JPH02115565U - - Google Patents

Info

Publication number
JPH02115565U
JPH02115565U JP2149689U JP2149689U JPH02115565U JP H02115565 U JPH02115565 U JP H02115565U JP 2149689 U JP2149689 U JP 2149689U JP 2149689 U JP2149689 U JP 2149689U JP H02115565 U JPH02115565 U JP H02115565U
Authority
JP
Japan
Prior art keywords
sample
magnetic material
sample dish
vibrating
dish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2149689U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2149689U priority Critical patent/JPH02115565U/ja
Publication of JPH02115565U publication Critical patent/JPH02115565U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す説明図、第２
図、第３図及び第４図はそれぞれ本考案の他の実
施例を示す説明図、第５図は本考案の実施例にお
ける試料皿の一例の構造を示す説明図、第６図は
従来のマイクロ波ＣＶＤ装置において採られてき
た撹拌手段の一例を示す説明図である。 １……試料皿、２……粉状試料、４……軸、５
……磁性体、６……電磁石、７……反応管、８…
…導波管、９……試料投入口、１０……キヤツプ
、１１ａ，１１ｂ……パツキン、１２……軸シー
ル、１３……昇降装置、１４……反応ガス導入口
、１５……排気装置、１６……バイブレータ、１
７……接触子、１８……アプリケータ。なお図中
同一符号は同一または相当するものを示す。 Fig. 1 is an explanatory diagram showing one embodiment of the present invention;
3 and 4 are explanatory diagrams showing other embodiments of the present invention, FIG. 5 is an explanatory diagram showing the structure of an example of a sample dish in the embodiment of the present invention, and FIG. FIG. 2 is an explanatory diagram showing an example of a stirring means used in a microwave CVD apparatus. 1...Sample plate, 2...Powdered sample, 4...Shaft, 5
...Magnetic material, 6...Electromagnet, 7...Reaction tube, 8...
... Waveguide, 9 ... Sample input port, 10 ... Cap, 11a, 11b ... Packing, 12 ... Shaft seal, 13 ... Lifting device, 14 ... Reaction gas inlet, 15 ... Exhaust device, 16...vibrator, 1
7... Contactor, 18... Applicator. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【実用新案登録請求の範囲】 (1) 真空反応管に反応ガスを流すとともにマイ
クロ波を導入してプラズマを発生させ、このプラ
ズマの領域内で試料皿に入れた粉状試料を上記反
応ガスと気相化学反応させるマイクロ波ＣＶＤ装
置において、上記試料皿を振動させて該試料皿内
の粉状試料を撹拌する手段を設けたことを特徴と
するマイクロ波ＣＶＤ装置。 (2) 試料皿を振動させる手段として、試料皿を
支える軸に磁性体を装着するかあるいは軸自体を
磁性体とし、該磁性体の周囲に該磁性体に振動を
発生させる電磁石を配置したことを特徴とする請
求項第１項記載のマイクロ波ＣＶＤ装置。 (3) 試料皿を振動させる手段として、試料皿を
支える軸に接触子を介してバイブレータを接続し
たことを特徴とする請求項第１項記載のマイクロ
波ＣＶＤ装置。 (4) 試料皿の内部底面部をすりばち状にしたこ
とを特徴とする請求項第１項記載のマイクロ波Ｃ
ＶＤ装置。[Claims for Utility Model Registration] (1) Plasma is generated by flowing a reaction gas into a vacuum reaction tube and introducing microwaves, and a powdered sample placed in a sample dish is exposed to the reaction gas within the area of this plasma. A microwave CVD apparatus for carrying out a gas phase chemical reaction, characterized in that a means is provided for vibrating the sample dish to stir the powdered sample in the sample dish. (2) As a means of vibrating the sample dish, a magnetic material is attached to the shaft supporting the sample dish, or the shaft itself is made of a magnetic material, and an electromagnet is placed around the magnetic material to generate vibrations in the magnetic material. The microwave CVD apparatus according to claim 1, characterized in that: (3) The microwave CVD apparatus according to claim 1, wherein a vibrator is connected to the shaft supporting the sample plate via a contact as means for vibrating the sample plate. (4) The microwave C according to claim 1, characterized in that the inner bottom of the sample dish is shaped like a mortar.
VD device.
JP2149689U 1989-02-28 1989-02-28 Pending JPH02115565U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2149689U JPH02115565U (en) 1989-02-28 1989-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2149689U JPH02115565U (en) 1989-02-28 1989-02-28

Publications (1)

Publication Number Publication Date
JPH02115565U true JPH02115565U (en) 1990-09-17

Family

ID=31238786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2149689U Pending JPH02115565U (en) 1989-02-28 1989-02-28

Country Status (1)

Country Link
JP (1) JPH02115565U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08176540A (en) * 1994-12-27 1996-07-09 Nec Kansai Ltd Coating treatment of fluorescent substance for diffused electro-luminescence
JP2019530798A (en) * 2016-09-16 2019-10-24 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Particle coating by atomic layer deposition (ALD)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58141375A (en) * 1982-02-15 1983-08-22 Takashi Hirate Powder coating device
JPH01247503A (en) * 1988-03-30 1989-10-03 Tdk Corp Magnetic particles and production thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58141375A (en) * 1982-02-15 1983-08-22 Takashi Hirate Powder coating device
JPH01247503A (en) * 1988-03-30 1989-10-03 Tdk Corp Magnetic particles and production thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08176540A (en) * 1994-12-27 1996-07-09 Nec Kansai Ltd Coating treatment of fluorescent substance for diffused electro-luminescence
JP2019530798A (en) * 2016-09-16 2019-10-24 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Particle coating by atomic layer deposition (ALD)
US11261526B2 (en) 2016-09-16 2022-03-01 Picosun Oy Particle coating
JP2022095904A (en) * 2016-09-16 2022-06-28 ピコサン オーワイ Particle coating by atomic layer deposition (ald)

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