JPH0212515Y2 - - Google Patents
Info
- Publication number
- JPH0212515Y2 JPH0212515Y2 JP17019585U JP17019585U JPH0212515Y2 JP H0212515 Y2 JPH0212515 Y2 JP H0212515Y2 JP 17019585 U JP17019585 U JP 17019585U JP 17019585 U JP17019585 U JP 17019585U JP H0212515 Y2 JPH0212515 Y2 JP H0212515Y2
- Authority
- JP
- Japan
- Prior art keywords
- room
- raised floor
- air
- raised
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011148 porous material Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Description
【考案の詳細な説明】
「産業上の利用分野」
本考案は室内へ清浄な空気を強制的に通して室
内を清浄な環境に保つクリーンルームに関するも
のであり、特にこのようなクリーンルームのう
ち、床を底上げしたクリーンルームの上げ床構造
に関するものである。[Detailed description of the invention] "Industrial application field" This invention relates to a clean room that maintains a clean environment by forcing clean air into the room. This concerns a raised floor structure for a clean room with a raised floor.
「従来の技術」
床を底上げした上げ床の下を空気の流通空間と
し、上げ床板に孔を開け、天井より清浄な空気を
強制的に室内に供給して、該空気を前記床下の空
気流通空間を通じて室の外部に排出することによ
り、室内を清浄な環境に保つクリーンルームは既
に公知である。"Prior art" The area under the raised floor is an air circulation space, holes are made in the raised floor board, clean air is forcibly supplied into the room from the ceiling, and the air is circulated under the floor. Clean rooms that maintain a clean environment inside a room by discharging water to the outside of the room through the space are already known.
従来の上げ床形式のクリーンルームは、室の内
周部分における上げ床板の孔の開孔率や、室への
出入口部分における上げ床板の孔の開孔率が、他
の部分の上げ床板のそれと略同一であつた。 In conventional raised floor clean rooms, the porosity of the holes in the raised floor board at the inner circumference of the room and the opening ratio of the holes in the raised floor board at the entrance to the room are approximately equal to those of the raised floor boards in other parts. They were the same.
「考案が解決しようとする問題点」
従つて、従来の上げ床形式のクリーンルームに
おいては、天井より床方向に流れる空気の速度は
室内各部において大差がなく、室の側壁にわずか
な隙間がある部分や、室外との気密性が保ち難く
隙間が生じ易い出入口などの部分において、気圧
が下つた室内へ前記隙間を通じて室外の汚れた空
気が侵入した場合、その汚れた空気が室の中央部
分に達する場合があり、室内に装置されている機
器類を汚染する欠点があつた。また、このような
欠点を解消するためには、室への出入口部分や側
壁の構造についての気密性保持を特に配慮して、
側壁のパネルを連結する場合には、例えば角棒状
の両面にあり溝を形成した継手を用い、この継手
を介してパネル相互の両側端をあり継ぎ状に連結
し、さらに連結部分を適当な手段でシールしなけ
ればならないなど、設置費が高価となる欠点があ
つた。``Problem that the invention aims to solve'' Therefore, in a conventional raised-floor clean room, the speed of air flowing from the ceiling toward the floor does not differ greatly in each part of the room, and there is a slight gap in the side wall of the room. If dirty air from outside enters a room with reduced atmospheric pressure through the gap at entrances and exits where it is difficult to maintain airtightness with the outdoors and gaps are likely to form, the dirty air will reach the center of the room. This has the disadvantage of contaminating equipment installed in the room. In addition, in order to eliminate such drawbacks, special consideration must be given to maintaining airtightness in the structure of the entrance and exit to the room and the side walls.
When connecting side wall panels, for example, a rectangular rod-shaped joint with dovetail grooves formed on both sides is used, and the opposite ends of the panels are connected in a dovetail shape through this joint, and the connecting portion is then connected by an appropriate means. It had the disadvantage of being expensive to install, such as having to seal it with water.
本考案の目的は前記の欠点を解消すること、即
ち、室外との気密性を保ち難い出入口などの部分
において、あるいは、室の側壁の構造についての
気密性に十分な配慮がなされない場合について
も、隙間から侵入した外部の汚れた空気が室の中
央部分まで到達せず、室内における出入口に近接
した部分や室壁に隙間を生じ易い部分、あるいは
室の全内周部分において、室内に侵入した汚れた
空気を室外に排除できるクリーンルームの上げ床
構造を提供することにある。 The purpose of this invention is to eliminate the above-mentioned drawbacks, that is, in areas such as entrances and exits where it is difficult to maintain airtightness with the outside, or in cases where sufficient consideration is not given to the airtightness of the structure of the side walls of the room. If dirty air from the outside does not reach the center of the room, it may enter the room near the entrance or exit, in areas where gaps are likely to form on the room wall, or in the entire inner circumference of the room. To provide a raised floor structure for a clean room that can expel dirty air to the outside.
「問題点を解決するための手段」
床を底上げした上げ床板の下を空気流通空間と
し、上げ床板に孔を開け、天井より清浄な空気を
強制的に室内に供給し、該空気を前記上げ床板下
の空気流通空間を通じて室の外部に排出するよう
に構成したクリーンルームにおいて、室の内周部
分の全部又は一部における前記上げ床板の孔の開
孔率を、他の部分の上げ床板の孔の開孔率より大
きく設定したことである。``Means for solving the problem'' An air circulation space is created under the raised floor board with the bottom raised, holes are made in the raised floor board, clean air is forcibly supplied from the ceiling into the room, and the air is In a clean room configured to exhaust air to the outside of the room through the air circulation space under the floorboards, the porosity of the holes in the raised floorboards in all or part of the inner circumference of the room is determined by the porosity of the holes in the raised floorboards in other parts. This is because the pore area ratio was set larger than that of .
「作用」
室の内周部分における上げ床板の開孔率を大き
く設定した部分は、上方より下方へ移動する空気
の流れが他の部分より速く、該部分には上方から
下方へエアーカーテン類似の空気の流れの膜が形
成されるため、該部分に面する側壁に隙間があつ
て外部から室内に汚れた空気が侵入しても、この
汚れた空気は前記空気の流れの膜に遮断され、該
流れの膜に取込まれて室外に排出される。``Effect'' In the inner circumferential part of the room where the porosity of the raised floor board is set high, the flow of air moving from the top to the bottom is faster than in other parts. Since an air flow membrane is formed, even if there is a gap in the side wall facing this area and dirty air enters the room from the outside, this dirty air will be blocked by the air flow membrane, It is taken up by the membrane of the flow and discharged outside the room.
「実施例」
以下図面を参照して本考案の好適な実施例を説
明する。"Embodiments" Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
１はクリーンルームを構成する室であり、この
室１の一側及び天井裏にはパネル２１，３１でそ
れぞれ囲まれたダクト２，３がそれぞれ設けら
れ、室１の前記ダクト２が設けられている部分以
外の一側壁にはドアー１１を取付けた出入口が設
けられている。 Reference numeral 1 denotes a room constituting a clean room, and ducts 2 and 3 surrounded by panels 21 and 31, respectively, are provided on one side of this room 1 and behind the ceiling, and the duct 2 of room 1 is provided. An entrance/exit with a door 11 attached is provided on one side wall other than the section.
室１の床４は設置ベース４０より底上げされた
上げ床にしてあり、上げ床４を構成する上げ床板
４１及び４２は、設置ベース４０上へ適当な間隔
で立設された支柱のような各同一な高さの支え座
４３で支持させてあり、上げ床板４１，４２の下
は空気流通空間ｃとされている。支え座４３と床
板４１，４２との間には、図示しない根太を介在
させる場合もある。 The floor 4 of the room 1 is a raised floor that is raised above the installation base 40, and the raised floor boards 41 and 42 that make up the raised floor 4 are made of pillar-like structures that are erected on the installation base 40 at appropriate intervals. It is supported by a support seat 43 of the same height, and an air circulation space c is provided below the raised floor plates 41 and 42. A joist (not shown) may be interposed between the support seat 43 and the floorboards 41, 42.
上げ床板４１，４２はアルミ合金板やスチール
板、鋼板等の素材に孔ａ，ｂを形成し、表面を塗
装その他の手段でコーテイングしたもので、室１
の内周部分（側壁パネル１２に近接した部分）に
おける上げ床板４１の単位面積当りの孔ａの面積
の割合、即ち開孔率は、室１の中央部分における
上げ床板４２の孔ｂの開孔率より大きく設定して
ある。 The raised floor plates 41 and 42 are made of aluminum alloy plates, steel plates, steel plates, etc., with holes a and b formed in them, and the surfaces are coated with paint or other means.
The ratio of the area of the holes a per unit area of the raised floor board 41 in the inner peripheral part (the part close to the side wall panel 12), that is, the open area ratio, is the ratio of the opening of the holes b of the raised floor board 42 in the central part of the room 1. It is set higher than the rate.
床板４１の孔ａの開孔率と床板４２の孔ｂの開
孔率の差をどの程度に設定するかは、クリーンル
ームの使用目的や、室１の側壁パネル１２の連結
部分の気密性などの条件により異なるが、この実
施例においては、上げ床板４１における開孔率と
上げ床板４２のそれとの比が略３対１となるよう
に設定している。 The difference between the porosity of holes a in the floor plate 41 and holes b in the floor plate 42 depends on the purpose of use of the clean room, the airtightness of the connecting parts of the side wall panels 12 of the room 1, etc. Although it varies depending on the conditions, in this embodiment, the ratio of the open area ratio of the raised floor board 41 to that of the raised floor board 42 is set to be approximately 3:1.
室１の天井５は略水平に取付けられた多数の孔
を形成した孔開き板又は金網５１で構成され、該
金網５１等の上部には全面に適当なフイルター６
が設けられている。 The ceiling 5 of the room 1 is composed of a perforated plate or wire mesh 51 that is installed substantially horizontally and has a large number of holes, and a suitable filter 6 is installed over the entire surface of the wire mesh 51.
is provided.
室１の側部のダクト２と天井裏のダクト３との
間には、空気を強制的に室１内へ供給するフアン
７が設けられ、このフアン７の作動により、床４
の下の流通空間ｃ及びダクト２の外側のパネル２
１に形成された空気取入れ口２２よりの空気が、
天井裏のダクト３内に供給され、フイルター６に
よつて浄化された空気は室１、床下の空気流通空
間ｃ、ダクト２へと強制循環させられて室１内の
環境を清浄に保つようになつている。 A fan 7 that forcibly supplies air into the room 1 is provided between the duct 2 on the side of the room 1 and the duct 3 on the ceiling.
The outer panel 2 of the circulation space c and the duct 2 under
Air from the air intake port 22 formed in 1 is
The air supplied to the duct 3 in the ceiling and purified by the filter 6 is forcedly circulated to the room 1, the air circulation space c under the floor, and the duct 2 to keep the environment inside the room 1 clean. It's summery.
空気取入れ口２２にも図示しないフイルターを
取付ける場合もある。 A filter (not shown) may also be attached to the air intake port 22 in some cases.
前記実施例においては、室１の内周に近い部分
の上げ床板４１における孔ａの開孔率が、他の部
分の上げ床板４２における孔ｂの開孔率の略三倍
であるため、室１内における天井５より床４方向
への空気の流れは、第１図の矢印の状態であつ
て、室１の内周部分における空気の流れが他の部
分におけるより三倍程度速くなり、この速い空気
の流れによつて、室１の内周部分にはエアーカー
テンに類似した空気の流れの膜が形成される。し
たがつて、室１の外部から汚れた空気が室１内に
侵入しても、侵入した外部の空気は前記空気の流
れの膜に取込まれて室１から排出され、室１の中
央部に達することはない。 In the embodiment described above, the porosity of the holes a in the raised floor plate 41 in the portion near the inner circumference of the chamber 1 is approximately three times that of the holes b in the raised floor plate 42 in other portions, so that The flow of air in the direction of the floor 4 from the ceiling 5 in the room 1 is as indicated by the arrow in Figure 1, and the air flow in the inner circumference of the room 1 is about three times faster than in other parts. Due to the fast air flow, an air flow film similar to an air curtain is formed around the inner circumference of the chamber 1. Therefore, even if dirty air enters the chamber 1 from outside the chamber 1, the intruded outside air is taken in by the air flow membrane and discharged from the chamber 1, and the air is discharged from the center of the chamber 1. will never reach.
このように外部からの室内への汚れた空気の侵
入を遮断できるので、クリーンルームを設置する
場合において、側壁や出入口等における気密性を
特に配慮する必要がなくなり、より安価にクリー
ンルームを設置することができる。 In this way, it is possible to block the entry of dirty air into the room from the outside, so when installing a clean room, there is no need to pay special attention to the airtightness of side walls, entrances, etc., and it is possible to install a clean room at a lower cost. can.
前記実施例においては、室１の内周部分の全部
の上げ床板４１の開孔率を、他の部分の上げ床板
４２のそれより大きく設定したが、例えば平面四
角形のクリーンルームにおいて、一の辺面又は連
続した二の辺面を形成する側壁につき、コンクリ
ート壁等のように気密性を有する壁をそのまま用
いる場合には、室内の他の内周辺面を構成する側
壁に近接した部分における上げ床板についての
み、他の部分の上げ床板より開孔率を大きく設定
すればよい。また、既設のクリーンルームにおい
て、側壁に十分な気密性がある場合には、例えば
出入口に近接した部分における上げ床板について
のみ開孔率を大きく設定すればよい。 In the embodiment described above, the porosity of all the raised floor plates 41 in the inner circumference of the room 1 was set to be larger than that of the raised floor plates 42 in other parts. Or for side walls that form two continuous sides, if an airtight wall such as a concrete wall is used as is, raised floor boards in the area close to the side walls that form the other inner peripheral surfaces of the room. It is only necessary to set the perforation ratio to be larger than that of the raised floorboards in other parts. Furthermore, in an existing clean room, if the side walls have sufficient airtightness, it is only necessary to set a large open area ratio only for the raised floorboards in the vicinity of the entrance/exit, for example.
さらに第３図で例示するように、孔ａの開孔率
を他のものより大きく設定すべき上げ床板４１の
裏面両側に沿つて相対する案内溝４４を形成し、
床板４１における孔ａと同様な孔a′を形成したス
ライド板４５を設け、このスライド板４５を前記
案内溝４４へスライド自在に案内し、該スライド
板４５を手動により又は自動的に少しスライドさ
せることにより、床板４１における孔ａの開孔面
積を調節するように構成すればなを望ましい。 Furthermore, as illustrated in FIG. 3, opposing guide grooves 44 are formed along both sides of the back surface of the raised floor board 41, in which the aperture ratio of the hole a should be set larger than that of the other holes,
A slide plate 45 having a hole a' similar to the hole a in the floor plate 41 is provided, and this slide plate 45 is slidably guided to the guide groove 44, and the slide plate 45 is slightly slid manually or automatically. Therefore, it is desirable that the opening area of the hole a in the floor plate 41 be adjusted.
「考案の効果」
本考案に係るクリーンルームにおける上げ床構
造は、室の内周部分の全部又は一部における上げ
床板の孔の開孔率を、他の部分の上げ床板の開孔
率より大きく設定したものであるから、上げ床板
の孔の開孔率を大きく設定した室の内周部分で
は、空気の流れが他の部分より速くなり、この部
分において外部からの汚れた空気の侵入を遮断す
ることができる。したがつてまた、前記部分に相
対する室の側壁については、気密性の保持に特別
な配慮をする必要がないためより安価にクリーン
ルームを設置することができる。"Effect of the invention" The raised floor structure in the clean room according to the invention is such that the porosity of the raised floor board in all or part of the inner circumference of the room is set to be larger than the porosity of the raised floor board in other parts. Therefore, in the inner part of the room where the porosity of the holes in the raised floor board is set high, the air flows faster than in other parts, and this part blocks the intrusion of dirty air from the outside. be able to. Therefore, there is no need to pay special attention to maintaining the airtightness of the side wall of the room facing the above-mentioned portion, so that the clean room can be installed at a lower cost.
第１図は本考案に係る上げ床構造を適用したク
リーンルームの概略断面図、第２図は第１図の例
における室の内部の一部平面図、第３図は本考案
における要部の他の実施例を示す一部省略分解斜
視図である。
主要図中符号の説明、１は室、２，３はダク
ト、４は底上げした上げ床、４１，４２は上げ床
板、５は天井、５１は孔開き板又は金網、６はフ
イルター、７はフアン、ｃは床下の空気流通空
間、ａ，ｂは孔である。
Fig. 1 is a schematic sectional view of a clean room to which the raised floor structure of the present invention is applied, Fig. 2 is a plan view of a portion of the interior of the room in the example of Fig. 1, and Fig. 3 is a schematic cross-sectional view of a clean room to which a raised floor structure according to the present invention is applied. FIG. 2 is a partially omitted exploded perspective view showing an embodiment of the present invention. Explanation of the symbols in the main drawings: 1 is the room, 2 and 3 are the ducts, 4 is the raised floor, 41 and 42 are the raised floor boards, 5 is the ceiling, 51 is the perforated board or wire mesh, 6 is the filter, and 7 is the fan. , c is an air circulation space under the floor, and a and b are holes.
Claims (1)
とし、前記上げ床板に孔を開け、天井より清浄
な空気を強制的に室内に供給し、該空気を前記
上げ床板下の空気流通空間を通じて室の外部に
排出するように構成したクリーンルームにおい
て、室の内周部分の全部又は一部における前記
上げ床板の孔の開孔率を、他の部分の上げ床板
の孔の開孔率より大きく設定したことを特徴と
したクリーンルームにおける上げ床構造。 (2) 室の内周部分の全部又は一部における上げ床
板の開孔率と、他の部分における上げ床板の開
孔率との比を略３対１以上に設定した、実用新
案登録請求の範囲第１項に記載のクリーンルー
ムにおける上げ床構造。[Scope of Claim for Utility Model Registration] (1) An air circulation space is provided under a raised floor board with a raised floor, holes are made in the raised floor board, and clean air is forcibly supplied into the room from the ceiling. In a clean room configured to discharge air to the outside of the room through the air circulation space under the raised floor board, the porosity of the holes in the raised floor board in all or a part of the inner circumference of the room is determined by A raised floor structure in a clean room that is characterized by having a pore size larger than the pore size of the pores. (2) Utility model registration requests where the ratio of the porosity of the raised floorboards in all or part of the inner circumference of the room to the porosity of the raised floorboards in other parts is set to approximately 3:1 or more. Raised floor structure in the clean room described in Scope 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17019585U JPH0212515Y2 (en) | 1985-11-02 | 1985-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17019585U JPH0212515Y2 (en) | 1985-11-02 | 1985-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6277745U JPS6277745U (en) | 1987-05-18 |
| JPH0212515Y2 true JPH0212515Y2 (en) | 1990-04-09 |
Family
ID=31104705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17019585U Expired JPH0212515Y2 (en) | 1985-11-02 | 1985-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0212515Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447540Y2 (en) * | 1986-11-04 | 1992-11-10 | ||
| WO1993003482A1 (en) * | 1991-08-02 | 1993-02-18 | Mitsui Petrochemical Industries, Ltd. | Hub for optical recording medium and optical recording medium |
-
1985
- 1985-11-02 JP JP17019585U patent/JPH0212515Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6277745U (en) | 1987-05-18 |
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