JPH01317013A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH01317013A JPH01317013A JP14945988A JP14945988A JPH01317013A JP H01317013 A JPH01317013 A JP H01317013A JP 14945988 A JP14945988 A JP 14945988A JP 14945988 A JP14945988 A JP 14945988A JP H01317013 A JPH01317013 A JP H01317013A
- Authority
- JP
- Japan
- Prior art keywords
- width
- vibration
- electrode
- extraction electrode
- auxiliary path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001902 propagating effect Effects 0.000 claims abstract description 6
- 238000000605 extraction Methods 0.000 claims description 50
- 230000005284 excitation Effects 0.000 claims description 40
- 239000002184 metal Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 18
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000011358 absorbing material Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000418 atomic force spectrum Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（発明の利用分野）
本発明は圧電振動子を利用分野とし、特に導波路を用い
て副振動を小さくするとともに共振領域部の等価定数の
変化を防止した圧電振動子に関する。Detailed Description of the Invention (Field of Application of the Invention) The field of the invention is a piezoelectric vibrator, and in particular a piezoelectric vibrator that uses a waveguide to reduce secondary vibrations and prevent changes in the equivalent constant of the resonance region. Regarding.
（発明の背景）
圧電振動子は特に厚みすべり振動姿態の水晶振動子は共
振先鋭度に優れることから例えば通信機器用の発振器あ
るいはフィルタ素子等として有用される。近年では、通
信量の増大等（こより雑音等の少なく高品位の情報を得
ることのできる圧電振動子が望まれている。本出願人は
このような事情に基づき、「特願昭６２−１１９２４９
号、圧電振動子Ｊ及び「特願昭８３−６４１１５号、多
重モード型圧電振動子１にて副振動の振動レベルを低減
する新規な技術思想を提案した。すなわち、厚みすべり
振動の主振動に対して相対的に発生する副振動を導波路
により共振領域外に伝播させて振動吸収材により吸収減
衰し、その振動レベルを相対的に小さくする技術思想で
ある。(Background of the Invention) Piezoelectric resonators, especially crystal resonators in the thickness-shear vibration mode, have excellent resonance sharpness and are therefore useful, for example, as oscillators or filter elements for communication equipment. In recent years, there has been a demand for piezoelectric vibrators that can obtain high-quality information with less noise due to increased communication traffic, etc. Based on these circumstances, the applicant has
No. 1, piezoelectric vibrator J and patent application No. 83-64115, proposed a new technical concept for reducing the vibration level of secondary vibration in multi-mode piezoelectric vibrator 1. In other words, the main vibration of thickness shear vibration The technical concept is to propagate the secondary vibrations that occur relatively to the other side outside the resonant region using a waveguide, absorb and attenuate them using a vibration absorbing material, and reduce the vibration level relatively.
（従来技術）
第６図は厚みすべり振動及び上記技術思想の基本を説明
する水晶振動子の平面図である。(Prior Art) FIG. 6 is a plan view of a crystal resonator illustrating thickness shear vibration and the basics of the above technical idea.
水晶振動子は例えばＡＴカットで切断された円板状の水
晶片１からなる。水晶片１には両生面間で対向する′＃
Ａｗの励振電極対２ （ａ、ｂ）を形成する。励振電極
対２からは２″軸方向の両端外周部に＠ｄの引き出し電
極３ （Ｊ！、ｂ）を形成する。The crystal resonator consists of a disk-shaped crystal piece 1 cut by AT cutting, for example. The crystal piece 1 has two faces facing each other.
An excitation electrode pair 2 (a, b) of Aw is formed. From the excitation electrode pair 2, extraction electrodes 3 (J!, b) @d are formed on the outer periphery of both ends in the 2'' axis direction.
このようなものでは、対向する励振電極対２間部分を特
に共振領域部４として厚みすべり振動が励起される。厚
みすべり振動には種々の振動モードが存在し、例えばモ
ード記号（ｙ％”％”）で示される。モード記号（Ｖｑ
ｘＳＺｊ中、ｙは厚み（ｙｐ軸）方向の半波長の数（即
ち、オーバトーンの次ａ）を、ｘＸｚは共振領域内にお
けろＸ、Ｚ′軸方向の振動の復（山及び谷）の数を示す
。In such a device, thickness shear vibration is excited particularly in the resonance region 4 between the pair of excitation electrodes 2 facing each other. There are various vibration modes in thickness shear vibration, which are indicated by a mode symbol (y% "%"), for example. Mode symbol (Vq
In xSZj, y is the number of half wavelengths in the thickness (yp axis) direction (i.e., the order a of overtone), and xXz is the vibration return (peaks and valleys) in the X and Z' axis directions within the resonance region. Indicates the number of
ここで、水晶片１、共振ｓ城郭４、引き出１７電極部分
５の遮断周波数をｆ８、ｆ３、ｆ、とすると、共振領域
部４の閉じ込め領域ΔＦ、は遮断周波数Ｆ１からｆ、ま
での間となる。したがって、共振領域部４には閉＋ｓ込
め領域ΔＦ、内にある振動モードが主振’Ｉｈ ｔ ａ
及び副搬ｖｈ ｔ Ｐとして励起される。Here, if the cut-off frequencies of the crystal piece 1, the resonant castle 4, and the electrode portion 5 of the drawer 17 are f8, f3, and f, then the confinement area ΔF of the resonance region portion 4 is between the cut-off frequency F1 and f. becomes. Therefore, in the resonance region 4, the vibration mode within the closed +s inclusion region ΔF is the main vibration 'Ih t a
and is excited as a subtransport vh t P.
なお、主振動ｆ０は遮断周波数１１に略一致して励起さ
れる。そして、一般には主振’ｈ ｔ ｏを（ｙ。Note that the main vibration f0 is excited to substantially match the cutoff frequency 11. In general, the main vibration 'h t o (y.
１．１）モードとし、副振動ｆ、をモード記号のｘ、ｚ
を複数とした例えば（ｙｌ １．３）、（ｙ。1.1) Mode, sub-vibration f, mode symbol x, z
For example, (yl 1.3), (y.
３．１）モードとして励起される。3.1) Excited as a mode.
一方、引き出し電極部分５の閉じ込め領域ΔＦ、を想定
すると、その閉じ込め領域ΔＦよけ遮断周波数ｆｌ力弓
ｔ ｓまでの同となる。したがって、閉１５込め領域Δ
Ｆ２にある振動モード（副振動ｔｐ＋ミゝ゛あって、伝
播方向を引き出し電極と同一方向とする振動モードの振
動エネルギーは、共振領域部からその方向に伝播する。On the other hand, assuming the confinement area ΔF of the extraction electrode portion 5, the confinement area ΔF is the same up to the cutoff frequency fl and the force curve ts. Therefore, the closed 15 inclusion area Δ
The vibration energy of the vibration mode at F2 (sub-vibration tp+m) whose propagation direction is the same as that of the extraction electrode is propagated in that direction from the resonance region.
この場合には、Ｚ′軸方向に伝播する例えば（ｙ１３．
１）モードが相当する（第７図の周波数配列図参照）。In this case, for example (y13.
1) Corresponding modes (see frequency array diagram in Figure 7).
このようなことから、引き出１，７１１％部分５を副搬
’Ｉ ｔ ｐの導波路として共振領域部４外に導くこと
ができ、更に引き出し電極部分５の例えば延出端端部に
図示しない導電性接着剤等を施すことによ昨、これを振
動吸収材として副振動はｆ、の振動エネルギーを吸収減
衰できる。そ１７て、引き出しＴ４極３（引き出１）電
極部分５）の１ｌｌｌｄを励振電極対２（共振領域部４
）の中心と一致させて０゜５ｗ以上とすると、振動エネ
ルギーの最大変位部分を伝播することになるので導波路
としての機能を充分に発揮できる。For this reason, the extraction 1,711% portion 5 can be guided outside the resonant region 4 as a waveguide for the subcarrier 'I t p, and the extraction electrode portion 5 can be guided, for example, at the extended end as shown in the figure. By applying a non-conductive adhesive or the like, this can be used as a vibration absorbing material to absorb and attenuate the vibration energy of the secondary vibration f. 1lld of the drawer T4 pole 3 (drawer 1) electrode part 5) is connected to the excitation electrode pair 2 (resonant region part 4).
), and the maximum displacement part of the vibration energy is propagated, so that the function as a waveguide can be fully exhibited.
（従来技術の問題点）
１ノかしながら、上記におけろ副振動１．の抑圧励振電
極対２の対向面積で決定される等価定数例えば電極間容
量やインダクタンスに与える影響が大きい。なお、通常
では、引き出１７電極３の幅は０．３Ｗ以下とするので
、励振４１ｍ極対２の命対向面稍に起因する等価定数へ
の影響は少ない。このようなことから引き出し１１＃ｖ
！３の幅ｄを０．５ｗ以上とした場合には、その幅ｄを
考慮した設計が求められる。しかし、実際にはこれらを
考慮した設計は困難であり、このような場合生産性を低
下させる。(Problems with the prior art) Although the above-mentioned vibration is caused by 1. This has a large influence on the equivalent constant determined by the opposing area of the suppressed excitation electrode pair 2, such as the interelectrode capacitance and inductance. Note that since the width of the extraction 17 electrode 3 is normally set to 0.3 W or less, the influence on the equivalent constant due to the difference in the life-facing surfaces of the excitation 41 m pole pair 2 is small. Because of this, drawer 11#v
! When the width d of 3 is set to 0.5w or more, a design that takes the width d into consideration is required. However, in reality, it is difficult to design with these considerations in mind, and in such cases, productivity is reduced.
本発明者等は、この点につき、次の手段を提案している
「前述の特願昭６３−ｆ１４１１５号参照」。すなわち
、第８図に示したように、励振電極対２からの引き出し
１１極３の延出始端部にギャップＧのスリ・ソト６を設
けて括れを形成し、引き出し電極３の励振Ｉｔ極対間面
積による等価定数への影響を少なくする方法である。し
かし、このような方法では、ギャップＧが大きいと導波
路としの機能を妨げ、又小さいと励振電極対間面積に影
響を及ぼすので、その調整を困難にする欠点があった。In this regard, the present inventors have proposed the following means (see the aforementioned Japanese Patent Application No. 63-F14115). That is, as shown in FIG. 8, a slot 6 with a gap G is provided at the starting end of the extension of the lead-out electrode 11 pole 3 from the excitation electrode pair 2 to form a constriction, and the excitation It pole pair of the lead-out electrode 3 is This is a method to reduce the influence of the area between the two on the equivalent constant. However, in such a method, if the gap G is large, the function as a waveguide is hindered, and if the gap G is small, it affects the area between the pair of excitation electrodes, so that it is difficult to adjust the gap G.
（発明の目的）
本発明は、導波路により副振動の振１）ｕノベルを低減
して、しかも励振電極対による回路定数の変化を防止し
た圧電振動子を提供することを目的とする。(Objectives of the Invention) An object of the present invention is to provide a piezoelectric vibrator in which the oscillations (1) and u-novel of sub-oscillations are reduced by a waveguide, and changes in circuit constants due to the excitation electrode pair are prevented.
（解決手段）
本発明は、共振領域部からη１■振拗を伝播する方向に
励振電極とは電気的に独立した補助路を形成し、前記共
振領域部の幅をＷ、前記励振電極と接続する引き出し電
極の幅を８１前記補助路の幅をｂとしたと〜、前記引き
出しｍ極のｇａを０．５ｗ以下にするとともに、前記共
振領域部の幅内にある引き出し電極と補助路との幅の和
ａ 十ｂ ｔｅ ０ 。(Solution Means) The present invention forms an auxiliary path electrically independent from the excitation electrode in the direction in which η1■ vibration propagates from the resonance region, and connects the width of the resonance region to W and the excitation electrode. If the width of the extraction electrode is 81 and the width of the auxiliary path is b, then the ga of the extraction m pole should be 0.5W or less, and the distance between the extraction electrode and the auxiliary path within the width of the resonance region should be Sum of widths a ten b te 0 .
５ｗより大きくしたことを解決手段とする。The solution is to make it larger than 5w.
（発明の作用）
本発明は励振電極の＠Ｗに対して引き出し電極のｇａを
０．５ｗ以下としたので、励振電極対の対向面積に与え
る電気的影響を少なくする。(Function of the Invention) In the present invention, the ga of the extraction electrode is set to 0.5 W or less with respect to @W of the excitation electrode, so that the electrical influence on the opposing area of the excitation electrode pair is reduced.
また、引き出１７電極に電気的に独立した補助路を並設
して、かつ゛引き出し電極と補助路との幅ａ、ｂの和ａ
＋ｂｅｏ、５ｗ以上として導波路を形成したので、共振
領域部内（こ励起して伝播方向を導波路の延出方向と同
１′／にする副振動の最大変位部分を伝播する。以下、
本発明の実施例を説明する。In addition, an electrically independent auxiliary path is provided in parallel to the extraction electrode 17, and ``the sum of the widths a and b of the extraction electrode and the auxiliary path a.
Since the waveguide was formed with +beo, 5w or more, the maximum displacement part of the sub-vibration is propagated within the resonance region (by exciting this and making the propagation direction the same as the extending direction of the waveguide 1'/).Hereinafter,
Examples of the present invention will be described.
（実施例）
第１図は本発明の一実施例を説明する水晶振動子の平面
図である。なお、前実施例と同一部分については同番号
を付与して説明する。水晶振動子は前述したように例え
ばＡＴカットで円板状の水軸方向の両端外周部に引き出
し電極３（ａ、）を形成する。このとき、引き出し電極
３と励振Ｍ極対２の中心は一致し、引き出ｌ／Ｍ漸３の
＠ ａ Ｊ、ｔ Ｏ。(Embodiment) FIG. 1 is a plan view of a crystal resonator illustrating an embodiment of the present invention. Note that the same parts as in the previous embodiment are given the same numbers and explained. As described above, the crystal resonator is formed by, for example, an AT cut, and the extraction electrodes 3 (a,) are formed on the outer periphery of both ends in the water axis direction of a disk shape. At this time, the centers of the extractor electrode 3 and the excitation M pole pair 2 coincide, and the extractor l/M gradually becomes 3 @ a J, t O.
５ｗ以下に設定する。引さ出１７電極３の両側にはその
延出方向に沿って等しい幅すの補助路７が形成される。Set it to 5w or less. An auxiliary path 7 having an equal width is formed on both sides of the drawn-out electrode 3 along its extending direction.
補助＃！７の１ｌＩｌｌｂは引き出し電極３の幅ａとの
和ａ＋２ｂが０．５ｗより大きく設定される。そｌ、て
、励振電極対２及び引き出し電＃ｊ３とは間隙をもって
両者とは電気的に独立する。そして、補助＃ｉ７自身も
その延出方向に電気的に独立した例えば二つに把分断さ
れる（それぞれを分割補助＄７ａ、７ｂとする）。なお
、補助路７は例えば引き出し電極３と同一金属がらなり
蒸着等にｒ’）形成される。auxiliary#! The sum a+2b of 1lIllb of No. 7 and the width a of the extraction electrode 3 is set to be larger than 0.5w. Also, the excitation electrode pair 2 and the extraction electrode #j3 are electrically independent from each other with a gap between them. The auxiliary #i7 itself is also electrically divided into two parts, for example, which are electrically independent in the extending direction (each of them is referred to as divided auxiliary parts $7a and 7b). The auxiliary path 7 is made of the same metal as the extraction electrode 3, and is formed by vapor deposition or the like.
そして、引き出しｆ４極３と補助路７を形成した水晶片
の遮断周波数を、Ｚ軸方向に伝播する副搬ＷｐｔＪ（ｙ
、３．１）モードの周波数より低くて１振’Ｊｌｂ（ｙ
、１．１）モードより高い領域に設定する。Then, the cutoff frequency of the crystal piece forming the drawer f4 pole 3 and the auxiliary path 7 is determined by the subtransmission WptJ(y
, 3.1) One swing 'Jlb(y
, 1.1) Set to a higher area than the mode.
引き出し電極３及び補助＃ｌｉ７の延出した外周両端部
には図示しない導電性接着剤が施される。そして、図示
しない保持具と引き出し電極３とを電気的・機械的に接
続する構成とする。A conductive adhesive (not shown) is applied to both ends of the extended outer periphery of the extraction electrode 3 and the auxiliary #li7. The structure is such that the holder (not shown) and the extraction electrode 3 are electrically and mechanically connected.
したがって、このようなものでは、引き出し電極３と補
助路７とにより導波路が形成される。そして導波路の幅
（ａ＋２ｈ）を０．５ｗ以上とするので、前述したよう
に導波路としての機能を充分に発揮する。すなわち、副
振動ｆ、ここでは例えば（ｙ、３．１）モードを外周へ
伝播し、導電性接着剤を振動吸収材として減衰吸収する
。Therefore, in such a device, the extraction electrode 3 and the auxiliary path 7 form a waveguide. Since the width (a+2h) of the waveguide is set to 0.5W or more, the function as a waveguide is fully exhibited as described above. That is, the sub-vibration f, here for example the (y, 3.1) mode, is propagated to the outer periphery and is damped and absorbed using the conductive adhesive as a vibration absorbing material.
そして、補助ＦＩｓ７を分割して電気的に独立して形成
したので、両端外周部に導電性接着剤を施して引き出し
電極３と外周側の分割補助＄７ｂとが電気的に短絡して
も、励振電極対２側の分割補助Ｗｓ７ａは励振電極対２
に対して電気的な独立を維持する。したがって、励振電
極対間の対向面積による等価定数に影響を及ぼすのは特
に引き出し電極３のみとなる。そして、本実施例では引
き出し電極３の幅ａを励振電極対２に対して０．５ｗ以
下としたので、励振電極対２間の対向面積【こよろ等価
定数への影響を少なくして設計時のｒＦｔＩ格定数の変
化を防止できろ。また、このようなことから、補■力路
７ａを励振電極対２に充分に近接させろことができ、導
波路としての機能を損なうことがない。Since the auxiliary FIs 7 are divided and formed to be electrically independent, even if conductive adhesive is applied to the outer periphery of both ends and the extraction electrode 3 and the outer periphery-side divided auxiliary FIs 7b are electrically short-circuited, The division auxiliary Ws7a on the excitation electrode pair 2 side is the excitation electrode pair 2.
maintain electrical independence from Therefore, only the extraction electrode 3 affects the equivalent constant due to the facing area between the excitation electrode pair. In this embodiment, the width a of the extraction electrode 3 is set to 0.5w or less with respect to the excitation electrode pair 2, so that the opposing area between the excitation electrode pair 2 It is possible to prevent changes in the rFtI rating of . Moreover, for this reason, the reinforcement path 7a can be brought sufficiently close to the excitation electrode pair 2, without impairing its function as a waveguide.
なお、本実施例では引き出し電極３の両側に設けた補助
路７の幅すは等しいとしたが、必ずしも同一である必要
はない。また、引き出し電極３と外周側の分割電極７ｂ
とは電気的に接続してもよいことは勿論である。In this embodiment, the widths of the auxiliary channels 7 provided on both sides of the extraction electrode 3 are equal, but they do not necessarily have to be the same. In addition, the extraction electrode 3 and the outer peripheral side divided electrode 7b
Of course, it may be electrically connected to.
（他の実施例）
第２図は本発明の他の実施例を説明する水晶振動子の平
面図である。なお、前実施例と同一部分には同番号を付
与してその説明を省略する。この実施例では、幅Ｗの励
振Ｔ１極対２のそれぞれ反対側の一端側から、幅ａを０
．５ｗ以下とした引き出し電極３を延出する。補助路８
ば分割補助路８ａ、Ｒｈからなり、引き出し電Ｓ３に沿
った２′軸方向にその幅をｂとして延出する。そして、
励振電極対２の＠Ｗ内にある、引き出しｆ４ｔＱｉ３と
補助路８との幅の和ａ ＋ ｂを０．１上とし、この部
分の遮断周波数をＺ軸方向に伝播する副振動の周波数よ
り低くて主振動より高い領域に設定する。(Other Embodiments) FIG. 2 is a plan view of a crystal resonator illustrating another embodiment of the present invention. Note that the same parts as in the previous embodiment are given the same numbers and their explanations will be omitted. In this embodiment, the width a is set to 0 from one end side of the opposite side of the excitation T1 pole pair 2 having the width W.
．． The extraction electrode 3 with a power of 5W or less is extended. Auxiliary road 8
The splitting auxiliary path 8a and Rh extend in the 2'-axis direction along the lead-out electric current S3 with a width b. and,
The sum a + b of the widths of the extraction f4tQi3 and the auxiliary path 8 in @W of the excitation electrode pair 2 is set to 0.1 or more, and the cutoff frequency of this part is set lower than the frequency of the sub-vibration propagating in the Z-axis direction. and set it in an area higher than the main vibration.
したがって、この実施例においても、前実施例と同様に
、分割補助路８ａを励振電極対２に充分に近接させて両
端外周部に保持及び振動吸収材としての導電性接着剤を
施し、分割補助路８ｂと引き出Ｌｍ極３とが電気的に短
絡したとしても、励振電極間の対向面積に及ぼす影響を
少なくして等価定数の変化を防止する。そして、引き出
し電極３と補助路８の部分を導波路としてその機能を充
分に発揮する。Therefore, in this embodiment, as in the previous embodiment, the division auxiliary path 8a is brought sufficiently close to the excitation electrode pair 2, and a conductive adhesive is applied to the outer periphery of both ends as a holding and vibration absorbing material. Even if the path 8b and the extraction Lm pole 3 are electrically short-circuited, the effect on the opposing area between the excitation electrodes is reduced to prevent changes in the equivalent constant. Then, the extraction electrode 3 and the auxiliary path 8 are used as waveguides to fully exhibit their functions.
なお、この実施例においては、補助路８の部分の遮断周
波数のみを副振動の周波数より低くて主振動より高い領
域に設定し、励振電極対の＠Ｗ内におけろ補助路８の幅
すをＯゎ５ｗ以上として引き出ｊ７電極に拘らず導波路
としてもよいことは勿論である。In this embodiment, only the cutoff frequency of the auxiliary path 8 is set in a region lower than the frequency of the sub-vibration and higher than the main vibration, and the width of the auxiliary path 8 is set within the @W of the excitation electrode pair. Of course, it is possible to use a waveguide instead of the extraction j7 electrode by setting Oゎ5w or more.
（他の実施例）
第３図は本発明の他の実施例を説明する水晶振動子の平
面図である。(Other Embodiments) FIG. 3 is a plan view of a crystal resonator illustrating another embodiment of the present invention.
この実施例で（よ、幅Ｗの励振電極対２からＺ′軸方向
に０．５ｗ以上の分割補助路９ａ、９ｈからなる補助路
９を延出する。そして、その部分の遮断周波数を副振動
より低くて、主振動より高い領域に設定する。補助路９
（９ｂ）の延出端部には振動吸収材としての図示し
ない導電性接着材を施す。引き出し電極３はその幅を０
．５ｗ以下として、２′軸から応力感度特性の良好な例
えば３０度傾いた方向に延出する。そして、引き出し電
極の延出端部に図示しない導電性接着剤を施して保持具
と電気的・機械的に接続する。In this embodiment, an auxiliary path 9 consisting of divided auxiliary paths 9a and 9h of 0.5W or more is extended from the excitation electrode pair 2 with a width W in the Z' axis direction. Set in an area lower than the vibration and higher than the main vibration.Auxiliary path 9
A conductive adhesive (not shown) as a vibration absorbing material is applied to the extending end of (9b). The width of the extraction electrode 3 is 0.
．． 5w or less, and extends in a direction tilted by, for example, 30 degrees from the 2' axis with good stress sensitivity characteristics. Then, a conductive adhesive (not shown) is applied to the extending end of the extraction electrode to electrically and mechanically connect it to the holder.
したがって、この実施例でも同様に、分割補助路９ａｅ
Ｍ振電極対２に充分に近接させても、仮に分割補助路８
ｈと引き出し電極３とが電気的に短絡したとしても、励
振ｔ４電極の対向面積に及ぼす影響を少なくして等価定
数の変化を防止し、補助路９の部分を導波路としてその
機能を充分に発揮する。そして、引き出し電極を応力感
度特性の良好な方向に延出して保持したので、ＦＪｖＩ
！特性等を良好にする。Therefore, in this embodiment as well, the divided auxiliary path 9ae
Even if it is placed sufficiently close to the M vibration electrode pair 2, if the dividing auxiliary path 8
Even if h and the extraction electrode 3 are electrically short-circuited, the effect on the opposing area of the excitation t4 electrode is reduced to prevent changes in the equivalent constant, and the auxiliary path 9 is used as a waveguide to fully function. Demonstrate. Then, since the extraction electrode was extended and held in the direction with good stress sensitivity characteristics, FJvI
! Improve characteristics etc.
なお、この実施例においては、例えば第４図に示したよ
うに、引き出し電極３と外周側の分割補助路とは電気的
に接続してもよい。但し、引き出し？？ｔｔｌｊ３の励
振電極対２からの延出始端部は充分な間隔をとる必要か
１１ある。また、このときの引き出しｔＩｉ極部分の遮
断周波数は特に問題とする必要（才ない。In this embodiment, for example, as shown in FIG. 4, the extraction electrode 3 and the dividing auxiliary path on the outer peripheral side may be electrically connected. However, a drawer? ? There is a need for sufficient spacing between the starting ends of the ttlj3 extending from the excitation electrode pair 2. Also, the cutoff frequency of the extraction pole tIi at this time needs to be a particular issue.
（他の事項）
なお、Ｆ記の各実施例では補助路を分割補助路として説
明したが、本発明では例えば引き出し電極の延出分には
導電性接着剤を用いて保持具と接続し、補助路には絶縁
性の振動吸収材を設けても同様な効果をもたらすので、
必ずしも分割補助路とする必要はない。また、補助路は
二つに分割したが、三つ以上のｖｌ、数に分割されてい
てもよい乙とは勿論である。また、補助路は例えば引き
出し電極と同じ金属としたが、絶縁材から形成して電気
的にのみ独立させてもよい。副振動はＺ′軸方向に伝播
する例えば（ｙ１３．１）モードとしたが、Ｘ軸方向に
伝播する副振動例えば（ｙ、１．３）を抑圧する場合に
Ｘ軸方向へも本発明による導波路を形成してｗｅ吸収材
を設ければよい。(Other matters) Note that in each of the embodiments described in F, the auxiliary path was explained as a divided auxiliary path, but in the present invention, for example, the extension of the extraction electrode is connected to the holder using a conductive adhesive, The same effect can be achieved by installing insulating vibration absorbing material on the auxiliary path, so
It does not necessarily have to be a divided auxiliary road. Further, although the auxiliary road is divided into two, it goes without saying that it may be divided into three or more parts. In addition, although the auxiliary path is made of the same metal as the extraction electrode, for example, it may be made of an insulating material so as to be electrically independent. The secondary vibration propagates in the Z'-axis direction, for example, the (y13.1) mode, but when suppressing the secondary vibration, for example (y, 1.3), which propagates in the X-axis direction, the present invention also applies to the X-axis direction. What is necessary is to form a waveguide and provide a we absorbing material.
また、圧電振動子は一組の対向する励振電極の設けられ
た水晶振動子としたが、例えば第５図に示したように、
水晶片１の一方の主面に分割電極１０ （ａ、ｂ）を、
他方の主面に共通電極１１を設けた所謂Ｍ ＣＦ （ｌ
Ｊｏｎｏｌｉｔｈｉｃ Ｃｒｙｓｔａｌ Ｆｉｌｔｅｒ
）にも適用できろ。例えば、一方の主面の分割電極１０
からそれぞれＺ′軸方向に引き出し電極１２（ａ、ｈ）
を、共通Ｔｉ極１１からＸ軸方向の両端外周部に引き出
し電極１４（ａ、ｂ）を延出する。In addition, the piezoelectric vibrator was a crystal vibrator provided with a pair of opposing excitation electrodes; for example, as shown in FIG.
Split electrodes 10 (a, b) are placed on one main surface of the crystal blank 1,
The so-called M CF (l
Jonolithic Crystal Filter
) can also be applied. For example, the divided electrode 10 on one main surface
The electrodes 12 (a, h) are drawn out in the Z'-axis direction from
Extracting electrodes 14 (a, b) are extended from the common Ti pole 11 to the outer periphery of both ends in the X-axis direction.
そして、各引き出し電極１２．１４の両側に分割補助路
１３（ａＸｂ） 、１５ （ａ、ｂ）からなろ補助Ｆ＃
Ｓ１３．１５を設ける。そして、各引き出し電極１２．
１４の幅ａ１、ａ２を共通電極１１のＸ１Ｚ′軸方向の
谷幅ｗ１、ｗ２に対して０．５ｗ、、０ 、５Ｖ／ ２
以下にする。共通電極の谷幅Ｗ８、ｗ２内にある各補助
路１３．１５の共通電極幅ｂ１内にあろｂｌ、、ｂ２を
、ａ＋＋２ｈ１）０．５ｗ、、ａ２＋ ２ ｈ ２＞
０ 、５ ｗ ２となるようにする。そ１ノて、引き出
１７電＄ｆｉｉ１２（１４）と補助路１３（１５）との
部分の遮断周波数を振動より低くて主振動より高い領域
に設定すればよい。なお、この場合においても、他の実
施例で説明したような種々の前用にを取昨得ろこと（よ
いうまでもなく、その他複数の？！電極対した多電極対
型にも適用でき、場合に応じて自在に変更可能である。Then, on both sides of each extraction electrode 12.14, there are divided auxiliary paths 13 (aXb), 15 (a, b) from the auxiliary auxiliary F#.
S13.15 is provided. Then, each extraction electrode 12.
The widths a1 and a2 of 14 are 0.5W, 0, 5V/2 for the valley widths w1 and w2 of the common electrode 11 in the X1Z' axis direction.
Do the following. Common electrode valley width W8, common electrode width b1 of each auxiliary path 13.15 within w2 is bl,, b2, a++2h1)0.5w,,a2+ 2 h2>
0, 5 w 2. First, the cutoff frequency of the portion between the drawer 17 electric wire 12 (14) and the auxiliary path 13 (15) may be set to a region lower than the vibration and higher than the main vibration. In this case as well, it should be noted that it is necessary to obtain the various pre-uses as explained in other embodiments (it goes without saying that it can also be applied to a multi-electrode pair type in which multiple electrodes are paired). It can be changed freely depending on the situation.
（発明の効果）
本発明は、共振領域部から副振動を伝播する方向に励振
電極とは電気的に独立した補助路を形成ｊ７、前記共振
領域部の幅をｗ１前記励振電極と接続する引き出し電極
の幅をａ、前記補助路の幅をｂとしたとき、前記引き出
し電極の幅ａを０．５ｗ以下にするとともに、前記共振
領域部の幅内にある引き出し電極と補助路との幅の和ａ
＋ ｂを０゜５ｗより大きくしたので、導波＃Ｈこよ
り副振動の振動レベルを低減して、しかも励振電極対【
こよろ回路定数の変化を防止した圧電振動子を提供でき
ろ。(Effects of the Invention) The present invention provides an auxiliary path that is electrically independent from the excitation electrode in the direction of propagating sub-vibration from the resonant region j7, and a drawer connecting the width of the resonant region w1 with the excitation electrode. When the width of the electrode is a and the width of the auxiliary path is b, the width a of the extraction electrode is 0.5W or less, and the width of the extraction electrode and the auxiliary path within the width of the resonance region is Japanese a
Since +b is made larger than 0°5W, the vibration level of the secondary vibration from the waveguide #H is reduced, and the excitation electrode pair [
Can you provide a piezoelectric vibrator that prevents changes in coil circuit constants?
第１図は本発明の一実施例を説明する水晶振動子の平面
図である。第２図乃至第５図はは本発明の他の実施例を
説明する水晶振動子の平面図である。
第６図及び第８図は本出願人がすでに提案した技術思想
を説明する水晶振動子の平面図、第７ｖ４は第６図の水
晶振動子を説明する周波数配列図である。
１ 水晶片、２ 励振電極対、３・・・引き出し電極、
４・・共振領域部、５．１２．１４・・引き出し電極部
、６ ・スリ・フト、７．８．９．１３．１５・補助路
、１０ ・分割電極、１１・・共通電極。FIG. 1 is a plan view of a crystal resonator illustrating an embodiment of the present invention. 2 to 5 are plan views of a crystal resonator illustrating another embodiment of the present invention. 6 and 8 are plan views of a crystal resonator to explain the technical concept already proposed by the applicant, and FIG. 7v4 is a frequency array diagram to explain the crystal resonator of FIG. 6. 1 crystal piece, 2 excitation electrode pair, 3... extraction electrode,
4.Resonance region section, 5.12.14.Extraction electrode section, 6.Slip lift, 7.8.9.13.15.Auxiliary path, 10.Divided electrode, 11.Common electrode.
Claims (4)
電極対を形成して厚みすべり振動の励起される共振領域
部とし、該共振領域部から副振動を伝播する導波路を延
出した圧電振動子において、前記導波路は副振動の伝播
する方向に形成される前記励振電極の引き出し電極と該
引き出し電極の延出方向に沿って並設されて電気的に独
立した補助路とからなり、前記共振領域部の幅をｗ、引
き出し電極の幅をａ、補助路の幅をｂとしたとき、前記
引き出し電極の幅ａを０．５ｗ以下にするとともに、前
記共振領域部の幅内にある引き出し電極と補助路との幅
の和ａ＋ｂを０．５ｗより大きくしたことを特徴とする
圧電振動子。(1) At least one pair of excitation electrodes facing each other on both main surfaces of the piezoelectric piece is formed to form a resonance region where thickness-shear vibration is excited, and a waveguide for propagating sub-vibration is extended from the resonance region. In the piezoelectric vibrator, the waveguide includes an extraction electrode of the excitation electrode formed in the direction in which sub-vibration propagates, and an electrically independent auxiliary path that is arranged in parallel along the extension direction of the extraction electrode. When the width of the resonance region is w, the width of the extraction electrode is a, and the width of the auxiliary path is b, the width a of the extraction electrode is 0.5W or less, and within the width of the resonance region. A piezoelectric vibrator characterized in that the sum a+b of the widths of the extraction electrode and the auxiliary path is larger than 0.5W.
電極対を形成して厚みすべり振動の励起される共振領域
部とし、該共振領域部から副振動を伝播する導波路を延
出した圧電振動子において、前記導波路は副振動の伝播
する方向に形成されて前記励振電極と電気的に独立した
補助路からなり、前記共振領域部の幅をｗ、補助路の幅
をｂ、励振電極から延出する引き出し電極をｃとしたと
き、該補助路の幅ｂを０．５ｗ以上にするとともに、引
き出し電極の幅ｃを０．５ｗ以下としたことを特徴とす
る圧電振動子。(2) At least one pair of excitation electrodes facing each other on both main surfaces of the piezoelectric piece is formed to form a resonance region where thickness shear vibration is excited, and a waveguide for propagating sub-vibration is extended from the resonance region. In the piezoelectric vibrator, the waveguide includes an auxiliary path formed in the direction in which the auxiliary vibration propagates and is electrically independent of the excitation electrode, and the width of the resonance region portion is w, the width of the auxiliary path is b, A piezoelectric vibrator characterized in that the width b of the auxiliary path is 0.5w or more, and the width c of the extraction electrode is 0.5w or less, where c is an extraction electrode extending from the excitation electrode.
項又は第２記載の圧電振動子。(3) The auxiliary path is made of a metal film.
The piezoelectric vibrator according to item 1 or 2.
囲第１項又は第２項記載の圧電振動子。(4) The piezoelectric vibrator according to claim 1 or 2, wherein the metal film is divided in the extending direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149459A JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149459A JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01317013A true JPH01317013A (en) | 1989-12-21 |
| JP2733604B2 JP2733604B2 (en) | 1998-03-30 |
Family
ID=15475585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63149459A Expired - Fee Related JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2733604B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173348A (en) * | 2004-12-15 | 2006-06-29 | Tdk Corp | Method of manufacturing multilayered piezoelectric element |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59502128A (en) * | 1982-11-08 | 1984-12-20 | モトロ−ラ・インコ−ポレ−テツド | Improved energy capture resonator for multiple resonators |
| JPS62142410A (en) * | 1985-12-17 | 1987-06-25 | Toyo Commun Equip Co Ltd | Electrode structure of spurious suppressing type piezoelectric vibrator and monolithic piezoelectric element filter |
| JPS62159015U (en) * | 1986-03-31 | 1987-10-08 |
-
1988
- 1988-06-17 JP JP63149459A patent/JP2733604B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59502128A (en) * | 1982-11-08 | 1984-12-20 | モトロ−ラ・インコ−ポレ−テツド | Improved energy capture resonator for multiple resonators |
| JPS62142410A (en) * | 1985-12-17 | 1987-06-25 | Toyo Commun Equip Co Ltd | Electrode structure of spurious suppressing type piezoelectric vibrator and monolithic piezoelectric element filter |
| JPS62159015U (en) * | 1986-03-31 | 1987-10-08 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173348A (en) * | 2004-12-15 | 2006-06-29 | Tdk Corp | Method of manufacturing multilayered piezoelectric element |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2733604B2 (en) | 1998-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4877966B2 (en) | Piezoelectric thin film device | |
| JP3094717B2 (en) | Piezoelectric resonance components | |
| US11936364B2 (en) | Surface acoustic wave device on device on composite substrate | |
| US9496847B2 (en) | Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure | |
| US6518688B1 (en) | Piezoelectric vibration device | |
| JPH0927729A (en) | Thickness-mode piezoelectric vibrator | |
| JP2014143657A (en) | Elastic wave element, splitter and communication module | |
| JP2000031781A (en) | Piezoelectric vibrator | |
| JPH01317013A (en) | Piezoelectric vibrator | |
| JPH036912A (en) | Surface acoustic wave element | |
| JPS5821444B2 (en) | Energy Tojikomegata Atsuden Tairohaki | |
| JP2000040938A (en) | Ultra high frequency piezoelectric device | |
| JP2000312130A (en) | Piezoelectric device, manufacture thereof and mobile communication unit employing them | |
| JPH05327401A (en) | Ceramic filter | |
| JPH0832397A (en) | Surface acoustic wave device | |
| JP3733020B2 (en) | Piezoelectric element and mobile communication device using the same | |
| JP3912102B2 (en) | Crystal filter | |
| WO2024027033A1 (en) | Acoustic resonator | |
| JP3901013B2 (en) | Vertically coupled multimode piezoelectric filter device and electronic component | |
| JP2001339272A (en) | Piezoelectric resonator | |
| JPH1141057A (en) | Piezoelectric vibration component | |
| JPH0993076A (en) | Thickness mode piezoelectric oscillator | |
| Qi et al. | High performance multilayer heterogeneous resonators based on 128° YX lithium niobate and diamond composite films for 5 GHz and beyond | |
| JP2001036377A (en) | Piezoelectric device and production thereof | |
| JP3922095B2 (en) | Vertically coupled multimode piezoelectric filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |