JPH0196816A - Cylinder motor - Google Patents

Cylinder motor

Info

Publication number
JPH0196816A
JPH0196816A JP25365887A JP25365887A JPH0196816A JP H0196816 A JPH0196816 A JP H0196816A JP 25365887 A JP25365887 A JP 25365887A JP 25365887 A JP25365887 A JP 25365887A JP H0196816 A JPH0196816 A JP H0196816A
Authority
JP
Japan
Prior art keywords
cylinder
amplifier
motor
brush
slip ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25365887A
Other languages
Japanese (ja)
Inventor
Tomohito Yamashita
智史 山下
Masaharu Ono
正治 小野
Saburo Kazama
風間 三郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP25365887A priority Critical patent/JPH0196816A/en
Publication of JPH0196816A publication Critical patent/JPH0196816A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/12Disposition of constructional parts in the apparatus, e.g. of power supply, of modules
    • G11B33/121Disposition of constructional parts in the apparatus, e.g. of power supply, of modules the apparatus comprising a single recording/reproducing device
    • G11B33/122Arrangements for providing electrical connections, e.g. connectors, cables, switches
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/52Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with simultaneous movement of head and record carrier, e.g. rotation of head
    • G11B5/53Disposition or mounting of heads on rotating support

Landscapes

  • Recording Or Reproducing By Magnetic Means (AREA)

Abstract

PURPOSE:To make a frequency band into a wide band, to make a reproducing output into a high output and to improve an S/N by making the construction of a cylinder motor into a shaft fixing and upper cylinder rotation system and mounting the amplifier to the cylinder to supply an electric power to an amplifier with a brush and a slip ring. CONSTITUTION:By a lower cylinder 2 of a cylinder motor such as VTR, the traveling of a recording body is guided, a shaft 3 is fixed directly or indirectly to the low surface center of the cylinder 2 and an upper cylinder 1 is freely rotatably engaged through a bearing 4 around the shaft 3. At the outer margin of the cylinder 1, a rotary head 17 is fixed and a rotor yoke 10, a rotating yoke, etc., are arranged in a space between both cylinders 1 and 2. An amplifier 8 is mounted at a substrate 7 arranged to the cylinder 1 and a slip ring 5 is connected through a brush 6 to the amplifier 8. From the slip ring 5 through the brush 6, an electric power is supplied from a connecting terminal 14 to the cylinder 1 side, the amplifier 8 is operated and a reproducing signal from the head 17 is amplified.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はVTR,DAT等において、信号を記録、再生
するシリンダモータに係り、特に高性態機用lこ最適な
シリンダモータに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cylinder motor for recording and reproducing signals in VTRs, DATs, etc., and particularly relates to a cylinder motor most suitable for high performance machines.

〔従来の技術〕[Conventional technology]

従来のシリンダモータは、特開昭55−55007号に
記載の様に、上シリンダに取り付けられた回転ヘッドに
より、テープ等の記録媒体から記録信号を再生し、この
再生信号をロータリトランスを介してシリンダモータの
外部に設けられた増幅回路により増幅させた後ζこ回路
へ送る構成となっていた。
As described in Japanese Patent Application Laid-Open No. 55-55007, a conventional cylinder motor reproduces a recorded signal from a recording medium such as a tape using a rotating head attached to an upper cylinder, and transmits this reproduced signal via a rotary transformer. The configuration was such that the signal was amplified by an amplifier circuit provided outside the cylinder motor and then sent to the circuit.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来構成の配線図を第4図に示す。また回転ヘッド
で検出した再生信号の周波数特性を第5図1こ示す。図
中のtoは共振周波数でfAまでが周波数帯域となる。
A wiring diagram of the conventional configuration described above is shown in FIG. Further, the frequency characteristics of the reproduced signal detected by the rotary head are shown in FIG. In the figure, to is the resonant frequency, and the frequency band extends up to fA.

第4図に示す様ζこ、従来構成では回転ヘッド17カ)
ら増幅器8までの距離が長く、蔵開容量の値が大きく、
このために共振周波数foを高くすることができず、周
波数帯域を広帯域化できない原因となっていた。また共
振周波数foをある値に設定した場合も、線間容量の値
が大きいために回転ヘッド17の巻線インダクタンスの
値が小さくなり、再生出力が小さくなるといった問題が
あった。さらに再生出力が小さいため、外部からの飛び
込みノイズによりS/N比が劣化する原因にもなってい
た。
As shown in Figure 4, the conventional configuration has 17 rotating heads)
The distance from the amplifier 8 to the amplifier 8 is long, and the value of the storage and opening capacitance is large.
For this reason, the resonant frequency fo cannot be increased, which is the cause of the inability to widen the frequency band. Further, even when the resonant frequency fo is set to a certain value, there is a problem in that the value of the winding inductance of the rotary head 17 is reduced due to the large value of the line capacitance, and the reproduction output is reduced. Furthermore, since the reproduction output is small, the S/N ratio deteriorates due to noise coming in from the outside.

また、上シリンダに増幅器を搭載した、軸回転上シリン
ダ回転方式のシリンダモータがあるが、振動が大きく、
このためlこブラシとスリップリングの接触性が悪く、
信頼性に欠けていた。さらに軸回転のため構造が大型化
し、薄形高性能シリンダモータの実現が困難であった。
In addition, there is a cylinder motor with an amplifier mounted on the upper cylinder that uses a shaft-rotating upper cylinder rotation system, but it generates large vibrations and
For this reason, the contact between the lubricant brush and the slip ring is poor.
It lacked reliability. Furthermore, the structure became larger due to the rotation of the shaft, making it difficult to realize a thin, high-performance cylinder motor.

本発明の目的は、周波数帯域の広帯域化、再生出力の高
出力化、S/N比の向上、さらIζ低振動で高信頼性、
薄形高性能シリンダモータを実現することにある。
The purpose of the present invention is to widen the frequency band, increase the reproduction output, improve the S/N ratio, and further achieve high reliability with low Iζ vibration.
The goal is to realize a thin, high-performance cylinder motor.

C問題点を解決するための手段〕 上記目的は、シリンダモータの構造を軸固定。Measures to solve problem C] The above purpose is to fix the shaft of the cylinder motor structure.

上シリンダ回転方式とし、増幅器を上口クリ/ダlこ搭
載することfこより達成される。かかる構造にするため
、上シリンダに設けられた増幅器(こ電力を供給する手
段として、上シリンダと固定側にブラシ、スリップリン
グを設け、これらブラシとスリップリングを接触させ、
上シリンダに電力を供給し、増幅器を動作させる。これ
により線間容量を大幅に低減できるため、再生信号の広
帯域化。
This is achieved by using an upper cylinder rotation system and mounting the amplifier on the upper cylinder. In order to achieve such a structure, an amplifier provided in the upper cylinder (as a means for supplying this power, a brush and a slip ring are provided on the upper cylinder and the fixed side, and these brushes and the slip ring are brought into contact with each other,
Supply power to the upper cylinder and operate the amplifier. This allows for a significant reduction in line capacitance, resulting in a wider range of reproduced signals.

高出力化、S/N比の向上が図られ、さらlこ低振動で
薄形シリンダ構造のシリンダモータができる。
A cylinder motor with a thin cylinder structure with high output and improved S/N ratio and low vibration can be created.

〔作用〕[Effect]

本発明のシリンダモータは、軸固定、上シリンダ回転方
式で、上シリンダ部に増幅器を搭載し、スリップリング
、ブラシを介し、増幅器lこ電力を入力する。この増幅
器で回転ヘッドで検出した再生信号を増幅した後(ζ、
ロータリトランスを介し外部の回路に伝送する。これに
より増幅器の入力端から見た線間容量を大幅に低減でき
、共振周波数foの値を高くすることができる。このた
め従来と同じインダクタンスの回転ヘッドを用いた場合
、再生信号の周波数帯域が大きくなる。また共振周波数
fOを同じ値としたとき、従来と比べ回転ヘッドの巻線
インダクタンスの値を大きくできるので、再生出力を大
きくすることができる。このためにノイズに対するS/
N比を向上することができる。
The cylinder motor of the present invention has a fixed shaft and a rotating upper cylinder. An amplifier is mounted on the upper cylinder, and power is input to the amplifier via a slip ring and a brush. After amplifying the reproduced signal detected by the rotating head with this amplifier (ζ,
Transmitted to external circuit via rotary transformer. As a result, the line capacitance seen from the input end of the amplifier can be significantly reduced, and the value of the resonant frequency fo can be increased. For this reason, when a rotary head with the same inductance as the conventional one is used, the frequency band of the reproduced signal becomes large. Further, when the resonance frequency fO is set to the same value, the value of the winding inductance of the rotary head can be increased compared to the conventional one, so that the reproduction output can be increased. For this reason, S/
The N ratio can be improved.

さらに軸固定、上シリンダ回転方式であるため、振動が
小さく、ブラシとスリップリングの接触を確実にでき信
頼性が向上する七ともに、容易に薄形シリンダ構造にす
ることができる。
Furthermore, since the shaft is fixed and the upper cylinder rotates, vibration is small, the contact between the brush and the slip ring is ensured, and reliability is improved.In addition, a thin cylinder structure can be easily achieved.

〔実施例〕〔Example〕

以下、本発明の実施例を図に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.

第1図は本発明のシリンダモータの第1実施例図で、回
転体への寛力供給部は下シリンダ2(固定側)をこ固定
された軸3の上方にスリップリング5を取り付け、これ
lこブラシ6を接触させたいわゆるブラシ回転式構造で
ある。このブラシ6は上シリンダ1上面lこ取り付けら
れた基板7に固定されており、上シリンダ1が回転する
ことにより、スリップリング5の側面に接触しながら回
転する。
FIG. 1 shows a first embodiment of a cylinder motor according to the present invention, in which a slip ring 5 is attached above a shaft 3 to which a lower cylinder 2 (fixed side) is fixed. This is a so-called brush rotating structure in which a single brush 6 is brought into contact. This brush 6 is fixed to a substrate 7 attached to the upper surface of the upper cylinder 1, and rotates while contacting the side surface of the slip ring 5 as the upper cylinder 1 rotates.

基板7上にはヘッド17からの再生信号用増幅器8が設
けられている。上記上シリンダ1は軸受4により回転自
在に軸3に支承されたロータヨーク1゜さこれlこ貼り
付けられたマグネット11とから成る回転子を、これに
対向して設けられたコイル12に制御給電することによ
り回転駆動させる。
An amplifier 8 for reproduced signals from the head 17 is provided on the substrate 7 . The upper cylinder 1 has a rotor that is rotatably supported on a shaft 3 by a bearing 4 and a rotor yoke 1, and a magnet 11 attached to the rotor yoke 1. Controlled power is supplied to a coil 12 provided opposite the rotor yoke. It is rotated by doing this.

本実施例は上記スリップリング5からブラシ6を介し、
接続端子14より電力を上シリンダ1側Iこ供給し、基
板7上に設けられた増幅器を動作させる。回転ヘッド1
7で検出した再生信号そ上記増幅器8で増幅した後、ロ
ータリトランス9により外部の回路に伝送し復調する。
In this embodiment, from the slip ring 5 through the brush 6,
Electric power is supplied from the connection terminal 14 to the upper cylinder 1 side, and the amplifier provided on the board 7 is operated. rotating head 1
After the reproduced signal detected in step 7 is amplified by the amplifier 8, it is transmitted to an external circuit by the rotary transformer 9 and demodulated.

本構造のシリンダモータでは、(1)増幅器8の入力端
から見た線間容量を大幅に低減化できるため、再生信号
の共振周波数を高くすることができ、周波数帯域を広く
するこ七ができるため、高精細な映像を再生することカ
モできる。また回転ヘッド17の巻線インダクタンスの
値を大きくすることができるので再生信号の出力を大き
くすることができ、このためノイズに対するS/N比を
向上させることができる。さらに、(2)@固定、上シ
リンダ回転方式のシリンダモータであるため振動が少な
く、このためにブラシとスリップリングを確実に接触さ
せることができ信頼性が同上するとともに、容易に薄形
シリンダ構造1こすることができる。
With the cylinder motor of this structure, (1) the line capacitance seen from the input end of the amplifier 8 can be significantly reduced, making it possible to increase the resonant frequency of the reproduced signal and widening the frequency band; Therefore, it is possible to play high-definition video. Furthermore, since the value of the winding inductance of the rotary head 17 can be increased, the output of the reproduced signal can be increased, and therefore the S/N ratio with respect to noise can be improved. Furthermore, (2) the cylinder motor is fixed and the upper cylinder rotates, so there is less vibration, which allows the brush and slip ring to come into contact with each other reliably, which increases reliability and allows for easy thin cylinder construction. 1 can be rubbed.

a!2図にスリップリング5及びブラシ6を示す。a! Figure 2 shows the slip ring 5 and brush 6.

(a)図はクリップリング5の側面図で、絶縁部16と
導電部15が重ね合わされて構成されている。伽)図は
ブラシ6の側面図で、このブラシ6七スリツプリング5
を、(c)図の様に接触させて電力を伝送する0 第3図は本発明のシリンダモータの給電方式図である。
(a) is a side view of the clip ring 5, which is constructed by overlapping an insulating part 16 and a conductive part 15. The figure is a side view of the brush 6.
3 is a diagram of the power supply system of the cylinder motor of the present invention.

電源18より供給される゛電力はスリップリング5から
ブラシ6へ伝送され、上シリンダに設けられた増幅器8
に入力される。
Power supplied from the power source 18 is transmitted from the slip ring 5 to the brush 6, and then to the amplifier 8 provided in the upper cylinder.
is input.

第6図は本発明の第2実施例因で、(a)図は側面図、
(b)図は上面図である。本実施例は千面戴のスリップ
リング58軸3の端面に設け、ブラシ6に電力を伝送す
る構造としたことが主な%徴である。
FIG. 6 shows a second embodiment of the present invention, in which (a) is a side view;
(b) is a top view. The main feature of this embodiment is that it has a structure in which a thousand-faced slip ring 58 is provided on the end face of the shaft 3 and transmits electric power to the brush 6.

同心円状に配置された導電部15にブラシ6を接触させ
電力を伝送する。図中19はスルーホールでリード線引
出し用に使う。その他の構成は上記第1実施例と同様で
ある。本実施例Cζおいても、上記WIJ1実施例と同
様の効果を得ることができる。
The brush 6 is brought into contact with the conductive parts 15 arranged concentrically to transmit electric power. In the figure, 19 is a through hole used for drawing out lead wires. The other configurations are the same as those of the first embodiment. In this embodiment Cζ, the same effects as in the above-mentioned WIJ1 embodiment can be obtained.

第7図は本発明の第5実施例図である。本実施例は、固
定側の軸3の先端lζブラシ6を設け、回転側の上シリ
ンダ1に平面型のスリップリング5を設けたことが主な
特徴である。′4源から供給される電力がブラシ6カ)
らクリップリング5へ伝送される構造である。その他の
構成は前記第1実施例と同様である。本実施例において
も、前記第1゜2実施例と同様の効果を得ることができ
る。
FIG. 7 is a diagram showing a fifth embodiment of the present invention. The main feature of this embodiment is that a brush 6 is provided at the tip of the shaft 3 on the fixed side, and a flat slip ring 5 is provided on the upper cylinder 1 on the rotating side. 'The power supplied from 4 sources is 6 brushes)
This structure is such that the signal is transmitted from the clip ring 5 to the clip ring 5. The rest of the structure is the same as that of the first embodiment. In this embodiment as well, the same effects as in the first and second embodiments can be obtained.

以上、シリンダモータの上シリンダに搭載した増幅器へ
の電力供給手段を記述したが、本発明は増幅器だけへの
電力供給に限らず、例えば、圧電素子を使った回転ヘッ
ドのトラッキング制御等への電力供給手段として利用す
るのも本発明の範囲内である。
The means for supplying power to the amplifier mounted on the upper cylinder of the cylinder motor has been described above, but the present invention is not limited to supplying power only to the amplifier, but is also applicable to, for example, power supply to tracking control of a rotating head using a piezoelectric element. It is also within the scope of the present invention to utilize it as a supply means.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、シリンダモータを軸固定、上シリンダ
回転方式とし、上シリンダ部ζこ増幅器を搭載し、増幅
器への電力供給手段としてスリップリングとブラシを用
いた。これにより増@器の入力端から見た線間容量を大
幅6ζ低減できるため、(1)再生信号の共振周波数を
高くすることができ、これ−こより周波数帯域の広帯域
化が図られ、高精細な映像を再生することができる。
According to the present invention, the cylinder motor has a fixed axis and the upper cylinder rotates, an amplifier is mounted on the upper cylinder section, and a slip ring and a brush are used as means for supplying power to the amplifier. As a result, the line capacitance seen from the input end of the amplifier can be significantly reduced by 6ζ, so (1) the resonant frequency of the reproduced signal can be increased, which allows the frequency band to be widened and high-definition You can play back videos.

(2)回転ヘッドの巻線インダクタンスのHを大きくす
ることができ、回生出力の高出力化が図られる。
(2) The winding inductance H of the rotary head can be increased, and the regenerative output can be increased.

(3)再生出刃の高出力化により、ノイズに対するS/
N比を向上することができる。
(3) By increasing the output of the regenerated blade, S/
The N ratio can be improved.

また軸固定式シリンダモータのために、(4)低振動に
できる。このためブラシ〜スリップリング間の接触を確
実にでき、高fFK頼註かっ低ノイズにできる。
Also, since it is a fixed shaft cylinder motor, (4) vibration can be reduced. Therefore, contact between the brush and the slip ring can be ensured, and high fFK reliability and low noise can be achieved.

(5)薄形シリンダ構造にすることができる。(5) It can have a thin cylinder structure.

等の効果がある。There are other effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のシリンダモータの第1実施例の断面図
、第2図(a)はスリップリングの側面図、(b)はブ
ラシの側面図、(c)はスリップリングとブラシの組合
せ図、第3図は本発明の給電方式図、第4囚は従来の再
生方式図、第5図は再生信号の周波数を性図、$6図(
a)は本発明のM2実施例の側面図、(b)は上面図、
WIZ図は第3実施例の側面図である。 1・・・上シリンダ 2・・・下シリンダ 3・・・軸
4・−軸受 5・・・クリップリング 6・・・ブラシ
7・・・基板 8・・・増幅器 9・・・ロータリトラ
ンス10・−・ロータヨーク 11・・・マグネット 
12・・・コイル 13・一回転ヨーク 14・・・接
続端子 15・・・導電部 16・・・絶縁部 17・
・・回転ヘッド 18・・・電源19・・・スルーホー
ル 20・・・切替回路、1− 代理人 弁理士 小 川 勝 男  寵電 1 図 12 口 !5      (α) \ 13 図 季 4− 回 罵 し ■ (α) し くb) χ   ワ  図 ム             ら
FIG. 1 is a sectional view of the first embodiment of the cylinder motor of the present invention, FIG. 2 (a) is a side view of a slip ring, (b) is a side view of a brush, and (c) is a combination of a slip ring and a brush. Figure 3 is a diagram of the power supply system of the present invention, Figure 4 is a diagram of the conventional reproduction system, Figure 5 is a diagram of the frequency of the reproduction signal, and Figure 6 is a diagram of the frequency of the reproduction signal.
a) is a side view of the M2 embodiment of the present invention, (b) is a top view,
The WIZ diagram is a side view of the third embodiment. 1... Upper cylinder 2... Lower cylinder 3... Shaft 4 - bearing 5... Clip ring 6... Brush 7... Board 8... Amplifier 9... Rotary transformer 10... -・Rotor yoke 11...Magnet
12... Coil 13. One rotation yoke 14... Connection terminal 15... Conductive part 16... Insulating part 17.
...Rotating head 18...Power supply 19...Through hole 20...Switching circuit, 1- Agent Patent attorney Masao Ogawa Kyōden 1 Figure 12 Mouth! 5 (α) \ 13 Zuki 4- Excuse ■ (α) Shikub) χ Wa Zumu et al.

Claims (1)

【特許請求の範囲】 1、テープ等の記録媒体面上を回転ヘッドで走査するこ
とにより信号を記録または再生するビデオテープレコー
ダ(VTR)等のシリンダモータにおいて、記録媒体の
走行をガイドするための下シリンダと、該下シリンダの
底面中心に直接または間接に固定した中心軸と、該中心
軸の周りに軸受部を介して回転自在に係合し、かつ外周
縁に回転ヘッドを固定した上シリンダと、該上シリンダ
と上記下シリンダ間のスペース内にあつて、上シリンダ
側にモータ回転子をまた下シリンダ側にモータ固定子を
固定した構造から成る直結駆動モータと、上シリンダ側
の面上に設けたヘッド信号処理手段や、ヘッド位置制御
手段等と、上シリンダ側と中心固定軸間に設けた電力供
給手段とを備えた構成を特徴とするシリンダモータ。 2、特許請求の範囲第1項記載のシリンダモータにおい
て、電力供給手段として、スリップリングとブラシを用
いたことを特徴とするシリンダモータ。
[Claims] 1. A cylinder motor for guiding the running of a recording medium in a cylinder motor such as a video tape recorder (VTR) that records or reproduces signals by scanning the surface of a recording medium such as a tape with a rotating head. A lower cylinder, a central shaft fixed directly or indirectly to the center of the bottom surface of the lower cylinder, and an upper cylinder rotatably engaged around the central shaft via a bearing and having a rotating head fixed to its outer periphery. In the space between the upper cylinder and the lower cylinder, there is a direct drive motor having a structure in which a motor rotor is fixed to the upper cylinder side and a motor stator is fixed to the lower cylinder side; A cylinder motor characterized by a configuration comprising a head signal processing means, a head position control means, etc. provided in the upper cylinder side and a power supply means provided between the upper cylinder side and a central fixed shaft. 2. A cylinder motor according to claim 1, characterized in that a slip ring and a brush are used as power supply means.
JP25365887A 1987-10-09 1987-10-09 Cylinder motor Pending JPH0196816A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25365887A JPH0196816A (en) 1987-10-09 1987-10-09 Cylinder motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25365887A JPH0196816A (en) 1987-10-09 1987-10-09 Cylinder motor

Publications (1)

Publication Number Publication Date
JPH0196816A true JPH0196816A (en) 1989-04-14

Family

ID=17254383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25365887A Pending JPH0196816A (en) 1987-10-09 1987-10-09 Cylinder motor

Country Status (1)

Country Link
JP (1) JPH0196816A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371405U (en) * 1989-11-07 1991-07-19
US5223452A (en) * 1989-12-21 1993-06-29 Knepprath Vernon E Method and apparatus for doping silicon spheres

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371405U (en) * 1989-11-07 1991-07-19
US5223452A (en) * 1989-12-21 1993-06-29 Knepprath Vernon E Method and apparatus for doping silicon spheres

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