワーを印加してＡｕ層（膜厚１１０人）を形成した。さ
らにＴｅ−Ｓｅ合金ターゲットに高周波パワーを印加し
てＴｅａ。Ｓｅｔ。組成（原子数比）の合金＠（４５０
人）を積層して光ディスクを得た。The inside of the chamber was evacuated to 5x 10-'Torr, then Ar gas was introduced, and the Ar gas pressure was increased to 5x to
−'Torr. As a target, a polytetrafluoroethylene target, Tea. Set. An alloy target having the same composition (atomic ratio) and an Au target were used. First, high frequency power was applied to a polytetrafluoroethylene target to form a fluorocarbon thin film with a thickness of 20 nm. Furthermore, when a fluorocarbon thin film formed under the same conditions was analyzed for its composition using the ES CA method,
The F content was 48%, which is the number percent of F atoms expressed as F/(F+-C)xloo. After forming the 70-hole carbon intermediate layer, DC power was applied to the Au target to form an Au layer (thickness: 110). Furthermore, high frequency power is applied to the Te-Se alloy target to produce Tea. Set. Alloy of composition (atomic ratio) @ (450
An optical disc was obtained by laminating the discs.
上述の方法で作成した光ディスクは高反射率を有してお
り、波１７８０ｎｎ＋の光で基板側から測定した反射率
はディスクミラ一部で６５％であった。そして、５ｍＶ
からＣＮＦＬが４５ｄＢで書き込み可能であり、最高Ｃ
ＮＲは５０ｄＢに達した。上記ディスクに線速１．４ｍ
／ｓ、書き込みパワー９ｍＷでＥＦ’Ｍ変調記録（マー
ク長記録）を行ったところ、ジッターは３０ｎｓｅｃで
あり、非常に良好な記録再生特性を得ることができた。The optical disk produced by the above method has a high reflectance, and the reflectance measured from the substrate side using 1780 nn+ light was 65% at a portion of the disk mirror. And 5mV
CNFL can be written at 45 dB from
NR reached 50dB. Linear speed 1.4m on the above disk
When EF'M modulation recording (mark length recording) was performed at a write power of 9 mW and a writing power of 9 mW, the jitter was 30 nsec, and very good recording and reproducing characteristics could be obtained.
この光ディスクは市販のＣＤプレーヤで再生可能であっ
た。なお、この実施例の光（実施例２）
実施例１と同じポリカーボネイト製透明円板上にフロロ
カーボン中間層とＴｅ−Ｓｅ合金中にＡｕ元素を濃度勾
配をつけて分散させた記録膜とをスパックリング法によ
って成膜した。以下にその成膜条件を示す。実施例１と
同様にチャンバー内を真空引きし、そののちＡｒガスを
導入し、Ａｒガス圧を５Ｘ １０−’Ｔｏｒｒに設定し
た。ターゲットとしては、ポリテトラフロロエチレンの
ターゲット、Ｔｅａ。Ｓｅ、。This optical disc could be played on a commercially available CD player. The light of this example (Example 2) was spun on the same polycarbonate transparent disk as in Example 1, with a fluorocarbon intermediate layer and a recording film in which Au elements were dispersed in a Te-Se alloy with a concentration gradient. The film was formed by the ring method. The film forming conditions are shown below. The inside of the chamber was evacuated in the same manner as in Example 1, and then Ar gas was introduced, and the Ar gas pressure was set at 5×10 −′ Torr. As a target, a polytetrafluoroethylene target, Tea. Se,.
組成（原子数比）の合金ターゲットおよびＡｕのターゲ
ットを用いた。まずポリテトラフロロエチレンのターゲ
ットに高周波パワーを印加し、厚さが２０ｎｍのフロロ
カーボン薄膜を形成した。なお同じ条件で成膜したフロ
ロカーボン薄膜では、Ｆ／（Ｆ＋Ｃ）ＸＩＯＩＩで表わ
される上記Ｆの原子数パーセントが５７％であった。上
記フロロカーボン中間層を形成したのちＴｅ−５ｅ合金
ターゲットに高周波パワー、Ａｕターゲットに直流パワ
ーをそれぞれ印加してＴｅ−３ｅ層中にＡｕ元素が分散
された記録膜を得た（膜厚５０ｎｍ）。ここでＡｕター
ゲットに印加する直流パワーを徐々に小さくする条件で
成膜をで成膜した薄膜をＥＳＣＡ法によって深さ方向の
Ａｕ元素の濃度分布を測定したところ、記録再生のため
の先ビーム照射側である基板側表面におけるＡｕ元素の
濃度は９０原子数パーセントで、それから膜厚方向に向
かって濃度は急激に減少し、記録膜の膜厚の半分のとこ
ろでＡｕ元素濃度は０％であった。An alloy target having the same composition (atomic ratio) and an Au target were used. First, high frequency power was applied to a polytetrafluoroethylene target to form a fluorocarbon thin film with a thickness of 20 nm. In addition, in the fluorocarbon thin film formed under the same conditions, the above atomic percentage of F expressed as F/(F+C)XIOII was 57%. After forming the fluorocarbon intermediate layer, high frequency power was applied to the Te-5e alloy target and DC power was applied to the Au target to obtain a recording film in which Au elements were dispersed in the Te-3e layer (film thickness: 50 nm). Here, we measured the concentration distribution of the Au element in the depth direction using the ESCA method on a thin film that was deposited under the condition of gradually decreasing the DC power applied to the Au target. The concentration of Au element on the substrate side surface was 90 atomic percent, and then the concentration decreased rapidly in the direction of the film thickness, and at half the thickness of the recording film, the Au element concentration was 0%. .
上述の方法で作成した光ディスクら同様に高反射率を有
しており、波長７ｇ０ｎｍの光で基板側から測定した反
射率はディスクミラ一部で７１％であった。上記ディス
クに線速１．４ｍ／ｓ、書き込みパワー９ａＹでＥＦＭ
変調記録を行ったところ、ＣＮＲは５５ｄＢ、ジッター
は２５ｎｇｅｃであり、非常に良好な記録再生特性を得
ることができた。この光ディスクは市販のＣＤプレーヤ
で再生可能であった。また上記記録膜上に、ウレタン系
接着剤でＰＥＴフィルムを貼り付けて保護層を形成した
。この光ディスクでは書き込みパワーにｌｏ＋ａｌを要
するようになったか、その他の特性は特に変化しなかっ
た。なお、この実施例の光ディスクの記録ピットをＳＥ
ピットになっており、ピットエツジの形状は安定（均一
）であった。Like the optical disks prepared by the above-described method, it had a high reflectance, and the reflectance measured from the substrate side using light with a wavelength of 7g0 nm was 71% at a portion of the disk mirror. EFM on the above disk at a linear velocity of 1.4 m/s and a writing power of 9aY.
When modulated recording was performed, the CNR was 55 dB and the jitter was 25 ngec, and very good recording and reproducing characteristics could be obtained. This optical disc could be played on a commercially available CD player. A protective layer was also formed on the recording film by pasting a PET film with a urethane adhesive. In this optical disk, the writing power required lo+al, and other characteristics did not change. Note that the recording pits of the optical disc in this example are SE
The shape of the pit edge was stable (uniform).
（比較例）
上記実施例のポリカーボネイト製透明円板上に実進例２
と同し条件てフロロカーボン中間層（膜厚２０ｎｍ）を
成膜し、上記フロロカーボン層上にＴｅ−５ｅ−Ｐｂ合
金からなる記録膜（膜厚５０ｎｍ）を形成した。上記各
層の成膜は、ポリテトラフロロエチレンのターゲットお
よびＴｅａ。５ｅ１ｓｐｂｓ （原子数比）の合金ター
ゲットを用いたスパッタリング法により行った。なお上
記記録膜の組成比も原子数でＴｅｇｏＳｅ＋５Ｐｂｓで
あった。(Comparative example) Practical example 2 was placed on the polycarbonate transparent disk of the above example.
A fluorocarbon intermediate layer (thickness: 20 nm) was formed under the same conditions as above, and a recording film (thickness: 50 nm) made of a Te-5e-Pb alloy was formed on the fluorocarbon layer. The above layers were formed using a polytetrafluoroethylene target and Tea. The sputtering method was performed using an alloy target of 5e1spbs (atomic ratio). The composition ratio of the recording film was also TegoSe+5Pbs in terms of number of atoms.
上記方法で作成した光ディスクの反射率は上記実施例よ
りも低く、波長７８０ｎａの光で基板側から測定した反
射率はディスクミラ一部で４５％であった。また上記光
ディスクの記録感度は高（，３ｍｌから書き込みが可能
であった。この光ディスクの記録部をＳＥＭ観察すると
、第６図に示すようなリムを有するピットが形成されて
おり、ピット形状は不均一であった。そして線速１．４
鳳／Ｓ、書き込みパワー９ｍＷでＥＰＭ変調記録を行っ
たところ、ジッターは５０ｎｓｅｃであり上記実施例に
比べて劣っていた。The reflectance of the optical disk produced by the above method was lower than that of the above example, and the reflectance measured from the substrate side using light with a wavelength of 780 na was 45% at a portion of the disk mirror. Furthermore, the recording sensitivity of the above-mentioned optical disc was high (writing was possible from 3 ml). When the recording section of this optical disc was observed with a SEM, pits with rims as shown in Fig. 6 were formed, and the pit shape was irregular. It was uniform, and the linear velocity was 1.4.
When EPM modulation recording was performed using Otori/S and a writing power of 9 mW, the jitter was 50 nsec, which was inferior to the above example.
［発明の効果］
この出願の請求項（１）の光学記録媒体は、基板上に延
性の大きな金属または合金を含む記録膜が形成されてお
り、上記記録膜は弾性限度を超えて膨張変形し、変形部
の頂上は破壊されてピット（穴部）が形成されているの
で、高コントラストで記録が行われる。上記ピットを基
板側から照射する再生レーザ光で再生するときは、カル
デラ状に形成されたピットの裾部と基板との接点部でピ
ットエツジが検出されるので、ピットエツジが安定し、
良好なジッター値が得られる。[Effect of the invention] The optical recording medium of claim (1) of this application has a recording film containing a highly ductile metal or alloy formed on a substrate, and the recording film expands and deforms beyond its elastic limit. Since the top of the deformed part is destroyed and a pit is formed, recording is performed with high contrast. When reproducing the above-mentioned pits with a reproducing laser beam irradiated from the substrate side, the pit edges are detected at the contact points between the base of the pits formed in a caldera shape and the substrate, so the pit edges are stabilized.
A good jitter value can be obtained.
請求項（２）の発明では請求項（１）においてフロロカ
ーボン中間層を設けているので、記録ピット形状をさら
に均一化し、また高感度化が達成される。In the invention of claim (2), since a fluorocarbon intermediate layer is provided in claim (1), the shape of the recording pits can be made more uniform, and higher sensitivity can be achieved.
請求項（３）の光学記録媒体では、上記延性の大きな金
属として、基板あるいはフロロカーボン中間層との密着
性の低いＡｕ元素を用いているので、記録のための光ビ
ームを照射した際、空隙が形成されやすく、ピットが容
易に形成され、記録感度がより高い光学記録媒体が得ら
れる。In the optical recording medium of claim (3), as the highly ductile metal, Au element is used, which has low adhesion to the substrate or the fluorocarbon intermediate layer. An optical recording medium in which pits are easily formed and has higher recording sensitivity can be obtained.
第１図ないし第３図はこの発明の１つの実施例の光学記
録媒体の概略断面図、第４図または第５図はこの発明の
他の実施例の光学記録媒体の概略断面図、第６図はピッ
ト形成により記録される従来の光学記録媒体の概略断面
図である。
■・・・・・基 坂、 ２・・・・・記録膜、５・
・・・・フロロカーボン中間層、
６・・・・・空 隙、 ７・・・・・ピット。
特許出願人 株式会社 り ラ し1 to 3 are schematic cross-sectional views of an optical recording medium according to one embodiment of the present invention, FIG. 4 or 5 is a schematic cross-sectional view of an optical recording medium according to another embodiment of the present invention, and FIG. The figure is a schematic cross-sectional view of a conventional optical recording medium recorded by pit formation. ■...Motosaka, 2...Recording film, 5.
...Fluorocarbon intermediate layer, 6...Void, 7...Pit. Patent applicant RiRa Shi Co., Ltd.
Claims (2)
ることによつて記録膜を変形して情報を記録する光学記
録媒体において、上記記録膜が延性の大きな金属あるい
は合金を含み、上記光照射によつて上記記録膜は弾性限
度を超えて膨張変形し、かつ、変形部の頂上は破壊限度
を超えて欠損することにより情報が記録されていること
を特徴とする光学記録媒体。(1) In an optical recording medium that has a substrate and a recording film, and records information by deforming the recording film by irradiating the recording film with light, the recording film is made of a highly ductile metal or alloy. An optical recording characterized in that the recording film expands and deforms beyond its elastic limit by the light irradiation, and information is recorded by the top of the deformed portion being damaged beyond the breaking limit. Medium.
されており、上記記録膜は上記フロロカーボン中間層上
に形成されていることを特徴とする請求項１記載の光学
記録媒体。（３）上記記録膜がＡｕを含むことを特徴と
する請求項１または２記載の光学記録媒体。(2) The optical recording medium according to claim 1, wherein an intermediate layer containing fluorocarbon is formed on the substrate, and the recording film is formed on the fluorocarbon intermediate layer. (3) The optical recording medium according to claim 1 or 2, wherein the recording film contains Au.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63295570A JPH02141283A (en) | 1988-11-22 | 1988-11-22 | Optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63295570A JPH02141283A (en) | 1988-11-22 | 1988-11-22 | Optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02141283A true JPH02141283A (en) | 1990-05-30 |
Family
ID=17822350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63295570A Pending JPH02141283A (en) | 1988-11-22 | 1988-11-22 | Optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02141283A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028604A1 (en) * | 1998-11-06 | 2000-05-18 | Pacific Solar Pty. Limited | Indirect laser patterning of resist |
-
1988
- 1988-11-22 JP JP63295570A patent/JPH02141283A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028604A1 (en) * | 1998-11-06 | 2000-05-18 | Pacific Solar Pty. Limited | Indirect laser patterning of resist |
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