JPH01290785A - Wear resistant composite member having high lubricity - Google Patents
Wear resistant composite member having high lubricityInfo
- Publication number
- JPH01290785A JPH01290785A JP12001288A JP12001288A JPH01290785A JP H01290785 A JPH01290785 A JP H01290785A JP 12001288 A JP12001288 A JP 12001288A JP 12001288 A JP12001288 A JP 12001288A JP H01290785 A JPH01290785 A JP H01290785A
- Authority
- JP
- Japan
- Prior art keywords
- film
- cr2n
- wear resistance
- crn
- lubricity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims description 8
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 230000001050 lubricating effect Effects 0.000 claims description 4
- 229910019590 Cr-N Inorganic materials 0.000 abstract description 10
- 229910019588 Cr—N Inorganic materials 0.000 abstract description 10
- 238000001704 evaporation Methods 0.000 abstract description 4
- 229910000831 Steel Inorganic materials 0.000 abstract description 2
- 239000010959 steel Substances 0.000 abstract description 2
- 238000007733 ion plating Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 206010010904 Convulsion Diseases 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Sliding-Contact Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は機械の摺動部等に使用される耐摩耗性・高潤滑
性複合部材に関し、基体部材表面にＣｒ−Ｎ系の高硬度
膜を被覆してなる耐摩耗性・高潤滑性複合部材に関する
ものである。Detailed Description of the Invention [Industrial Application Field] The present invention relates to a wear-resistant and highly lubricating composite member used for sliding parts of machines, etc. The present invention relates to a wear-resistant and highly lubricious composite member coated with.
［従来の技術］
自動車や工作機械の軸受部材等は、過酷な摺動条件下で
使用されることからその表面に耐摩耗性並びに潤滑性を
高める為の表面処理が施される。[Prior Art] Since bearing members for automobiles and machine tools are used under severe sliding conditions, their surfaces are subjected to surface treatments to improve wear resistance and lubricity.
こうした表面処理技術としては従来電気めっきや無電解
めっきが一般的であり、殊に硬質Ｃｒめっき膜や硬質ア
ルマイト処理の技術が採用されることが多い。Conventionally, electroplating and electroless plating are commonly used as such surface treatment techniques, and in particular, techniques of hard Cr plating film and hard alumite treatment are often employed.
しかるに上記従来技術の表面処理膜は、膜強度が不足す
ると共に基材と膜との密着性が低く耐摩耗性に欠ける面
があり、軸受部材等の表面処理技術としては満足１ノ得
るものではなかった。特に前記工作機械等の高性能化に
伴なって軸受部材等の使用条件は益々過酷化する傾向に
あることから、耐摩耗性並びに潤滑性の一層優れた軸受
部材等の必要性が高まっている。However, the surface treatment film of the above-mentioned conventional technology lacks film strength, has low adhesion between the base material and the film, and lacks wear resistance, and is not satisfactory as a surface treatment technology for bearing members, etc. There wasn't. In particular, as the performance of the aforementioned machine tools increases, the operating conditions for bearing members, etc. tend to become increasingly severe, so there is an increasing need for bearing members, etc. that have even better wear resistance and lubricity. .
一方耐摩耗性膜被覆技術として、最近Ｐ、ＶＤ法やＣＶ
Ｄ法の普及が著しく種々の分野でその利用が進んでいる
。軸受部材等の表面処理にもこれらの方法の通用が検討
されており、各種窒化物膜や炭化物膜が被覆膜として考
えられているが、例えばＴｉＮ＠の場合には潤滑性に問
題があり、焼付等を生じ易いという欠点がある。又Ｃｒ
あるいはＣｒ窒化物も検討されているが、いずれも硬度
が低く、クランクが入り易かったりして耐摩耗性に問題
がある。On the other hand, as wear-resistant film coating technology, P, VD method and CV
Method D has become extremely popular and its use is progressing in various fields. The application of these methods to surface treatment of bearing members, etc. is also being considered, and various nitride films and carbide films are being considered as coating films, but for example, in the case of TiN@, there are problems with lubricity. , it has the disadvantage of being susceptible to seizures and the like. Also Cr
Alternatively, Cr nitride has been considered, but both have low hardness and are easily cranked, resulting in problems with wear resistance.
〔発明が解決しようとする課題］
本発明はこうした事情に着目してなされたものであって
、基本的には硬質Ｃｒめつきや硬質アルマイト処理に代
えてＰＶＤ法等の耐摩耗性膜被覆技術を適用することに
より耐摩耗性等の優れた軸受部材等の被覆部材を提供し
ようとするものであり、特に耐摩耗性並びに潤滑性の双
方に優れた被覆膜について検討を重ねることによってこ
れら両特性を兼ね備えた膜を被覆してなる複合部材を提
供しようとするものである。尚上記説明では軸受部材を
中心にして述べているが、本発明の適用対象は耐摩耗・
高潤滑性の要求される全ての部材を包含するものである
。[Problems to be Solved by the Invention] The present invention has been made focusing on these circumstances, and basically uses wear-resistant film coating technology such as PVD method instead of hard Cr plating or hard alumite treatment. The aim is to provide coated members such as bearing members with excellent wear resistance by applying this technology, and in particular, by repeatedly studying coating films that have excellent wear resistance and lubricity, it is possible to improve both of these properties. The present invention aims to provide a composite member coated with a membrane that has a combination of properties. Although the above description focuses on bearing members, the present invention is applicable to wear-resistant and
This includes all members that require high lubricity.
［課題を解決するための手段〕
しかして上記目的を達成した本発明部材は、体積比でＣ
ｒ ： ３０％以下及び／またはＣｒＮ ：４０％以下
を含み、残部がＣｒ２ＮまたはＣｒとＣｒ２Ｎからなる
組成膜を、基材表面に被覆してなる点に要旨を有するも
のである。[Means for Solving the Problems] The member of the present invention that achieves the above object has a volume ratio of C
The gist is that the surface of the base material is coated with a composition film containing r: 30% or less and/or CrN: 40% or less, with the remainder being Cr2N or Cr and Cr2N.
［作用］
本発明者等の研究によると、ＰＶＤ法によって基体部材
表面にＣｒ−Ｎ［を形成した場合の膜組成はＮ ／ Ｃ
ｒ比が１．０のＣｒＮだけではなく、製膜条件によって
Ｎ ／ Ｃｒ比の異なる種々の膜が形成される。そして
従来の考え方では基体部材表面にＣｒＮ膜を被覆するこ
とによって潤滑性を備えた耐摩耗性膜を形成することが
できるとされていた。しかしながらＣｒ−Ｎ系膜におけ
る結晶組成と機械的性質の関係を克明に調べてみると、
耐摩耗性に関してはＣｒＮ相よりむしろＣｒ２Ｎ相がそ
の改善に寄与することを見出し、さらに検討を重ねた結
果、前記構成に示される本発明部材を完成するに至った
。[Function] According to research by the present inventors, when Cr-N is formed on the surface of a base member by the PVD method, the film composition is N/C.
Not only CrN with an r ratio of 1.0 but also various films with different N/Cr ratios are formed depending on the film forming conditions. The conventional thinking was that by coating the surface of the base member with a CrN film, a wear-resistant film with lubricity could be formed. However, when we carefully examine the relationship between crystal composition and mechanical properties in Cr-N films, we find that
It was discovered that the Cr2N phase rather than the CrN phase contributes to the improvement of wear resistance, and as a result of further studies, the member of the present invention having the above structure was completed.
即ちＣｒＮ膜は潤滑性に優れた耐摩耗性膜であり、軸受
部材等の用途に適しているが、前述した様に膜硬度が低
く［ビッカース硬度（Ｈｖ）：１０００〜１２００ｋｇ
／ｃｍ２コ、耐摩耗性に問題があった。これに対しＣｒ
２Ｎ膜はビッカース硬度（Ｈｖ）が１６００ ｋｇ／ｍ
ａ＋２以上にも及び、高硬度であるが故に優れた耐摩耗
性を発揮すると考えられる。尚α−Ｃｒ相のビッカース
硬度（Ｈｖ）は８００ ｋｇ／ｍａｄ”程度である。従
ってＰＶＤ法によってより基体部材表面にＣｒ−Ｎ膜を
被覆するに当たっては、Ｃｒ＝Ｎ膜あるいはＣｒ２Ｎの
占める割合が大きく、Ｃｒ−Ｎ膜が形成されることによ
って耐摩耗性の優れた本発明被覆部材を得・５ことがで
きる。尚潤滑性に関してはＣｒ２Ｎ相よりＣｒＮ相の方
が良好な性質を示すが、Ｃｒ−Ｎ系膜であるＣｒ２Ｎ相
も潤滑性を大幅に低下させることはなく、満足し得る値
を確保することができる。又ＰＶＤ法においてＣｒ−Ｎ
膜の組成を制御するに際しては、後記実施例に示す様に
例えば成膜雰囲気のＮ２圧力を調整すればよいが、他の
手段で組成制御を行なうことも許される。In other words, the CrN film is a wear-resistant film with excellent lubricity and is suitable for applications such as bearing members, but as mentioned above, the film has low hardness [Vickers hardness (Hv): 1000-1200 kg]
/cm2, there was a problem with abrasion resistance. On the other hand, Cr
The 2N membrane has a Vickers hardness (Hv) of 1600 kg/m
It is thought that it exhibits excellent wear resistance because of its high hardness, which is even higher than a+2. The Vickers hardness (Hv) of the α-Cr phase is about 800 kg/mad. Therefore, when coating the surface of a base member with a Cr-N film by the PVD method, the proportion of the Cr=N film or Cr2N should be By forming a large Cr-N film, it is possible to obtain a coated member of the present invention with excellent wear resistance.In terms of lubricity, the CrN phase exhibits better properties than the Cr2N phase, but The Cr2N phase, which is a Cr-N based film, does not significantly reduce the lubricity and can ensure a satisfactory value.Also, in the PVD method, Cr-N
The composition of the film can be controlled by adjusting, for example, the N2 pressure in the film-forming atmosphere, as shown in Examples below, but it is also permissible to control the composition by other means.
第１図は、ＰＶＤ法における成膜雰囲気のＮ２圧力と膜
中の結晶構造との関係を示すグラフであり２Ｎ２圧力の
増加につれて結晶形態はα−ＣｒからＣｒ２ＮさらにＣ
ｒＮへと変化することが分かる。Ｃｒ２Ｎが形成される
Ｎ２圧力はＣｒの蒸発量により変動するが、Ｃｒ蒸発量
の如何にかかわらずＣｒとＣｒ２Ｎの混合相、ＣｒＮと
Ｃｒ２Ｎの混合相又は反応状態によっては、Ｃｒが一部
残留しＣｒ、ＣｒＮ、Ｃｒ２Ｎの混合相が形成される領
域が夫々存在する。そして前記した様に高硬度であるＣ
ｒ２Ｎ相の割合が増大するほど硬度が高くなり、耐摩耗
性を高めることができる訳であるが、Ｃｒ及びＣｒＮが
ある程度存在していても満足し得る高硬度を確保するこ
とができる。即ちＣｒ及び／又はＣｒＮとＣｒ２Ｎとの
混合膜においてＣｒが体積比で３０％以下及び／又はＣ
ｒＮが体積比で４０％以下であれば目的とする高硬度ひ
いては耐摩耗性を得ることができる。Figure 1 is a graph showing the relationship between the N2 pressure in the film-forming atmosphere and the crystal structure in the film in the PVD method.As the 2N2 pressure increases, the crystal morphology changes from α-Cr to Cr2N to C
It can be seen that it changes to rN. The N2 pressure at which Cr2N is formed varies depending on the amount of evaporation of Cr, but regardless of the amount of evaporation of Cr, some Cr may remain depending on the mixed phase of Cr and Cr2N, the mixed phase of CrN and Cr2N, or the reaction state. There are regions in which mixed phases of Cr, CrN, and Cr2N are formed. And as mentioned above, C has high hardness.
As the ratio of r2N phase increases, the hardness increases and the wear resistance can be improved, but even if Cr and CrN are present to some extent, a satisfactory high hardness can be ensured. That is, in a mixed film of Cr and/or CrN and Cr2N, Cr is 30% or less by volume and/or C
If rN is 40% or less by volume, the desired high hardness and wear resistance can be obtained.
尚本発明に係る耐摩耗性・高潤滑性複合部材において上
記Ｃｒ−Ｎ系混合相膜の膜厚については特に制限を設け
るものではないが、好ましくは膜厚を０．５〜１０μｍ
とすることが推奨される。膜厚が０．５μｍ未満では膜
厚が薄すぎる為に所望の耐摩耗性向上効果を得ることが
できず、一方膜厚が１０μｍを超えると膜強度自体が劣
化することになり耐摩耗性は却フて低下する。In the wear-resistant and highly lubricious composite member according to the present invention, there is no particular restriction on the thickness of the Cr-N mixed phase film, but preferably the film thickness is 0.5 to 10 μm.
It is recommended that If the film thickness is less than 0.5 μm, the desired effect of improving wear resistance cannot be obtained because the film thickness is too thin. On the other hand, if the film thickness exceeds 10 μm, the film strength itself will deteriorate and the wear resistance will deteriorate. However, it declines.
［実施例］
軸受鋼（ＳＵＪ−２）で製作された基体部材を、イオン
ブレーティング装置に装入し、１００℃に予備加熱した
後、蒸発源からＣｒを蒸発させると共にＮ２を導入して
１．５ Ｘ １０−’ Ｔｏｒｒ 〜３Ｘ １０ ””
Ｔｏｒｒの雰囲気を夫々形成し、且つ基体部材に一７
０Ｖの電圧を印加して成膜を行なフた。得られた被覆部
材の膜中結晶組成をＸ線回折法により定量したところ第
１表に示す通りであった。各被覆部材を大越式摩耗試験
機に供し、ＦＣ２５ｍ材を摩耗相手材として比摩耗量を
調べた結果を第１表に併記した。尚摩耗試験条件は、荷
重２．２ｋｇｆ、摩擦速度２ｍ／秒とした。[Example] A base member made of bearing steel (SUJ-2) was loaded into an ion brating device, preheated to 100°C, and then Cr was evaporated from the evaporation source and N2 was introduced. .5 X 10-' Torr ~3X 10''
Torr atmosphere is formed respectively, and the base member is
The film was formed by applying a voltage of 0V. The crystal composition in the film of the obtained coated member was determined by X-ray diffraction method and was as shown in Table 1. Each coated member was subjected to an Okoshi type abrasion tester, and the specific wear amount was investigated using FC25m material as the wear partner. The results are also listed in Table 1. The wear test conditions were a load of 2.2 kgf and a friction speed of 2 m/sec.
第１表
第１表に示す通り、本発明部材はＣｒ−Ｎ膜被覆部材と
しては優れた耐摩耗性を有することが確認された。As shown in Table 1, the members of the present invention were confirmed to have excellent wear resistance as a Cr-N film coated member.
［発明の効果］
本発明は以上の様に構成されており、Ｃｒ−Ｎ膜の特長
である高潤滑性を確保しつつ、耐摩耗性に優れた被覆部
材を得ることができ、軸受部材等の分野における使用の
拡大を望むことができる。[Effects of the Invention] The present invention is configured as described above, and it is possible to obtain a coated member with excellent wear resistance while ensuring the high lubricity that is a feature of the Cr-N film, and to obtain a coated member with excellent wear resistance. It is hoped that its use will expand in the following fields.
第１図はＰＶＤ法におけるＮ２７囲気圧力と結晶構成の
関係を示すグラフである。FIG. 1 is a graph showing the relationship between N27 ambient pressure and crystal structure in the PVD method.
Claims (3)
る耐摩耗性・高潤滑性複合部材。(1) A wear-resistant and highly lubricating composite member characterized by coating the surface of a base material with a film consisting of Cr: 30% or less and the remainder Cr_2N.
る耐摩耗性・高潤滑性複合部材。(2) A wear-resistant and highly lubricating composite member, characterized in that the surface of a base material is coated with a film consisting of CrN: 40% or less and the remainder Cr_2N: by volume.
る耐摩耗性・高潤滑性複合部材。(3) A wear-resistant and highly lubricating composite member, characterized in that the surface of a base material is coated with a film consisting of Cr: 5% or less and CrN: 40% or less and Cr_2N: the remainder in terms of volume ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63120012A JP2633623B2 (en) | 1988-05-16 | 1988-05-16 | Wear-resistant and highly lubricated composite members |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63120012A JP2633623B2 (en) | 1988-05-16 | 1988-05-16 | Wear-resistant and highly lubricated composite members |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01290785A true JPH01290785A (en) | 1989-11-22 |
| JP2633623B2 JP2633623B2 (en) | 1997-07-23 |
Family
ID=14775716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63120012A Expired - Lifetime JP2633623B2 (en) | 1988-05-16 | 1988-05-16 | Wear-resistant and highly lubricated composite members |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2633623B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0581303A2 (en) * | 1992-07-31 | 1994-02-02 | Matsushita Electric Industrial Co., Ltd. | Magnetic head having a chromium nitride protective film for use in a magnetic recording and/or reproducing apparatus and a method of manufacturing the same |
| WO1998041771A1 (en) * | 1997-03-19 | 1998-09-24 | Caterpillar Inc. | Track and/or hinge pin having improved abrasion, corrosion and galling resistance |
| JP2006077328A (en) * | 2004-09-09 | 2006-03-23 | Ina-Schaeffler Kg | Wear-resistant coating and process for producing it |
| JP2006329262A (en) * | 2005-05-24 | 2006-12-07 | Nippon Densan Corp | Dynamic pressure bearing device and motor equipped with the device, and disk device using the motor |
| JP2010163694A (en) * | 1997-11-06 | 2010-07-29 | Dowa Holdings Co Ltd | NITROGEN-CONTAINING Cr FILM, AND MACHINE MEMBER HAVING THE FILM |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4877502B2 (en) * | 1997-11-06 | 2012-02-15 | Ｄｏｗａサーモテック株式会社 | Nitrogen-containing Cr coating and mechanical member having this coating |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187950A (en) * | 1984-10-05 | 1986-05-06 | Riken Corp | Piston ring |
| JPS62188856A (en) * | 1986-02-13 | 1987-08-18 | Riken Corp | Piston ring |
| JPH01159449A (en) * | 1987-12-15 | 1989-06-22 | Riken Corp | Piston ring with compound nitriding layer |
-
1988
- 1988-05-16 JP JP63120012A patent/JP2633623B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187950A (en) * | 1984-10-05 | 1986-05-06 | Riken Corp | Piston ring |
| JPS62188856A (en) * | 1986-02-13 | 1987-08-18 | Riken Corp | Piston ring |
| JPH01159449A (en) * | 1987-12-15 | 1989-06-22 | Riken Corp | Piston ring with compound nitriding layer |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0581303A2 (en) * | 1992-07-31 | 1994-02-02 | Matsushita Electric Industrial Co., Ltd. | Magnetic head having a chromium nitride protective film for use in a magnetic recording and/or reproducing apparatus and a method of manufacturing the same |
| EP0581303A3 (en) * | 1992-07-31 | 1994-06-29 | Matsushita Electric Ind Co Ltd | Magnetic head having a chromium nitride protective film for use in a magnetic recording and/or reproducing apparatus and a method of manufacturing the same |
| WO1998041771A1 (en) * | 1997-03-19 | 1998-09-24 | Caterpillar Inc. | Track and/or hinge pin having improved abrasion, corrosion and galling resistance |
| JP2010163694A (en) * | 1997-11-06 | 2010-07-29 | Dowa Holdings Co Ltd | NITROGEN-CONTAINING Cr FILM, AND MACHINE MEMBER HAVING THE FILM |
| JP2006077328A (en) * | 2004-09-09 | 2006-03-23 | Ina-Schaeffler Kg | Wear-resistant coating and process for producing it |
| DE102004043550B4 (en) * | 2004-09-09 | 2012-02-16 | Schaeffler Technologies Gmbh & Co. Kg | Wear resistant coating, its use and method of making the same |
| KR101282483B1 (en) * | 2004-09-09 | 2013-07-04 | 섀플러 테크놀로지스 아게 운트 코. 카게 | Wear-resistant coating and method of producing the same |
| JP2006329262A (en) * | 2005-05-24 | 2006-12-07 | Nippon Densan Corp | Dynamic pressure bearing device and motor equipped with the device, and disk device using the motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2633623B2 (en) | 1997-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7758974B2 (en) | Hard film | |
| Cicek | Wear behaviors of TiN/TiCN/DLC composite coatings in different environments | |
| Erdemir et al. | Effect of source gas and deposition method on friction and wear performance of diamondlike carbon films | |
| Polcar et al. | Comparative study of the tribological behavior of self-lubricating W–S–C and Mo–Se–C sputtered coatings | |
| Watanabe et al. | Friction properties of WS2/MoS2 multilayer films under vacuum environment | |
| JP2015142944A (en) | Coated mold for plastic working excellent in sliding characteristic and method of manufacturing the same | |
| US20220145442A1 (en) | Wear and/or friction reduction by using molybdenum nitride based coatings | |
| WO2018235750A1 (en) | Sliding member and coating film | |
| JPH01290785A (en) | Wear resistant composite member having high lubricity | |
| US20080038503A1 (en) | Hard film and hard film-coated material | |
| JPH05208806A (en) | Rigid and solid lubricating film having self-repairing property and its production | |
| JP2006124818A (en) | Hard film and method for forming the same | |
| Venkatesh et al. | Synthesis of Ag-doped hydrogenated carbon thin films by a hybrid PVD–PECVD deposition process | |
| CN109196136B (en) | Reducing wear and/or friction by using molybdenum nitride based coatings | |
| Kao et al. | Optimum MoS2–Cr coating for sliding against copper, steel and ceramic balls | |
| Yamamoto et al. | Nano-multilayered CrN/BCN coating for anti-wear and low friction applications | |
| KR102607291B1 (en) | Thin film using medium entropy alloy and preparation method thereof | |
| KR100300110B1 (en) | Sliding member having chromium nitride film formed thereon | |
| JP2007177313A (en) | Sliding member | |
| JP4388152B2 (en) | Thin film laminate covering member | |
| CN111647852A (en) | Solid lubricating film and preparation method and application thereof | |
| JP3205304B2 (en) | Sliding member | |
| JP5043906B2 (en) | Hard coating and method for forming the same | |
| Su et al. | The effect of cn coatings doped with niobium, titanium and zirconium metal on mechanical, tribological and corrosion resistance properties of thin films | |
| Murakawa et al. | Tribological properties of c-BN Films fabricated by the reactive ion plating method and modified by ion implantation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080425 Year of fee payment: 11 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080425 Year of fee payment: 11 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080425 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090425 Year of fee payment: 12 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090425 Year of fee payment: 12 |