JPH01310853A - Deodesic lens polishing device - Google Patents
Deodesic lens polishing deviceInfo
- Publication number
- JPH01310853A JPH01310853A JP14299188A JP14299188A JPH01310853A JP H01310853 A JPH01310853 A JP H01310853A JP 14299188 A JP14299188 A JP 14299188A JP 14299188 A JP14299188 A JP 14299188A JP H01310853 A JPH01310853 A JP H01310853A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- spherical surface
- work
- fixed
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 44
- 239000004744 fabric Substances 0.000 abstract description 10
- 229910003460 diamond Inorganic materials 0.000 abstract description 8
- 239000010432 diamond Substances 0.000 abstract description 8
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000008119 colloidal silica Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はジオデシックレンズのメカノケミカル研磨を行
なう、ジオデシックレンズの非球面研磨装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an aspheric surface polishing device for a geodesic lens, which performs mechanochemical polishing of a geodesic lens.
従来、ジオデシックレンズは、ＮＣ旋盤によりダイヤモ
ンドバイトで荒加工された開弁球面をジオデシックレン
ズ研磨装置により、被加工物と凸Ｒ球面のラップ棒との
間に供給された液状のダイヤモンド砥粒と希釈液を混合
した研磨剤でボリシング非球面研磨されていた。Conventionally, geodesic lenses are made by diluting an open spherical surface rough-machined with a diamond tool on an NC lathe with liquid diamond abrasive grains supplied between the workpiece and a lap rod with a convex radius spherical surface using a geodesic lens polishing device. The aspherical surface was polished using a polishing agent mixed with liquid.
従来の非球面研磨は、被加工物と凸Ｒ球面のラップ棒と
の間に供給される研磨剤には、液状のタ′イヤモンド砥
粒と希釈液を混合して使用していたか、砥粒が常に研磨
面に同量供給されず均一に研磨されないため、ＮＣ旋盤
により夕゛イヤモンドバイトで荒加工した開弁球面形状
がくずれる欠点があった。このため研磨状態に応じて研
磨を行なうため工数もかかり、歩留まりも悪かった。In conventional aspheric polishing, the polishing agent supplied between the workpiece and the convex R spherical lapping rod is a mixture of liquid diamond abrasive grains and a diluted solution, or Since the same amount of metal is not always supplied to the polished surface and the polishing is not uniform, there is a drawback that the shape of the opening spherical surface, which is roughly machined with a diamond bit by the NC lathe, is distorted. For this reason, polishing was performed depending on the polishing state, which required a lot of man-hours and resulted in poor yield.
また、研磨歪みが入るため、アニールを行なった後にメ
カノケミカル研磨を行い、歪み部分は除去していた。Furthermore, since polishing distortion occurs, mechanochemical polishing is performed after annealing to remove the distorted parts.
本発明の目的は、かかる欠点を除去するため、被加工物
の角度を変え、非球面の中心とテーブルの回転中心を同
心にして回転させ、各場所ことに研磨状態を確認しなが
ら加工を行ない、ＮＣ旋盤によりダイヤモンドバイトて
荒加工した開弁球面形状をくずさずに面粗度を向上させ
、全面を均一に無歪み研磨ができるシオテシックレンズ
の研磨装置を提供することである。The purpose of the present invention is to eliminate such defects by changing the angle of the workpiece, rotating the workpiece so that the center of the aspherical surface is concentric with the rotation center of the table, and machining while checking the polishing condition at each location. An object of the present invention is to provide a polishing device for a cyotethic lens, which can improve the surface roughness without destroying the open spherical shape rough-machined using a diamond cutting tool using an NC lathe, and can polish the entire surface uniformly and without distortion.
本発明のジオデシックレンスの非球面研磨装置は、上下
移動・位置固定でき、かつ、駆動源により回転せしめら
れる主軸の一端に、着脱可能に保持されたラップ棒の一
方向に一定の圧力を与える機構を有するホルダーを保持
した回転部と、被加工物を固定し、任意の角度に傾き及
びその角度に固定されるテーブルとこのテーブル外周を
覆う容器、及びチーフルと容器を回転する駆動源とチー
フルの傾きによる回転中心の位置ずれを補正するＸＹス
テージを備えた取付は部と、前記取付は部を保持してＸ
方向に動かし、研磨位置合わせと固定するスライド部と
を少くとも備えている。The Geodesic Lens aspheric polishing device of the present invention has a mechanism that applies constant pressure in one direction to a lap rod that is detachably held at one end of the main shaft that can be moved up and down and fixed in position, and that is rotated by a drive source. a rotating part that holds a holder having a holder, a table that fixes a workpiece and is tilted at an arbitrary angle and fixed at that angle, a container that covers the outer periphery of the table, a drive source that rotates the chiffle and the container, and a drive source that rotates the chiffle and the container. The installation is equipped with an XY stage that corrects the displacement of the center of rotation due to tilt, and the installation
It includes at least a sliding part for moving in the direction, polishing alignment, and fixing.
次に本発明の研磨装置の実施例の概要について図面を参
照して説明する。Next, an outline of an embodiment of the polishing apparatus of the present invention will be explained with reference to the drawings.
第２図（ａ、 ）、（ｂ）、（ｃ）は研磨状態を示す断
面図である。第１図は本発明の一実施例の斜視図である
。FIGS. 2(a), 2(b), and 2(c) are cross-sectional views showing the polished state. FIG. 1 is a perspective view of an embodiment of the present invention.
研磨条件及び装置運転条件は、
ラップ棒７ 先端Ｒ２，５〜］、９ｍ ｍ研磨クロス８
ポリウレタン製クロス研磨剤 コ
ロイダルシリカ粒径 ０．０３８ｍ〜０
．０１μｍ研磨時間 ６時間
研磨量 １０〜３０μｍ
研磨圧 ３００〜５００ｇ主軸回転数
６０〜１００ ｒ、ｐ、ｍテーブル回転数
１３〜２Ｏｒ、ｐ、ｍテーブル傾き角度 ０〜２０度
以上の条件でＮＣ旋盤によりダイヤモンドバイトで荒加
工した量弁球面を第２図（ａ＞、（ｂ）。The polishing conditions and device operating conditions are as follows: lapping rod 7 tip R2, 5~], 9mm polishing cloth 8
Polyurethane cloth abrasive colloidal silica particle size 0.038m~0
．． 01μm Polishing time 6 hours Polishing amount 10~30μm Polishing pressure 300~500g Spindle rotation speed
60-100 r, p, m table rotation speed
Figures 2 (a>, (b)) show the spherical surface of the valve which was roughly machined with a diamond cutting tool on an NC lathe under conditions of a table inclination angle of 0 to 20 degrees or more.
（Ｃ）のように開弁球面形状Ｒの各位置に咬み合うそれ
ぞれの先端臼Ｒラップ棒７が面接触するように固定テー
ブル１２の傾き角度及び研磨位置を変え、ラップ棒７と
固定テーブル１２を同時に回転させながら、ラップ棒７
先端に収り付けた研磨クロス８（ポリウレタン製クロス
）と容器２］に入った研磨剤（コロイダルシリカ）を使
用し、拡大写真と顕微鏡及び形状測定により研磨状態を
確認しながらメカノケミカル研磨を行なう。As shown in (C), the inclination angle and polishing position of the fixed table 12 are changed so that the end mill R lap rods 7 that engage each position of the open valve spherical shape R are in surface contact, and the lap rods 7 and the fixed table 12 are in surface contact with each other. while simultaneously rotating the wrap rod 7.
Using the polishing cloth 8 (polyurethane cloth) placed at the tip and the polishing agent (colloidal silica) contained in the container 2, mechanochemical polishing is performed while checking the polishing state using enlarged photographs, a microscope, and shape measurement. .
次に、本発明の研磨装置について説明する。Next, the polishing apparatus of the present invention will be explained.
回転部１は主軸３、ホルダー６、ラップ棒７から成り、
駆動源の回転部モータ２の回転を主軸３に伝える。主軸
３は回転部ハンドル４により上下に移動し、主軸固定レ
バー５によりその位置を保持される。ホルダー６は前記
主軸３にシャンク部が固定され、部内にバネが挿入され
、ラップ棒７に一定の圧力が加えられる機構を備えてラ
ップ棒−５＝
７を着脱可能に保持する。ラップ棒７は量弁球面に咬み
合うように先端か凸球面状になっており、この先端に研
磨クロス８（ポリウレタン製クロス）が取り付けられる
。The rotating part 1 consists of a main shaft 3, a holder 6, and a lap rod 7.
The rotation of the rotating part motor 2 of the drive source is transmitted to the main shaft 3. The main shaft 3 is moved up and down by a rotating part handle 4 and held at that position by a main shaft fixing lever 5. The holder 6 has a shank portion fixed to the main shaft 3, a spring is inserted into the holder 6, and has a mechanism for applying a constant pressure to the wrap rod 7, and holds the wrap rod 5=7 in a removable manner. The wrap rod 7 has a convex spherical tip so as to engage with the spherical surface of the metering valve, and a polishing cloth 8 (polyurethane cloth) is attached to the tip.
取付は部っけ駆動源のステージ部モータ１０とＸＹステ
ージ１１に取り付けられた固定デーフル１２と容器２］
からなり、ベース］３に保持され任意の角度に傾き、そ
の角度を傾斜固定ネジ１４で固定する。固定チーフル１
２は被加工物を固定し、非球面の中心と回転の中心か同
心になるようにＸＹステージ１］を動かして位置出し、
ステージ部モータ１０により回転させる。スライド部１
５は被加工物の量弁球面を研磨位置に移動させるもので
、ベース１３の送りネジ１６とレール１７からなる。ベ
ース１３は升形に形成され、筐体２０に保持されたレー
ル１７と、送りネジ１６によりスライド部ハンドル］８
を回転させ移動し、ベース固定レバー１９でベース１３
をその位置に固定する。The installation is done by the stage part motor 10 of the drive source, the fixed differential 12 attached to the XY stage 11, and the container 2]
It is held on a base] 3 and tilted at an arbitrary angle, and the angle is fixed with a tilt fixing screw 14. Fixed chiffle 1
2. Fix the workpiece and position it by moving the XY stage 1 so that it is concentric with the center of the aspherical surface and the center of rotation.
It is rotated by a stage part motor 10. Slide part 1
Reference numeral 5 moves the spherical surface of the workpiece to the polishing position, and is comprised of a feed screw 16 and a rail 17 of a base 13. The base 13 is formed in a square shape, and includes a rail 17 held in the housing 20 and a slide handle by a feed screw 16]8
Rotate and move the base 13 using the base fixing lever 19.
fix it in that position.
被加工物を固定テーブル］２に取り付け、ＮＣ６一
旋盤によりダイヤモンドバイトて荒加工した量弁球面の
中心と回転の中心か同心になるようにＸＹステージ］１
を動かして位置を出しする。ホルダー６に研磨する位置
の量弁球面形状Ｒに咬み合う先端凸Ｒのラップ棒７に研
磨クロス８（ポリウレタン製クロス）を収り付ける。面
接触するように固定テーブル１２の傾き角度を調節し傾
斜固定ネジ１４て固定する。次に、ベース１３を移動し
て研磨位置を出しベース固定レバー１９て固定する。ラ
ップ棒７と固定チーフル］２を同時に回転させながら、
容器２１に入った研磨剤（コロイタルシリ力）でメカノ
ケミカル研磨を行なう。Attach the workpiece to a fixed table] 2, and set it on an XY stage so that the center of rotation is concentric with the center of the valve spherical surface, which was rough-machined with a diamond tool using an NC6 lathe.
Move to find the position. A polishing cloth 8 (polyurethane cloth) is placed on a lap rod 7 having a convex tip R that engages with the spherical shape R of the valve at the position to be polished in the holder 6. The inclination angle of the fixing table 12 is adjusted so as to make surface contact, and the fixing table 12 is fixed using the inclination fixing screw 14. Next, the base 13 is moved to the polishing position and fixed using the base fixing lever 19. While simultaneously rotating the wrap rod 7 and fixed chifur] 2,
Mechanochemical polishing is performed using the polishing agent (colloidal silica) contained in the container 21.
以上詳細に説明したように、本発明によれば、全面が均
一に研磨されず量弁球面形状かくずれる等の欠点と、歪
み除去のために行なっていたメカノケミカル研磨工程を
無くし、各場所ごとに研磨状態を確認しながら加工を行
ない、量弁球面形状をくずさずに全面を均一に無歪み研
磨ができ、面粗度を向上さぜ研磨工数を短縮し、歩留も
向上させる等の効果がある。As explained in detail above, according to the present invention, the disadvantages such as the entire surface being not polished uniformly and the shape of the valve spherical surface being distorted, and the mechanochemical polishing process that was used to remove distortion, are eliminated, and each location is polished individually. Processing is performed while checking the polishing condition, and the entire surface can be polished uniformly and without distortion without destroying the spherical shape of the valve, improving surface roughness, shortening polishing man-hours, and improving yield. There is.
第１図は本発明の一実施例の斜視図である。第２図（ａ
）、（ｂ）、（Ｃ）は研磨状態を示す断面図である。
１・・・回転部、２・・・回転部モータ、３・・主軸、
４・・・回転ハンドル、５・・主軸固定レバー、６・・
・ボルダ−１７・・・ラップ棒、８・・・研磨クロス、
９・・取イ」け部、１０・・・ステージ部モータ、１．
１・・・ＸＹステージ、１２・・・固定テーブル、１３
・・・ベース、１４・・・傾斜固定ネジ、１５・・・ス
ライド部、１６・・・送りネジ、１７・・・レール、］
８・・・スライド部ハンドル、１つ・・ベース固定レバ
ー、２０・・・筐体、２１・・・容器。FIG. 1 is a perspective view of an embodiment of the present invention. Figure 2 (a
), (b), and (C) are cross-sectional views showing the polished state. 1... Rotating part, 2... Rotating part motor, 3... Main shaft,
4...Rotating handle, 5...Main shaft fixing lever, 6...
・Boulder-17... Lapping rod, 8... Polishing cloth,
9. Take-out portion, 10. Stage portion motor, 1.
1...XY stage, 12...fixed table, 13
... base, 14 ... tilt fixing screw, 15 ... slide part, 16 ... feed screw, 17 ... rail,]
8...Sliding part handle, 1...Base fixing lever, 20...Housing, 21...Container.
Claims (1)
められる主軸の一端に、着脱可能に保持したラップ棒の
一方向に一定の圧力を与える機構を有するホルダーを保
持した回転部と、被加工物を固定し、任意の角度に傾き
及びその角度に固定されるテーブルとこのテーブル外周
を覆う容器と前記テーブル及び容器を回転せしめる駆動
源と前記テーブルの傾きによる回転中心の位置ずれを補
正するＸＹステージとを備えた取付け部と、前記取付け
部を保持してＸ方向に動かし、研磨位置合わせをするス
ライド部とを少くとも備えていることを特徴とするジオ
デシックレンズ研磨装置。A rotating part that holds a holder that can be moved up and down and fixed in position, and that has a mechanism that applies a constant pressure in one direction to a removably held lap rod at one end of the main shaft that is rotated by a drive source, and a workpiece. A table that is fixed and tilted at an arbitrary angle and fixed at that angle, a container that covers the outer periphery of this table, a drive source that rotates the table and the container, and an XY stage that corrects the positional deviation of the center of rotation due to the inclination of the table. 1. A geodesic lens polishing device comprising at least a mounting section having a mounting section and a slide section for holding and moving the mounting section in the X direction to align the polishing position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14299188A JPH01310853A (en) | 1988-06-09 | 1988-06-09 | Deodesic lens polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14299188A JPH01310853A (en) | 1988-06-09 | 1988-06-09 | Deodesic lens polishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01310853A true JPH01310853A (en) | 1989-12-14 |
Family
ID=15328398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14299188A Pending JPH01310853A (en) | 1988-06-09 | 1988-06-09 | Deodesic lens polishing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01310853A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272517A (en) * | 1990-07-20 | 1992-09-29 | Borg Warner Automot Transmission & Engine Components Corp | Clutch separator plate |
| CN105643396A (en) * | 2016-01-29 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Milling and grinding method of large-caliber off-axis aspherical lens |
-
1988
- 1988-06-09 JP JP14299188A patent/JPH01310853A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272517A (en) * | 1990-07-20 | 1992-09-29 | Borg Warner Automot Transmission & Engine Components Corp | Clutch separator plate |
| CN105643396A (en) * | 2016-01-29 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Milling and grinding method of large-caliber off-axis aspherical lens |
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