JPH01290568A - Bonding method - Google Patents
Bonding methodInfo
- Publication number
- JPH01290568A JPH01290568A JP12258888A JP12258888A JPH01290568A JP H01290568 A JPH01290568 A JP H01290568A JP 12258888 A JP12258888 A JP 12258888A JP 12258888 A JP12258888 A JP 12258888A JP H01290568 A JPH01290568 A JP H01290568A
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- ceramic
- noble metal
- metal
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 229910052574 oxide ceramic Inorganic materials 0.000 claims abstract description 26
- 239000011224 oxide ceramic Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000005219 brazing Methods 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 239000010970 precious metal Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 abstract description 14
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 8
- 229910000679 solder Inorganic materials 0.000 abstract description 4
- 229910000963 austenitic stainless steel Inorganic materials 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 abstract 3
- 238000007796 conventional method Methods 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 241000282485 Vulpes vulpes Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/405—Iron metal group, e.g. Co or Ni
- C04B2237/406—Iron, e.g. steel
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/408—Noble metals, e.g. palladium, platina or silver
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/72—Forming laminates or joined articles comprising at least two interlayers directly next to each other
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、酸化物セラミックス同士、酸化物セラミッ
クスと金属の接合方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for joining oxide ceramics to each other and to joining oxide ceramics to metal.
貴金属と酸化物セラミックスの酸素を含む雰囲気中での
反応接合性に着眼し、酸化物セラミックス表面のメタラ
イズ化を行い、同時に、貴金属の変形のし易さを利用し
、酸化物セラミックス同士。Focusing on the reactive bondability of noble metals and oxide ceramics in an oxygen-containing atmosphere, we metallized the surface of oxide ceramics, and at the same time took advantage of the ease of deformation of noble metals to bond oxide ceramics together.
酸化物セラミックスと金属の接合により発生する応力を
吸収する接合方法を提供する。A bonding method that absorbs stress generated by bonding oxide ceramics and metal is provided.
応力緩和材料としてＣｕ、Ｎｉの軟質金属を用い、活性
金属を含んだ金ろう、銀ろうにより、酸化物セラミック
ス、応力緩和材、金属との接合を行っていた。Soft metals such as Cu and Ni were used as stress relaxation materials, and bonding with oxide ceramics, stress relaxation materials, and metals was performed using gold solder and silver solder containing active metals.
従来の接合方法であると、応力緩和材がＣｕ。 In the conventional joining method, the stress relaxation material is Cu.
Ｎｉなので、耐環境性（主に耐食性）が悪く、装飾品等
では美観を損ねるという欠点を有していた。Since it is made of Ni, it has poor environmental resistance (mainly corrosion resistance) and has the drawback of spoiling the aesthetic appearance of decorative items.
又接合界面が、酸化物セラミックス−ろう材一応力緩和
材−ろう材−金属或いは酸化物セラミックスと４箇所と
なるため、接合部の気密性、信頼性等を維持するのが難
しく、不良となる確率が高かった。そこで本発明は、従
来のこの様な欠点を解決するため、接合方法の検討を行
い、耐食性の良い応力緩和材を有し、接合界面の少ない
接合方法を提供することを目的としている。In addition, since there are four bonding interfaces: oxide ceramic - brazing metal - stress relaxation material - brazing metal - metal or oxide ceramic, it is difficult to maintain the airtightness and reliability of the joint, resulting in defects. The odds were high. Therefore, in order to solve these conventional drawbacks, the present invention investigates a joining method, and aims to provide a joining method that uses a stress-relaxing material with good corrosion resistance and has fewer joining interfaces.
上記問題点を解決するため、この発明は、応力緩和材と
して耐食性の良く、軟らかい貴金属を用い貴金属と酸化
物セラミックスの酸素を含む雰囲気での反応を利用し接
合し、最後に耐食性の良いろう材でもう一方の貴金属と
酸化物セラミックスとの反応体或いは金属と接合する様
にした。In order to solve the above problems, the present invention uses a soft noble metal with good corrosion resistance as a stress relaxation material, joins the noble metal and oxide ceramics by utilizing a reaction in an oxygen-containing atmosphere, and finally uses a brazing filler metal with good corrosion resistance. However, it was bonded to the other noble metal and oxide ceramic reactant or metal.
上記の様な接合方法であると、耐食性の良い応力緩和と
接合界面が減少する。The above bonding method provides stress relaxation with good corrosion resistance and reduces the bonding interface.
（実施例１〕
第１図は、本発明の方法の実施例を示す接合部の断面図
を示す、１は例えばジルコニア等の酸化物セラミックス
、２は酸化物セラミックス１と酸素を含む雰囲気で接合
された貴金属層、３はろう材、４は金属（例えばオース
テナイト系ステンレス等）から構成されている。この接
合方法による最大の特徴は、貴金属ＩＷ３が、酸化物セ
ラミックス１との接合の役割と接合部に発生する応力の
緩和を兼ねていることである。その結果、従来の様な応
力緩和材を介する必要がなくなり、接合界面の数も３つ
と減少させることが可能となった。接合部の品質を表−
１に示す。(Example 1) FIG. 1 shows a cross-sectional view of a joint showing an example of the method of the present invention. 1 is an oxide ceramic such as zirconia, and 2 is an oxide ceramic 1 bonded in an atmosphere containing oxygen. The noble metal layer 3 is composed of a brazing material 3 and a metal (for example, austenitic stainless steel). As a result, there is no need to use a stress relief material like in the past, and the number of bonding interfaces can be reduced to three. Show quality
Shown in 1.
表−１
〔実施例２〕
第３図は本発明の他の実施例を示す接合部の断面図を示
す、１は例えばジルコニア等の酸化物セラミックス、２
は酸化物セラミックス１と酸素を含む雰囲気で接合され
た貴金属層、３はろう材、６は他の酸化物セラミフーク
ス（例えば、アルミナ）、７は酸化物セラミックス６と
酸素を含む雰囲気で接合された貴金属層から構成されて
いる。Table 1 [Example 2] Figure 3 shows a cross-sectional view of a joint showing another example of the present invention, 1 is an oxide ceramic such as zirconia, 2
is a noble metal layer bonded to oxide ceramic 1 in an oxygen-containing atmosphere, 3 is a brazing material, 6 is another oxide ceramic Fuchs (e.g., alumina), and 7 is a noble metal layer bonded to oxide ceramic 6 in an oxygen-containing atmosphere. It is composed of a precious metal layer.
この実施例においても、貴金属層２．７が酸化物セラミ
ックス１．６との接合の役割と、接合部に発生する応力
緩和を兼ねていることが特徴となっている。その結果、
従来の様な応力緩和材を介する必要がなくなり、接合部
の品質も表−２に示す欅に飛躍的に向上した。This embodiment is also characterized in that the noble metal layer 2.7 serves both the role of bonding to the oxide ceramic 1.6 and the relaxation of stress generated at the bonded portion. the result,
It is no longer necessary to use a stress relief material as in the past, and the quality of the joint has been dramatically improved to the level shown in Table 2.
表−２
〔発明の効果〕
この発明は、以上説明した様に、貴金属層を酸化物セラ
ミックスとの接合材料と応力緩和材に用いることにより
、接合部の気密性の信転性を増し、強度をアンプさせ、
熱衝撃の強制劣化に対しても優れた耐久性を有するとい
う効果がある。Table 2 [Effects of the Invention] As explained above, this invention uses a noble metal layer as a bonding material with oxide ceramics and as a stress relaxation material, thereby increasing the reliability of the airtightness of the bonded part and increasing the strength. amplify the
It also has the effect of having excellent durability against forced deterioration due to thermal shock.
第１図は、本発明に関わる接合方法を説明する接合部の
断面図、第２図は、従来の接合方法による接合部の断面
図、第３図は、本発明に関わる接合方法による他の実施
例の接合部の断面図である。
１・・・酸化物セラミックス（ジルコニア）２・・・貴
金属（金、白金等）
３・・・ろう材
４・・・金属
５・・・従来の応力緩和材（Ｃｕ、Ｎｉ等）以上
出願人 セイコー電子工業株式会社FIG. 1 is a cross-sectional view of a joint part for explaining the joining method according to the present invention, FIG. 2 is a cross-sectional view of a joint part according to a conventional joining method, and FIG. 3 is a cross-sectional view of a joint part according to a conventional joining method. FIG. 3 is a cross-sectional view of a joint part in an example. 1... Oxide ceramics (zirconia) 2... Precious metals (gold, platinum, etc.) 3... Brazing filler metal 4... Metal 5... Conventional stress relaxation materials (Cu, Ni, etc.) Applicant Seiko Electronic Industries Co., Ltd.
Claims (1)
中で加熱接合し、メタライズ化し、貴金属の融点以下の
ろう材を用い、メタライズ化された酸化物セラミックス
同士、メタライズ化された酸化物セラミックスと金属の
接合をすることを特徴とする接合方法。(1) Oxide ceramics and precious metals are heated and bonded in an oxygen-containing atmosphere to metallize them, and a brazing material below the melting point of the precious metal is used to bond the metalized oxide ceramics to each other, and the metallized oxide ceramics to the metal. A joining method characterized by joining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12258888A JPH01290568A (en) | 1988-05-19 | 1988-05-19 | Bonding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12258888A JPH01290568A (en) | 1988-05-19 | 1988-05-19 | Bonding method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01290568A true JPH01290568A (en) | 1989-11-22 |
Family
ID=14839638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12258888A Pending JPH01290568A (en) | 1988-05-19 | 1988-05-19 | Bonding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01290568A (en) |
-
1988
- 1988-05-19 JP JP12258888A patent/JPH01290568A/en active Pending
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