JPH0187533U - - Google Patents
Info
- Publication number
- JPH0187533U JPH0187533U JP18416487U JP18416487U JPH0187533U JP H0187533 U JPH0187533 U JP H0187533U JP 18416487 U JP18416487 U JP 18416487U JP 18416487 U JP18416487 U JP 18416487U JP H0187533 U JPH0187533 U JP H0187533U
- Authority
- JP
- Japan
- Prior art keywords
- charged beam
- chamber
- column
- exposure apparatus
- beam exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013016 damping Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は本考案による荷電ビーム露光装置の一
実施例を示す斜視図、第２図はカラム倒れ込み振
動を表す露光装置の断面図、第３図ａは本実施例
露光装置の倒れ込み振動減衰特性を示す図、第３
図ｂは従来の露光装置の倒れ込み振動減衰特性を
示す図である。
１１……カラム、１２……チヤンバ、１３……
ステージ、１４……ベース、１５……リブ、θ…
…傾き角。
Fig. 1 is a perspective view showing an embodiment of a charged beam exposure apparatus according to the present invention, Fig. 2 is a sectional view of the exposure apparatus showing column collapsing vibration, and Fig. 3a is a collapsing vibration damping characteristic of the exposure apparatus of this embodiment. Figure 3 showing
FIG. b is a diagram showing the collapse vibration damping characteristics of a conventional exposure apparatus. 11...column, 12...chiyamba, 13...
Stage, 14...base, 15...rib, θ...
...Tilt angle.
Claims (1)
付けられたチヤンバと、該チヤンバ内に設置され
た可動なステージとを有し、荷電ビームを用いて
所望パタンを露光する荷電ビーム露光装置におい
て、前記チヤンバの上面内側に、カラム取付け部
から放射状に延びるリブを設けたことを特徴とす
る荷電ビーム露光装置。 A charged beam exposure apparatus for exposing a desired pattern using a charged beam, which comprises a column equipped with a charged beam gun, a chamber to which the column is attached, and a movable stage installed in the chamber. A charged beam exposure apparatus characterized in that ribs are provided on the inside of the upper surface of the chamber and extend radially from a column attachment part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18416487U JPH0187533U (en) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18416487U JPH0187533U (en) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187533U true JPH0187533U (en) | 1989-06-09 |
Family
ID=31475543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18416487U Pending JPH0187533U (en) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187533U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6043490A (en) * | 1997-01-27 | 2000-03-28 | Hitachi, Ltd. | Vibration cancellation system for a charged particle beam apparatus |
| JP2011213287A (en) * | 2010-04-01 | 2011-10-27 | Nhk Spring Co Ltd | Air suspension type seat support device for vehicle |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52124872A (en) * | 1976-04-14 | 1977-10-20 | Toshiba Corp | Electron beam exposure device |
| JPS57188787A (en) * | 1981-05-18 | 1982-11-19 | Toshiba Corp | Vibration-proof mechanism for vacuum pump |
-
1987
- 1987-12-01 JP JP18416487U patent/JPH0187533U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52124872A (en) * | 1976-04-14 | 1977-10-20 | Toshiba Corp | Electron beam exposure device |
| JPS57188787A (en) * | 1981-05-18 | 1982-11-19 | Toshiba Corp | Vibration-proof mechanism for vacuum pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6043490A (en) * | 1997-01-27 | 2000-03-28 | Hitachi, Ltd. | Vibration cancellation system for a charged particle beam apparatus |
| JP2011213287A (en) * | 2010-04-01 | 2011-10-27 | Nhk Spring Co Ltd | Air suspension type seat support device for vehicle |