JPH01321337A - Light scanner - Google Patents

Light scanner

Info

Publication number
JPH01321337A
JPH01321337A JP15744688A JP15744688A JPH01321337A JP H01321337 A JPH01321337 A JP H01321337A JP 15744688 A JP15744688 A JP 15744688A JP 15744688 A JP15744688 A JP 15744688A JP H01321337 A JPH01321337 A JP H01321337A
Authority
JP
Japan
Prior art keywords
optical scanner
photodetector
light beam
light
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15744688A
Other languages
Japanese (ja)
Inventor
Michinosuke Takada
高田 道之助
Toshiya Kubodera
窪寺 俊也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15744688A priority Critical patent/JPH01321337A/en
Publication of JPH01321337A publication Critical patent/JPH01321337A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59Transmissivity
    • G01N21/5907Densitometers
    • G01N21/5911Densitometers of the scanning type

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To enable the setting of optimum measuring conditions by providing a light receiving section with a single photo detector and a driving mechanism to move the photo detector in response to a scanning with an optical scanner so that the photo detector is always located at a position opposite to the optical scanner. CONSTITUTION:As a rotary drum 2 is turned, an optical scanner 12 and a light receiving section 30 are rotated. The scanner 12 has a reflector 26 oscillated with a motor and a light beam 24 from a light source scans to cover an area to be measured of an object to be inspected to be detected with a photo detector 34 moving maintaining an opposite positional relationship with a reflector 26. In this manner, with the turning of a drum 2, a radiating position of the light beam 24 with respect to the object to be inspected is changed along a circumferential direction centered on the object to be inspected at a fixed pitch over the entire circumference. This enables the setting of optimum measuring conditions to match the object to be inspected.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は光ビームを走査して光透過性の被検体内の断層
情報を被破壊的に得る光走査装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an optical scanning device that non-destructively obtains tomographic information within a transparent object by scanning a light beam.

(従来の技術) 試料内の断層情報を非破壊的に得るにはx 41 cT
装置が一般に使用されている。X線に代えて可視領域か
ら近赤外領域の光を照射して試料の断層情報を得る光C
T装置が提案されている(例えば特開昭60−7254
2号公報参照)。
(Prior art) To non-destructively obtain tomographic information within a sample x 41 cT
equipment is commonly used. Light C that obtains tomographic information of a sample by irradiating light from the visible region to the near-infrared region instead of X-rays
T device has been proposed (for example, Japanese Patent Application Laid-Open No. 60-7254
(See Publication No. 2).

光CT装置の光走査装置は光源からの光ビームを試料に
対して異なる位置で透過させるための光ビーム走査手段
と、光ビーム走査手段に対向する位置に設けられ、光ビ
ーム走査手段から出射される光ビームを受光する受光部
とを備えている。
The optical scanning device of the optical CT apparatus includes a light beam scanning means for transmitting a light beam from a light source to a sample at different positions, and a light beam scanning device provided at a position opposite to the light beam scanning means to transmit a light beam emitted from the light beam scanning means. and a light receiving section that receives the light beam.

光走査装置の第1世代及び第2世代と称されるものは第
4図に示されるようなS−R方式であり、第3世代以後
は第5図に示されるファンビームを用いたR−R方式で
ある。
The so-called first and second generation optical scanning devices are the S-R system as shown in FIG. 4, and the third and subsequent generations are the R-system using a fan beam as shown in FIG. This is the R method.

第4図において、2は回転ドラム、4は被検体を配置す
る孔であり、回転ドラム2内で光源6と光検出器8が互
いに対向しながら平行シフトを行なう。中央部に配置さ
れた被検体は固定され、回転ドラム2の回転に伴なって
光源6と光検出器8が対向関係を保ったままで回転して
被検体の全周にわたるデータが得られる。
In FIG. 4, 2 is a rotating drum, 4 is a hole in which a subject is placed, and within the rotating drum 2, a light source 6 and a photodetector 8 face each other and perform a parallel shift. The subject placed in the center is fixed, and as the rotating drum 2 rotates, the light source 6 and photodetector 8 rotate while maintaining a facing relationship, thereby obtaining data over the entire circumference of the subject.

第5図の方式では光源10からの光ビームが光学スキャ
ナ12によフて一定の範囲内で扇形に走査され、光ビー
ムは光学スキャナ12に対向して配置された光検出器ア
レイ14によって検出される。第5図の装置でも中央部
に配置された被検体は固定され1回転ドラム2の回転に
伴なって光学スキャナ12と光検出器アレイ14も回転
して被検体の全周にわたるデータが得られる。
In the method shown in FIG. 5, a light beam from a light source 10 is scanned in a fan shape within a certain range by an optical scanner 12, and the light beam is detected by a photodetector array 14 placed opposite the optical scanner 12. be done. In the apparatus shown in FIG. 5, the subject placed in the center is fixed, and as the drum 2 rotates once, the optical scanner 12 and the photodetector array 14 also rotate to obtain data over the entire circumference of the subject. .

(発明が解決しようとする課題) 第4図に示されるS−R方式では、光@6と光検出器8
の平行シフトと、回転ドラム2の回転というまったく異
なった機構を組み合わせるので、機構的に複雑になる問
題がある。
(Problem to be solved by the invention) In the S-R system shown in FIG.
Since the parallel shift of the rotary drum 2 and the rotation of the rotary drum 2, which are completely different mechanisms, are combined, there is a problem of mechanical complexity.

また、光源6として大型のレーザ装置(例えば色素レー
ザ)などを使用することができない。
Furthermore, a large laser device (for example, a dye laser) cannot be used as the light source 6.

第5図のR−R方式は1機構的には簡単になるものの、
多数の光検出器が必要になる。光CT装置で動物や人体
などの光散乱性の被検体を測定するとき、被検体を透過
してくる光景が極めて少なくなるため、光検出器として
は高感度のものを用いる必要がある。そこで1例えばフ
ォトンカウント回路やストリークカメラなどの高感度光
検出器を用いようとすると、空間的制約から設置できる
検出器の数が限られてしまい、画像の分解能が悪くなる
。また、そのような高感度光検出器を多数使用すると光
走査装置の価格が高くなる。
Although the R-R method shown in Fig. 5 is mechanically simpler,
A large number of photodetectors are required. When measuring a light-scattering object such as an animal or a human body using an optical CT apparatus, the amount of sight that passes through the object becomes extremely small, so a highly sensitive photodetector must be used. Therefore, if a high-sensitivity photodetector such as a photon counting circuit or a streak camera is used, the number of detectors that can be installed is limited due to spatial constraints, resulting in poor image resolution. Furthermore, if a large number of such high-sensitivity photodetectors are used, the price of the optical scanning device increases.

本発明は第5図に示されるような方式の光走査装置にお
いて、高感度光検出器を用いることができるようにし、
かつ、分解能が高く1価格は高くしないことを目的とす
るもののである6(課題を解決するための手段) 本発明では光学スキャナによって光源からの光ビームを
走査するようにし、光学スキャナと対向する位置には単
一の光検出器を設け、この光検出器を光学スキャナの走
査に対応して移動させて常に光学スキャナの対向位置に
あるようにする。
The present invention makes it possible to use a highly sensitive photodetector in an optical scanning device of the type shown in FIG.
In addition, the object is to have high resolution and not be expensive.6 (Means for Solving the Problems) In the present invention, an optical scanner is used to scan a light beam from a light source, and a light beam facing the optical scanner is scanned. A single photodetector is provided at the position, and this photodetector is moved in response to the scanning of the optical scanner so that it is always in a position opposite the optical scanner.

そのため、本発明では回転ドラム内で光源からの光ビー
ムを回転ドラムの中心軸と直交する平面内で反射して走
査する光学スキャナを配置し、光学スキャナの対向側に
は光学スキャナから出射される光ビームを受光する受光
部を配置し、受光部には単一の光検出器と、光検出器が
常に光学スキャナの対向位置になるように光検出器を光
学スキャナの走査に対応して移動させる光検出器駆動機
構を備えた。
Therefore, in the present invention, an optical scanner that scans by reflecting the light beam from a light source in a plane perpendicular to the central axis of the rotating drum is arranged inside the rotating drum, and on the opposite side of the optical scanner, the light beam emitted from the optical scanner is A light receiving section that receives the light beam is arranged, and the light receiving section includes a single photodetector, and the photodetector is moved in accordance with the scanning of the optical scanner so that the photodetector is always in a position facing the optical scanner. Equipped with a photodetector drive mechanism that allows

(作用) 回転駆動手段によって回転ドラムが回転すると。(effect) When the rotary drum is rotated by the rotary drive means.

それに伴なって光学スキャナと受光部も回転する。Along with this, the optical scanner and the light receiving section also rotate.

回転ドラムの回転中又は停止時に光学スキャナが光ビー
ムを走査するので、光ビームは被検体の測定領域をカバ
ーするように走査されながら、かつ、光ビームの放射位
置が被検体を中心とした全周にわたって変位する。光検
出器は光検出器駆動機構によって常に光学スキャナに対
向する位置に移動させられるので、走査された全ての光
ビームを単一の光検出器で検出する。
Since the optical scanner scans the light beam while the rotating drum is rotating or when it is stopped, the light beam is scanned to cover the measurement area of the object, and the emission position of the light beam is spread over the whole area centered on the object. Displaced over the circumference. Since the photodetector is always moved to a position facing the optical scanner by the photodetector drive mechanism, all scanned light beams are detected by a single photodetector.

(実施例) 第1図及び第2図に本発明の一実施例を示す。(Example) An embodiment of the present invention is shown in FIGS. 1 and 2. FIG.

第2図は一部を切り欠いて示す側面図、第1図は第2図
のA−A線位置での断面図である。
FIG. 2 is a partially cutaway side view, and FIG. 1 is a sectional view taken along line A--A in FIG. 2.

回転ドラム2は外周面2aで受はローラ20によって回
転可能に支持されている。回転ローラ2の中心部には被
検体を配置する孔4が形成されている。回転ドラム2の
外周面2aには図には表わされていないが、全周に渡っ
てねじ溝が形成され。
The rotary drum 2 is rotatably supported by rollers 20 on its outer peripheral surface 2a. A hole 4 is formed in the center of the rotating roller 2 in which a subject is placed. Although not shown in the figure, a thread groove is formed on the outer circumferential surface 2a of the rotating drum 2 over the entire circumference.

そのねじ溝に歯車が噛み合わされ、その歯車が駆動用モ
ータによって回転させられることにより回転ドラム2が
回転する。
A gear is engaged with the thread groove, and the gear is rotated by a drive motor, thereby rotating the rotating drum 2.

回転ドラム2内には被検体を照射する光ビーム24を発
生する光源22と、光源22からの光ビーム24を回転
ドラム2の中心軸と直交する平面内で反射して走査する
光学スキャナ12が回転ドラム2に取りつけられている
。光学スキャナ12は光ビーム24を反射して被検体に
照射する反射鏡26と、反射鏡26を揺動卵動するモー
タ28とを備えている。
Inside the rotating drum 2 are a light source 22 that generates a light beam 24 that irradiates the subject, and an optical scanner 12 that scans by reflecting the light beam 24 from the light source 22 within a plane perpendicular to the central axis of the rotating drum 2. It is attached to the rotating drum 2. The optical scanner 12 includes a reflecting mirror 26 that reflects a light beam 24 and irradiates the object to be examined, and a motor 28 that swings the reflecting mirror 26.

回転ドラム2内にはまた。被検体を挾んで光学スキャナ
12と対向する側に光学スキャナ12で走査される光ビ
ーム24を受光する受光部30が回転ドラム2に取りつ
けられている。受光部30は回転ドラム2に取りつけら
れた光検出m駆動機構32と、光検出器駆動機構32に
支持された光電子増倍管やフォトダイオードなどの単一
の光検出器34を備えている。光検出器駆動機構32は
光検出器34が光学スキャナの反射鏡26を中心とする
円の円弧上を移動するように光検出器34を支持するラ
ック36と、ラック36を駆動するモータ38とを備え
、モータ38の回転軸には歯車が取りつけられてその歯
車がラック36と噛み合っている。
Also inside the rotating drum 2. A light receiving section 30 that receives the light beam 24 scanned by the optical scanner 12 is attached to the rotating drum 2 on the side facing the optical scanner 12 while sandwiching the subject. The light receiving section 30 includes a photodetector driving mechanism 32 attached to the rotating drum 2 and a single photodetector 34 such as a photomultiplier tube or a photodiode supported by the photodetector driving mechanism 32. The photodetector drive mechanism 32 includes a rack 36 that supports the photodetector 34 so that the photodetector 34 moves on an arc of a circle centered on the reflector 26 of the optical scanner, and a motor 38 that drives the rack 36. A gear is attached to the rotating shaft of the motor 38, and the gear meshes with the rack 36.

光学スキャナのモータ28と光検出器駆動機構のモータ
38は、光検出器34が常に反射鏡26と対向する位置
関係を保つように同期して駆動が制御される。これらの
モータ28,38としては例えばパルスモータを使用す
ることができる。ラック36の原点位置を検出するため
に、フォトセンサなどの検出手段を設けておく。
The motor 28 of the optical scanner and the motor 38 of the photodetector drive mechanism are controlled in synchronization so that the photodetector 34 always maintains a positional relationship facing the reflecting mirror 26. For example, pulse motors can be used as these motors 28, 38. In order to detect the origin position of the rack 36, a detection means such as a photo sensor is provided.

次に、本実施例の動作について説明する。Next, the operation of this embodiment will be explained.

回転ドラム2が一方向に回転させられると、それに伴な
って光学スキャナ12と受光部30も回転する。一方、
光学スキャナ12においてはモータ28によって反射鏡
26が揺動して光源22からの光ビーム24を被検体の
測定領域をカバーするように走査し、その走査された光
ビームは反射!!26と対向位置関係を保って移動する
光検出器34によって検出される。このように1回転ド
ラム2の回転に伴なって被検体に対する光ビーム24の
放射位置が被検体を中心とする周方向に沿って一定のピ
ッチで全円周にわたって変化させられる。
When the rotating drum 2 is rotated in one direction, the optical scanner 12 and the light receiving section 30 are also rotated accordingly. on the other hand,
In the optical scanner 12, a reflecting mirror 26 is oscillated by a motor 28 to scan the light beam 24 from the light source 22 so as to cover the measurement area of the object, and the scanned light beam is reflected! ! It is detected by a photodetector 34 that moves while maintaining a positional relationship opposite to 26. In this manner, as the drum 2 rotates once, the radiation position of the light beam 24 relative to the subject is changed over the entire circumference at a constant pitch along the circumferential direction centered on the subject.

第3図は他の実施例を表わす。FIG. 3 represents another embodiment.

光検出器34が金具40に取りつけられ、金具40は光
学スキャナの反射鏡26の回転中心と同じ回転中心のま
わりに回転するように回転ドラム2に取りつけられてい
る。
The photodetector 34 is attached to a metal fitting 40, and the metal fitting 40 is attached to the rotating drum 2 so as to rotate about the same rotation center as the rotation center of the reflecting mirror 26 of the optical scanner.

反射鏡26による光ビーム24の反射光を光検出器34
に入射させるために、金具40の回転角が反射鏡26の
回転角の2倍になるように設定されている。
The reflected light of the light beam 24 by the reflecting mirror 26 is detected by a photodetector 34.
The rotation angle of the metal fitting 40 is set to be twice the rotation angle of the reflecting mirror 26 in order to make the light incident on the mirror 26.

第1図及び第2図に示される実施例では、光源22が回
転ドラム2内に設けられているが、光源として例えば大
型レーザ装置などを使用する場合は、光源を回転ドラム
2の外部に設置し、光源からの光ビームを回転ドラム2
の中心軸上を回転ドラム内に導き、その中心軸上に回転
ドラム2とともに回転するように第1の反射鏡を設け、
回転ドラム2に第2の反射鏡を取りつけ、第2の反射鏡
を経て光ビームを光学スキャナの反射鏡26に導くよう
にしてもよい。
In the embodiment shown in FIGS. 1 and 2, the light source 22 is provided inside the rotating drum 2, but if a large laser device or the like is used as the light source, the light source is installed outside the rotating drum 2. The light beam from the light source is sent to the rotating drum 2.
a first reflecting mirror is provided on the central axis so as to rotate together with the rotating drum 2,
A second reflector may be attached to the rotating drum 2, through which the light beam is guided to a reflector 26 of the optical scanner.

(発明の効果) 本発明では、光学スキャナによって光源からの光ビーム
を走査するようにしたので1wI単な機構の光走査装置
となる。
(Effects of the Invention) In the present invention, since the optical scanner scans the light beam from the light source, it becomes an optical scanning device with a simple mechanism.

また、単一の光検出器を用いるので、高感度な光検出方
式を採用することができる。
Furthermore, since a single photodetector is used, a highly sensitive photodetection method can be employed.

第5図の光走査装置では、光検出器の数や取りつけピッ
チが予め決まっているので、分解能は固定されているが
、本発明の光走査袋ζでは光学スキャナと光検出器の送
りピッチによって分解能を上げたり、下げたりすること
が自由にでき、また、光検出器の送り範囲も自由に制御
できるので、被検体に合わせて最適の測定条件を設定す
ることができ、自由度の高い光走査装置となる。
In the optical scanning device shown in Fig. 5, the number of photodetectors and the mounting pitch are predetermined, so the resolution is fixed, but in the optical scanning bag ζ of the present invention, the resolution is determined by the feeding pitch of the optical scanner and the photodetector. You can freely increase or decrease the resolution, and you can also freely control the feed range of the photodetector, so you can set the optimal measurement conditions according to the object being examined, and you can use light with a high degree of freedom. It becomes a scanning device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は一実施例を示す断面図であり、第2図のA−A
線位置での切断状態を表わしている。第2図は同実施例
を一部を切り欠いて示す側面図である。第3図は他の実
施例を示す要部正面図、第4図及び第5図はそれぞれ従
来の光走査装置を示す概略図である。 2・・・・・・回転ドラム、4・・・・・・被検体設置
孔、12・・・・・・光学スキャナ、26・・・・・・
反射鏡、28,38・・・・・・モータ、3o・・・・
・・受光部、32・・・・・・光検出器駆動機構、34
・・・・・・光検出器、36・・・・・・ラック、40
・・・・・・金具。 特許出顕人 株式会社島津製作所
FIG. 1 is a sectional view showing one embodiment, and A-A in FIG.
It shows the cutting state at the line position. FIG. 2 is a partially cutaway side view of the same embodiment. FIG. 3 is a front view of main parts showing another embodiment, and FIGS. 4 and 5 are schematic diagrams showing conventional optical scanning devices, respectively. 2... Rotating drum, 4... Subject installation hole, 12... Optical scanner, 26...
Reflector, 28, 38...Motor, 3o...
... Light receiving section, 32 ... Photodetector drive mechanism, 34
...Photodetector, 36...Rack, 40
...Metal fittings. Patent Appearance Shimadzu Corporation

Claims (1)

【特許請求の範囲】[Claims] (1)中央に被検体を配置する孔が形成された回転ドラ
ムと、この回転ドラムを回転駆動する回転駆動手段とを
備え、前記回転ドラム内には光源からの光ビームを前記
回転ドラムの中心軸と直交する平面内で反射して走査す
る光学スキャナと、この光学スキャナの対向側でこの光
学スキャナから出射される光ビームを受光する受光部と
が配置され、前記受光部には単一の光検出器と、この光
検出器が常に前記光学スキャナの対向位置になるように
前記光学スキャナの走査に対応して光検出器を移動させ
る光検出器駆動機構とを備えている光走査装置。
(1) A rotating drum is provided with a hole formed in the center for arranging a subject, and a rotational drive means for rotationally driving this rotating drum. An optical scanner that scans by reflecting in a plane perpendicular to the axis, and a light receiving section that receives a light beam emitted from this optical scanner on the opposite side of the optical scanner are arranged, and the light receiving section has a single light beam. An optical scanning device comprising: a photodetector; and a photodetector drive mechanism that moves the photodetector in response to scanning by the optical scanner so that the photodetector is always positioned opposite the optical scanner.
JP15744688A 1988-06-23 1988-06-23 Light scanner Pending JPH01321337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15744688A JPH01321337A (en) 1988-06-23 1988-06-23 Light scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15744688A JPH01321337A (en) 1988-06-23 1988-06-23 Light scanner

Publications (1)

Publication Number Publication Date
JPH01321337A true JPH01321337A (en) 1989-12-27

Family

ID=15649836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15744688A Pending JPH01321337A (en) 1988-06-23 1988-06-23 Light scanner

Country Status (1)

Country Link
JP (1) JPH01321337A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636030A (en) * 1995-05-01 1997-06-03 Limbach; Douglas C. Optical method and apparatus for measuring surface topography of an object
ITBO20130363A1 (en) * 2013-07-12 2015-01-13 T R Turoni S R L DEVICE FOR THE MEASURE OF FRUITS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636030A (en) * 1995-05-01 1997-06-03 Limbach; Douglas C. Optical method and apparatus for measuring surface topography of an object
ITBO20130363A1 (en) * 2013-07-12 2015-01-13 T R Turoni S R L DEVICE FOR THE MEASURE OF FRUITS

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