JPH0161920U - - Google Patents
Info
- Publication number
- JPH0161920U JPH0161920U JP15577087U JP15577087U JPH0161920U JP H0161920 U JPH0161920 U JP H0161920U JP 15577087 U JP15577087 U JP 15577087U JP 15577087 U JP15577087 U JP 15577087U JP H0161920 U JPH0161920 U JP H0161920U
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- clean air
- air
- supply device
- mixer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims 4
- 229920006395 saturated elastomer Polymers 0.000 claims 3
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Separation Of Particles Using Liquids (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は従来の清浄空気供給装置の一例を示す側面断
面図、第３図は従来の清浄空気供給装置の他の例
を示す側面断面図である。
１０……ＨＥＰＡフイルタ、３０……飽和混合
器、３２……液面センサ、３４……温度センサ、
３６……アルコール液、３８……ヒータ、４２，
５６……凝縮器、４４……送風器、４６……アル
コール貯槽、５２……空気冷却用管路、６０……
インターフエース、６２……制御部。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a side sectional view showing an example of a conventional clean air supply device, and FIG. 3 is a side sectional view showing another example of the conventional clean air supply device. 10...HEPA filter, 30...Saturation mixer, 32...Liquid level sensor, 34...Temperature sensor,
36...alcohol liquid, 38...heater, 42,
56... Condenser, 44... Air blower, 46... Alcohol storage tank, 52... Air cooling pipe, 60...
Interface, 62...control unit.
Claims (1)
空気に有機溶剤蒸気を混合する飽和混合器と、該
飽和混合器より出力される混合気中の有機溶剤蒸
気を凝縮させて液滴に生長させる冷却手段と、該
冷却手段より出力される空気中の液滴および粒子
を捕集して清浄な空気を出力するフイルタと、該
フイルタによつて清浄化された空気に残存する有
機溶剤を分離除去する凝縮器とを具備することを
特徴とする清浄空気供給装置。 (2) 前記有機溶剤はアルコールであることを特
徴とする実用新案登録請求の範囲第(1)項記載の
清浄空気供給装置。[Claims for Utility Model Registration] (1) A saturated mixer that mixes organic solvent vapor with air taken in from an atmosphere that requires cleaning, and a saturated mixer that mixes organic solvent vapor in the mixture output from the saturated mixer. A cooling means that condenses and grows into droplets, a filter that collects droplets and particles in the air output from the cooling means and outputs clean air, and air that is purified by the filter. 1. A clean air supply device comprising a condenser for separating and removing residual organic solvent. (2) The clean air supply device according to claim (1), wherein the organic solvent is alcohol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577087U JPH0161920U (en) | 1987-10-12 | 1987-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577087U JPH0161920U (en) | 1987-10-12 | 1987-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161920U true JPH0161920U (en) | 1989-04-20 |
Family
ID=31433690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15577087U Pending JPH0161920U (en) | 1987-10-12 | 1987-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161920U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001321601A (en) * | 2000-05-12 | 2001-11-20 | Sony Corp | Organic solvent discharge reducing method and organic solvent discharge reducing device, wafer drying device |
-
1987
- 1987-10-12 JP JP15577087U patent/JPH0161920U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001321601A (en) * | 2000-05-12 | 2001-11-20 | Sony Corp | Organic solvent discharge reducing method and organic solvent discharge reducing device, wafer drying device |