JPH02118434A - Measuring instrument for contamination extent of liquid - Google Patents
Measuring instrument for contamination extent of liquidInfo
- Publication number
- JPH02118434A JPH02118434A JP27280588A JP27280588A JPH02118434A JP H02118434 A JPH02118434 A JP H02118434A JP 27280588 A JP27280588 A JP 27280588A JP 27280588 A JP27280588 A JP 27280588A JP H02118434 A JPH02118434 A JP H02118434A
- Authority
- JP
- Japan
- Prior art keywords
- contamination
- piezoelectric vibrator
- frequency
- liquid
- extent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 title claims abstract description 38
- 239000007788 liquid Substances 0.000 title claims abstract description 20
- 230000010355 oscillation Effects 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 239000000356 contaminant Substances 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract 1
- 239000002904 solvent Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 101100353042 Mycobacterium bovis (strain BCG / Pasteur 1173P2) lnt gene Proteins 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 101150028022 ppm1 gene Proteins 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ、産業上の利用分野
本発明は、圧電振動子を利用した液体の汚染度測定器に
関する。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a liquid contamination level measuring device using a piezoelectric vibrator.
Ｂ０発明の概要
本発明は、液体の汚染度を検出する液体の汚染度測定器
において、
圧電振動子を具えた圧電発振器を検出部とし、該圧電発
振器を周波数測定器に接続して発振周波数を測定できる
ようにすることにより、汚染した液体を圧電振動子に付
着させた後乾燥させた場合には、液体を付着させる前と
は発振周波数が異なることから、汚染度を検出するよう
にしたものである。B0 Summary of the Invention The present invention provides a liquid contamination degree measuring device for detecting the degree of contamination of a liquid, in which a piezoelectric oscillator equipped with a piezoelectric vibrator is used as a detection part, and the piezoelectric oscillator is connected to a frequency measuring device to measure the oscillation frequency. By making it possible to measure the degree of contamination, if a contaminated liquid is attached to a piezoelectric vibrator and then dried, the oscillation frequency will be different from before the liquid is attached, so the degree of contamination can be detected. It is.
Ｃ１従来の技術
半導体の製造工程をはじめ種々の工業分野で、部品の洗
浄等にアルコールやトリクレン等の溶剤が洗浄済として
使用される。これらの溶剤はくり返し使用され、それに
よって例えば油脂類や固体混濁物などの汚染物質の混入
が増加し劣化すると、洗浄後の部品等の清浄度が悪くな
る。そのため、溶剤の劣化度である汚染度を定期的にチ
エツクして管理する必要がある。C1 Prior Art In various industrial fields including the manufacturing process of semiconductors, solvents such as alcohol and trichlene are used to clean parts and the like. These solvents are used repeatedly, and as a result, contaminants such as oils and fats and solid turbid substances increase and deteriorate, resulting in poor cleanliness of parts after cleaning. Therefore, it is necessary to periodically check and manage the degree of contamination, which is the degree of deterioration of the solvent.
汚染度をチエツクするのに、従来は以下の方法を用いて
いる。Conventionally, the following method is used to check the degree of contamination.
（イ）重量法
この方法は、一定量の溶剤を加温乾燥し、残渣として残
った汚染物質の重量を秤量して測定する。(a) Gravimetric method In this method, a certain amount of solvent is heated and dried, and the weight of the contaminant that remains as a residue is weighed.
（ロ）ＰＨ法 溶剤のＰＨの変化を試験紙や試薬によって測定する。(b) PH method Measure the change in pH of the solvent using test paper or reagents.
（ハ）比重法 溶剤の比重の変化を比重計等によって測定する。(c) Specific gravity method Measure the change in specific gravity of the solvent using a hydrometer, etc.
Ｄ５発明が解決しようとする課題
ところが、重量法においては乾燥後に残渣として残った
汚染物質の重量を正確に測定するのに時間がかかり、自
動化しにくい。一方、ＰＨ法や比重法は精度が高くない
等の欠点がある。D5 Problem to be solved by the invention However, in the gravimetric method, it takes time to accurately measure the weight of contaminants remaining as a residue after drying, and it is difficult to automate. On the other hand, the PH method and the specific gravity method have drawbacks such as low accuracy.
そこで本発明は、斯かる課題を解決した液体の汚染度測
定器を提供することを目的とする。Therefore, an object of the present invention is to provide a liquid contamination level measuring device that solves the above problems.
９１課題を解決するための手段
斯かる目的を達成するための本発明の構成は、検出部と
しての厚みすべり振動モード等の圧電振動子を具えた圧
電発振器と、該圧電発振器を接続して該圧電発振器の発
振周波数を測定する周波数測定器とから構成したことを
特徴とする。91 Means for Solving the Problems The configuration of the present invention for achieving the above object includes a piezoelectric oscillator equipped with a piezoelectric vibrator such as a thickness shear vibration mode as a detection part, and a piezoelectric oscillator that is connected to A frequency measuring device for measuring the oscillation frequency of the piezoelectric oscillator.
Ｆ１作用
液体の汚染度を測定するには、厚みすべり振動モード等
の圧電振動子上に液体を滴下または付着せしめた後乾燥
させ、残渣として得られた汚染物質が圧電振動子上に残
留した状態で圧電発振器に通電して圧電振動子を振動さ
せ、その発振周波数を周波数測定器で測定する。To measure the degree of contamination of the F1 working liquid, the liquid is dropped or adhered onto a piezoelectric vibrator in thickness-shear vibration mode, etc., and then dried, and the contaminants obtained as a residue remain on the piezoelectric vibrator. energize the piezoelectric oscillator to vibrate the piezoelectric vibrator, and measure the oscillation frequency with a frequency measuring device.
液体の汚染が多くなるほど圧電振動子上に残留する残渣
の量が増加し、周波数変動が大きいので、汚染の度合に
対する周波数変動値を予めグラフ又は表に表示しておく
ことにより、周波数変動値を知ることで汚染度を測定す
ることができる。As the amount of liquid contamination increases, the amount of residue remaining on the piezoelectric vibrator increases, and the frequency fluctuation increases. Therefore, by displaying the frequency fluctuation value in advance in a graph or table according to the degree of contamination, the frequency fluctuation value can be easily calculated. By knowing this, we can measure the degree of contamination.
Ｇ、実施例
以下、本発明を図面に示す実施例に基づいて詳細に説明
する。G. Examples Hereinafter, the present invention will be explained in detail based on examples shown in the drawings.
（ａ）実施例の構成
本発明による液体の汚染度測定器の構成を、第１図（−
）、（ｂ）に基づいて説明する。(a) Structure of Example The structure of the liquid contamination level measuring device according to the present invention is shown in FIG.
) and (b).
図のように、汚染度測定器は、検出部としての厚みすべ
り振動モード等の圧電振動子ｌを有する圧電発振器２と
、周波数測定器６とで構成される。As shown in the figure, the contamination level measuring device is composed of a piezoelectric oscillator 2 having a piezoelectric vibrator 1 in a thickness-shear vibration mode or the like as a detection section, and a frequency measuring device 6.
なお周波数測定器６に比べて圧電発振器２は、はるかに
小さいものであるが、第１図では両者の大きさの対比は
省略して示しである。Although the piezoelectric oscillator 2 is much smaller than the frequency measuring device 6, the comparison of the sizes thereof is omitted in FIG.
圧電振動子１は、第１図（ｂ）に示すように円盤形の振
動子片３の両方の主面３ａ、３ｂ上に位置する電極４ａ
、４ｂとこの電極４ａ、４ｂに夫々接続されたリード部
４ｃ、４ｄを蒸着したものである。一対のリード部４ｃ
、４．ｄは、図のように同じ方向へ導出してもよいし、
相互にＩ８０゜をなす反対方向へ導出してもよい。As shown in FIG. 1(b), the piezoelectric vibrator 1 includes electrodes 4a located on both main surfaces 3a and 3b of a disc-shaped vibrator piece 3.
, 4b and lead portions 4c and 4d connected to the electrodes 4a and 4b, respectively, are deposited. A pair of lead parts 4c
,4. d may be derived in the same direction as shown in the figure, or
They may also be derived in opposite directions forming an angle of I80° with respect to each other.
圧電発振器２内には、一般に知られているように圧電振
動子■の電極のリード部４ｃ、４ｄに接続されると共に
、その一対の電極４ａ、４ｂ間に電圧を印加して発振を
生ぜしめる図示を省略した発振回路等が内蔵されている
。１０は例えば商用電源等に接続するための電源コード
である。また１１ａ、ｌｌｂは発振出力を取り出すため
の出力端子である。発振周波数の測定を行う際には、こ
の出力端子１１ａ、ｌｌｂを周波数測定器６に接続して
発振周波数の測定を行うものである。In the piezoelectric oscillator 2, as is generally known, a piezoelectric oscillator (1) is connected to lead portions 4c, 4d of the electrodes, and a voltage is applied between the pair of electrodes 4a, 4b to generate oscillation. An oscillation circuit and the like, which are not shown, are built-in. Reference numeral 10 denotes a power cord for connecting to, for example, a commercial power source. Further, 11a and llb are output terminals for taking out oscillation output. When measuring the oscillation frequency, the output terminals 11a and llb are connected to the frequency measuring device 6 to measure the oscillation frequency.
圧電振動子ｌにおける第１図（ａ）中の上下には、圧電
発振器２に固定して一対の保護カバー５の一端が結合さ
れる。少なく、！：も一方の保護カバー５の中央には、
圧１ｕ振動子Ｉ上に溶剤を滴下するための孔７が形成さ
れる。One ends of a pair of protective covers 5 are fixed to the piezoelectric oscillator 2 and connected to the top and bottom of the piezoelectric vibrator l in FIG. 1(a). Less! : In the center of one protective cover 5,
A hole 7 for dropping a solvent is formed on the pressure 1u vibrator I.
なお、圧７１１１！動子の形状は円形に限らず、矩形で
あってもよい。また周辺部や端部にベベル加工等を施さ
ないものでもよい（第４図参照）。また、０７１記の保
護カバー５の一方または両方とも省略してもよい。また
、圧電発振器２内に電池等の電源を内蔵せしめた場合に
は圧電発振器２に電源コード１０を設けなくてもよい。In addition, the pressure is 7111! The shape of the mover is not limited to circular, but may be rectangular. Further, it is also possible that the peripheral portion or end portion is not beveled or the like (see Fig. 4). Further, one or both of the protective covers 5 described in 071 may be omitted. Further, when the piezoelectric oscillator 2 has a built-in power source such as a battery, the piezoelectric oscillator 2 does not need to be provided with the power cord 10.
なおｎｊｊ記の周波数測定器６は従来から一般に使用さ
れている周波数測定器を用いることでよく、検出部とし
ての第１図に示すような少なくとも電極４ａ、４ｂを設
けた主面３ａ、３ｂのうちの一方を露出せしめた圧電振
動子１を備えた圧電発振器２と組合せて溝成することで
よい。Note that the frequency measuring device 6 described in njj may be a frequency measuring device that has been generally used in the past, and the main surfaces 3a and 3b provided with at least electrodes 4a and 4b as a detection section as shown in FIG. A groove may be formed in combination with a piezoelectric oscillator 2 having a piezoelectric vibrator 1 with one side exposed.
（ｂ）実施例の作用
次に、液体の汚染度測定器の作用を第２図〜第４図に基
づいて説明する。(b) Operation of the embodiment Next, the operation of the liquid contamination level measuring device will be explained based on FIGS. 2 to 4.
第２図は、本発明の作用を原理的に示した乙のである。FIG. 2 shows the principle of the operation of the present invention.
溶剤の汚染度を測定するには、第２図（ａ）に示すよう
に、検出部としての厚みすべり振動モード等の圧電振動
子ｉ上に汚れた溶剤８を滴下したあと、第２図（ｂ）に
示すように圧電振動子Ｉを加熱又は自然乾燥によって乾
燥させ、乾燥後に残渣として得られた汚染物質が圧電振
動子ｌ上に残留した状態で第２図（ｄ）に示すように一
対の電極４ａ、４ｂ間に電圧を印加し、このときの発振
周波数を測る。To measure the degree of contamination of the solvent, as shown in Fig. 2(a), after dropping the dirty solvent 8 onto the piezoelectric vibrator i in thickness-shear vibration mode, etc. as a detection part, as shown in Fig. 2(a), As shown in b), the piezoelectric vibrator I is dried by heating or natural drying, and with the contaminants obtained as a residue remaining on the piezoelectric vibrator l after drying, a pair is assembled as shown in FIG. 2(d). A voltage is applied between the electrodes 4a and 4b, and the oscillation frequency at this time is measured.
汚染物質が付着してないときの発振周波数を「０として
汚染物質が残留したときの発振周波数をｒ８とすると、
発振周波数の差は、Δｆ＝ｆｘ−ｆ。If the oscillation frequency when no contaminants are attached is 0, and the oscillation frequency when contaminants remain is r8, then
The difference in oscillation frequency is Δf=fx−f.
となる。一方、発振周波数の差Δｆは、圧電振動子ｌ上
に残留した汚染物質の量と対応して変わる。becomes. On the other hand, the oscillation frequency difference Δf changes depending on the amount of contaminants remaining on the piezoelectric vibrator l.
また圧電振動子ｌ上に残渣として残留する汚染物質の量
は溶剤の汚染度と直接的な関係を有する。Furthermore, the amount of contaminants remaining as residue on the piezoelectric vibrator l has a direct relationship with the degree of contamination of the solvent.
従って、汚染物質の残留量に対する発振周波数の差Δｆ
を予め測定してグラフ又は表にしておけば、周波数の差
Δｆを測定することによって汚染物質の残留量、即ち汚
染度を知ることができる。Therefore, the difference in oscillation frequency Δf with respect to the residual amount of pollutants
If Δf is measured in advance and plotted in a graph or table, the residual amount of contaminants, that is, the degree of contamination, can be determined by measuring the frequency difference Δf.
次に、簡易形の汚染度測定法を第３図に示す。Next, a simplified method for measuring the degree of contamination is shown in FIG.
第３図（ａ）に示すように圧電振動子１の部分を溶剤８
中に浸し、第３図（ｂ）に示すように圧電振動子ｌの表
面に付着した溶剤８を乾燥させて第３図（ｃ）に示すよ
うに汚染物質が付着した状態で圧電振動素子Ｉの周波数
を測定する。As shown in FIG. 3(a), the piezoelectric vibrator 1 was removed using a solvent
The solvent 8 adhering to the surface of the piezoelectric vibrator I is dried as shown in FIG. Measure the frequency of.
最後に、定量形汚染度測定法を第４図に示す。Finally, the quantitative contamination level measurement method is shown in FIG.
これは、第４図（ａ）、（ｂ）に示すように、圧電振動
子１の外周部にリング状の枠９を仮置きし、枠９内に溶
剤を満たすことで圧電振動子ｌ上に一定量の溶剤を載せ
うるようにしたものである。測定のためのその他の手順
は前記の場合と同じなので、説明を省略する。As shown in FIGS. 4(a) and 4(b), a ring-shaped frame 9 is temporarily placed on the outer periphery of the piezoelectric vibrator 1, and the frame 9 is filled with a solvent to place the ring-shaped frame 9 on the piezoelectric vibrator l. It is designed so that a certain amount of solvent can be placed on it. The other steps for measurement are the same as in the previous case, so their explanation will be omitted.
圧電振動子の発振周波数の変化は、よく知られているよ
うに例えばｐｐｍオーダーの液化まで極めて容易に測定
でき、溶剤中に汚染物質の混入が少ない場合にも高感度
の汚染度測定か可能である。As is well known, changes in the oscillation frequency of a piezoelectric vibrator can be extremely easily measured up to liquefaction on the order of ppm, and highly sensitive contamination level measurement is possible even when there are few contaminants mixed in the solvent. be.
そして、使用後は汚染のない溶剤で圧電振動子を洗浄し
ておけば、何度でも使用できる。After use, the piezoelectric vibrator can be used as many times as needed by cleaning it with a clean solvent.
本発明で使用する圧電振動子は、任意の発振周波数のも
のでよく、ｒｏ二１０ＭＩＴｚのものを使用してアルコ
ールの汚染度を測定した場合の結果を以下に示す。The piezoelectric vibrator used in the present invention may have any oscillation frequency, and the results of measuring the degree of alcohol contamination using a piezoelectric vibrator with an RO210 MITz are shown below.
新しいアルコールにおいてはΔｒ＝ｏｐｐｍであり、発
振周波数の変動はなかった。次に、使用期間の異なる汚
染された数種類のアルコールについて発振周波数の変化
を測定したところ、少ないものではへｒ＝５０ｐｐｍ１
多いものではΔｆ＝１００ｐｐｍであった。In the new alcohol, Δr=oppm, and there was no fluctuation in the oscillation frequency. Next, when we measured the change in oscillation frequency for several types of contaminated alcohol that had been used for different periods of time, we found that the change in the oscillation frequency was found to be 50 ppm1.
In most cases, Δf was 100 ppm.
周波数の変化量Δｆとしてはｐｐｍオーダーの測定が可
能なので、溶剤の汚染度に対して極めて高感度の測定が
可能である。Since the amount of change in frequency Δf can be measured on the order of ppm, it is possible to measure the degree of contamination of the solvent with extremely high sensitivity.
Ｈ９発明の詳細
な説明したように本発明による液体の汚染度測定器によ
れば、厚みすべり振動モード等の圧電振動子を具えた圧
電発振器と周波数測定器とで構成したので、ｐｐｍオー
ダーの発振周波数変動を測定することによって液体の汚
染が少ない場合にも高精度で汚染度の検出ができる。従
って、部品の洗浄度に対する要求が厳しい場合であって
汚染度の低い状態での汚染度の測定と液体の管理が容易
である。As described in detail in the H9 invention, the liquid contamination level measuring device according to the present invention is composed of a piezoelectric oscillator equipped with a piezoelectric vibrator such as a thickness-shear vibration mode, and a frequency measuring device, so that oscillation on the order of ppm can be achieved. By measuring frequency fluctuations, the degree of contamination can be detected with high accuracy even when there is little contamination of the liquid. Therefore, it is easy to measure the degree of contamination and manage the liquid when the degree of contamination is low and the requirements for the degree of cleanliness of parts are strict.
また、圧電発振器を検出部とし、一般の周波数測定器と
の組合せで構成されることから、検出部は小形で何回で
し繰り返し使用することが可能であり、しかも低コスト
である。Furthermore, since the piezoelectric oscillator is used as the detection section and is configured in combination with a general frequency measuring device, the detection section is small and can be used repeatedly, and is low cost.
第１図〜第４図は本発明による液体の汚染度測定器の実
施例に係り、第１図（ａ）はその構成図、第１図（ｂ）
は圧電振動子の平面図、第２図（ａ）〜（ｄ）は作用説
明図、第３図（ａ）〜（ｃ）は簡易形汚染度測定法の説
明図、第４図（ａ）は定量形汚染度測定法に係る圧電振
動子の平面図、第４図（ｂ）はその正面断面図である。
１・・・圧電振動子、２・・・圧電発振器、６・・・周
波数測定器。
第１図
（ａ）
汚染度測定器の構成図く本発明）
？
（ｂ）
圧電振動子の平面図（本発明）
外２名
１０−・・電源Figures 1 to 4 relate to an embodiment of the liquid contamination level measuring device according to the present invention, and Figure 1 (a) is its configuration diagram, and Figure 1 (b)
is a plan view of the piezoelectric vibrator, Figures 2 (a) to (d) are diagrams for explaining the action, Figures 3 (a) to (c) are diagrams for explaining the simplified contamination level measurement method, and Figure 4 (a) 4(b) is a plan view of a piezoelectric vibrator according to the quantitative pollution level measurement method, and FIG. 4(b) is a front sectional view thereof. 1... Piezoelectric vibrator, 2... Piezoelectric oscillator, 6... Frequency measuring device. Fig. 1 (a) Configuration diagram of a contamination level measuring device (present invention)? (b) Plan view of piezoelectric vibrator (present invention) Two other people 10 - Power supply
Claims (1)
電発振器を接続して該圧電発振器の発振周波数を測定す
る周波数測定器とから構成したことを特徴とする液体の
汚染度測定器。1. A liquid contamination level measuring device comprising: a piezoelectric oscillator equipped with a piezoelectric vibrator as a detection section; and a frequency measuring device connected to the piezoelectric oscillator to measure the oscillation frequency of the piezoelectric oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27280588A JPH02118434A (en) | 1988-10-28 | 1988-10-28 | Measuring instrument for contamination extent of liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27280588A JPH02118434A (en) | 1988-10-28 | 1988-10-28 | Measuring instrument for contamination extent of liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118434A true JPH02118434A (en) | 1990-05-02 |
Family
ID=17519001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27280588A Pending JPH02118434A (en) | 1988-10-28 | 1988-10-28 | Measuring instrument for contamination extent of liquid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118434A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000283905A (en) * | 1999-03-30 | 2000-10-13 | Noboru Koyama | Multichannel qcm sensor device |
| JP2003532056A (en) * | 2000-04-05 | 2003-10-28 | ザ チャールズ スターク ドレイパー ラボラトリー インク | Apparatus and method for measuring mass of substance |
| JP2013228411A (en) * | 2013-08-14 | 2013-11-07 | Fujitsu Ltd | Atmosphere analyzer |
| US9762204B2 (en) | 2003-02-12 | 2017-09-12 | Attana Ab | Piezoelectric resonator |
-
1988
- 1988-10-28 JP JP27280588A patent/JPH02118434A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000283905A (en) * | 1999-03-30 | 2000-10-13 | Noboru Koyama | Multichannel qcm sensor device |
| JP2003532056A (en) * | 2000-04-05 | 2003-10-28 | ザ チャールズ スターク ドレイパー ラボラトリー インク | Apparatus and method for measuring mass of substance |
| US7171844B2 (en) | 2000-04-05 | 2007-02-06 | The Charles Stark Draper Laboratory, Inc. | Apparatus and method for measuring the mass of a substance |
| US9762204B2 (en) | 2003-02-12 | 2017-09-12 | Attana Ab | Piezoelectric resonator |
| JP2013228411A (en) * | 2013-08-14 | 2013-11-07 | Fujitsu Ltd | Atmosphere analyzer |
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