JPH02129836U - - Google Patents
Info
- Publication number
- JPH02129836U JPH02129836U JP3947089U JP3947089U JPH02129836U JP H02129836 U JPH02129836 U JP H02129836U JP 3947089 U JP3947089 U JP 3947089U JP 3947089 U JP3947089 U JP 3947089U JP H02129836 U JPH02129836 U JP H02129836U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- electrode
- capacitance
- piezoelectric element
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案による圧力装置の第１実施例の
構成図、第２図は従来の圧力測定装置の構成図、
第３図は本考案による圧力測定装置の第２実施例
の構成図である。
１……基準圧力となる第１の部屋、２……被測
定圧力となる第２の部屋、３……ダイヤフラム、
４……電極、５……圧電素子、６，６ａ，６ｂ…
…温度検出センサ、７……検出回路、８……制御
回路、９，９ａ，９ｂ……温度検出回路、１０…
…温度補償回路、１１……駆動回路、１２……変
換回路、１３……表示回路。
FIG. 1 is a configuration diagram of a first embodiment of a pressure device according to the present invention, FIG. 2 is a configuration diagram of a conventional pressure measurement device,
FIG. 3 is a block diagram of a second embodiment of the pressure measuring device according to the present invention. 1... First chamber serving as reference pressure, 2... Second chamber serving as measured pressure, 3... Diaphragm,
4... Electrode, 5... Piezoelectric element, 6, 6a, 6b...
...Temperature detection sensor, 7...Detection circuit, 8...Control circuit, 9, 9a, 9b...Temperature detection circuit, 10...
... Temperature compensation circuit, 11 ... Drive circuit, 12 ... Conversion circuit, 13 ... Display circuit.
Claims (1)
第２の部屋と、前記ダイヤフラムとの間に静電容
量を持つように前記ダイヤフラムに対向して設け
られた１つ以上の電極と、前記ダイヤフラムと前
記電極との間の距離を可変させる前記電極に設け
られた圧電素子を備え、前記ダイヤフラムと前記
電極間の静電容量を検出し、前記ダイヤフラムと
前記電極間の静電容量を一定にするための信号か
ら圧力値を検出する圧力測定装置において、前記
圧電素子近傍に温度検出センサを設け、この温度
検出センサからの信号により圧力値を温度補償す
るようにしたことを特徴とする圧力測定装置。 a first chamber and a second chamber separated by a diaphragm, one or more electrodes provided opposite to the diaphragm so as to have a capacitance between the diaphragm and the diaphragm; A piezoelectric element provided on the electrode that changes the distance between the diaphragm and the electrode, detects the capacitance between the diaphragm and the electrode, and keeps the capacitance between the diaphragm and the electrode constant. A pressure measuring device for detecting a pressure value from a signal of the piezoelectric element, characterized in that a temperature detection sensor is provided near the piezoelectric element, and the pressure value is temperature-compensated by the signal from the temperature detection sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3947089U JPH02129836U (en) | 1989-04-03 | 1989-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3947089U JPH02129836U (en) | 1989-04-03 | 1989-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129836U true JPH02129836U (en) | 1990-10-25 |
Family
ID=31548404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3947089U Pending JPH02129836U (en) | 1989-04-03 | 1989-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129836U (en) |
-
1989
- 1989-04-03 JP JP3947089U patent/JPH02129836U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1219940A3 (en) | Capacitive pressure sensors | |
| JPH01165457U (en) | ||
| JPH02129836U (en) | ||
| JPH01163862U (en) | ||
| JPH02131641U (en) | ||
| JPS6346830Y2 (en) | ||
| JPS6326745Y2 (en) | ||
| JPS6184835U (en) | ||
| JPH0322219U (en) | ||
| SU1425491A1 (en) | Pressure transducer | |
| JPH0213753U (en) | ||
| JPS6224351U (en) | ||
| JPS6348133U (en) | ||
| JPH02131617U (en) | ||
| JPH02107052U (en) | ||
| JPS6445643U (en) | ||
| JPH0181548U (en) | ||
| JPS62199650U (en) | ||
| JPS63161415U (en) | ||
| JPS6422315U (en) | ||
| JPS61152923U (en) | ||
| JPS6370045U (en) | ||
| JPS62150606U (en) | ||
| JPH0328403U (en) | ||
| JPH0316039U (en) |