JPH02101975A - Drive circuit for ultrasonic motor - Google Patents
Drive circuit for ultrasonic motorInfo
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- JPH02101975A JPH02101975A JP63255129A JP25512988A JPH02101975A JP H02101975 A JPH02101975 A JP H02101975A JP 63255129 A JP63255129 A JP 63255129A JP 25512988 A JP25512988 A JP 25512988A JP H02101975 A JPH02101975 A JP H02101975A
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- ultrasonic motor
- circuit
- voltage
- frequency
- drive
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- 230000010356 wave oscillation Effects 0.000 claims abstract description 4
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 230000010355 oscillation Effects 0.000 claims description 7
- 230000000875 corresponding effect Effects 0.000 abstract 2
- 230000001276 controlling effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
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Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁歪、電歪、圧電体等の電気−機械変換子を
用いて駆動力を発生する超音波モータの駆動回路に関す
る。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a driving circuit for an ultrasonic motor that generates driving force using an electro-mechanical transducer such as magnetostrictive, electrostrictive or piezoelectric material.
従来の技術
従来第４図に示す如く、超音波モータにおける速度制御
装置として、特願昭６１−３１２１２７号が提案されて
いる。2. Description of the Related Art As shown in FIG. 4, a speed control device for an ultrasonic motor has been proposed in Japanese Patent Application No. 61-312127.
すなわち、固定子４を構成する圧電体１，２へ高周波電
圧を印加するスイッチング回路４１．４２と、そのスイ
ッチング回路４１．４２に速度指令に対応する直流電圧
を供給する電圧−電圧変換回路４３を備え、また、圧電
体１，２に印加する電圧と圧電体の機械振動に関与する
電流との位相差を一定にするように制御する可変発振回
路４４を備えたもので、圧電体１，２に印加する電圧の
振幅Ｖｃを可変して超音波モータ８の回転速度を制御す
るものである。つまり、圧電体に印加する電圧と圧電体
の機械撮動に関与する電流とを検出して、この２つの位
相差を一定にするよう周波数を自動的に変える可変発振
回路４４で出力された信号の一方を直接スイッチング回
路４１に入力し、他の一方を任意の位相差だけ移相回路
４５で位相差を生じさせたのちにスイッチング回路４２
に入力して、それぞれの信号をスイッチング回路４１及
び４２で信号増幅し、その出力を圧電体１及び２に印加
する。そしてスイッチング回路４１及び４２に供給する
電圧は、電源４６から電圧−電圧変換回路４３で前記電
圧ＶＢをパルス振幅変調して得られる電圧Ｖｃを供給す
る構成となっている。That is, a switching circuit 41.42 applies a high frequency voltage to the piezoelectric bodies 1 and 2 constituting the stator 4, and a voltage-voltage conversion circuit 43 supplies a DC voltage corresponding to a speed command to the switching circuit 41.42. It is also equipped with a variable oscillation circuit 44 that controls the phase difference between the voltage applied to the piezoelectric bodies 1 and 2 and the current involved in the mechanical vibration of the piezoelectric bodies to be constant. The rotational speed of the ultrasonic motor 8 is controlled by varying the amplitude Vc of the voltage applied to the ultrasonic motor 8. In other words, the signal output by the variable oscillation circuit 44 detects the voltage applied to the piezoelectric body and the current involved in mechanical imaging of the piezoelectric body, and automatically changes the frequency so as to keep the phase difference between the two constant. One side is directly input to the switching circuit 41, and the other side is input to the switching circuit 42 after a phase difference is generated by a phase shift circuit 45 by an arbitrary phase difference.
, the respective signals are amplified by switching circuits 41 and 42, and the outputs thereof are applied to piezoelectric bodies 1 and 2. The voltage supplied to the switching circuits 41 and 42 is a voltage Vc obtained by pulse amplitude modulating the voltage VB in a voltage-voltage conversion circuit 43 from a power supply 46.
なお、第４図において、４７はモータ出力を検出するセ
ンサー、４８は周波数−電圧変換回路、４９は基準信号
発振回路である。In FIG. 4, 47 is a sensor for detecting the motor output, 48 is a frequency-voltage conversion circuit, and 49 is a reference signal oscillation circuit.
発明が解決しようとする課題
上述のように従来の構成においては、超音波モータの回
転速度を制御する手段として、（１）圧電体に高周波電
圧を印加するスイッチング回路、
■圧電体に印加する電圧を制御する電圧−電圧変換回路
の２つの電力変換回路が必要であった。Problems to be Solved by the Invention As mentioned above, in the conventional configuration, as means for controlling the rotational speed of the ultrasonic motor, (1) a switching circuit that applies a high frequency voltage to the piezoelectric body; Two power conversion circuits were required: a voltage-to-voltage conversion circuit to control the voltage-to-voltage conversion circuit.
そこで超音波モータを電池駆動のカメラレンズのフォー
カス制御用等に応用すると、
■ ２つの電力変換回路が必要で回路効率が悪い。Therefore, if an ultrasonic motor is applied to focus control of a battery-powered camera lens, etc., two power conversion circuits are required, resulting in poor circuit efficiency.
■小スペースでない。■It's not a small space.
■価格が高い。■The price is high.
等の課題がある。There are other issues.
なお、上記従来の構成は、第２図（Ａ）に示すＰＡＭ方
式（パルス高変調方式）による例であるがこのＰＡＭ方
式以外に第２図（Ｂ）に示すようなＳＩＮ波駆動駆動方
式２図（Ｃ）、（Ｄ）に示すＰＷＭ方式（パルス幅変調
方式）による駆動が考えられるが、これらの方式におい
ては下記する欠点がある。The above conventional configuration is an example using the PAM method (pulse height modulation method) shown in FIG. 2(A), but in addition to this PAM method, the SIN wave drive drive method 2 shown in FIG. 2(B) Driving using the PWM method (pulse width modulation method) shown in FIGS. (C) and (D) can be considered, but these methods have the following drawbacks.
（Ｂ）ＳＩＮ波駆動
駆動電圧波形としては理想的ではあるが、駆動回路が高
価となり実用的でない。(B) SIN wave drive Although this is an ideal drive voltage waveform, the drive circuit becomes expensive and is not practical.
（Ｃ）ＰＷＭ−１（パルス幅変調方式）ｆｃのキャリア
ー周波数でＰＷＭ制御するもので、上記従来例に示す構
成に比べて電圧−電圧変換回路が省略できる利点がある
が、チョッピング周波数ｆｃによる不要振動の発生、お
よび超音波モータ駆動周波数ｆＯとチョッピング周波数
ｆｃとの共鳴による音の発生等を解決するためには、ｆ
ｃをｆｏの約２０倍以上に設計する必要がある。(C) PWM-1 (pulse width modulation method) PWM control is performed using the carrier frequency of fc, which has the advantage of omitting the voltage-voltage conversion circuit compared to the configuration shown in the conventional example above, but is unnecessary due to the chopping frequency fc. In order to solve the generation of vibrations and the generation of sound due to resonance between the ultrasonic motor drive frequency fO and the chopping frequency fc, f
It is necessary to design c to be about 20 times or more than fo.
しかし、ｆＯを４０ｋＨｚとするとｆｃ＝８００ｋＨｚ
となり、高周波でのチョッパー回路が必要となり、価格
上の問題がある。However, if fO is 40kHz, fc=800kHz
Therefore, a high frequency chopper circuit is required, which poses a cost problem.
（Ｄ）ＰＷＭ−２
駆動周波数ｆＯでＰＷＭ制御するもので、この場合ＰＷ
Ｍ出力波形の矩形波の幅に応じて、基本波成分子ｏの位
相が変わることになり、超音波モータへの応用は不可と
なる。(D) PWM-2 PWM control is performed at the drive frequency fO, in this case PWM-2
The phase of the fundamental wave component element o changes depending on the width of the rectangular wave of the M output waveform, making application to an ultrasonic motor impossible.
本発明は、上述の点に鑑みてなされたもので、簡単な構
成にてモータに加わる負荷や周囲条件の変化に対して安
定した実用的な超音波モータの駆動回路さらに駆動用Ｉ
Ｃを提供しようというものである。The present invention has been made in view of the above-mentioned points, and includes a practical ultrasonic motor drive circuit that has a simple configuration and is stable against changes in the load applied to the motor and surrounding conditions.
The aim is to provide C.
課題を解決するための手段
そこで本発明は、モータの共振状態を検出する回路と、
共振状態に応じて駆動周波数を制御する可変三角波発振
回路と、この三角波をキャリアーとするパルス幅変調の
コンパレータと、前記パルス幅変調波形に応じて、電圧
を印加するスイッチング回路とを備えた同期ＰＷＭ方式
としたものである。Means for Solving the Problems The present invention provides a circuit for detecting the resonance state of a motor;
A synchronous PWM comprising a variable triangular wave oscillation circuit that controls a drive frequency according to a resonance state, a pulse width modulation comparator that uses this triangular wave as a carrier, and a switching circuit that applies a voltage according to the pulse width modulation waveform. This is a method.
作用
以上本発明に係る同期ＰＷＭ方式は、第２図（Ｅ）に示
す如（駆動周波数ｆｏに同期しながら、パルス幅を可変
することによって超音波モータに印加する電圧を可変し
、回転速度を制御することができる。As shown in FIG. 2(E), the synchronous PWM method according to the present invention changes the voltage applied to the ultrasonic motor by varying the pulse width while synchronizing with the drive frequency fo, thereby increasing the rotation speed. can be controlled.
実施例
第１図は本発明に係る超音波モータの制御装置の一実施
例を示す。Embodiment FIG. 1 shows an embodiment of an ultrasonic motor control device according to the present invention.
図において、４はディスク型状をした固定子で、該固定
子４にはその表面に分極処理された圧電素子１，２が配
されている。In the figure, reference numeral 4 denotes a disk-shaped stator, and the stator 4 has polarized piezoelectric elements 1 and 2 arranged on its surface.
一方回転子６にライニング５が接着され、加圧装置７に
よって固定子４に圧接され、超音波モータ８が構成され
ている。圧電体１，２には駆動電圧を加える電極が設け
られ、互いに９０’位相の異なる駆動電圧が、電流検出
用抵抗３０．３１を介してスイッチング回路２８．２９
より印加される。On the other hand, a lining 5 is bonded to the rotor 6 and pressed against the stator 4 by a pressure device 7, thereby forming an ultrasonic motor 8. The piezoelectric bodies 1 and 2 are provided with electrodes for applying driving voltages, and the driving voltages having a phase difference of 90' from each other are applied to switching circuits 28 and 29 via current detection resistors 30 and 31.
more applied.
上記電極に９０°位相の異なる駆動電圧が印加されるこ
とによって固定子の表面に進行波を発生し、回転子が回
転する。By applying driving voltages having a phase difference of 90° to the electrodes, traveling waves are generated on the surface of the stator, and the rotor rotates.
位相比較回路（以下ＰＣと称す）１９において、その一
方の入力端子は電圧検出回路２７に接続され、他の一方
の入力端子は電流検出回路２６に接続されて超音波モー
タ８の共振状態を検出する。In the phase comparison circuit (hereinafter referred to as PC) 19, one input terminal is connected to a voltage detection circuit 27, and the other input terminal is connected to a current detection circuit 26 to detect the resonance state of the ultrasonic motor 8. do.
可変三角波発振回路（以下ＶＣｏと称す）２２は、ＰＣ
ｌ３の出力電圧に応じて発振周波数を可変し、常に電圧
と電流の位相差を一定に保つ。The variable triangular wave oscillator circuit (hereinafter referred to as VCo) 22 is a PC
The oscillation frequency is varied according to the output voltage of l3, and the phase difference between voltage and current is always kept constant.
この時発振周波数は駆動周波数ｆｏの２倍に設定してお
き、移相器２３に接続される。At this time, the oscillation frequency is set to twice the drive frequency fo, and is connected to the phase shifter 23.
次にＰＷＭ回路の構成について説明する。Next, the configuration of the PWM circuit will be explained.
超音波モータ８の回転速度を電圧に変換するためエンコ
ーダ等のＦＧ９を介して、周波数−電圧変換回路（以下
ＦＶと称す）１０を構成する。In order to convert the rotation speed of the ultrasonic motor 8 into voltage, a frequency-voltage conversion circuit (hereinafter referred to as FV) 10 is configured via an FG 9 such as an encoder.
誤差増巾器１５はＦＶＩＯの出力電圧と、速度指令電圧
３２の差を増巾し、その出力をＰＷＭコンパレータ１６
，１７の逆相入力端子に接続する。The error amplifier 15 amplifies the difference between the FVIO output voltage and the speed command voltage 32, and the output is sent to the PWM comparator 16.
, 17 are connected to the negative phase input terminals.
一方、ＶＣＯ２２，時定数コンデンサＣＴ２ＯよりＰＷ
Ｍコンパレータ１６の正相入力端子に直接接続し、ＰＷ
Ｍコンパレータ１７には反転アンプ１８を介して接続す
る。On the other hand, from VCO22 and time constant capacitor CT2O, PW
Connect directly to the positive phase input terminal of the M comparator 16, and
It is connected to the M comparator 17 via an inverting amplifier 18.
また、上記移相器２３の出力は、ＶＣＯ２２出力の１／
２の周波数の信号がＯｏと９０°の位相関係で２回路作
られ、それぞれＡＮＤゲート２４゜２５の一方の入力端
子を介してスイッチング回路２８．２９に接続する。Ａ
ＮＤゲートの他方の入力端子には上記ＰＷＭコンパレー
タ１６，１７の出力が接続される。Further, the output of the phase shifter 23 is 1/1/1 of the output of the VCO 22.
Two circuits of signals having a frequency of 0.2 and Oo are created in a phase relationship of 90 degrees, and each is connected to the switching circuits 28 and 29 through one input terminal of the AND gates 24 and 25. A
The outputs of the PWM comparators 16 and 17 are connected to the other input terminal of the ND gate.
また、本実施例に基づき超音波モータ駆動用ＩＣ３３を
構成する。Further, an ultrasonic motor driving IC 33 is configured based on this embodiment.
以下、本発明の実施例の動作について説明する。The operation of the embodiment of the present invention will be described below.
超音波モータの共振周波数は、加わる負荷、あるいは周
囲温度によって変化するため、効率のよい回転を得るた
めには、常に駆動周波数を調整する必要がある。Since the resonant frequency of an ultrasonic motor changes depending on the applied load or the ambient temperature, it is necessary to constantly adjust the driving frequency in order to obtain efficient rotation.
上記の構成によって電圧・電流検出回路２６゜２７、Ｐ
Ｃｌ３、ＶＣＯ２２、移相器２３、スイッチング回路２
８によって閉ループを構成しており、負帰還作用によっ
て電流と電圧の位相が一定になるように作動する。With the above configuration, the voltage/current detection circuit 26゜27,P
Cl3, VCO22, phase shifter 23, switching circuit 2
8 constitutes a closed loop, and operates so that the phases of current and voltage are constant due to negative feedback action.
次にＰＷＭ回路の動作について述べる。Next, the operation of the PWM circuit will be described.
第３図は実施例にもとづ（各部の動作波形である。Ｆは
駆動周波数の基本波成分で、移相器２３の出力め０°相
および９０”相の波形を示す。（Ｇ）。FIG. 3 is based on the example (operating waveforms of each part. F is the fundamental wave component of the drive frequency, and shows the waveforms of the 0° phase and 90'' phase of the output of the phase shifter 23. (G) .
（Ｊ）はそれぞれ移相器２３の出力、（Ｈ）はｖＣＯ２
２の時定数用コンデンサの電圧波形で、駆動周波数の２
倍の周期で対称三角波である。同様に（Ｋ）は反転増巾
器１８により１８０°反転された波形である。(J) is the output of the phase shifter 23, (H) is vCO2
The voltage waveform of the capacitor for the time constant of 2, the driving frequency of 2
It is a symmetrical triangular wave with twice the period. Similarly, (K) is a waveform inverted by 180° by the inverting amplifier 18.
（Ｈ）、（Ｋ）の波形においてＶｓは誤差増巾器１５の
出力波形で、ＰＷＭコバレータ１６．１７の逆相入力端
子に入力され、上記対称三角波と比較される。In the waveforms (H) and (K), Vs is the output waveform of the error amplifier 15, which is input to the negative phase input terminal of the PWM coverter 16.17 and compared with the symmetrical triangular wave.
なお、ＦＧ９．周波数−電圧変換回路（Ｆｖ）１０、誤
差増幅器１５．抵抗器１１．１４．コンデンサ１３によ
って閉ループを構成しており、負帰還作用によって、速
度指令に基づいて回転速度を制御する。In addition, FG9. Frequency-voltage conversion circuit (Fv) 10, error amplifier 15. Resistor 11.14. A closed loop is formed by the capacitor 13, and the rotational speed is controlled based on the speed command by a negative feedback effect.
（Ｊ）、（Ｌ）はＰＷＭコンパレータの出力がＡＮＤゲ
ートを通過した波形である。なお、本実施例は（Ｆ）の
基本波成分の内（＋）側の動作を示す。(J) and (L) are waveforms obtained by passing the output of the PWM comparator through an AND gate. Note that this embodiment shows the operation of the (+) side of the fundamental wave component of (F).
（−）側は同様の構成で発生することができ、（■）（
Ｌ）に示す波形となる。The (−) side can occur in a similar configuration, and (■) (
The waveform is shown in L).
以上の説明で明らかなように、超音波モータ特有の駆動
周波数が変わっても、同−Ｖｓにもががわらず、ＰＷＭ
コンパレータの出力のデユーティ比は変わらない。As is clear from the above explanation, even if the drive frequency specific to the ultrasonic motor changes, PWM
The duty ratio of the comparator output remains unchanged.
発明の効果
以上、本発明に係る超音波モータの駆動回路にあっては
、駆動電圧と電流の位相関係が、常に共振状態の位相関
係となるよう、周波数を決定しているので、簡単な構成
にて、高精度でモータを共振駆動させることが可能であ
る。As described above, in the ultrasonic motor drive circuit according to the present invention, the frequency is determined so that the phase relationship between the drive voltage and the current is always in a resonant state, so the configuration is simple. It is possible to drive the motor resonantly with high precision.
また、ｖＣＯの時定数用コンデンサの電圧波形をそのま
まＰＷＭコンパレータの比較入力に利用することによっ
て、ＰＷＭ用の発振器が省略でき、駆動周波数が変わっ
ても同期して、ＰＷＭコンパレータ出力の周波数を変え
ることができる。In addition, by using the voltage waveform of the vCO time constant capacitor as it is for the comparison input of the PWM comparator, the PWM oscillator can be omitted, and even if the drive frequency changes, the frequency of the PWM comparator output can be changed in synchronization. Can be done.
また、ｖＣＯの発振周波数を駆動周波数の２倍に設定す
ると、その時定数用コンデンサの電圧波形と、反転した
電圧波形を利用して、９０°それぞれ位相差のあるＰＷ
Ｍ波形を作ることができる。In addition, when the oscillation frequency of vCO is set to twice the drive frequency, the voltage waveform of the time constant capacitor and the inverted voltage waveform are used to generate a PW signal with a phase difference of 90 degrees.
M waveforms can be created.
また、速度制御に係り、電圧−電圧変換回路を省略した
、駆動用ＩＣが開発できた。Furthermore, regarding speed control, we were able to develop a driving IC that omitted a voltage-voltage conversion circuit.
第１図は本発明の一実施例を示す超音波モータの駆動回
路のブロック図、第２図は各駆動方式を示す説明図、第
３図は第１図に示す駆動回路の各部の動作波形図、第４
図は従来例のブロック図である。
８・・・・・・超音波モータ、１４・・・・・・誤差増
巾器、１６．１７・・・・・・ＰＷＭコンパレータ、１
９・・・・・・位相比較回路（ＰＣ） 、２２・・・・
・・可変三角波発振回路（ＶＣＯ） 、２３・・・・・
・移相器、２４．２５・・・・・・Ａ、 Ｎ Ｄゲート
、２８．２９・・・・・・スイッチング回路、３３・・
・・・・駆動用ＩＣ。
第
図
ど−一一′−−−−＼
璧Fig. 1 is a block diagram of an ultrasonic motor drive circuit showing an embodiment of the present invention, Fig. 2 is an explanatory diagram showing each drive method, and Fig. 3 is an operating waveform of each part of the drive circuit shown in Fig. 1. Figure, 4th
The figure is a block diagram of a conventional example. 8... Ultrasonic motor, 14... Error amplifier, 16.17... PWM comparator, 1
9... Phase comparator circuit (PC), 22...
...Variable triangular wave oscillator circuit (VCO), 23...
・Phase shifter, 24.25...A, ND gate, 28.29...Switching circuit, 33...
...Drive IC. Figure 11′---＼
Claims (1)
異なる電圧を印加することによって、固定子に進行波を
発生させ、回転子を駆動する超音波モータの駆動回路に
おいて、モータの共振状態を検出する回路と、共振状態
に応じて駆動周波数を制御する可変三角波発振回路と、
この三角波をキャリアーとするパルス幅変調のコンパレ
ータと、前記パルス幅変調波形に応じて、電圧を印加す
るスイッチング回路よりなる超音波モータの駆動回路。 ２ 可変三角波発振回路の発振周波数は、駆動周波数の
２倍に構成した請求項（１）記載の超音波モータの駆動
回路。(1) By applying voltages with different phases to the electric-mechanical energy conversion elements, a traveling wave is generated in the stator, and the resonance state of the motor is detected in the drive circuit of the ultrasonic motor that drives the rotor. circuit, a variable triangular wave oscillation circuit that controls the drive frequency according to the resonance state,
An ultrasonic motor drive circuit comprising a pulse width modulated comparator using this triangular wave as a carrier, and a switching circuit that applies a voltage according to the pulse width modulated waveform. 2. The ultrasonic motor drive circuit according to claim 1, wherein the oscillation frequency of the variable triangular wave oscillation circuit is twice the drive frequency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63255129A JPH02101975A (en) | 1988-10-11 | 1988-10-11 | Drive circuit for ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63255129A JPH02101975A (en) | 1988-10-11 | 1988-10-11 | Drive circuit for ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02101975A true JPH02101975A (en) | 1990-04-13 |
Family
ID=17274492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63255129A Pending JPH02101975A (en) | 1988-10-11 | 1988-10-11 | Drive circuit for ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02101975A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0602635A1 (en) * | 1992-12-16 | 1994-06-22 | Matsushita Electric Industrial Co., Ltd. | A method and an apparatus for controlling a moving velocity of an ultrasonic motor |
| US5644199A (en) * | 1994-07-20 | 1997-07-01 | Matsushita Electric Industrial Co., Ltd. | Method for driving an ultrasonic motor |
| JP2008236834A (en) * | 2007-03-16 | 2008-10-02 | Olympus Corp | Driver and driving method of ultrasonic motor |
| JP2011239621A (en) * | 2010-05-13 | 2011-11-24 | Kobe Steel Ltd | Magneto-striction type ultrasonic motor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60176470A (en) * | 1984-02-21 | 1985-09-10 | Canon Inc | Drive system of vibration wave motor |
| JPS6323572A (en) * | 1986-07-14 | 1988-01-30 | Canon Inc | Drive circuit for oscillatory wave motor |
-
1988
- 1988-10-11 JP JP63255129A patent/JPH02101975A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60176470A (en) * | 1984-02-21 | 1985-09-10 | Canon Inc | Drive system of vibration wave motor |
| JPS6323572A (en) * | 1986-07-14 | 1988-01-30 | Canon Inc | Drive circuit for oscillatory wave motor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0602635A1 (en) * | 1992-12-16 | 1994-06-22 | Matsushita Electric Industrial Co., Ltd. | A method and an apparatus for controlling a moving velocity of an ultrasonic motor |
| US5461273A (en) * | 1992-12-16 | 1995-10-24 | Matsushita Electric Industrial Co., Ltd. | Method and an apparatus for controlling a moving velocity of an ultrasonic motor |
| US5644199A (en) * | 1994-07-20 | 1997-07-01 | Matsushita Electric Industrial Co., Ltd. | Method for driving an ultrasonic motor |
| JP2008236834A (en) * | 2007-03-16 | 2008-10-02 | Olympus Corp | Driver and driving method of ultrasonic motor |
| JP2011239621A (en) * | 2010-05-13 | 2011-11-24 | Kobe Steel Ltd | Magneto-striction type ultrasonic motor |
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