JPH0142341Y2 - - Google Patents
Info
- Publication number
- JPH0142341Y2 JPH0142341Y2 JP1984127599U JP12759984U JPH0142341Y2 JP H0142341 Y2 JPH0142341 Y2 JP H0142341Y2 JP 1984127599 U JP1984127599 U JP 1984127599U JP 12759984 U JP12759984 U JP 12759984U JP H0142341 Y2 JPH0142341 Y2 JP H0142341Y2
- Authority
- JP
- Japan
- Prior art keywords
- fork
- quartz
- cartridge
- support
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 79
- 239000010453 quartz Substances 0.000 claims description 77
- 235000012431 wafers Nutrition 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12759984U JPS6144832U (ja) | 1984-08-24 | 1984-08-24 | ウエハ挿入用石英フオ−ク支持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12759984U JPS6144832U (ja) | 1984-08-24 | 1984-08-24 | ウエハ挿入用石英フオ−ク支持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144832U JPS6144832U (ja) | 1986-03-25 |
| JPH0142341Y2 true JPH0142341Y2 (zh) | 1989-12-12 |
Family
ID=30686241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12759984U Granted JPS6144832U (ja) | 1984-08-24 | 1984-08-24 | ウエハ挿入用石英フオ−ク支持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144832U (zh) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636129A (en) * | 1979-08-31 | 1981-04-09 | Hitachi Ltd | Method and device for heat treatment of semiconductor thin plate |
| JPS5645020A (en) * | 1979-09-21 | 1981-04-24 | Hitachi Ltd | Boat loader |
| JPS57170523A (en) * | 1981-04-15 | 1982-10-20 | Kokusai Electric Co Ltd | Conveying method for wafer boat |
-
1984
- 1984-08-24 JP JP12759984U patent/JPS6144832U/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636129A (en) * | 1979-08-31 | 1981-04-09 | Hitachi Ltd | Method and device for heat treatment of semiconductor thin plate |
| JPS5645020A (en) * | 1979-09-21 | 1981-04-24 | Hitachi Ltd | Boat loader |
| JPS57170523A (en) * | 1981-04-15 | 1982-10-20 | Kokusai Electric Co Ltd | Conveying method for wafer boat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144832U (ja) | 1986-03-25 |
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