JPH01309244A - Sample bed device in electron microscope - Google Patents

Abstract

PURPOSE:To enable a sample bed to be made thinner and to have inclination function by taking in/out a mesh on which a sample lies from the horizontal direction of the sample bed. CONSTITUTION:The top end of a sample supporting body 4 is formed into a thin plate-shaped body 4 so as to be inserted into a gap between objective lens pole pieces 2, 3. When a lug piece 121 is pulled, a moving piece 9 slides so that the linkage of a spring 16 comes off from a pin 10, and a rotatable sample bed 13 separates form the slope 4'' of the supporting body 4. Next, when the lug piece 12 is rotated and pushed, a sample clamp 22 separates from a sample 21, and when a sample take in/out port 18 is turned to the lower side, the sample 21 can be taken out from the sample bed 13. With this arrangement, the thickness of the sample bed 13 can be made thinner and as well it can have inclination function.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子顕微鏡の改良に係り、特に試料を光軸の側
方から挿入するサイドエントリ一方式の試料台に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to improvements in electron microscopes, and more particularly to a side-entry one-type sample stage in which a sample is inserted from the side of the optical axis.

〔従来の技術〕[Conventional technology]

試料を対物レンズの側方から挿入するサイドエントリー
の試料台装置の試料の固定法は、従来は支持体に凹みを
設けてこれに試料を落し込みこれを押え板で固定する方
式と、凹みに係合する割リングで固定する方式、又は凹
みに螺合するメツシュ押えで固定する方式等が用いられ
ている。いずれの場合も試料台の上方より試料を落し込
みメツシュ押え具で試料を固定しているので試料台の厚
さを薄く小さくするには限界があった。対物レンズのポ
ールピースギャップは収差等の考慮から成るべく小さい
ことが好ましいので試料台は限られた狭い空間しか占有
できない。従って試料台は薄く小さくしなければならず
、そのうえ試料台に傾斜機能を備えることは従来の技術
では困難であった。Conventionally, the methods of fixing a sample in a side-entry sample stage device, in which the sample is inserted from the side of the objective lens, have been two methods: providing a recess in the support, dropping the sample into it, and fixing it with a holding plate; A method of fixing with an engaging split ring, a method of fixing with a mesh presser screwed into a recess, etc. are used. In either case, the sample is dropped from above the sample stage and fixed with a mesh holder, so there is a limit to how thin and small the sample stage can be made. Since the pole piece gap of the objective lens is preferably as small as possible in consideration of aberrations, etc., the sample stage can occupy only a limited narrow space. Therefore, the sample stage must be made thin and small, and in addition, it has been difficult with conventional techniques to provide the sample stage with a tilting function.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術は試料台を薄く小さくしたうえで、さらに
傾斜機能を備えるという点について配慮がされておらず
、超高分解能での試料の傾斜は困麺であった。本発明の
目的はポールピースのギャップが狭い対物レンズにもギ
ャップに合せて試料台を薄く小さくシ、かつ傾斜機能を
備えることにある。In the above-mentioned conventional technology, no consideration was given to making the sample stage thin and small and further providing a tilting function, and it was difficult to tilt the sample at ultra-high resolution. An object of the present invention is to make the sample stage thinner and smaller to fit the gap of an objective lens having a narrow pole piece gap, and to provide a tilting function.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的は試料台の水平方向から試料を載置したメツシ
ュを挿脱することにより、達成される。The above object is achieved by inserting and removing the mesh on which the sample is placed from the sample stage in the horizontal direction.

〔作用〕[Effect]

メツシュを固定する手段を試料台に内蔵させることによ
り、試料台を薄く小さくでき、試料台の両端にピボット
を設けて支持部材にピボットで支承することにより、試
料の傾斜機能が備わり試料台にメツシュを挿脱する際に
も挿脱し易い方向に試料台の向きを回転できるようにし
た。By incorporating means for fixing the mesh into the sample stand, the sample stand can be made thinner and smaller. By providing pivots at both ends of the sample stand and supporting the support member with the pivots, a tilting function for the sample is provided, and the mesh can be attached to the sample stand. When inserting and removing the specimen, the sample stage can be rotated in a direction that facilitates insertion and removal.

〔実施例〕 以下、本発明の一実施例を図面により詳細に説明する。〔Example〕 Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第１図に於て真空室１内に配置された対物レンズの上部
ポールピース２および下部ポールピース３の間にはギャ
ップが形成されている。このギャップは普通１０ｎｗｎ
以下であるが超高分解能になると５ｍ程度となる。この
ギャップには実際には対物レンズ絞りが挿入されるが図
では省略されている。４は試料支持体でこの先端は対物
レンズポールピースのギャップの間に挿入するため４′
として薄い板状体に形成されている。５は４′の尖端に
埋込まれたピボットで電子顕微鏡内に設けられた受けに
受けられて試料ホールダを検鏡位置に位置せしめている
。６は柄で支持′体４と一体化されＯリング７を介して
装置内に気密的に且つ滑動可能な如く挿入される部分で
ある。六８は支持体４の中心部に設けられていて移動子
９が軸方向滑動、および回転自在に収容されている。In FIG. 1, a gap is formed between an upper pole piece 2 and a lower pole piece 3 of an objective lens placed in a vacuum chamber 1. This gap is usually 10nwn
However, if it becomes ultra-high resolution, it will be about 5 m. An objective lens diaphragm is actually inserted into this gap, but it is omitted in the figure. 4 is a sample support whose tip is inserted into the gap between the objective lens pole piece at 4'.
It is formed into a thin plate-like body. Reference numeral 5 denotes a pivot embedded in the tip of 4', which is received by a receiver provided within the electron microscope to position the sample holder at the microscope position. Reference numeral 6 denotes a handle which is integrated with the support body 4 and is inserted into the device via an O-ring 7 in an airtight and slidable manner. 68 is provided in the center of the support body 4, and a slider 9 is housed therein so as to be slidable and rotatable in the axial direction.

移動子９の先端にはピン１０．１０’　が植設され柄６
に対しＯリング７′で気密を保たれた外端には嫡子１２
が小ねじで固着されている。１３は試料台で試料台の両
端に植設されたピボット１４゜１４′により支持体４に
設けられた穴１５，１５’に回転自在に支承されている
。試料台１３は回転軸でもあるピボット１４．１４’　
と平行な曲面１３′が支持体４の先端に設けられた斜面
４′と係合して水平の状態になっている。１６はばねで
試料台１３の両側面１７．１７’　に植設されピボッｈ
１４，１４’　を１巻きして、ピン１０に引掛けられて
おり、ばね１６のばね作用により試料台１３には斜面４
′に抑圧されている。試料台１３には電子線通過穴１７
．試料挿脱口１８、穴１９゜１９′が設けられ、その両
面を板ばね２ｏでサンドイッチされている。試料挿脱口
１８より挿入された試料２１は板ばね２ｏに設けられた
穴２０′内でかしめられた試料押え２２によって試料台
１３にセットされている。板ばね２ｏの下側の面２０″
には試料台１３の穴と同位置に穴１９゜１９′が設けら
れている。以上のように構成されているので第１図の検
鏡状態から試料２１を挿脱する操作について説明する。A pin 10.10' is installed at the tip of the mover 9, and the handle 6
On the other hand, there is a legitimate child 12 at the outer end, which is kept airtight with an O-ring 7'.
is fixed with a machine screw. Reference numeral 13 denotes a sample stage, which is rotatably supported in holes 15 and 15' provided in the support 4 by pivots 14 and 14' installed at both ends of the sample stage. The sample stage 13 has a pivot 14.14' which is also a rotation axis.
A curved surface 13' parallel to the support body 4 engages with an inclined surface 4' provided at the tip of the support body 4, so that the support body 4 is in a horizontal state. 16 is installed with springs on both sides 17 and 17' of the sample stage 13, and pivots h.
14, 14' are wrapped once and hooked onto the pin 10, and the sample stage 13 has an inclined surface 4 due to the spring action of the spring 16.
' is suppressed. The sample stage 13 has an electron beam passage hole 17.
．． A sample insertion/removal port 18 and holes 19° and 19' are provided, and both sides thereof are sandwiched between leaf springs 2o. The sample 21 inserted through the sample insertion/removal port 18 is set on the sample stage 13 by a sample holder 22 caulked within a hole 20' provided in the leaf spring 2o. Lower surface 20″ of leaf spring 2o
Holes 19° and 19' are provided at the same positions as the holes in the sample stage 13. Since the apparatus is constructed as described above, the operation of inserting and removing the sample 21 from the microscope state shown in FIG. 1 will be explained.

嫡子１２を引張ると移動子９が摺動してピン１０とばね
１６の係合が外れ、回転自在の試料台１３は支持体４の
斜面４′から離れる。次に嫡子１２を９０′回転して押
すとピン１０．１０’　が試料台１３の穴１９゜１９′
を通り、板ばね２ｏの試料押え２２側の面を押す。移動
子９が試料台１３と面接触した第３図の状態で小ねじで
固着すると板ばね２ｏはばね作用を損わない程度に開き
、試料押え２２は試料２１から離れる。この状態で試料
挿脱口１８を下側に向けると試料２１は試料台１３より
取出せる。When the eldest child 12 is pulled, the slider 9 slides, the pin 10 and the spring 16 are disengaged, and the rotatable sample stage 13 is separated from the slope 4' of the support 4. Next, when the eldest child 12 is rotated 90' and pushed, the pin 10.
, and press the surface of the plate spring 2o on the sample holder 22 side. When the slider 9 is fixed with machine screws in the state shown in FIG. 3 in which it is in surface contact with the sample stage 13, the leaf spring 2o opens to the extent that the spring action is not impaired, and the sample holder 22 is separated from the sample 21. In this state, the sample 21 can be taken out from the sample stage 13 by turning the sample insertion/ejection port 18 downward.

試料２１を試料台１３にセットする場合は試料挿脱口１
８を上側に向は試料２１を挿入してから嫡子１２を引張
ると板ばね２０のばね作用で試料押え２２は試料２１を
押圧し固定する。ばね１６をピン１０に引掛けると試料
台１３は支持体４の斜面４′と接触して水平状態となる
。When setting the sample 21 on the sample stage 13, use the sample insertion/removal port 1.
When the sample 21 is inserted with 8 facing upward and the legitimate child 12 is pulled, the sample holder 22 presses and fixes the sample 21 by the spring action of the leaf spring 20. When the spring 16 is hooked to the pin 10, the sample stage 13 comes into contact with the slope 4' of the support 4 and becomes horizontal.

〔発明の効果〕〔Effect of the invention〕

本発明によれば試料押えを試料台に内蔵しているので試
料押えの落下、紛失の危険性が全く無く、試料台の厚さ
も１．５　ｒｍ程度まで薄くすることができる。試料台
には回転機能すなわち傾斜機能が備わっており、簡単な
構造で２軸傾斜が可能なようになっている。又試料を取
外す手段を試料支持体内に設けであるので特別な工具を
使用することも無く取扱いが簡単である。According to the present invention, since the sample holder is built into the sample stand, there is no risk of the sample holder falling or being lost, and the thickness of the sample holder can be reduced to about 1.5 rm. The sample stage has a rotation function, that is, a tilting function, and can be tilted in two axes with a simple structure. Furthermore, since the means for removing the sample is provided within the sample support, handling is easy without the use of special tools.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例の試料台装置の縦断面図、第
２図は第１図の試料台周辺の平面図、第３図は第１図の
試料挿脱時の平面図、第４図は試料台を拡大した平面図
、第５図は試料台の縦断面図である。 １・・・真空室、４・・・支持体、５・・・ピボット、
６・・・柄、９・・・移動子、１ｏ・・・ビン、１１・
・・軸、１２・・・嫡子、１３・・・試料台、１４・・
・ピボット、１６・・・ばね、１７・・・電子線通過穴
、１８・・・試料挿脱口、２０・・・第　１　図FIG. 1 is a longitudinal cross-sectional view of a sample stage device according to an embodiment of the present invention, FIG. 2 is a plan view of the vicinity of the sample stage shown in FIG. 1, and FIG. 3 is a plan view of the sample stage shown in FIG. FIG. 4 is an enlarged plan view of the sample stage, and FIG. 5 is a longitudinal sectional view of the sample stage. 1... Vacuum chamber, 4... Support, 5... Pivot,
6...handle, 9...mover, 1o...bottle, 11.
...axis, 12... legitimate child, 13... sample stand, 14...
・Pivot, 16... Spring, 17... Electron beam passage hole, 18... Sample insertion/extraction port, 20... Fig. 1

Claims (1)

【特許請求の範囲】 １、試料台の水平方向から試料を載置したメッシュを挿
脱するように構成したことを特徴とする電子顕微鏡に於
ける試料台装置。 ２、上記試料台はメッシュ挿脱の際に回転できるように
したことを特徴とする特許請求の範囲第１項に記載され
た電子顕微鏡に於ける試料台装置。 ３、上記試料台にメッシュを固定する手段を内蔵するよ
うにしたことを特徴とする特許請求の範囲第１項に記載
された電子顕微鏡に於ける試料台装置。 ４、メッシュを取外す手段を試料台を支持している部材
内に設けたことを特徴とする特許請求の範囲第１項に記
載された電子顕微鏡に於ける試料台装置。[Scope of Claims] 1. A sample stage device for an electron microscope, characterized in that a mesh on which a sample is placed can be inserted and removed from the sample stage in the horizontal direction. 2. The sample stage device for an electron microscope as set forth in claim 1, wherein the sample stage is rotatable when inserting and removing the mesh. 3. A sample stage device for an electron microscope as set forth in claim 1, characterized in that means for fixing a mesh to the sample stage is built-in. 4. A sample stage device for an electron microscope as set forth in claim 1, characterized in that means for removing the mesh is provided within a member supporting the sample stage.