JPH0154634B2 - - Google Patents
Info
- Publication number
- JPH0154634B2 JPH0154634B2 JP59156269A JP15626984A JPH0154634B2 JP H0154634 B2 JPH0154634 B2 JP H0154634B2 JP 59156269 A JP59156269 A JP 59156269A JP 15626984 A JP15626984 A JP 15626984A JP H0154634 B2 JPH0154634 B2 JP H0154634B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- vacuum
- cavity
- door
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 55
- 238000001816 cooling Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 6
- 238000010791 quenching Methods 0.000 description 12
- 230000000171 quenching effect Effects 0.000 description 12
- 238000011084 recovery Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 238000007667 floating Methods 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Description
【発明の詳細な説明】
＜産業上の利用分野＞
この発明は真空熱処理炉の真空ドア開閉装置に
関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a vacuum door opening/closing device for a vacuum heat treatment furnace.
＜従来の技術＞
一般に真空熱処理炉は(1)無酸化状態で正確な温
度に加熱できる、(2)省エネルギーに役立つ、(3)炉
の寿命が長い、(4)無公害である等、優れた効果が
あることから、安価な量産部品の熱処理に利用さ
れるようになつてきた。<Conventional technology> In general, vacuum heat treatment furnaces have advantages such as (1) being able to heat to a precise temperature in a non-oxidizing state, (2) helping to save energy, (3) having a long furnace life, and (4) being non-polluting. Because of its beneficial effects, it has come to be used for heat treatment of inexpensive mass-produced parts.
現在、この真空熱処理炉には準備室、加熱室、
冷却室からなる３真空室容器と２真空ドアで構成
した連続真空熱処理炉と、加熱室、冷却室からな
る２真空室容器と１真空ドアで構成したセミ連続
真空熱処理炉とがよく知られている。 Currently, this vacuum heat treatment furnace has a preparation room, a heating room,
Continuous vacuum heat treatment furnaces are well-known, consisting of a three-vacuum chamber container consisting of a cooling chamber and two vacuum doors, and a semi-continuous vacuum heat treatment furnace consisting of a two-vacuum chamber container consisting of a heating chamber and a cooling chamber, and one vacuum door. There is.
そしてそれぞれの真空ドアは相互の真空室容器
の差圧によつて完全に密閉されており、被熱物の
移送時には相互の真空室容器の圧力をほぼ同圧に
して真空ドアを開放しなければならない。もし多
少とも差圧がある状態で無理に開放すると、相互
の真空室容器内の圧力が急激に同圧になろうとす
るため、真空シール材（例えばＯリング）が真空
ドアから外れたり、切断したり、過度の場合は加
熱室を破損するおそれがある。 Each vacuum door is completely sealed by the differential pressure between the vacuum chamber containers, and when transferring the heated object, the pressures of both vacuum chamber containers must be set to approximately the same pressure to open the vacuum door. It won't happen. If you forcibly open the door when there is some pressure difference, the pressure inside both vacuum chambers will rapidly become the same, causing the vacuum sealing material (for example, an O-ring) to come off or break from the vacuum door. or if it is excessive, there is a risk of damaging the heating chamber.
このため、従来加熱室、冷却室へそれぞれ真空
圧力調節計が付設され、両室が同圧になるように
設定されているが、真空圧力調節計の切断差にバ
ラツキがあり、正確に同圧に合わせることが困難
である。例えば冷却室を或る圧力に復圧させ、加
熱室における被処理材の真空加熱の終了を待機し
ている間に、気温などの影響で冷却室の圧力が変
動することがある。そのときに加熱室がタイムア
ツプして真空圧力調節計の設定値まで復圧して真
空ドアを開放しようとすると、実際には差圧が生
じているため上記同様の事故が発生する。 For this reason, vacuum pressure regulators have traditionally been attached to the heating and cooling chambers to ensure that both chambers are at the same pressure, but there are variations in the cutoff difference of the vacuum pressure regulators, making it difficult to ensure that the pressure is exactly the same. It is difficult to match. For example, while the pressure in the cooling chamber is restored to a certain level and the heating chamber is waiting for the completion of vacuum heating of the material to be processed in the heating chamber, the pressure in the cooling chamber may fluctuate due to the influence of the temperature or the like. At that time, when the heating chamber times out and the pressure returns to the set value of the vacuum pressure regulator and attempts to open the vacuum door, the same accident as described above occurs because a pressure difference actually occurs.
この点から、一方の真空室容器の圧力が他方の
真空室容器の圧力変動に応じて同圧になつたとき
同圧信号を発するように構成し、自動的に真空ド
アを開放する装置を真空熱処理炉へ組込むことが
要望されている。また搬入ドア、搬出ドア等も同
様に稼動日の添候（気圧条件）、真空熱処理炉の
設置場所（海抜）等により真空圧力調節計の設定
値を変更する必要がある。 From this point of view, when the pressure in one vacuum chamber container becomes the same pressure in response to pressure fluctuations in the other vacuum chamber container, an equal pressure signal is generated, and a device that automatically opens the vacuum door is configured to emit an equal pressure signal. There is a demand for incorporation into heat treatment furnaces. Similarly, it is necessary to change the setting value of the vacuum pressure regulator for the loading door, the loading door, etc. depending on the weather (atmospheric pressure conditions) on the operating day, the installation location of the vacuum heat treatment furnace (altitude above sea level), etc.
＜発明の目的＞
この発明は上記にかんがみてなされたものであ
つて、その目的は冷却室の圧力を所定値に設定
し、加熱室の圧力が該設定圧力に到達したとき真
空ドアを開放する真空熱処理炉の真空ドア開閉装
置を提供することである。<Object of the invention> This invention has been made in view of the above, and its object is to set the pressure in the cooling chamber to a predetermined value, and to open the vacuum door when the pressure in the heating chamber reaches the set pressure. An object of the present invention is to provide a vacuum door opening/closing device for a vacuum heat treatment furnace.
＜発明の要旨＞
圧力変動に応動するダイヤフラムで区画された
一方の空洞部を管路で加熱室へ連通し、他方の空
洞部を管路で冷却室へ連通し、両空洞部が同圧に
なると同圧信号を発する差圧スイツチと、制御盤
と、真空ドア開閉装置とを回路接続したものであ
る。<Summary of the Invention> One cavity partitioned by a diaphragm that responds to pressure fluctuations is communicated with a heating chamber through a conduit, and the other cavity is communicated with a cooling chamber through a conduit, so that both cavities are at the same pressure. This circuit connects a differential pressure switch that emits the same pressure signal, a control panel, and a vacuum door opening/closing device.
＜実施例＞
以下、この発明の実施例を示す第１〜５図にも
とづいて構成および作動態様を説明する。<Example> Hereinafter, the structure and operation mode will be explained based on FIGS. 1 to 5 showing an example of the present invention.
(イ) 構成
第１図に示す１１は差圧スイツチであつて、
該差圧スイツチ１１は上段ケース１２と下段ケ
ース１３に分れており、気密的にボルト締めさ
れている。１２．１は上段ケース１２内に形成
した第１空洞部で管路１５をへて加熱室１へ連
通している（第３図参照）。この第１空洞部１
２．１には上段ケース１２と下段ケース１３と
によつて周縁が固定された軽量なダイヤフラム
１２．２が上下動可能に内挿されている。１
３．１は下段ケース１３内に形成した第２空洞
部で管路１６をへて冷却室６へ連通している
（第３図参照）。１３．２は第２空洞部１３．１
へ連通する第３空洞部で接点１３．３が内挿さ
れている。１３．４は接点１３．３へ接続した
中継端子で下段ケース１３へ固定されている。
この中継端子１３．４とリレー制御盤３２、真
空ドア開閉装置３３、復圧ガス管路３４Ａへ配
設した復圧弁３４とはそれぞれ導通可能に結線
されている。(a) Configuration 11 shown in Figure 1 is a differential pressure switch,
The differential pressure switch 11 is divided into an upper case 12 and a lower case 13, which are hermetically bolted together. 12.1 is a first cavity formed in the upper case 12 and communicates with the heating chamber 1 through a conduit 15 (see FIG. 3). This first cavity 1
A lightweight diaphragm 12.2 whose periphery is fixed by an upper case 12 and a lower case 13 is inserted into 2.1 so as to be movable up and down. 1
3.1 is a second cavity formed in the lower case 13, which communicates with the cooling chamber 6 through a conduit 16 (see FIG. 3). 13.2 is the second cavity part 13.1
A contact 13.3 is inserted in the third cavity which communicates with the. 13.4 is a relay terminal connected to the contact 13.3 and fixed to the lower case 13.
This relay terminal 13.4 is electrically connected to the relay control panel 32, the vacuum door opening/closing device 33, and the recovery valve 34 disposed in the recovery gas pipe line 34A.
したがつて第１空洞部１２．１の圧力が第２
空洞部１３．１の圧力よりも低い場合、ダイヤ
フラム１２．２は差圧により降下しないが、加
熱室１へ復圧ガスが導入されて同圧になるとダ
イヤフラム１２．２は自重降下して接点１３．
３へ当接し、その同圧信号をリレー制御盤３２
で処理し、加熱室１へ導入中の復圧ガスを復圧
弁３４で止めると同時に、真空ドア開閉装置３
３が作動して真空ドア５が開放される。 Therefore, the pressure in the first cavity 12.1 is equal to the pressure in the second cavity 12.1.
When the pressure is lower than the pressure in the cavity 13.1, the diaphragm 12.2 does not drop due to the pressure difference, but when the pressure is equal to that of the heating chamber 1 due to the introduction of the repressurized gas, the diaphragm 12.2 drops under its own weight and contacts the contact 13. ．．
3 and transmits the same pressure signal to the relay control panel 32.
At the same time, the return pressure gas being processed and introduced into the heating chamber 1 is stopped by the return pressure valve 34.
3 is activated and the vacuum door 5 is opened.
また第２図に示す差圧スイツチ２１は他の実
施例であつて、上段ケース２２、中段ケース２
３、下段ケース２４に分れており、気密的にボ
ルト締めされている。２２．１は上段ケース２
２内に形成した第１空洞部で管路１５をへて加
熱室１へ連通している（第３図参照）。この第
１空洞部２２．１内には上段ケース２２と中段
ケース２３により周縁が固定された軽量な第１
ダイヤフラム２２．２が上下動可能に内挿され
ている。２３．１は中段ケース２３内に形成し
た第２空洞部で管路１６をへて冷却室６へ連通
している（第３図参照）。２３．２は第２空洞
部２３．１へ連通する第３空洞部で接点２３．
３が内挿されている。２３．４は接点２３．３
と接続する中継端子で中段ケース２３へ固定さ
れている。２４．１は下段ケース２４内に形成
した第４空洞部で、この第４空洞部２４．１は
下段ケース２４に形成した第５空洞部２４．３
と、管路１７、管路１５をへて加熱室１へ連通
している。そしてこの第４空洞部２４．１内に
は中段ケース２３と下段ケース２４により周縁
を固定され、第１ダイヤフラム２２．２と等重
量の第２ダイヤフラム２４．２が上下動可能に
内挿されている。また第５空洞部２４．３には
接点２４．４が内挿されている。２４．５は接
点２４．４と接続する中継端子で下段ケース２
４へ固定されている。上記中継端子２３．４，
２４．５とリレー制御盤３２、真空ドア開閉装
置３３、復圧ガス管路３４Ａへ配設した復圧弁
３４とはそれぞれ導通可能に結線されている。 Moreover, the differential pressure switch 21 shown in FIG.
3. It is divided into a lower case 24, which is hermetically bolted together. 22.1 is upper case 2
A first cavity formed in the heating chamber 2 communicates with the heating chamber 1 through a conduit 15 (see FIG. 3). Inside this first cavity 22.1, there is a lightweight first cavity whose periphery is fixed by an upper case 22 and a middle case 23.
A diaphragm 22.2 is inserted so that it can be moved up and down. 23.1 is a second cavity formed in the middle case 23 and communicates with the cooling chamber 6 through the pipe line 16 (see FIG. 3). 23.2 is a third cavity communicating with the second cavity 23.1 and a contact point 23.2.
3 is interpolated. 23.4 is contact point 23.3
It is fixed to the middle case 23 through a relay terminal connected to the middle case 23. 24.1 is a fourth cavity formed in the lower case 24, and this fourth cavity 24.1 is connected to a fifth cavity 24.3 formed in the lower case 24.
It communicates with the heating chamber 1 through a pipe line 17 and a pipe line 15. A second diaphragm 24.2 having the same weight as the first diaphragm 22.2 is inserted into the fourth cavity 24.1 so as to be movable up and down, the periphery of which is fixed by the middle case 23 and the lower case 24. There is. Further, a contact point 24.4 is inserted into the fifth cavity 24.3. 24.5 is a relay terminal that connects with contact 24.4 and is connected to lower case 2.
It is fixed to 4. The above relay terminal 23.4,
24.5 and the relay control panel 32, the vacuum door opening/closing device 33, and the recovery valve 34 disposed in the recovery gas pipe 34A are electrically connected to each other.
したがつて第１空洞部２２．１、第４空洞部
２４．１の圧力が第２空洞部２３．１の圧力よ
りも低い場合、第１ダイヤフラム２２．２は差
圧により浮上中であり、第２ダイヤフラム２
４．２は差圧および自重により降下して接点２
４．４へ当接し、その同圧信号をリレー制御盤
３２が処理しようとするが、接点２３．２から
同圧信号が未着であるため信号処理しない。そ
の後復圧ガスが加熱室１へ導入されて第１空洞
部２２．１と第２空洞部２３．１とが同圧にな
ると、第１ダイヤフラム２２．２が自重降下し
て接点２３．３へ当接し、その同圧信号がリレ
ー制御盤３２へ入るため、該リレー制御盤３２
は両者の同圧信号を処理し、加熱室１へ導入中
の復圧ガスを復圧弁３４で止めると同時に、真
空ドア開閉装置３３が作動して真空ドア５が開
放される。 Therefore, when the pressure in the first cavity 22.1 and the fourth cavity 24.1 is lower than the pressure in the second cavity 23.1, the first diaphragm 22.2 is floating due to the differential pressure, Second diaphragm 2
4.2 falls due to differential pressure and its own weight and reaches contact 2.
4.4, and the relay control panel 32 tries to process the same pressure signal, but since the same pressure signal has not arrived from the contact 23.2, the signal is not processed. After that, when the repressurized gas is introduced into the heating chamber 1 and the first cavity 22.1 and the second cavity 23.1 have the same pressure, the first diaphragm 22.2 drops under its own weight and reaches the contact 23.3. contact, and the same pressure signal enters the relay control panel 32, so the relay control panel 32
processes the same pressure signals from both, and stops the repressurized gas being introduced into the heating chamber 1 by the repressurizing valve 34, and at the same time, the vacuum door opening/closing device 33 is operated to open the vacuum door 5.
第３図は第１図に示す差圧スイツチ１１組込
んだセミ連続真空熱処理炉を示し、１は図示し
ない管路で真空排気源、復圧ガス源へ連通した
加熱室、２は加熱室１の入口側に配設した搬入
ドア、３は加熱室１内に装設した加熱炉、３．
１は加熱炉３を構成する断熱材からなるドア付
きの炉体、３．２は炉体３．１内に配設した発
熱体である。４は被処理材を収容したトレイＴ
の移送ローラ、５は加熱室１の出口側に配設し
た真空ドア、６は加熱室１へ連設し、図示しな
い管路で真空排気源、復圧源へ連通した冷却
室、７は冷却室６の上部へ配設したガス撹拌フ
アン、８は冷却室６内へ貯留した常温焼入れ
油、９は冷却室６へ配設した常温焼入れ油８の
オイル・アジテータ、１０は冷却室６の出口側
に配設した搬入ドアである。 FIG. 3 shows a semi-continuous vacuum heat treatment furnace incorporating the differential pressure switch 11 shown in FIG. 3 is a heating furnace installed in the heating chamber 1;
1 is a furnace body with a door made of a heat insulating material constituting the heating furnace 3, and 3.2 is a heating element disposed within the furnace body 3.1. 4 is a tray T containing the material to be processed
5 is a vacuum door disposed on the exit side of the heating chamber 1; 6 is a cooling chamber connected to the heating chamber 1 and connected to a vacuum exhaust source and a return pressure source through a pipe (not shown); 7 is a cooling chamber; A gas stirring fan disposed in the upper part of the chamber 6, 8 a room temperature quenching oil stored in the cooling chamber 6, 9 an oil agitator for the room temperature quenching oil 8 disposed in the cooling chamber 6, 10 an outlet of the cooling chamber 6 This is the loading door located on the side.
３０は冷却室６内の圧力を調整する真空調圧
制御装置、３１は真空調圧制御装置３０で作動
される復圧弁であつて、復圧ガス管路３１Ａへ
配設されている。 30 is a vacuum pressure regulation control device for adjusting the pressure within the cooling chamber 6, and 31 is a pressure recovery valve operated by the vacuum pressure regulation control device 30, which is disposed in the pressure recovery gas pipe 31A.
なお、上記差圧スイツチ１１，２１は加熱室
１と冷却室６とを同圧にして真空ドア５を開放
する場合に使用する事例を説明したが、この差
圧スイツチ１１，２１は搬入ドア２、搬出ドア
１０を大気圧状態で開放する場合にも使用可能
である。 The differential pressure switches 11 and 21 described above are used to set the heating chamber 1 and the cooling chamber 6 at the same pressure and open the vacuum door 5. However, the differential pressure switches 11 and 21 , it can also be used when opening the carry-out door 10 at atmospheric pressure.
例えば差圧スイツチ１１を使用して搬入ドア
２を開放する場合は、第１空洞部１２．１を加
熱室１へ連通させ、第２空洞部１３．１を外気
へ開放しておく。こうすると加熱室１内が減圧
状態のときダイヤフラム１２．２は浮上中で、
復圧ガスが復圧弁３４から加熱炉１内へ導入さ
れて大気圧状態（同圧）になるとダイヤフラム
１２．２が自重降下して接点１３．３へ当接
し、その同圧信号をリレー制御盤３２で処理
し、加熱室１へ導入中の復圧ガスを復圧弁３４
で止めると同時に、図示しない搬入ドア開閉装
置が作動して搬入ドア２が開放される。 For example, when opening the carry-in door 2 using the differential pressure switch 11, the first cavity 12.1 is communicated with the heating chamber 1, and the second cavity 13.1 is opened to the outside air. In this way, when the inside of the heating chamber 1 is in a reduced pressure state, the diaphragm 12.2 is floating;
When the repressurized gas is introduced into the heating furnace 1 from the repressurizing valve 34 and becomes atmospheric pressure (same pressure), the diaphragm 12.2 drops under its own weight and contacts the contact 13.3, and the same pressure signal is sent to the relay control panel. 32 and the depressurized gas being introduced into the heating chamber 1 is passed through the depressurizing valve 34.
At the same time, a loading door opening/closing device (not shown) is activated to open the loading door 2.
また差圧スイツチ２１を使用して搬出ドア１
０を開放する場合は、第１空洞部２１．１、第
４空洞部２４．１を冷却室６へ連通させ、第２
空洞部２３．１を外気へ開放しておく。こうす
ると冷却室６内が減圧状態のとき第１ダイヤフ
ラム２２．２は浮上中であるが、第２ダイヤフ
ラム２４．２は降下して接点２４．４へ当接
し、同圧信号をリレー制御盤３２が処理しよう
とするが、接点２３．３から同圧信号が未着で
あるため信号処理しない。そして復圧ガスが復
圧弁３１から冷却室６内へ導入されて大気圧状
態（同圧）になると第１ダイヤフラム２２．２
が自重降下して接点２３．３へ当接し、その同
圧信号がリレー制御盤３２へ入るため、該リレ
ー制御盤３２は両者の同圧信号を処理し、冷却
室６へ導入中の復圧ガスを復圧弁３１で止める
と同時に、図示しない搬出ドア開閉装置が作動
して搬出ドア１０が開放される。 Also, the differential pressure switch 21 is used to close the unloading door 1.
0, the first cavity 21.1 and the fourth cavity 24.1 are communicated with the cooling chamber 6, and the second cavity 21.1 and the fourth cavity 24.1 are opened.
The cavity 23.1 is opened to the outside air. In this way, when the inside of the cooling chamber 6 is in a reduced pressure state, the first diaphragm 22.2 is floating, but the second diaphragm 24.2 descends and comes into contact with the contact 24.4, sending the same pressure signal to the relay control panel 32. attempts to process it, but since the same pressure signal has not arrived from contact 23.3, the signal is not processed. When the return pressure gas is introduced into the cooling chamber 6 from the return pressure valve 31 and becomes atmospheric pressure (same pressure), the first diaphragm 22.2
falls under its own weight and contacts the contact 23.3, and the same pressure signal enters the relay control panel 32, so the relay control panel 32 processes the same pressure signals from both and restores the pressure being introduced into the cooling chamber 6. At the same time as the gas is stopped by the pressure recovery valve 31, an unillustrated carry-out door opening/closing device is operated to open the carry-out door 10.
(ロ) 作動態様
つぎに上記のような構成からなる真空熱処理
炉における定常状態の作動態様を説明する。(b) Operating mode Next, the steady state operating mode of the vacuum heat treatment furnace configured as described above will be explained.
あらかじめ、搬入ドア２、真空ドア５、搬出
ドア１０等がそれぞれ閉鎖されており、加熱室
１１内は所定の真空圧（例：0.1Torr）に減圧
され、加熱炉３内へ移送したトレイT1内の被
処理材（例：SCM435鋼）が所定温度（例：
850℃）に加熱されている。そして冷却室６内
は真空にした後真空調圧制御装置３０により作
動する復圧弁３１で任意の設定圧力（例：
100Torr）へ復圧されている。この設定圧力は
真空調圧制御装置３０で設定する。その後上記
被処理材の真空加熱がタイムアツプすると冷却
室６内に貯留中の常温焼入れ油８で油焼入れす
るために加熱室１内を復圧弁３４で復圧させ
る。このとき差圧スイツチ１１の第１空洞部１
２．１内の圧力（加熱室１内の圧力と同じ）が
第２空洞部１３．１内の圧力（冷却室６内の圧
力と同じ）よりも低い場合、ダイヤフラム１
２．２は差圧により浮上中である。その後第１
空洞部１２．１内が100Torrへ復圧されて第２
空洞部１３．１と同圧になると、ダイヤフラム
１２．２は自重降下して接点１３．３へ当接す
る。これにより差圧スイツチ１１からの同圧信
号をリレー制御盤３２が処理して、加熱室１へ
導入中の復圧ガスを復圧弁３４で止めると同時
に、真空ドア開閉装置３３が作動して真空ドア
５が開放される。 The carry-in door 2, the vacuum door 5, the carry-out door 10, etc. are each closed in advance, and the inside of the heating chamber 11 is reduced to a predetermined vacuum pressure (for example, 0.1 Torr), and the tray T 1 transferred to the heating furnace 3 is The material to be treated (e.g. SCM435 steel) inside is at a specified temperature (e.g.
850℃). After the inside of the cooling chamber 6 is evacuated, an arbitrary set pressure (e.g.
100Torr). This set pressure is set by the vacuum pressure regulation control device 30. Thereafter, when the vacuum heating of the material to be treated is timed out, the pressure inside the heating chamber 1 is restored by the pressure recovery valve 34 in order to perform oil quenching with the room temperature quenching oil 8 stored in the cooling chamber 6. At this time, the first cavity 1 of the differential pressure switch 11
2.1 (same as the pressure in the heating chamber 1) is lower than the pressure in the second cavity 13.1 (same as the pressure in the cooling chamber 6), the diaphragm 1
2.2 is floating due to differential pressure. then the first
The pressure inside the cavity 12.1 is restored to 100Torr and the second
When the pressure is equal to that of the cavity 13.1, the diaphragm 12.2 drops under its own weight and comes into contact with the contact 13.3. As a result, the relay control panel 32 processes the same pressure signal from the differential pressure switch 11, and at the same time, the repressurized gas being introduced into the heating chamber 1 is stopped by the repressurizing valve 34, and at the same time, the vacuum door opening/closing device 33 is activated to create a vacuum. Door 5 is opened.
ついでトレイT1を移送ローラ４により冷却
室６内へ移送し、直ちに図示しない昇降手段に
より常温焼入れ油８へ浸漬し、被処理材は所定
雰囲気圧力（100Torr）下で油焼入れされる。 Next, the tray T1 is transferred into the cooling chamber 6 by the transfer roller 4, and immediately immersed in room temperature quenching oil 8 by a lifting means (not shown), and the material to be treated is oil quenched under a predetermined atmospheric pressure (100 Torr).
ついで真空ドア５を閉鎖して加熱炉１内を大
気圧状態へ復圧後搬入ドア２を開放し、つぎの
被処理材（例：SUJ2鋼）を収容したトレイT2
を加熱炉１内へ搬入すると同時に搬入ドア２を
閉鎖して加熱室１内へ所定真空圧（例：
0.1Torr）へ減圧しつつ真空加熱する。一方、
冷却室６内を大気圧状態へ復圧後、搬出ドア１
０を開放し、トレイT1を所定レベルで上昇後
移送ローラ４により炉外へ搬出する。その後搬
出ドア１０を閉鎖し、真空にした後真空調圧制
御装置３０により復圧弁３１を作動させて冷却
室６内を所定の設定圧力（例：250Torr）へ復
圧させる。 Next, the vacuum door 5 is closed to restore the pressure inside the heating furnace 1 to atmospheric pressure, and then the carry-in door 2 is opened, and the tray T 2 containing the next material to be processed (for example, SUJ2 steel) is opened.
At the same time as the material is transported into the heating furnace 1, the transport door 2 is closed and the inside of the heating chamber 1 is heated to a predetermined vacuum pressure (e.g.
Heat under vacuum while reducing the pressure to 0.1Torr). on the other hand,
After restoring the pressure inside the cooling chamber 6 to atmospheric pressure, the unloading door 1
0 is opened, and after the tray T1 is raised to a predetermined level, it is carried out of the furnace by the transfer rollers 4. Thereafter, the carry-out door 10 is closed, and after the vacuum is created, the vacuum pressure regulation control device 30 operates the pressure recovery valve 31 to restore the pressure in the cooling chamber 6 to a predetermined set pressure (eg, 250 Torr).
なお、上記差圧スイツチ１１を使用して
SCM435鋼、SUJ2鋼を数種の雰囲気圧力下で
真空油焼入れしたところ、第４、５図に示すよ
うに100Torrで焼入れした場合、焼入れひずみ
が最小になることがわかつた。 In addition, using the differential pressure switch 11 mentioned above,
When SCM435 steel and SUJ2 steel were vacuum oil quenched under several atmospheric pressures, it was found that the quenching strain was minimized when quenched at 100 Torr, as shown in Figures 4 and 5.
なお、構造用炭素鋼、炭素工具鋼、合金工具
鋼等の焼入れひずみを最小限に抑えることがで
きる真空油焼入れ時の雰囲気圧力は概ね600〜
500、300〜200Torrであることがわかつた。 In addition, the atmospheric pressure during vacuum oil quenching, which can minimize quenching distortion of structural carbon steel, carbon tool steel, alloy tool steel, etc., is approximately 600~
It was found to be 500, 300 to 200Torr.
＜発明の効果＞
上記のとおり、この発明に係る差圧スイツチを
真空熱処理炉へ組込むことにより、例えば加熱室
と冷却室との圧力が同圧になつたとき直ちに真空
ドアが開放されるため、従来のような不具合が解
消できる。また冷却室内の圧力（真空油焼入れ時
の雰囲気圧力）は被処理材毎に真空調圧制御装置
で任意に設定できるため、適正な焼入れかたさが
得られ、また焼入れひずみが最小限に抑えられる
という効果を奏する。<Effects of the Invention> As described above, by incorporating the differential pressure switch according to the present invention into a vacuum heat treatment furnace, the vacuum door is opened immediately when, for example, the pressures in the heating chamber and the cooling chamber become the same. Conventional problems can be resolved. In addition, the pressure in the cooling chamber (atmospheric pressure during vacuum oil quenching) can be set arbitrarily for each material to be treated using a vacuum pressure adjustment control device, so it is possible to obtain the appropriate quenching hardness and minimize quenching distortion. be effective.
図はこの発明の実施例を示し、第１図は差圧ス
イツチの断面図、第２図は他の差圧スイツチの断
面図、第３図は第１図に示す差圧スイツチを組込
んだ真空熱処理炉の概要説明図、第４，５図は
SCM435鋼、SUJ2鋼の焼入れひずみ状況を示す
ヒストグラフである。
１……加熱室、５……真空ドア、６……冷却
室、１１……差圧スイツチ、１２．１……一方の
空洞部（第１空洞部）、１２．２……ダイヤフラ
ム、１３．１……他方の空洞部（第２空洞部）、
１５，１６……管路、３０……真空調圧制御装
置、３１，３４……復圧弁、３２……リレー制御
盤、３３……真空ドア開閉装置。
The figures show embodiments of the invention, with Figure 1 being a sectional view of a differential pressure switch, Figure 2 being a sectional view of another differential pressure switch, and Figure 3 incorporating the differential pressure switch shown in Figure 1. A schematic explanatory diagram of the vacuum heat treatment furnace, Figures 4 and 5 are
This is a histograph showing the quenching strain status of SCM435 steel and SUJ2 steel. 1... Heating chamber, 5... Vacuum door, 6... Cooling chamber, 11... Differential pressure switch, 12.1... One cavity (first cavity), 12.2... Diaphragm, 13. 1...The other cavity (second cavity),
15, 16...Pipe line, 30...Vacuum pressure regulation control device, 31, 34...Repressure valve, 32...Relay control panel, 33...Vacuum door opening/closing device.
Claims (1)
た一方の空洞部を管路で高真空圧状態に減圧され
る加熱室へ連通し、他方の空洞部を管路で低真空
圧状態に減圧される冷却室へ連通し、前記２つの
空洞部内が同圧になると同圧信号を発する差圧ス
イツチと、制御盤と、真空ドア開閉装置とを回路
接続したことを特徴とする真空熱処理炉の真空ド
ア開閉装置。1 One cavity partitioned by a diaphragm that responds to pressure fluctuations is connected via a pipe to a heating chamber that is depressurized to a high vacuum state, and the other cavity is connected to a cooling chamber that is depressurized to a low vacuum state via a pipe. A vacuum door opening/closing method for a vacuum heat treatment furnace, characterized in that a differential pressure switch that communicates with a chamber and issues an equal pressure signal when the pressure inside the two cavities becomes the same, a control panel, and a vacuum door opening/closing device are connected in a circuit. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15626984A JPS6136682A (en) | 1984-07-26 | 1984-07-26 | Switchgear for vacuum door of vacuum heat treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15626984A JPS6136682A (en) | 1984-07-26 | 1984-07-26 | Switchgear for vacuum door of vacuum heat treatment furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6136682A JPS6136682A (en) | 1986-02-21 |
| JPH0154634B2 true JPH0154634B2 (en) | 1989-11-20 |
Family
ID=15624119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15626984A Granted JPS6136682A (en) | 1984-07-26 | 1984-07-26 | Switchgear for vacuum door of vacuum heat treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6136682A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6978623B1 (en) * | 2021-03-26 | 2021-12-08 | 株式会社ノリタケカンパニーリミテド | Heating furnace transfer device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123167A (en) * | 1974-08-20 | 1976-02-24 | Tokico Ltd | SEIRYUSOCHI |
| JPS5466108A (en) * | 1977-10-25 | 1979-05-28 | Ibm | Magnetic disk |
| JPS554710A (en) * | 1978-06-22 | 1980-01-14 | Toppan Printing Co Ltd | Cassette disc |
| JPS5744266A (en) * | 1980-08-27 | 1982-03-12 | Canon Inc | Magnetic sheet cassette device |
| JPS6040581A (en) * | 1983-08-15 | 1985-03-02 | Hitachi Ltd | Housing of disk-shaped recording medium |
| JPS6035367B2 (en) * | 1980-12-24 | 1985-08-14 | 三井東圧化学株式会社 | Method for producing aromatic polyesteramide |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6035367U (en) * | 1983-08-19 | 1985-03-11 | 三洋電機株式会社 | disk drive |
-
1984
- 1984-07-26 JP JP15626984A patent/JPS6136682A/en active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123167A (en) * | 1974-08-20 | 1976-02-24 | Tokico Ltd | SEIRYUSOCHI |
| JPS5466108A (en) * | 1977-10-25 | 1979-05-28 | Ibm | Magnetic disk |
| JPS554710A (en) * | 1978-06-22 | 1980-01-14 | Toppan Printing Co Ltd | Cassette disc |
| JPS5744266A (en) * | 1980-08-27 | 1982-03-12 | Canon Inc | Magnetic sheet cassette device |
| JPS6035367B2 (en) * | 1980-12-24 | 1985-08-14 | 三井東圧化学株式会社 | Method for producing aromatic polyesteramide |
| JPS6040581A (en) * | 1983-08-15 | 1985-03-02 | Hitachi Ltd | Housing of disk-shaped recording medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6978623B1 (en) * | 2021-03-26 | 2021-12-08 | 株式会社ノリタケカンパニーリミテド | Heating furnace transfer device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6136682A (en) | 1986-02-21 |
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