JPH01295658A - Rotation detector - Google Patents
Rotation detectorInfo
- Publication number
- JPH01295658A JPH01295658A JP12544788A JP12544788A JPH01295658A JP H01295658 A JPH01295658 A JP H01295658A JP 12544788 A JP12544788 A JP 12544788A JP 12544788 A JP12544788 A JP 12544788A JP H01295658 A JPH01295658 A JP H01295658A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- rotation
- film
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000010409 thin film Substances 0.000 claims description 33
- 230000005415 magnetization Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 2
- 230000004907 flux Effects 0.000 abstract description 10
- 239000004020 conductor Substances 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract 1
- 230000008859 change Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000005381 magnetic domain Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Brushless Motors (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は各種回転体の回転数、回転角および回転速度を
検出する磁気式の回転検出装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic rotation detection device for detecting the rotation speed, rotation angle, and rotation speed of various rotating bodies.
各種回転体の回転検出装置は従来から多くのものがあり
、回転体に回転円板が直結され、この回転円板の回転数
２回転角および回転速度を光学式あるいは磁気式で検出
するようにされている。光学式のものは回転円板にスリ
ット孔を設け、このスリット孔を通過する光をホトトラ
ンジスタのような受光素子で検出する構成である。また
磁気式のものには周面に沿って突起を設けた磁性円板を
回転させ、外周に設けた磁石との間にホール素子を挿入
し、円板の突起により変化する磁束をホール素子で読み
取る簡単なものや、周面にＮ極とＳ極を交互に着磁した
回転円板を設け、この極性変化をホール素子または磁気
抵抗素子などの磁気センサで検出するものなどが知られ
ている。さらに最近は周面に着磁した回転円板の磁極面
に垂直に磁性合金線特にアモルファス磁性細線を接近さ
せ。There have been many types of rotation detection devices for various types of rotating bodies, in which a rotating disk is directly connected to the rotating body, and the rotational speed, rotation angle, and rotational speed of this rotating disk are detected optically or magnetically. has been done. The optical type has a configuration in which a slit hole is provided in a rotating disk, and light passing through the slit hole is detected by a light receiving element such as a phototransistor. In addition, in the magnetic type, a magnetic disk with protrusions along the circumference is rotated, and a Hall element is inserted between the magnet provided on the outer circumference, and the magnetic flux changing due to the protrusions on the disk is transferred by the Hall element. There are some that are easy to read, and others that have a rotating disk with alternately magnetized north and south poles on its circumference, and detect this change in polarity with a magnetic sensor such as a Hall element or magnetoresistive element. . Furthermore, recently, magnetic alloy wires, especially amorphous magnetic thin wires, have been brought close to the magnetic pole surface of a rotating disk whose circumferential surface is magnetized perpendicularly.
着磁極に対応した電圧出力をこの磁性細線に巻いたさぐ
りコイルの出力で検出するものがある。Some detect the voltage output corresponding to the magnetized pole using the output of a probe coil wound around this magnetic thin wire.
光学式の回転検出装置は発光素子および受光素子を必要
とし、また回転角の分解能を高めるためにはスリット孔
を多く要し受光素子をｌｋｍ加工することが必要となる
。また磁気式の装置でホール素子や磁気抵抗素子を使用
する場合は通電電流を必要とし、また高分解能を得るた
めには回転円板の着磁および検出素子に微細加工が必要
となり高度の技術が必要になる。またアモルファス磁性
細線を用いる場合にはこの細線の剛性を考慮すると細線
の直径に限界があり高分解能への対応が困難であり、さ
らに細線に壱いたさぐりコイルが必要となるなどの欠点
がある。An optical rotation detection device requires a light-emitting element and a light-receiving element, and in order to improve the resolution of the rotation angle, it is necessary to provide many slit holes and process the light-receiving element by 1km. In addition, when using a Hall element or magnetoresistive element in a magnetic device, a current is required, and in order to obtain high resolution, magnetization of the rotating disk and fine processing of the detection element are required, which requires advanced technology. It becomes necessary. Further, when using an amorphous magnetic thin wire, there is a limit to the diameter of the thin wire when considering the rigidity of the thin wire, making it difficult to support high resolution, and there are also drawbacks such as the need for a probe coil attached to the thin wire.
本発明の目的は着磁された回転円板を使用し、簡単な構
成で高分解能化が可能な回転検出装置を提供することに
ある。An object of the present invention is to provide a rotation detection device that uses a magnetized rotating disk and can achieve high resolution with a simple configuration.
上述の課題を解決するため、本発明の回転検出装置は、
周面に沿って等間隔にＮＳ交互に着磁された回転円板、
非磁性基板上に細長形状に形成されて長手方向に対し斜
め方向に磁化容易軸ををする軟磁性薄膜からなり前記回
転円板の磁極面にほぼ垂直に設けられた少なくとも１個
の検出素子およびこの検出素子の両端に導体薄膜を介し
て接続され前記軟磁性薄膜に発生する電圧を検出する電
圧検出装置を備えろものとする。また、検出素子が複数
個の場合は、所定の磁極間隔をもって配置され、各検出
素子の両端に接続された電圧検出装置は各検出素子の磁
極に対する位相の順位列を認識し回転方向を検出する計
測装置に接続されているものとする。In order to solve the above-mentioned problems, the rotation detection device of the present invention has the following features:
A rotating disk with NS magnetized alternately at equal intervals along the circumference,
at least one detection element made of a soft magnetic thin film formed in an elongated shape on a non-magnetic substrate and having an axis of easy magnetization oblique to the longitudinal direction, and provided substantially perpendicular to the magnetic pole face of the rotating disk; A voltage detection device connected to both ends of the detection element via a conductive thin film to detect the voltage generated in the soft magnetic thin film is provided. In addition, when there are multiple detection elements, they are arranged with a predetermined magnetic pole spacing, and the voltage detection device connected to both ends of each detection element recognizes the phase order sequence with respect to the magnetic pole of each detection element and detects the rotation direction. Assume that it is connected to a measuring device.
細長状に形成され磁歪を有し、急速な磁区の変動が生じ
島いＦｅ基アモルファス磁性材料のような軟磁性薄膜を
非磁性基板上に形成し、このとき磁性薄膜の長手方向に
対し斜め方向に応力を加えておけば、この方向を磁化容
易軸とした検出素子が得られるから検出すべき回転体に
連結され、周面にＮＳ交互に磁極を設けた回転円板の磁
極面にこの検出素子の長手方向をほぼ垂直に接近させて
設置すれば、円板の回転に伴う磁極の極性変化に対応し
て素子の薄膜長手方向に磁化反転が生じ、磁化容易軸方
向に急激な磁壁移動や磁区の反転が生じ、このときの幅
方向の磁束成分の変化により磁性薄膜長手方向に電流が
発生し、検出素子の両端に電圧が発生する。この電圧は
磁極の急激な変化により正負交互のパルス電圧になるか
らこれを電圧検出装置で検出し、そのパルス敗から回転
数または回転角を求める。また複数の検出素子を磁極に
対する位相を変えて設置し、計測装置で回転数。A soft magnetic thin film such as an Fe-based amorphous magnetic material that is formed in an elongated shape, has magnetostriction, and has rapid magnetic domain fluctuations and is formed on a non-magnetic substrate is formed on a non-magnetic substrate. If stress is applied to the magnetic pole surface of a rotating disk, which is connected to the rotating body to be detected and has alternating magnetic poles on its circumference, a detection element with this direction as the axis of easy magnetization can be obtained. If the elements are installed so that their longitudinal directions are nearly perpendicular, magnetization reversal will occur in the longitudinal direction of the thin film of the element in response to changes in the polarity of the magnetic poles as the disk rotates, resulting in sudden domain wall movement or domain wall movement in the direction of the easy axis of magnetization. A reversal of the magnetic domains occurs, and a change in the magnetic flux component in the width direction at this time generates a current in the longitudinal direction of the magnetic thin film, and a voltage is generated at both ends of the detection element. This voltage becomes an alternating positive and negative pulse voltage due to a sudden change in the magnetic pole, so this is detected by a voltage detection device, and the rotation speed or rotation angle is determined from the pulse loss. In addition, multiple detection elements are installed with different phases relative to the magnetic poles, and a measuring device measures the rotational speed.
回転角および回転方向を検出することができる。The rotation angle and rotation direction can be detected.
磁性薄膜の断面は非常に薄いから円板の回転方向に磁性
薄膜の幅方向を直角に配置すれば円板の回転方向に対す
る寸法が非常に小さく、その位相角を正確に検出するこ
とができる。また複数個の検出素子を用いればさらに分
解能を高めることができる。Since the cross section of the magnetic thin film is very thin, if the width direction of the magnetic thin film is arranged perpendicular to the rotation direction of the disk, the dimension with respect to the rotation direction of the disk is very small, and the phase angle can be detected accurately. Furthermore, the resolution can be further improved by using a plurality of detection elements.
本発明の一実施例を第１図に示す、ここで回転体１に直
結された回転円板２にはその周面に磁極３がＮＳ交互に
かつ等間隔に着磁されている。この磁極３に垂直にかつ
その幅方向が回転円板２の厚さ方向に検出素子工が配置
されている。この検出素子土は第２図に示すように斜め
方向に細長のＦｅ基アモルファス磁性薄膜５が絶縁膜６
を介して蒸着などで形成され、さらにこの磁性薄膜５の
両端に接続される導体薄膜７が形成された円弧状の基板
８をＰ矢印方向に広げて平板状に変形し、この磁性薄膜
５の周囲を長手方向に切断して第３図Ａ、Ｈに示すよう
に形成されている。すなわち磁性薄膜５の両端に接続さ
れた導体薄膜７は検出素子土の一方の端部からリード線
で引き出すようにされ他方の端部は磁極３の面に接近し
易くされている。このような構成では第４図に示すよう
に磁性薄膜５の斜め方向に引張応力δが与えられている
からこの方向が磁化容易軸であり、磁極３によりＨ方向
に磁界が与えられると応力δの方向に磁束φ・が発生し
、その分力φ２は磁性薄膜５の長手方向に直角である。An embodiment of the present invention is shown in FIG. 1, in which a rotating disk 2 directly connected to a rotating body 1 has magnetic poles 3 magnetized on its circumferential surface alternately and at equal intervals. A detection element is arranged perpendicularly to the magnetic pole 3 and with its width direction extending in the thickness direction of the rotating disk 2. As shown in FIG.
The arc-shaped substrate 8, on which the conductor thin film 7 is formed by vapor deposition or the like, and which is connected to both ends of the magnetic thin film 5, is expanded in the direction of the arrow P and deformed into a flat plate. It is formed by cutting the periphery in the longitudinal direction as shown in FIGS. 3A and 3H. That is, the conductor thin film 7 connected to both ends of the magnetic thin film 5 is drawn out from one end of the sensing element layer by a lead wire, and the other end is made easily accessible to the surface of the magnetic pole 3. In such a configuration, as shown in FIG. 4, a tensile stress δ is applied in an oblique direction to the magnetic thin film 5, so this direction is the axis of easy magnetization, and when a magnetic field is applied in the H direction by the magnetic pole 3, the stress δ A magnetic flux φ· is generated in the direction, and its component force φ2 is perpendicular to the longitudinal direction of the magnetic thin film 5.
そして磁極３が円板２の回転につれてＮＳ交互に変化す
るとこの分力φ８もその方向が反転する。これは磁性薄
膜５の磁壁が移動しまたは磁区が反転するためで、この
分力φ８の直角方向すなわち磁性薄膜５の長手方向に電
流■が流れ、この両端にパルス電圧Ｅ１を発生する。When the magnetic pole 3 alternates between NS and NS as the disk 2 rotates, the direction of this component force φ8 is also reversed. This is because the magnetic domain walls of the magnetic thin film 5 move or the magnetic domains are reversed, and a current (2) flows in the direction perpendicular to this component force φ8, that is, in the longitudinal direction of the magnetic thin film 5, generating a pulse voltage E1 at both ends thereof.
このパルス電圧Ｅ、は第５図に示すように磁束φ。This pulse voltage E, corresponds to the magnetic flux φ, as shown in FIG.
が急激に変化する位相で表われる。これを検出装置９で
検出し、回転数および回転角を求める。したがって着磁
極数が多いほど分解能は高度になる。appears with a rapidly changing phase. This is detected by the detection device 9, and the rotation speed and rotation angle are determined. Therefore, the greater the number of magnetized poles, the higher the resolution.
検出装置９は磁性薄膜５の両端に導体薄膜７を介してリ
ード線１０で接続されＦｅ基アモルファス磁性薄膜５が
はんだ着けなどで加熱され変質しないようにされている
。The detection device 9 is connected to both ends of the magnetic thin film 5 by lead wires 10 via the conductive thin film 7 to prevent the Fe-based amorphous magnetic thin film 5 from being heated and deteriorating in quality by soldering or the like.
第６図は第１図と異なる実施例を示し、ＮＳの磁極３を
設けた回転円板２は第１図と同じであるが、検出素子は
雨検出素子４ａ、 ４ｂと同じものを２個設けた点に相
違がある。この雨検出素子４ａ、 ４ｂの間隙は位相角
９０°が原則であるが、３６０°＋９０゜としてもよい
、この雨検出素子４ａ、 ４ｂの出力端はそれぞれ検出
ｖ装置９ａ、９ｂを介して計測装置１１に接続されてい
る。Fig. 6 shows a different embodiment from Fig. 1, in which the rotating disk 2 provided with the NS magnetic poles 3 is the same as in Fig. 1, but the two detection elements are the same as the rain detection elements 4a and 4b. There is a difference in the points established. In principle, the gap between the rain detection elements 4a and 4b has a phase angle of 90°, but it may also be set to 360°+90°.The output ends of the rain detection elements 4a and 4b are measured via detection devices 9a and 9b, respectively. It is connected to the device 11.
回転円板２が回転すると第７図に示すように検出素子４
ａは第５図と同様に磁束φ３の変化によりパルス電圧Ｅ
ｌを発生する。また検出素子４ｂは検出素子４ａと同様
にして磁束φ、の変化によりパルス電圧Ｅ８を発生する
。この両パルス電圧Ｅ ｒ 、 Ｅｔは全く同じ波形で
あるが、両磁束−意、φコの位相が９０”異なるために
この両電圧Ｅ、、Ｅ、も９０”の位相差がある点に特長
がある。したがってこの両パルス電圧ａ 、Ｅ ｍを整
流してそのパルス数から回転数や回転角を検出するとき
の分解能は第１図の実施例より高くなる。またこの場合
は電圧Ｅ。When the rotating disk 2 rotates, the detection element 4 is detected as shown in FIG.
a is the pulse voltage E due to the change in magnetic flux φ3 as in Fig. 5.
generate l. Similarly to the detection element 4a, the detection element 4b generates a pulse voltage E8 due to a change in the magnetic flux φ. These two pulse voltages E r and Et have exactly the same waveform, but since the phases of both magnetic fluxes and φ are 90" different, the two voltages E, , E also have a phase difference of 90". There is. Therefore, the resolution when rectifying both pulse voltages a and E m and detecting the rotation speed and rotation angle from the number of pulses is higher than that of the embodiment shown in FIG. In this case, the voltage is E.
と電圧Ｅｔの何れが９０”遅れているか、または進んで
いるかによって、その回転方向を検出することができる
。The direction of rotation can be detected depending on whether Et and Et are behind or ahead by 90''.
本発明によれば細長の磁性薄膜を非磁性基板上に形成し
、このとき長手方向に対し斜め方向に応力を加えた検出
素子を、局面にＮＳ交互に着磁された回転円板の磁極面
に垂直に設けたから円板の回転に伴い、磁界の方向がＮ
からＳ、またはＳからＮに急変するとき磁性薄膜にパル
ス状の波形の電圧を生じ、この円板に連結された回転体
の回転速度１回転角を高分解能で検出することができる
効果がある。また複数の検出素子を用いればさらに分解
能を高くし、かつ回転方向を検出することもできる。According to the present invention, an elongated magnetic thin film is formed on a non-magnetic substrate, and a detection element to which stress is applied in a diagonal direction with respect to the longitudinal direction is placed on the magnetic pole surface of a rotating disk that is alternately magnetized in NS and curvature directions. As the disk rotates, the direction of the magnetic field changes to N.
When there is a sudden change from S to N, or from S to N, a pulse-like voltage is generated in the magnetic thin film, which has the effect of making it possible to detect with high resolution one rotation angle of the rotation speed of the rotating body connected to this disk. . Furthermore, if a plurality of detection elements are used, the resolution can be further increased and the direction of rotation can also be detected.
また検出素子の磁性薄膜の端部の幅を回転円板の厚さ方
向にすれば円板の回転方向に対する占育率が小さく位相
角が正確に設定できる。さらに検出素子の軟磁性薄膜は
Ｆｅ基アモルファス磁性薄膜とすれば高磁歪を有し、か
つ強度が高いから斜め方向に磁化容易軸を付与し易く、
また高透磁率で電気抵抗が高いものが得られ、急峻なパ
ルス電圧を得ることができすぐれた検出性能とすること
ができる。このとき磁性薄膜の両端は導体薄膜で接続し
て、検出装置に接続するリード線は導体薄膜に接続した
からはんだ付けなどによる磁性薄膜の劣化を防止できる
などの効果もある。Furthermore, if the width of the end of the magnetic thin film of the detection element is set in the thickness direction of the rotating disk, the occupation ratio with respect to the rotating direction of the disk is small and the phase angle can be set accurately. Furthermore, if the soft magnetic thin film of the detection element is an Fe-based amorphous magnetic thin film, it has high magnetostriction and high strength, so it is easy to provide an axis of easy magnetization in an oblique direction.
In addition, a material with high magnetic permeability and high electrical resistance can be obtained, and a steep pulse voltage can be obtained, resulting in excellent detection performance. At this time, both ends of the magnetic thin film are connected by a conductive thin film, and the lead wires connected to the detection device are connected to the conductive thin film, which has the effect of preventing deterioration of the magnetic thin film due to soldering or the like.
第１図は本発明による回転検出装置の一実施例を示す概
略斜視図、第２図は検出素子の製作方法を示す斜視図、
第３図は検出素子の一実施例を示し、（Ａ）は平面図、
（Ｂ）は（Ａ）図のｘ−ｘ’線に沿う断面図、第４図は
検出素子にパルス電圧が発生する理論を示す説明図、第
５図は磁束φ、とパルス電圧Ｅとの関係を示す波形図、
第６図は第１図と異なる回転検出装置の実施例を示す概
略斜視図、第７図は第６図の雨検出素子に与えられる磁
束とそれらの検出素子に発生するパルス電圧との関係を
示す波形図である。
２：回転円板、３：磁極、↓１ロ、ｕ：検出素子、５：
Ｆｅ基アモルファス磁性薄膜、７：導体薄膜、８：基板
、９．９ａ、 ９ｂ：検出装置、１１：計測＼ごｌ７１
１、゛
第１図
第２図 第４図
第３図
第５図FIG. 1 is a schematic perspective view showing an embodiment of a rotation detection device according to the present invention, FIG. 2 is a perspective view showing a method for manufacturing a detection element,
FIG. 3 shows an example of the detection element, (A) is a plan view,
(B) is a sectional view taken along line xx' in figure (A), Figure 4 is an explanatory diagram showing the theory of pulse voltage generation in the detection element, and Figure 5 is a diagram showing the relationship between magnetic flux φ and pulse voltage E. A waveform diagram showing the relationship,
FIG. 6 is a schematic perspective view showing an embodiment of the rotation detection device different from that in FIG. 1, and FIG. 7 shows the relationship between the magnetic flux applied to the rain detection elements in FIG. FIG. 2: Rotating disk, 3: Magnetic pole, ↓1ro, u: Detection element, 5:
Fe-based amorphous magnetic thin film, 7: Conductor thin film, 8: Substrate, 9.9a, 9b: Detection device, 11: Measurement\Go171
1. Figure 1 Figure 2 Figure 4 Figure 3 Figure 5
Claims (1)
板、非磁性基板上に細長形状に形成されて長手方向に対
し斜め方向に磁化容易軸を有する軟磁性薄膜からなり前
記回転円板の磁極面にほぼ垂直に設けられた少なくとも
１個の検出素子およびこの検出素子の両端に導体薄膜を
介して接続され前記軟磁性薄膜に発生する電圧を検出す
る電圧検出装置を備えていることを特徴とする回転検出
装置。 ２）請求項１に記載された回転検出装置において、検出
素子が複数個の場合は、所定の磁極間隔をもって配置さ
れ、各検出素子の両端に接続された電圧検出装置は各検
出素子の磁極に対する位相の順位列を認識し回転方向を
検出する計測装置に接続されていることを特徴とする回
転検出装置。[Claims] 1) A rotating disk that is magnetized alternately with NSs at equal intervals along the circumferential surface, formed in an elongated shape on a non-magnetic substrate, and has an axis of easy magnetization diagonal to the longitudinal direction. At least one detection element made of a soft magnetic thin film and provided substantially perpendicular to the magnetic pole surface of the rotating disk, and connected to both ends of this detection element via a conductive thin film to detect the voltage generated in the soft magnetic thin film. A rotation detection device comprising a voltage detection device. 2) In the rotation detecting device according to claim 1, when there is a plurality of detecting elements, they are arranged with a predetermined magnetic pole interval, and the voltage detecting device connected to both ends of each detecting element is connected to the magnetic pole of each detecting element. A rotation detection device characterized in that it is connected to a measurement device that recognizes a phase ranking sequence and detects a rotation direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12544788A JPH01295658A (en) | 1988-05-23 | 1988-05-23 | Rotation detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12544788A JPH01295658A (en) | 1988-05-23 | 1988-05-23 | Rotation detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01295658A true JPH01295658A (en) | 1989-11-29 |
Family
ID=14910310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12544788A Pending JPH01295658A (en) | 1988-05-23 | 1988-05-23 | Rotation detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01295658A (en) |
-
1988
- 1988-05-23 JP JP12544788A patent/JPH01295658A/en active Pending
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