JPH0138079B2 - - Google Patents
Info
- Publication number
- JPH0138079B2 JPH0138079B2 JP19474281A JP19474281A JPH0138079B2 JP H0138079 B2 JPH0138079 B2 JP H0138079B2 JP 19474281 A JP19474281 A JP 19474281A JP 19474281 A JP19474281 A JP 19474281A JP H0138079 B2 JPH0138079 B2 JP H0138079B2
- Authority
- JP
- Japan
- Prior art keywords
- pulling
- guide
- shaft
- pulling shaft
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims 4
- 239000013078 crystal Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
【発明の詳細な説明】
本発明は、チヨクラルスキー法による半導体引
上機に係り、特に引上軸としてワイヤまたはビー
ドチエーンなどの可とう性材料を用いたものの引
上軸の横振れ防止装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor pulling machine using the Czyochralski method, and in particular to a device for preventing lateral vibration of a pulling shaft in which a flexible material such as a wire or a bead chain is used as the pulling shaft. It is related to.
半導体引上機は、引上げられた単結晶インゴツ
トの酸素濃度および比抵抗の分布特性を十分満足
させるため、引上軸を所定速度で回転させる必要
がある。ところが、前記のように可とう性材料の
引上軸を用いた場合は、引上軸の回転が引上軸の
長さによる固有振動数に影響され、ある回転数の
範囲で共振を起こして横振れを生ずるため、所望
の回転数まで上げることができない欠点があつ
た。 The semiconductor pulling machine needs to rotate the pulling shaft at a predetermined speed in order to fully satisfy the oxygen concentration and resistivity distribution characteristics of the pulled single crystal ingot. However, when a pulling shaft made of flexible material is used as described above, the rotation of the pulling shaft is affected by the natural frequency of the length of the pulling shaft, and resonance occurs within a certain rotational speed range. There was a drawback that the rotation speed could not be increased to the desired speed due to side vibration.
本発明は、前述したような欠点を解決し、可と
う性材料からなる引上軸の共振などによる横振れ
を小さく押え、所望の速度で安定した回転を行な
わせ、良好な引上げを行ない得るようにした半導
体引上機における引上軸横振れ防止装置を提供す
るにある。 The present invention solves the above-mentioned drawbacks, suppresses lateral vibration caused by resonance of a pulling shaft made of a flexible material, allows stable rotation at a desired speed, and performs good pulling. The present invention provides a device for preventing lateral vibration of a pulling shaft in a semiconductor pulling machine.
以下、本発明の一実施例を示す第１図ないし第
５図について説明する。第１図において、１０は
引上機本体で、密閉可能な構造になされ、下部は
ルツボ１１および図示しない加熱装置などを内蔵
した加熱チヤンバ１０ａを形成し、上部はルツボ
１１内の融液１２から単結晶インゴツト１３を引
上げるための引上チヤンバ１０ｂを形成してい
る。本体１０の上部には、巻上装置１４が取付け
られている。巻上装置１４のフレーム１５はそれ
自身が前記本体１０に回転可能に取付けられ、そ
の下部に固着されたプーリー１６により、引上軸
回転モータ１７からベルト１８により回転を与え
るようになつている。前記フレーム１５にはワイ
ヤまたはビードチエーンなどの可とう性を有する
引上軸１９を巻上げるための巻上ドラム２０が設
けられ、引上モータ２１にて回転を与えられるよ
うになつている。引上軸１９の下端にはシード２
２を取付けたシードチヤツク２が取付けられてお
り、該引上軸１９の上端側にはフレーム１５に設
けた固定ガイド２４により垂下位置を定められて
いる。 1 to 5 showing one embodiment of the present invention will be described below. In FIG. 1, reference numeral 10 denotes the main body of the pulling machine, which has a hermetically sealed structure.The lower part forms a heating chamber 10a containing a crucible 11 and a heating device (not shown), and the upper part is used to draw from the melt 12 in the crucible 11. A pulling chamber 10b for pulling up the single crystal ingot 13 is formed. A hoisting device 14 is attached to the upper part of the main body 10 . The frame 15 of the hoisting device 14 is rotatably attached to the main body 10 , and is rotated by a belt 18 from a hoisting shaft rotating motor 17 through a pulley 16 fixed to the lower part of the frame 15. The frame 15 is provided with a hoisting drum 20 for hoisting a flexible hoisting shaft 19 such as a wire or bead chain, and is rotated by a hoisting motor 21. Seed 2 is attached to the lower end of the pulling shaft 19.
A seed chuck 2 with a seed chuck 2 attached thereto is attached, and its hanging position is determined by a fixed guide 24 provided on the frame 15 on the upper end side of the pulling shaft 19.
引上チヤンバ１０ｂ内には、互いに回転可能に
係合された外筒２５および内筒２６が引上軸１９
と平行に垂下され、、両者の下端には対をなすア
ーム２７，２８が固着されている。これらのアー
ム２７，２８は、第４図に示すように、外筒２５
と内筒２６の相対的な回転によつて開閉可能にな
され、引上軸１９にあらかじめ回転自在に係合さ
れているガイド２９（第５図参照）を着脱可能に
把持するようになつている。 Inside the lifting chamber 10b, an outer cylinder 25 and an inner cylinder 26, which are rotatably engaged with each other, are connected to the lifting shaft 19.
A pair of arms 27 and 28 are fixed to the lower ends of both arms. These arms 27, 28 are connected to the outer cylinder 25 as shown in FIG.
The guide 29 (see FIG. 5), which is rotatably engaged in advance with the pulling shaft 19, is detachably held. .
前記外筒２５および内筒２６には、上端が第１
図に示すように、図示しない真空シールを介して
引上チヤンバ１０ｂの上方へ突出しており、外筒
２５がベアリング３０を介してプレート３１に回
転自在に取付けられ、内筒２６は外筒２５に回転
のみ可能に支持されている。プレート３１には送
りめねじ３２が取付けられ、この送りめねじ３２
は、、外筒２５および内筒２６と平行に設けられ
た送りねじ３３に係合されている。この送りねじ
３３を回転可能に支寺している上下の取付板３
４，３５の間には、該送りねじ３３と平行に、第
２図に示すように、２本のガイド軸３５，３６が
固設され、これらのガイド軸３６，３６に前記プ
レート３１が移動可能に係合されている。 The outer cylinder 25 and the inner cylinder 26 have a first upper end.
As shown in the figure, the lifting chamber 10b projects upward through a vacuum seal (not shown), and the outer cylinder 25 is rotatably attached to the plate 31 via a bearing 30, and the inner cylinder 26 is attached to the outer cylinder 25. Supported for rotation only. A female feed screw 32 is attached to the plate 31.
is engaged with a feed screw 33 provided parallel to the outer cylinder 25 and the inner cylinder 26. Upper and lower mounting plates 3 that rotatably support this feed screw 33
As shown in FIG. 2, two guide shafts 35 and 36 are fixed between the feed screws 33 and 4 and 35, and the plate 31 is moved on these guide shafts 36 and 36. Possibly engaged.
前記外筒２５と内筒２６の上端には、第３図に
示すように、対をなす駆動側アーム３７，３８が
固着されている。駆動側アーム３７，３８の先端
寄りにはそれぞれめねじ３９，４０が係合されて
いる。これらのねじ３９，４０は駆動側アーム３
７，３８に対して回転はせずに、第３図において
左右方向へ移動可能に係合され、かつピン４１，
４２を中心に揺動し得るように取付けられてい
る。これらのめねじ３９，４０は、ねじ軸４３に
設けられている左ねじ部４４と右ねじ部４５にそ
れぞれ係合している。ねじ軸４３はアーム開閉用
モータ４６により正逆回転を与えられ、前記めね
じ３９，４０を介して駆動側アーム３７，３８を
開閉するようになつている。 As shown in FIG. 3, a pair of drive-side arms 37 and 38 are fixed to the upper ends of the outer cylinder 25 and the inner cylinder 26. Female threads 39 and 40 are engaged near the tips of the drive-side arms 37 and 38, respectively. These screws 39 and 40 are attached to the drive side arm 3.
The pins 41, 38 are not rotated but are movably engaged in the left and right direction in FIG.
It is attached so that it can swing around 42. These female threads 39 and 40 are engaged with a left-hand threaded portion 44 and a right-handed threaded portion 45 provided on the screw shaft 43, respectively. The screw shaft 43 is given forward and reverse rotation by an arm opening/closing motor 46, and opens and closes the drive side arms 37, 38 via the female threads 39, 40.
前記送りねじ３３は、下方の取付板３５上に設
けられた昇降用モータ４７によりプーリ４８、ベ
ルト４９、プーリ５０を介して正逆回転を与えら
れ、送りめねじ３２、プレート３１、ベアリング
３０を介して外筒２５および内筒２６を昇降させ
るようになつている。なお、内筒２６には、引上
チヤンバ１０ｂの下部に設けられて上方へ伸びる
振止め軸５１が摺動可動可能に係合されている。 The feed screw 33 is given forward and reverse rotation via a pulley 48, a belt 49, and a pulley 50 by a lifting motor 47 provided on a lower mounting plate 35, and rotates the feed screw 32, plate 31, and bearing 30. The outer cylinder 25 and the inner cylinder 26 are raised and lowered through the cylinder. Note that a steadying shaft 51 that is provided at the lower part of the lifting chamber 10b and extends upward is slidably engaged with the inner cylinder 26.
また、第２図に示すように、取付板３４，３５
の間にはガイド軸３６と平行にラツク５２が取付
けられ、このラツク５２に、第３図に示すよう
に、プレート３１に取付けられたポテンシヨメー
タなどの位置検出器５３がピニオン５４を介して
接続され、プレート３１と一体的に昇降するアー
ム２７，２８の高さ位置を検出し得るようになつ
ている。 In addition, as shown in FIG. 2, the mounting plates 34, 35
A rack 52 is mounted parallel to the guide shaft 36 between them, and a position detector 53 such as a potentiometer mounted on the plate 31 is connected to the rack 52 via a pinion 54, as shown in FIG. The height positions of the arms 27 and 28 which are connected and move up and down integrally with the plate 31 can be detected.
次いで本装置の作用について説明する。引上げ
開始時には、第１図に示すように、外筒２５およ
び内筒２６を下降限位置に置き、引上軸１９にあ
らかじめ係合されているガイド２９をアーム２
７，２８にて把持する。次いで、シード２２をル
ツボ１１内の融液１２に接触させ、引上軸回転モ
ータ１７によりフレーム１５を回転させて引上軸
１９を回転させ、単結晶インゴツト１３を育成し
ていく。 Next, the operation of this device will be explained. When starting to pull up, as shown in FIG.
Grip at 7 and 28. Next, the seed 22 is brought into contact with the melt 12 in the crucible 11, and the frame 15 is rotated by the pulling shaft rotation motor 17 to rotate the pulling shaft 19, thereby growing the single crystal ingot 13.
引上軸１９は、単結晶インゴツト１３の成長に
連れて巻上ドラム２０により除々に引上げられて
いく。このとき、引上軸１９の引上げに連動させ
て、昇降用モータ４７を駆動し、送りねじ３３を
回転させる。この送りねじ３３の回転により、送
りめねじ３２、プレート３１およびベアリング３
０を介して外筒２５および内筒２６が上昇し、ア
ーム２７，２８を介してガイド２９を引上軸１９
と連動して上昇させる。 The pulling shaft 19 is gradually pulled up by the hoisting drum 20 as the single crystal ingot 13 grows. At this time, in conjunction with the lifting of the pulling shaft 19, the lifting motor 47 is driven to rotate the feed screw 33. This rotation of the feed screw 33 causes the feed screw 32, the plate 31 and the bearing 3 to
0, the outer cylinder 25 and inner cylinder 26 rise, and the guide 29 is pulled up through the arms 27 and 28 to the shaft 19.
increase in conjunction with
このガイド２９の高さは、、プレート３１の上
昇に伴つてラツク５２とピニオン５４により回転
される位置検出器５３によつて検出され、図示し
ない制御装置により制御されて前記引上軸１９と
連動するように制御される。 The height of the guide 29 is detected by a position detector 53 that is rotated by a rack 52 and a pinion 54 as the plate 31 rises, and is controlled by a control device (not shown) to interlock with the pulling shaft 19. controlled to do so.
そこで、本装置によれば、引上軸１９の横振れ
方向に対して該引上軸１９を保持するガイド２９
とシードチヤツク２３までの引上軸１９の長さは
常に一定に保たれ、引上開始においても該長さは
短かく押えられる。 Therefore, according to the present device, a guide 29 that holds the pulling shaft 19 in the lateral vibration direction of the pulling shaft 19 is provided.
The length of the pulling shaft 19 from the seed chuck 23 to the seed chuck 23 is always kept constant, and the length is kept short even at the start of pulling.
なお、引上軸１９の共振周波数を表わす下式
のｌは、前記ガイド２９からシードチヤツク２３
までの実際の引上軸１９の長さでなく、ガイド２
９からシードチヤツク２３、シード２２および単
結晶インゴツト１３をも含めた重心位置Ｇまでの
距離となる。 Note that l in the equation below, which represents the resonant frequency of the pulling shaft 19, is calculated from the guide 29 to the seed chuck 23.
The length of the guide 2 is not the actual length of the pulling shaft 19 up to
9 to the center of gravity position G including the seed chuck 23, seed 22 and single crystal ingot 13.
ただし、ｇは重力加速度である。 However, g is gravitational acceleration.
そこで、前記距離ｌは、単結晶インゴツト１３
が成長し、引上長さが増加するにしたがつて増加
するために、この共振周波数に相当する引上軸
１９の許容回転数は、第６図に曲線Ａで示すよう
に変化し、引上開始時に最も高い回転数N1まで
共振を起こさず、引上長さが増加するにしたがつ
て低下したいく。 Therefore, the distance l is the distance between the single crystal ingot 13
grows and increases as the pulling length increases, so the permissible rotational speed of the pulling shaft 19 corresponding to this resonance frequency changes as shown by curve A in FIG. Resonance does not occur up to the highest rotational speed N1 at the start of lifting, and decreases as the pulling length increases.
他方、前記ガイド２９がなく、単に上方の固定
ガイド２４のみにて引上軸１９を保持する場合に
は、距離ｌが前記の場合より相当長くなるのでこ
のときの許容回転数は第６図の曲線Ｂで示すよう
になる。なお、この場合は、固定ガイド２４の位
置は一定であり、単結晶インゴツト１３などの重
心位置は引上げが進むに連れて上昇するため、前
記距離ｌは引上開始時が最も長く、引上げが進む
に連れて次第に短かくなる。そこで前記曲線Ｂで
示すように、許容回転数は引上開始時が最も低い
N2となり、引上げが進むに連れて許容回転数は
上昇する。しかしながら、実際に採用できる回転
数は、最も低い許容回転数N2であるため、この
許容回転数N2と比較すれば、前記曲線Ａで示さ
れている本装置の許容回転数は十分高くとり得る
ことが判明する。 On the other hand, if the guide 29 is not provided and the pulling shaft 19 is simply held by the upper fixed guide 24, the distance l will be considerably longer than in the above case, and the allowable rotation speed in this case will be as shown in FIG. It becomes as shown by curve B. In this case, the position of the fixed guide 24 is constant, and the center of gravity of the single crystal ingot 13 rises as the pulling progresses, so the distance l is longest at the start of pulling, and as the pulling progresses. It gradually becomes shorter as the length increases. Therefore, as shown in curve B above, the allowable rotation speed is lowest at the start of pulling.
N 2 , and the allowable rotation speed increases as the pulling progresses. However, since the actual rotation speed that can be adopted is the lowest allowable rotation speed N 2 , the allowable rotation speed of this device shown by the curve A is sufficiently high compared to this allowable rotation speed N 2 . It turns out that you get it.
しかして、本装置によれば、、従来のように引
上軸１９の横振れによつてその回転数を低く押え
られることなく、、育成される単結晶インゴツト
１３の酸素濃度および比抵抗の分布特性を満足さ
せるなどの引上条件に最も好ましい回転数で引上
軸１９を回転させることができ、良好な単結晶イ
ンゴツト１３が得られる。 According to this apparatus, the rotational speed of the pulling shaft 19 is not suppressed to a low level due to the lateral vibration of the pulling shaft 19 as in the conventional case, and the distribution of oxygen concentration and specific resistance of the single crystal ingot 13 to be grown is improved. The pulling shaft 19 can be rotated at the most preferable rotation speed for the pulling conditions such as satisfying the characteristics, and a good single crystal ingot 13 can be obtained.
こうして所定長さの単結晶インゴツト１３が育
成されたならば、引上げを停止し、アーム開閉用
モータ４０を作動させてねじ軸４３を逆転させ
る。このねじ軸４３の逆転によりめねじ３９，４
０を介して駆動側アーム３７，３８が閉じる方向
へ旋回して外筒２５と内筒２６とを互いに逆方向
へ回転させ、アーム２７，２８を開く。こうして
ガイド２９をアーム２７，２８から外した後、単
結晶インゴツト１３をルツボ１１から引上チヤン
バ１０ｂ内へ引上げ、加熱チヤンバ１０ａと引上
チヤンバ１０ｂの間の図示しないゲートバルブを
閉じて両チヤンバ間をしや断し、引上チヤンバ１
０ｂの図示しない開閉扉を開いて単結晶インゴツ
ト１３を取出し、１回の引上げを終了する。 Once the single crystal ingot 13 of a predetermined length has been grown in this manner, the pulling is stopped and the arm opening/closing motor 40 is operated to reverse the screw shaft 43. This reversal of the screw shaft 43 causes the female screws 39, 4 to
The drive-side arms 37 and 38 turn in the closing direction through the 0, rotating the outer cylinder 25 and the inner cylinder 26 in opposite directions, and opening the arms 27 and 28. After removing the guide 29 from the arms 27 and 28 in this manner, the single crystal ingot 13 is pulled up from the crucible 11 into the pulling chamber 10b, and the gate valve (not shown) between the heating chamber 10a and the pulling chamber 10b is closed, and the gap between both chambers is closed. Cut off and pull up chamber 1
The unillustrated opening/closing door 0b is opened to take out the single crystal ingot 13, and one pulling operation is completed.
前述した実施例は、ガイド２９を引上軸１９の
引上げに連動して上昇させるようにした例を示し
たが、、これに限らず、ガイド２９を引上げの初
期には下限に近い位置に停止させておき、引上げ
が進んでシードチヤツク２３がガイド２９に近付
いた時点からガイド２９を引上軸１９と連動させ
て上昇させるようにしてもよい。この場合、引上
軸１９の許容回転数は、第６図に一点鎖線で示す
曲線Ｃのようになる。また、ガイド２９は引上軸
１９の引上げに応じて間欠的に所定距離ずつ上昇
させるようにしてもよく、この場合の許容回転数
は第６図に点線で示す曲線Ｄのようになる。 Although the above-mentioned embodiment shows an example in which the guide 29 is raised in conjunction with the pulling up of the pulling shaft 19, the present invention is not limited to this, and the guide 29 may be stopped at a position close to the lower limit at the beginning of pulling up. Alternatively, the guide 29 may be raised in conjunction with the pulling shaft 19 from the time when the seed chuck 23 approaches the guide 29 as the pulling progresses. In this case, the permissible rotational speed of the pulling shaft 19 is as shown by a curve C shown by a dashed line in FIG. Further, the guide 29 may be raised intermittently by a predetermined distance in response to the pulling up of the pulling shaft 19, and in this case, the allowable rotation speed is as shown by a curve D shown by a dotted line in FIG.
さらにまた、前述した実施例は、あらかじめ引
上軸１９に係合されているガイド２９をアーム２
７，２８にて着脱可能に保持するようにした例を
示したが、アーム２７，２８をガイドとしてこれ
らにより直接引上軸１９を回転可能に包囲するよ
うにしてもよく、さらにまた、前記ガイド２９の
ようなガイドを単に引上軸１９と連続的ないしは
間欠的に連動して移動するように設けてもよい
等、種々変更し得ることは言うまでもない。 Furthermore, in the above-described embodiment, the guide 29, which is previously engaged with the pulling shaft 19, is connected to the arm 2.
Although an example is shown in which the arms 27 and 28 are detachably held, the arms 27 and 28 may be used as guides to directly surround the pulling shaft 19 in a rotatable manner. It goes without saying that various modifications may be made, such as simply providing a guide such as 29 to move in conjunction with the pulling shaft 19 continuously or intermittently.
以上述べたように本発明によれば、可とう性材
料からなる引上軸の共振などによる横振れを引上
開始時から終了時までのすべての間においてより
小さく押えることができ、引上軸を所望の速度で
安定して回転せることができるため、良好な引上
げを行ない得る効果が得られる。 As described above, according to the present invention, it is possible to suppress the lateral vibration caused by resonance of the pulling shaft made of flexible material to a smaller extent throughout the entire period from the start of pulling to the end of pulling. can be stably rotated at a desired speed, resulting in the effect of good pulling.
第１図は本発明の一実施例を示す一部破断概要
図、第２図は第１図のＺ矢視による部分右側面
図、第３図は第１図の−線による断面図、第
４図は第１図の−線による断面図、第５図は
第４図の−線による部分拡大断面図、第６図
は引上長さと引上軸の許容回転数との関係を示す
曲線図である。
１０……引上機本体、１０ａ……加熱チヤン
バ、１０ｂ……引上チヤンバ、１１……ルツボ、
１３……単結晶インゴツト、１４……巻上装置、
１９……引上軸、２２……シード、２３……シー
ドチヤツク、２５……外筒、２６……内筒、２
７，２８……アーム、２９……ガイド、３１……
プレート、３２……送りめねじ、３３……送りね
じ、３６……ガイド軸、３７，３８……駆動側ア
ーム、３９，４０……めねじ、４３……ねじ軸、
４６……アーム開閉用モータ、４７……昇降用モ
ータ、５２……ラツク、５３……位置検出器、５
４……ピニオン。
FIG. 1 is a partially cutaway schematic diagram showing one embodiment of the present invention, FIG. 2 is a partial right side view taken along the Z arrow in FIG. 1, and FIG. Figure 4 is a sectional view taken along the - line in Figure 1, Figure 5 is a partially enlarged sectional view taken along the - line in Figure 4, and Figure 6 is a curve showing the relationship between the pulling length and the allowable rotation speed of the pulling shaft. It is a diagram. 10 ... Pulling machine main body, 10a... Heating chamber, 10b... Pulling chamber, 11... Crucible,
13... Single crystal ingot, 14... Hoisting device,
19... Pulling shaft, 22... Seed, 23... Seed chuck, 25... Outer cylinder, 26... Inner cylinder, 2
7, 28... Arm, 29... Guide, 31...
Plate, 32... Feed female screw, 33... Feed screw, 36... Guide shaft, 37, 38... Drive side arm, 39, 40... Female thread, 43... Screw shaft,
46... Arm opening/closing motor, 47... Lifting motor, 52... Rack, 53... Position detector, 5
4...Pinion.
Claims (1)
上機において、シードチヤツクの上方に位置して
引上軸を包囲するガイドと、同ガイドを引上軸と
平行に移動可能に保持する案内部と、前記ガイド
を前記案内部に沿つて移動させる駆動手段とを具
備することを特徴とする半導体引上機における引
上軸横振れ防止装置。 ２ 駆動手段が、ガイドを引上軸の引上速度と同
期して移動させるように構成されている特許請求
の範囲第１項記載の半導体引上機における引上軸
横振れ防止装置。 ３ 駆動手段が、ガイドを引上軸の引上げに従つ
て間欠的に移動させるように構成されている特許
請求の範囲第１項記載の半導体引上機における引
上軸横振れ防止装置。 ４ ガイドが、案内部に沿つて移動する開閉部材
によつて着脱可能に支持されている特許請求の範
囲第１、２または３項記載の半導体引上機におけ
る引上軸横振れ防止装置。 ５ ガイドが、開閉可能に形成されている特許請
求の範囲第１、２または３項記載の半導体引上機
における引上軸横振れ防止装置。[Claims] 1. A semiconductor pulling machine that uses a flexible material as a pulling shaft, including a guide located above a seed chuck and surrounding the pulling shaft, and a guide that is movable parallel to the pulling shaft. 1. A device for preventing lateral vibration of a pulling shaft in a semiconductor pulling machine, comprising: a guide section for holding the guide; and a drive means for moving the guide along the guide section. 2. A pulling shaft lateral vibration prevention device in a semiconductor pulling machine according to claim 1, wherein the drive means is configured to move the guide in synchronization with the pulling speed of the pulling shaft. 3. A pulling shaft lateral vibration prevention device in a semiconductor pulling machine according to claim 1, wherein the drive means is configured to move the guide intermittently as the pulling shaft is pulled up. 4. A pulling shaft lateral vibration prevention device in a semiconductor pulling machine according to claim 1, 2 or 3, wherein the guide is removably supported by an opening/closing member that moves along the guide portion. 5. A pulling shaft lateral vibration prevention device in a semiconductor pulling machine according to claim 1, 2 or 3, wherein the guide is formed to be openable and closable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19474281A JPS5895691A (en) | 1981-12-03 | 1981-12-03 | Preventing apparatus for transverse vibration of pulling up shaft in pulling up machine of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19474281A JPS5895691A (en) | 1981-12-03 | 1981-12-03 | Preventing apparatus for transverse vibration of pulling up shaft in pulling up machine of semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5895691A JPS5895691A (en) | 1983-06-07 |
| JPH0138079B2 true JPH0138079B2 (en) | 1989-08-10 |
Family
ID=16329467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19474281A Granted JPS5895691A (en) | 1981-12-03 | 1981-12-03 | Preventing apparatus for transverse vibration of pulling up shaft in pulling up machine of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5895691A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100542538B1 (en) * | 2001-09-11 | 2006-01-11 | 주식회사 포스코 | Wave prevention apparatus for unloader bucket |
-
1981
- 1981-12-03 JP JP19474281A patent/JPS5895691A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5895691A (en) | 1983-06-07 |
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