JPH0178778U - - Google Patents
Info
- Publication number
- JPH0178778U JPH0178778U JP1987175650U JP17565087U JPH0178778U JP H0178778 U JPH0178778 U JP H0178778U JP 1987175650 U JP1987175650 U JP 1987175650U JP 17565087 U JP17565087 U JP 17565087U JP H0178778 U JPH0178778 U JP H0178778U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- valve
- opening
- valve seat
- seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Chemical Vapour Deposition (AREA)
Description
第1図は本考案の実施例による弁装置の部分破
断側面図、第2図及び第3図は同実施例の作用を
説明するための部分断面図である。
なお図において、14……駆動ロツド、16…
…弁体、29……ばね。
FIG. 1 is a partially cutaway side view of a valve device according to an embodiment of the present invention, and FIGS. 2 and 3 are partially sectional views for explaining the operation of the embodiment. In the figure, 14... drive rod, 16...
...valve body, 29...spring.
Claims (1)
する第2開口を有するケーシングと、前記第1開
口端部、又は第2開口端部に形成された、第1弁
座と、該第1弁座に着座可能な第1弁体と、該第
1弁体に形成され常時、前記排気系及び被減圧室
の一方に連通する第1通孔と、前記第1弁体に形
成され常時、前記排気系及び被減圧室の他方に連
通する第2通孔と、前記第1通孔の一方の開口端
部に形成される第2弁座と、該第2弁座に着座可
能で往復駆動されるロツド状の第2弁体と、前記
第1弁体に形成され前記第2弁体が往動するとき
に係合し得る係合部と、前記第1弁体を前記第1
弁座に着座させるべく付勢するばねと、前記第2
弁体を往復動させる駆動部とから成り、該駆動部
により前記第2弁体が第1の位置へと往動さされ
たときには、前記第2弁体は前記第2弁座から離
座して、前記第1通孔及び第2通孔を介して前記
第1開口と第2開口とを連通させる小さな流路断
面積を得るようにし、前記駆動部により更に前記
第2弁体が第2の位置へと往動されるときには前
記係合部と係合することにより前記第1弁体を前
記ばねのばね力に抗して共に往動させることによ
り前記第1弁座から離座させて前記第1開口と第
2開口とを連通させる大きな流路断面積を得るよ
うにしたことを特徴とする弁装置。 a casing having a first opening communicating with an exhaust system and a second opening communicating with a depressurized chamber; a first valve seat formed at the first opening end or the second opening end; a first valve body that can be seated on a valve seat; a first passage hole that is formed in the first valve body and always communicates with one of the exhaust system and the depressurized chamber; a second through hole communicating with the other of the exhaust system and the depressurized chamber; a second valve seat formed at one open end of the first through hole; and a second valve seat that can be seated on the second valve seat and is reciprocated a rod-shaped second valve body formed on the first valve body and capable of engaging when the second valve body moves forward;
a spring that urges the valve to seat on the valve seat;
and a drive unit that reciprocates the valve body, and when the second valve body is moved forward to the first position by the drive unit, the second valve body is separated from the second valve seat. A small flow passage cross-sectional area is obtained through which the first opening and the second opening communicate with each other through the first passage hole and the second passage hole, and the second valve body is further moved by the driving section to the second valve body. When moved forward to the position, the first valve body is moved forward together against the spring force of the spring by engaging with the engaging portion, thereby causing the first valve body to leave the first valve seat. A valve device characterized in that the first opening and the second opening have a large flow passage cross-sectional area that communicates with each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175650U JPH0178778U (en) | 1987-11-17 | 1987-11-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175650U JPH0178778U (en) | 1987-11-17 | 1987-11-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0178778U true JPH0178778U (en) | 1989-05-26 |
Family
ID=31467435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987175650U Pending JPH0178778U (en) | 1987-11-17 | 1987-11-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0178778U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013245761A (en) * | 2012-05-25 | 2013-12-09 | Tlv Co Ltd | Liquid pumping device |
-
1987
- 1987-11-17 JP JP1987175650U patent/JPH0178778U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013245761A (en) * | 2012-05-25 | 2013-12-09 | Tlv Co Ltd | Liquid pumping device |