JPH02107788U - - Google Patents
Info
- Publication number
- JPH02107788U JPH02107788U JP1723989U JP1723989U JPH02107788U JP H02107788 U JPH02107788 U JP H02107788U JP 1723989 U JP1723989 U JP 1723989U JP 1723989 U JP1723989 U JP 1723989U JP H02107788 U JPH02107788 U JP H02107788U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- blades
- threaded portion
- drive unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案によるターボ分子ポンプのロ
ータの全体概略図、第２図は従来のロータの全体
概略図、第３図は従来例のターボ分子ポンプを主
要部のみ断面した全体概略図である。
２…ロータ、３…翼、３′…ねじ部、５…ねじ
山、６…ねじ溝、δ…隙間。
Fig. 1 is an overall schematic diagram of the rotor of the turbo-molecular pump according to this invention, Fig. 2 is an overall schematic diagram of a conventional rotor, and Fig. 3 is an overall schematic diagram of a conventional turbo-molecular pump with only the main parts sectioned. . 2...Rotor, 3...Blade, 3'...Threaded portion, 5...Thread thread, 6...Thread groove, δ...Gap.
Claims (1)
より連結され所定の傾斜の翼を有する上部ロータ
、この上部ロータとは逆の傾斜の翼を有する上部
ステータ、上部ロータの下方に設けられ螺旋状の
ねじ部から成る下部ロータ、及びその外周に嵌装
され上部ステータの下方に設けられた下部ステー
タから成るロータ及びステータと、これらを収納
するハウジングとを備え、 前記下部ロータのねじ部溝深さを一定とし、そ
の溝幅を低真空側へ進むにつれて狭くなるように
形成して成るターボ分子ポンプ。[Claims for Utility Model Registration] A drive unit that provides rotational force, an upper rotor connected to the drive unit by a main shaft and having blades at a predetermined inclination, an upper stator having blades at an opposite inclination to that of the upper rotor, and an upper part. A lower rotor comprising a spiral threaded portion provided below the rotor, a lower stator fitted around the outer periphery of the lower rotor and provided below the upper stator, and a housing housing the rotor and stator; A turbo-molecular pump in which the depth of the groove in the threaded portion of the lower rotor is constant, and the width of the groove becomes narrower toward the low vacuum side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723989U JPH02107788U (en) | 1989-02-16 | 1989-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723989U JPH02107788U (en) | 1989-02-16 | 1989-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02107788U true JPH02107788U (en) | 1990-08-28 |
Family
ID=31230845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1723989U Pending JPH02107788U (en) | 1989-02-16 | 1989-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02107788U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015001911A1 (en) * | 2013-07-05 | 2015-01-08 | エドワーズ株式会社 | Vacuum pump |
-
1989
- 1989-02-16 JP JP1723989U patent/JPH02107788U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015001911A1 (en) * | 2013-07-05 | 2015-01-08 | エドワーズ株式会社 | Vacuum pump |
| JP2015014259A (en) * | 2013-07-05 | 2015-01-22 | エドワーズ株式会社 | Vacuum pump |
| CN105324578A (en) * | 2013-07-05 | 2016-02-10 | 埃地沃兹日本有限公司 | Vacuum pump |
| KR20160029733A (en) * | 2013-07-05 | 2016-03-15 | 에드워즈 가부시키가이샤 | Vacuum pump |
| CN105324578B (en) * | 2013-07-05 | 2018-05-15 | 埃地沃兹日本有限公司 | Vacuum pump |
| US10260509B2 (en) | 2013-07-05 | 2019-04-16 | Edwards Japan Limited | Vacuum pump |