JPH01320619A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01320619A JPH01320619A JP15528688A JP15528688A JPH01320619A JP H01320619 A JPH01320619 A JP H01320619A JP 15528688 A JP15528688 A JP 15528688A JP 15528688 A JP15528688 A JP 15528688A JP H01320619 A JPH01320619 A JP H01320619A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic recording
- recording medium
- perpendicularly magnetized
- durability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 21
- 229910001252 Pd alloy Inorganic materials 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 9
- 230000005415 magnetization Effects 0.000 claims description 8
- 230000002159 abnormal effect Effects 0.000 abstract description 5
- 239000013078 crystal Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 229920006254 polymer film Polymers 0.000 abstract description 4
- -1 polyethylene terephthalate Polymers 0.000 abstract description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
- 239000011241 protective layer Substances 0.000 abstract description 2
- 229910020517 Co—Ti Inorganic materials 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VLLYHFSAJNIONB-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,18,18,19,19,20,20,20-nonatriacontafluoroicosanoic acid Chemical group OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F VLLYHFSAJNIONB-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度記録に適する垂直磁気記録用の磁気記
録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium for perpendicular magnetic recording suitable for high-density recording.
従来の技術
垂直磁気記録方式は面内磁化記録方式による高密度化の
限界を越えることの出来る磁気記録技術としてその将来
性が注目されている（電子通信学会磁気記録研究会資料
、ＭＲ８５−１６）。Conventional technology Perpendicular magnetic recording is attracting attention as a magnetic recording technology that can exceed the limits of high density achieved by in-plane magnetization recording (IEICE Magnetic Recording Study Group Materials, MR85-16). .
このような高密度記録の実現には、基板上に配した強磁
性金属薄膜が、膜面に垂直方向に残留磁化を反平行に配
列できる磁化膜、いわゆる垂直磁化膜を必要とし、現状
では、０．２〜０，５μｍ程度でＯｒを１５〜２３ｗｔ
％含有したＣｏ −Ｏｒ 、ｘ。To realize such high-density recording, a ferromagnetic metal thin film disposed on a substrate requires a magnetized film that can arrange residual magnetization in an antiparallel direction perpendicular to the film surface, a so-called perpendicular magnetized film. 15-23wt of Or at about 0.2-0.5μm
% of Co-Or, x.
バッタ膜が性能的に最も優れていて、実用化の為に高速
化の提案がなされている（第４回日本応用磁気学会６０
ム−４，特公昭６２−５６５７５号公報）
発明が解決しようとする課題
しかしながら、従来得られるスパッタリング法によるＧ
ｏ−Ｃｒ垂直磁化膜は、膜形成速度が小さいこと以外に
も課題があり、とりわけ、磁気ヘッドとの接触高速摺動
条件下での耐久性は、重要な課題であり、ディスク状、
テープ状の形態を問わず、摩耗粉が発生し、電磁変換系
に於て、テープ、ディスク、ヘッドのいずれか一方又は
両方にダメージが生じ、優れた高密度記録特性を継続で
きないといった課題があり改善が望まれていた。The Batter film has the best performance, and proposals have been made to speed it up for practical use (4th Japan Society of Applied Magnetics 60
(Mu-4, Japanese Patent Publication No. 62-56575) Problems to be Solved by the Invention However, G
The o-Cr perpendicularly magnetized film has other problems besides its low film formation speed. In particular, durability under high-speed sliding conditions in contact with a magnetic head is an important issue.
Regardless of the form of the tape, abrasion particles are generated, causing damage to one or both of the tape, disk, and head in the electromagnetic conversion system, making it impossible to maintain excellent high-density recording characteristics. Improvement was desired.
本発明は上記した事情に鑑みなされたもので、優れた高
密度記録特性を維持できる高性能な垂直磁気記録媒体を
提供するものである。The present invention was made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a high-performance perpendicular magnetic recording medium that can maintain excellent high-density recording characteristics.
課題を解決するだめの手段
本発明の磁気記録媒体は上記した課題を解決するため、
高分子フィルム上にＰｄ又はＰｄ合金を配しその上に垂
直磁化膜を配したものである。Means for Solving the Problems The magnetic recording medium of the present invention solves the above problems by:
Pd or Pd alloy is placed on a polymer film, and a perpendicular magnetization film is placed on top of the Pd or Pd alloy.
作用
本発明は上記した構成により、垂直磁化膜形成時に、結
晶成長の異常が発生し、その部分が突起となり摩耗粉を
多く発生していた従来品と異なり、Ｐｄが結晶成長を均
一化する作用をもつことで、異常突起をなくすることが
できるので、優れた高密度記録特性を維持できることに
なる。Effect: Due to the above-described structure, the present invention has an effect that Pd uniformizes crystal growth, unlike conventional products in which abnormal crystal growth occurs during the formation of a perpendicularly magnetized film, and the abnormal part becomes a protrusion and generates a lot of wear powder. By having this, abnormal protrusions can be eliminated, and excellent high-density recording characteristics can be maintained.
実施例
以下、図面を参照しながら本発明の一実施例について説
明する。図は本発明の磁気記録媒体の拡大断面図である
。図で１はポリエチレンテレフタレート、ポリフェニレ
ンサルファイド、ポリエーテルエーテルケトン、ポリサ
ルフォン、ポリアミド。Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The figure is an enlarged sectional view of the magnetic recording medium of the present invention. In the figure, 1 is polyethylene terephthalate, polyphenylene sulfide, polyether ether ketone, polysulfone, and polyamide.
ポリイミド等の高分子フィルムで、下塗多層のあるもの
は勿論のこと必要なら合金基板でもよい。Of course, a polymer film such as polyimide with multiple layers of undercoating may be used, and if necessary, an alloy substrate may be used.
２はＰｄ又はＰｄ−ムｇ、Ｐｄ−５ｉ等の合金薄膜で、
合金薄膜の場合はＰｄＯ方を多く、好ましくはＣｏ％以
上をＰｄが占める条件とする必要がある。かかる薄膜は
スパッタリング法による形成が適しているが、他の薄膜
化手段によってもよい。膜厚は１５０ムから５００人の
範囲で構成すればよい。３はＯｏ−Ｏｒ 、 Ｃｏ −
Ｔｉ 、 Ｃｏ −Ｔａ 、 Ｇｏ −Ｍｏ 、
Ｇｏ −Ｗ、 Ｇｏ −Ｏｒ −Ｎｂ 。2 is an alloy thin film such as Pd or Pd-mug, Pd-5i,
In the case of an alloy thin film, the conditions must be such that PdO accounts for a large proportion, preferably Co% or more. Such a thin film is suitably formed by sputtering, but other thinning methods may also be used. The film thickness may range from 150 μm to 500 μm. 3 is Oo-Or, Co-
Ti, Co-Ta, Go-Mo,
Go-W, Go-Or-Nb.
Ｃｏ −０ｒ−Ｒｈ等の垂直磁化膜で、高周波スパッタ
リング法、イオンブレーティング法、電子ビーム蒸着法
等により形成した膜厚３ｏｏＫがら４０００人の薄膜で
４は保護層でプラズマ重合膜アモルファスカーボン！、
脂肪酸、パーフルオロポリエーテル等の適宜組み合わ
せで全体の膜厚を２５０Å以下にしてまとめ、スベーン
ング損失をおさえるのが好ましい。本発明は磁気テープ
、磁気ディスクのいずれの形態で実施してもよいが、以
下、更に具体的な例をテープで比較例との対比に於て説
明する。厚み１０μｍの表面の平滑な（平均粗さ３ＯＵ
）ポリエチレンテレフタレートフィルムに直径８０人
のＳｉＯ２微粒子を５ケ／（μｍ）配し、その上に高周
波スパッタリング法でＰｄ、Ｐｄ合金？［を形成し、更
にその上に、同じく高周波スパッタリング法で、Ｇｏ−
Ｏｒ垂直磁化膜を１６００＾形成し、更にヘキサメチル
ジシラザンをモノマーガスとしたプラズマ重合膜を１０
ｏム、パーフルオロアラキン酸の蒸着［−５０人配し、
８ミリ幅の磁気テープとした。比較例は、Ｓｉ、Ｔｉ薄
膜をｐａ 、又はＰ（１合金薄膜の代わりに置きかえた
ものを準備した。これらのテープを改造した８ミリビデ
オにより、ビット長０・２３μｍのディジタル信号を記
録し、再生出力を比較した。初期出力と、くり返し走行
後の出力を比較した結果を表にまとめて示した。A perpendicular magnetization film such as Co-0r-Rh is formed by high-frequency sputtering, ion blating, electron beam evaporation, etc. It is a thin film with a thickness of 30K and 4000, and 4 is a protective layer made of plasma polymerized amorphous carbon! ,
It is preferable to use a suitable combination of fatty acids, perfluoropolyethers, etc. to keep the total film thickness to 250 Å or less to suppress svening loss. Although the present invention may be implemented in the form of either a magnetic tape or a magnetic disk, a more specific example will be described below using a tape in comparison with a comparative example. Smooth surface with a thickness of 10 μm (average roughness 3OU)
) 5 pieces/(μm) of SiO2 fine particles with a diameter of 80 are placed on a polyethylene terephthalate film, and then Pd and Pd alloys are deposited on top of it by high-frequency sputtering. [ is formed, and Go-
A 1600° Or perpendicular magnetization film was formed, and a plasma polymerized film using hexamethyldisilazane as a monomer gas was further formed at 10°C.
om, vapor deposition of perfluoroarachidic acid [-50 staff,
The magnetic tape was 8 mm wide. A comparative example was prepared in which a Si or Ti thin film was replaced with a PA or P (1 alloy thin film).A digital signal with a bit length of 0.23 μm was recorded using an 8 mm video tape modified from these tapes. The reproduction output was compared.The results of comparing the initial output and the output after repeated running are summarized in a table.
（以下余白）
発明の効果
以上のように本発明によれば、優れた高密度記録特性を
使用環境の影響を受けずに維持できる、良好な耐久性を
持った垂直磁気記録用の磁気記録媒体がえられるといっ
たすぐれた効果がある。(Hereinafter, blank space) Effects of the Invention As described above, according to the present invention, a magnetic recording medium for perpendicular magnetic recording that can maintain excellent high-density recording characteristics without being affected by the usage environment and has good durability is provided. It has an excellent effect of being able to grow.
図は本発明の磁気記録媒体の一実施例の拡大断面図であ
る。
１・・・・・・高分子フィルム、２・・・・・・Ｐｄ又
はＰｄ合金薄膜、３・・・・・・垂直磁化膜。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名／−
−−息分子フィルム
２−Ｐｃｔ、又１才Ｐｄ＠；金賃順
３−室直磁化順The figure is an enlarged sectional view of one embodiment of the magnetic recording medium of the present invention. 1... Polymer film, 2... Pd or Pd alloy thin film, 3... Perpendicular magnetization film. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
--Breath molecular film 2-Pct, also 1 year old Pd@; Price order 3- Chamber direct magnetization order
Claims (1)
徴とする磁気記録媒体。A magnetic recording medium characterized in that a perpendicular magnetization film is disposed on a Pd or Pd alloy thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15528688A JPH01320619A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15528688A JPH01320619A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01320619A true JPH01320619A (en) | 1989-12-26 |
Family
ID=15602579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15528688A Pending JPH01320619A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01320619A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5863661A (en) * | 1994-10-07 | 1999-01-26 | Carnegie Mellon University | Method of enhancing the c-axis perpendicular orientation of barium hexaferrite thin films and barium hexaferrite thin film recording media produced thereby |
| WO2003042984A1 (en) * | 2001-11-16 | 2003-05-22 | Hitachi Maxell, Ltd. | Magnetic recording medium, its manufacturing method, and magnetic storage |
-
1988
- 1988-06-23 JP JP15528688A patent/JPH01320619A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5863661A (en) * | 1994-10-07 | 1999-01-26 | Carnegie Mellon University | Method of enhancing the c-axis perpendicular orientation of barium hexaferrite thin films and barium hexaferrite thin film recording media produced thereby |
| WO2003042984A1 (en) * | 2001-11-16 | 2003-05-22 | Hitachi Maxell, Ltd. | Magnetic recording medium, its manufacturing method, and magnetic storage |
| US6846582B2 (en) | 2001-11-16 | 2005-01-25 | Hitachi Maxell, Ltd. | Magnetic recording medium, method for producing the same, and magnetic storage apparatus |
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